Substrate bearing device and substrate processing equipment

Abstract

The utility model relates to a substrate bearing device. The substrate bearing device comprises a paddle rod and a supporting structure. The supporting structure is arranged on the paddle rod and comprises a first bearing set and a second bearing set which are arranged side by side, the first bearing set and the second bearing set are each provided with a bearing position used for bearing a substrate, a limiting gap is formed between the first bearing set and the second bearing set, and at least part of the paddle rod is embedded into the limiting gap so as to limit overturning of the supporting structure. After the substrate bearing device is placed in the quartz tube, the paddle rod is at least partially embedded into the limiting gap between the first bearing group and the second bearing group, so that the supporting structure can be prevented from overturning, and the supporting stability is ensured. Besides, the supporting structure is provided with the first bearing group and the second bearing group along the width direction of the paddle rod, and the first bearing group and the second bearing group are respectively provided with a bearing position for bearing the substrate, so that the size in the width direction in the quartz tube is utilized, the space utilization rate is increased, the substrate carrying amount is increased, and the processing efficiency is improved. The utility model further relates to substrate processing equipment.

Description

Technical Field

[0001] The utility model relates to photovoltaic production equipment, in particular to a substrate carrying device and a substrate processing device. Background Art

[0002] With the popularization of solar power generation, the demand for related photovoltaic products is increasing. To meet the increasing product demand, the processing efficiency of diffusion process equipment also needs to be improved urgently. Currently, to improve the processing efficiency of diffusion process equipment, it is usually necessary to increase the size of the quartz tube, and then increase the height size of the boat, so as to increase the wafer loading capacity of the boat. However, after the size of the quartz tube is increased, the sizes on both sides in the width direction of the boat will be wasted, resulting in low space utilization rate inside the quartz tube. Summary of the Utility Model

[0003] Based on this, in view of the problem of low space utilization rate after the existing quartz tube size is increased, it is necessary to provide a substrate carrying device and a substrate processing device that can increase the space utilization rate inside the quartz tube, increase the wafer loading capacity inside the quartz tube, and thus improve the processing efficiency.

[0004] A substrate carrying device includes:

[0005] A paddle rod; and

[0006] A support structure arranged on the paddle rod, the support structure includes a first carrying group and a second carrying group arranged side by side, both the first carrying group and the second carrying group have carrying positions for carrying substrates, and a limiting gap is formed between the first carrying group and the second carrying group, and at least part of the paddle rod is embedded in the limiting gap to limit the flipping of the support structure.

[0007] With the above substrate carrying device, after the substrate carrying device is placed inside the quartz tube, at least part of the paddle rod is embedded in the limiting gap between the first carrying group and the second carrying group, so as to avoid the flipping of the support structure and ensure the stability of the support. In addition, since the support structure has the first carrying group and the second carrying group in the width direction of the paddle rod, and both the first carrying group and the second carrying group have carrying positions for carrying substrates, the size in the width direction inside the quartz tube is utilized, the space utilization rate is improved, the wafer loading capacity is increased, and thus the processing efficiency is improved.

[0008] Further, the support structure includes a boat holder and a plurality of boats, the boat holder is placed on the paddle rod, and the boat holder includes a first supporting position and a second supporting position arranged side by side, the limiting gap is located between the first supporting position and the second supporting position, the boats have a plurality of the carrying positions, and a plurality of the boats are arranged on the first supporting position to form the first carrying group, and a plurality of the boats are arranged on the second supporting position to form the second carrying group.

[0009] Furthermore, the supporting structure includes a plurality of boats, each of which has a plurality of load-bearing positions. The plurality of boats are sequentially arranged on the paddle rod along the length direction of the paddle rod, and the first load-bearing group and the second load-bearing group are respectively formed on both sides of the paddle rod.

[0010] Furthermore, a plurality of first positioning grooves are provided on a side surface of the paddle rod for supporting the plurality of the boats, the plurality of the first positioning grooves are arranged along the length direction of the paddle rod, and the plurality of the boats correspond one-to-one to the plurality of the first positioning grooves.

[0011] Furthermore, the boat includes a first connecting part and two bearing parts, the two bearing parts are arranged on both sides of the paddle rod, the bearing part has a plurality of bearing positions, the first connecting part is connected between the two bearing parts, and the first connecting part and the two bearing parts form the limiting gap.

[0012] Furthermore, the boat includes a second connecting portion, the second connecting portion is connected to the upper ends of the two bearing portions, and a gap is left between the second connecting portion and the first connecting portion.

[0013] Furthermore, the boat further includes a grabbing portion, and the grabbing portion is arranged on a side of the second connecting portion away from the bearing portion.

[0014] Furthermore, the grabbing portion includes a connecting block and two ears connected to two ends of the connecting block.

[0015] Furthermore, the grabbing portion is a hanging ring.

[0016] Furthermore, the supporting structure also includes a supporting body, which is supported and arranged between the paddle rod and the boat, and the supporting body is located in the limiting gap. A plurality of second positioning grooves are provided on one side surface of the supporting body for supporting the plurality of boats, and the plurality of second positioning grooves are arranged along the length direction of the paddle rod, and the plurality of boats correspond one-to-one to the plurality of second positioning grooves.

[0017] Furthermore, the paddle rod is a hollow structure, the cross section of the paddle rod in the length direction is rectangular, and the dimension of the cross section in the height direction is greater than the dimension in the width direction.

[0018] A substrate processing device comprises the above-mentioned substrate carrying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0020] Figure 1 Schematic structural diagram of a paddle rod provided by an embodiment of the present application;

[0021] Figure 2 For Figure 1 Schematic cross-sectional structural diagram of the paddle rod shown;

[0022] Figure 3 Schematic structural diagram of a substrate carrier device provided by the first embodiment of the present application;

[0023] Figure 4 For Figure 3 Exploded view of the substrate carrier device shown;

[0024] Figure 5 For Figure 3 Schematic application structural diagram of the substrate carrier device shown;

[0025] Figure 6 For Figure 3 Schematic structural diagram of a boat support in the substrate carrier device shown;

[0026] Figure 7 For Figure 6 Schematic structural diagram of the boat support from another angle shown;

[0027] Figure 8 Schematic structural diagram of a substrate carrier device provided by the second embodiment of the present application;

[0028] Figure 9 For Figure 8 Exploded view of the substrate carrier device shown;

[0029] Figure 10 Schematic structural diagram of a substrate carrier device provided by the third embodiment of the present application;

[0030] Figure 11 For Figure 10 Exploded view of the substrate carrier device shown;

[0031] Figure 12 For Figure 11 Schematic structural diagram of a support body in the substrate carrier device shown;

[0032] Figure 13 For Figure 12Schematic structural diagram of the carrier from another angle as shown;

[0033] Figure 14 For Figure 10 Schematic structural diagram of the boat in the substrate carrier device as shown;

[0034] Figure 15 For Figure 14 Schematic structural diagram of the boat from another angle as shown;

[0035] Figure 16 For Figure 8 Schematic structural diagram of the boat in the substrate carrier device as shown;

[0036] Figure 17 For Figure 16 Schematic structural diagram of the boat from another angle as shown;

[0037] Figure 18 For Figure 16 Grasping schematic diagram of the boat as shown;

[0038] Figure 19 Schematic structural diagram of the boat provided by another embodiment. Detailed implementation manners

[0039] To make the above objects, features, and advantages of the present application more obvious and understandable, the following describes the detailed implementation manners of the present application with reference to the accompanying drawings. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0040] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present application.

[0041] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of this application, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0042] In this application, unless otherwise clearly specified and defined, terms such as "installed", "connected", "joined", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0043] In this application, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0044] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation.

[0045] On the one hand, this application provides a substrate carrier device 10 (please refer to Figure 3 ), which includes a paddle rod 100 and a support structure. The support structure is placed on the paddle rod 100, and the support structure is used to carry the substrate.

[0046] Please refer to Figure 1 and Figure 2, in one embodiment, the paddle rod 100 has a hollow structure. The cross-section of the paddle rod 100 along its own length direction is rectangular, and the dimension H in the height direction of the paddle rod 100 is greater than the dimension W in the width direction of the paddle rod 100. The hollow design can reduce the total weight of the paddle rod 100, and the design of the above rectangular cross-section can significantly improve the anti-deformation ability and anti-fracture ability of the paddle rod 100 in the vertical direction, ensuring that the paddle rod 100 can carry the weight of more substrates.

[0047] The support structure is arranged on the paddle rod 100, and the support structure includes a first bearing group and a second bearing group arranged side by side. Both the first bearing group and the second bearing group have bearing positions for bearing substrates, and a limiting gap is formed between the first bearing group and the second bearing group. At least part of the paddle rod is embedded in the limiting gap to limit the flipping of the support structure.

[0048] It should be noted that in this embodiment, the substrate is a silicon wafer, and the silicon wafer is placed in a furnace cavity formed by a quartz tube 20 (please refer to Figure 5 ) for heat treatment. In addition, a plurality of substrates are placed on the bearing positions, and the plurality of substrates are arranged along the height direction of the paddle rod 100.

[0049] With the above substrate carrying device, after the substrate carrying device is placed in the quartz tube 20, at least part of the paddle rod 100 is embedded in the limiting gap between the first bearing group and the second bearing group, so as to avoid the flipping of the support structure and ensure the stability of the support. In addition, since the first bearing group and the second bearing group are arranged along the width direction of the paddle rod 100 on the support structure, and both the first bearing group and the second bearing group have bearing positions for bearing substrates, the space utilization rate is improved by using the dimension in the width direction in the quartz tube 20, the number of wafers carried is increased, and thus the processing efficiency is improved.

[0050] Please refer to Figures 3 to 6 , in the first embodiment, the support structure includes a boat holder 200 and a plurality of small boats 300. The boat holder 200 is placed on the paddle rod 100, and the boat holder 200 includes a first supporting position 201 and a second supporting position 202 arranged side by side. The limiting gap is located between the first supporting position 201 and the second supporting position 202. The small boat 300 has a plurality of bearing positions, and a plurality of small boats are arranged on the first supporting position 201 to form a first bearing group, and a plurality of small boats are arranged on the second supporting position 202 to form a second bearing group. It can be seen that in this embodiment, the boat holder 200 and the plurality of small boats 300 together form a support structure with a first bearing group and a second bearing group.

[0051] It should be noted that for the convenience of understanding the technical solution of the present application, the components with the same name in the present application adopt the same reference numerals.

[0052] Further, please refer to Figure 6, on each support position of the boat support 200, a plurality of card slots 210 are provided on both sides along the width direction of the oar rod 100. The plurality of card slots 210 on both sides of each bearing position are arranged along the length direction of the oar rod 100, and the plurality of card slots 210 on both sides of each support position correspond to each other one by one. Each small boat 300 is supported and positioned on the boat support 200 through two corresponding card slots 210.

[0053] Furthermore, please refer to Figure 7 , a first support groove 220 is provided at the bottom of the boat support 200. The shape of the first support groove 220 matches the shape of the oar rod 100, so that the oar rod 100 can at least partially enter the first support groove 220 and abut against the bottom surface of the first support groove 220, so that the oar rod 100 stably supports the boat support 200 through the first support groove 220, preventing the boat support 200 from tipping over.

[0054] Specifically in Figure 6 and Figure 7 In the illustrated embodiment, the two support positions are symmetrically arranged, and the first support groove 220 is located at the middle position of the boat support 200 along the width direction of the oar rod 100. In this way, after the small boats 300 are placed on the two support positions, the force on the boat support 200 is more balanced, preventing the boat support 200 from tipping over. It can be understood that in this embodiment, after the small boats 300 are placed on the boat support 200, the small boats 300 on both sides of the oar rod 100 can also limit the flipping of the boat support 200. Therefore, the second support groove 240 on the boat support 200 and the small boats 300 form the above-mentioned limiting gap.

[0055] Please refer to Figure 8 and Figure 9 , in the second embodiment, the support structure includes a plurality of small boats 300. The small boats 300 have a plurality of bearing positions. The plurality of small boats 300 are sequentially arranged on the oar rod 100 along the length direction of the oar rod 100, forming a first bearing group and a second bearing group on both sides of the oar rod 100 respectively.

[0056] Further, a plurality of first positioning grooves 110 are provided on one side surface of the oar rod 100 for supporting the plurality of small boats 300. The plurality of first positioning grooves 110 are arranged along the length direction of the oar rod 100, and the plurality of small boats 300 correspond to the plurality of first positioning grooves 110 one by one.

[0057] Please refer to Figure 10 and Figure 11In the third embodiment, the support structure includes a supporting body 400 and a plurality of boats 300. The supporting body 400 is supported on the paddle shaft 100, and the plurality of boats 300 are sequentially arranged on the supporting body 400 along the length direction of the paddle shaft 100. Each boat 300 has two bearing positions, and the two bearing positions of each boat 300 are arranged along the width direction of the paddle shaft 100, forming a first bearing group and a second bearing group on both sides of the paddle shaft 100, respectively. The difference between the supporting body 400 and the boat support 200 in the first embodiment is that the boat support 200 has a first bearing position 201 and a second bearing position 202 on both sides, while the supporting body 400 only has a rod-shaped structure at the center of the boat support 200.

[0058] See also Figure 12 Further, a plurality of second positioning grooves 230 are formed on a side of the supporting body 400 away from the paddle rod 100. The plurality of second positioning grooves 230 are arranged along the length direction of the paddle rod 100. The plurality of boats 300 correspond to the plurality of second positioning grooves 230 one by one, so as to be placed in the second positioning grooves 230 of the supporting body 400.

[0059] See also Figure 13 Furthermore, a second support groove 240 is provided on the side of the supporting body 400 that contacts the paddle rod 100. The second support groove 240 matches the paddle rod 100, so that the paddle rod 100 can at least partially enter the second support groove 240 and abut against the bottom surface of the second support groove 240, so that the paddle rod 100 stably supports the supporting body 400 through the second support groove 240, thereby preventing the supporting structure from tipping over.

[0060] Specific to Figure 12 and Figure 13 In the illustrated embodiment, the supporting body 400 is further provided with lugs 250 at both ends along the length direction of the paddle rod 100. The lugs 250 are used to facilitate the removal of the supporting body 400 from the paddle rod 100.

[0061] See also Figure 14 and Figure 15 In the fourth embodiment, the boat 300 includes a first connection portion 320 and two bearing portions, the two bearing portions are arranged on both sides of the paddle rod 100, the bearing portions have a plurality of bearing positions, the first connection portion 320 is connected between the two bearing portions, and the first connection portion 320 and the two bearing portions form a limiting gap. The paddle rod 100 can at least partially enter the limiting gap and abut against the connecting plate 320 to support the boat 300.

[0062] Further, the boat 300 includes a second connecting portion 310. The second connecting portion 310 is connected to the upper ends of the two bearing portions, and there is a gap between the second connecting portion 310 and the first connecting portion 320. The first connecting portion 320 and the second connecting portion 310 can provide two connections between the bearing portions on both sides of the boat 300, avoiding the problem of the connection point breakage that is likely to occur in single-point connection, and significantly improving the overall structural strength of the boat 300. The second connecting portion 310 can be a plate-like component, thus serving as the top plate of the boat 300.

[0063] Further, the two bearing portions on the boat 300 are symmetrically located on both sides of the oar rod 100. Each bearing portion includes a bottom plate 331 and multiple connecting rods 332. The bottom plate 331 is arranged in parallel with the second connecting portion 310 serving as the top plate. The multiple connecting rods 332 are connected between the bottom plate 331 and the top plate 310 to form a bearing position between the bottom plate 331 and the top plate 310. The first connecting portion 320 is connected to the connecting rods 332 inside the two bearing portions to form a limiting gap with the connecting rods 332 inside the two bearing portions.

[0064] It should be noted that the connecting rods 332 inside the two bearing portions refer to the connecting rods 332 on the side of the two bearing portions close to the oar rod 100.

[0065] Specifically, each bearing portion includes four connecting rods 332. The four connecting rods 332 are connected to the four corners of the bottom plate 331. A plurality of bearing grooves are formed on one side of each connecting rod 332 facing the bearing position. The plurality of bearing grooves on the multiple connecting rods 332 are grouped and corresponding to form a plurality of bearing positions. The substrate is inserted into the bearing grooves of the corresponding bearing positions to carry the substrate.

[0066] In Figure 14 and Figure 15 In the illustrated embodiment, the boat 300 further includes a strengthening portion 311. The strengthening portion 311 is arranged on the side of the second connecting portion 310 facing away from the bearing portion for strengthening the strength of the second connecting portion 310.

[0067] In Figure 16 and Figure 17 In the illustrated embodiment, the boat 300 further includes a grasping portion 312. The grasping portion 312 is arranged on the side of the second connecting portion 310 facing away from the bearing portion for being grasped by the grasping mechanism 30, so as to facilitate grasping the boat 300. At the same time, the grasping portion 312 also has the effect of enhancing the structural strength of the boat 300 by the strengthening portion 311 in the previous embodiment.

[0068] Please also refer to Figure 18 , the grasping portion 312 is a hanging ring and includes a plurality of them for the grasping mechanism 30 to pass through to grasp the boat 300. The grasping portion 312 can also be Figure 19In the style shown in the figure, the grasping part 312 includes a connecting block and two ear parts connected to both ends of the connecting block, and the ear parts are used for the grasping mechanism 30 to grasp. Of course, the grasping part can also be in other forms, which is not limited here, as long as the corresponding grasping mechanism 30 is adopted, it is convenient to grasp the small boat 300.

[0069] It should be noted that in the second embodiment, since the small boat 300 is directly supported on the paddle rod 100, it is preferably to adopt the small boat 300 with the grasping part 312 to facilitate the grasping of the small boat 300. And in the third embodiment, since the convex ear part 250 is provided on the supporting body 400, the small boat 300 in the embodiment shown in Figure 14 and Figure 15 can be adopted.

[0070] To sum up, the substrate carrying device provided by this application has at least the following advantages:

[0071] 1. In the first embodiment, by arranging two carrying groups on the boat support 200, the number of wafers carried in the width direction of the paddle rod 100 is increased, the space utilization rate of the quartz tube 20 is improved, and thus the production efficiency is improved;

[0072] 2. In the second embodiment and the third embodiment, by arranging two carrying groups on the small boat 300, the number of wafers carried in the width direction of the paddle rod 100 is increased, the space utilization rate of the quartz tube 20 is improved, and thus the production efficiency is improved;

[0073] 3. The cross section of the paddle rod 100 is rectangular, and the dimension H in the height direction of the paddle rod 100 is greater than the dimension W in the width direction of the paddle rod 100, so as to ensure the support strength while increasing the number of wafers carried.

[0074] On the other hand, this application also provides a substrate processing device, including the substrate carrying device in the above embodiment.

[0075] Furthermore, the substrate is a silicon wafer, and the substrate processing device further includes a process container, such as the interior space of a diffusion furnace cavity, etc. The internal area of the quartz tube 20 corresponds to the internal space of the diffusion furnace cavity. The substrate carrying device can extend into the process container to process the substrate on the substrate carrying device in the process container. Of course, in other embodiments, the substrate can be other types of sheet materials, and the substrate processing device can also be a device for processing other products, which is not limited here.

[0076] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not conflict, it should be considered as the scope described in this specification.

[0077] The above-described embodiments merely represent several implementation manners of the present application. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A substrate carrying device, characterized in that: include: Paddle (100); and A support structure is arranged on the paddle rod (100), the support structure comprises a first bearing group and a second bearing group arranged side by side, the first bearing group and the second bearing group both have bearing positions for bearing substrates, a limited position gap is formed between the first bearing group and the second bearing group, and the paddle rod (100) is at least partially embedded in the limited position gap to limit the flipping of the support structure.

2. The substrate carrying device according to claim 1, characterized in that: The supporting structure includes a boat support (200) and a plurality of boats (300), wherein the boat support (200) is placed on the paddle rod (100), and the boat support (200) includes a first supporting position (201) and a second supporting position (202) arranged side by side, wherein the limiting gap is located between the first supporting position (201) and the second supporting position (202), and the boat (300) has a plurality of bearing positions, wherein the plurality of boats (300) are arranged at the first supporting position (201) to form the first bearing group, and the plurality of boats (300) are arranged at the second supporting position (202) to form the second bearing group.

3. The substrate carrying device according to claim 1, characterized in that: The supporting structure comprises a plurality of boats (300), each of the boats (300) having a plurality of load-bearing positions. The plurality of boats (300) are sequentially arranged on the paddle rod (100) along the length direction of the paddle rod (100), and the first load-bearing group and the second load-bearing group are respectively formed on both sides of the paddle rod (100).

4. The substrate carrying device according to claim 3, characterized in that: A plurality of first positioning grooves (110) are provided on one side surface of the paddle rod (100) for supporting the plurality of boats (300). The plurality of first positioning grooves (110) are arranged along the length direction of the paddle rod (100), and the plurality of boats (300) correspond one to one with the plurality of first positioning grooves (110).

5. The substrate carrying device according to claim 2 or 3, characterized in that: The boat (300) includes a first connecting portion (320) and two bearing portions, wherein the two bearing portions are arranged on both sides of the paddle rod (100), and the bearing portion has a plurality of bearing positions. The first connecting portion (320) is connected between the two bearing portions, and the first connecting portion (320) and the two bearing portions form the limiting gap.

6. The substrate carrying device according to claim 5, characterized in that: The boat (300) includes a second connecting portion (310), wherein the second connecting portion (310) is connected to the upper ends of the two bearing portions, and a gap is left between the second connecting portion (310) and the first connecting portion (320).

7. The substrate carrying device according to claim 6, characterized in that: The boat (300) further comprises a gripping portion (312), wherein the gripping portion (312) is arranged on a side of the second connecting portion (310) away from the carrying portion.

8. The substrate carrying device according to claim 7, characterized in that: The grabbing portion (312) comprises a connecting block and two ears connected to two ends of the connecting block.

9. The substrate carrying device according to claim 7, characterized in that: The grabbing portion (312) is a hanging ring.

10. The substrate carrying device according to claim 3, characterized in that: The support structure also includes a supporting body (400), and the supporting body (400) is supported and arranged between the paddle rod (100) and the boat (300). The supporting body (400) is located in the limiting gap. A plurality of second positioning grooves (230) are provided on a side surface of the supporting body (400) for supporting the plurality of boats (300). The plurality of second positioning grooves (230) are arranged along the length direction of the paddle rod (100), and the plurality of boats (300) correspond one to one with the plurality of second positioning grooves (230).

11. The substrate carrying device according to claim 1, characterized in that: The paddle rod (100) is a hollow structure; the cross section of the paddle rod (100) in the length direction is rectangular, and the dimension of the cross section in the height direction is greater than the dimension in the width direction.

12. A substrate processing device, characterized in that: A substrate supporting device comprising the substrate supporting device according to any one of claims 1 to 11.

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