Mechanical arm for flower basket

Abstract

The utility model discloses a mechanical arm for a flower basket. The mechanical arm at least comprises but not limited to a main supporting arm and an auxiliary hanging arm. The auxiliary hanging arms are evenly arranged along the lower end face of the main supporting arm, the main supporting arm is provided with an air pipe, and the air pipe is provided with air spraying holes for blocking ambient air around the flower basket. The air pipe is connected with an air source; according to the scheme, the basket is hung through the auxiliary hanging arms, then air flow is jetted through the air jet pipes, air around the basket is blocked, and the influence of the environment on silicon wafers borne on the basket is reduced as much as possible.

Description

Technical Field

[0001] The utility model relates to the field of silicon wafer preparation, and particularly relates to a robotic arm for a carrier. Background Art

[0002] A carrier is a structure for loading silicon wafers. Most of the existing carriers are lifted from the tank by the lifting of the robotic arm itself and then transported. The existing robotic arm transports the carrier through different processes; there are many problems during the transportation process:

[0003] 1. During the transportation process, the silicon wafers will come into contact with the ambient gas, causing pollution to the silicon wafers;

[0004] 2. The robotic arm lifts the silicon wafers that have completed the process in the alkali tank to the next process tank. During the intermediate movement process, due to the influence of alkali crystallization, the basket pressing sensor will malfunction, resulting in overtime rework or even scrapping;

[0005] 3. When the robotic arm lifts the carrier with silicon wafers from the tank, due to the surface tension and viscosity of the liquid, a large amount of water droplets are carried on the bottom rod and cannot be completely dried in the drying tank. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a robotic arm for a carrier aiming at the above deficiencies, which solves the problem that the silicon wafers will come into contact with the ambient gas during the transportation process, causing pollution to the silicon wafers; at the same time, it solves the problem that when the robotic arm lifts the silicon wafers that have completed the process in the alkali tank to the next process tank, the basket pressing sensor will malfunction due to the influence of alkali crystallization during the intermediate movement process, resulting in overtime rework or even scrapping; at the same time, it solves the problem that when the robotic arm lifts the carrier with silicon wafers from the tank, due to the surface tension and viscosity of the liquid, a large amount of water droplets are carried on the bottom rod and cannot be completely dried in the drying tank.

[0007] The utility model is realized by the following scheme:

[0008] A robotic arm for a carrier includes at least, but is not limited to, a main support arm and an auxiliary hanging arm; the auxiliary hanging arms are uniformly arranged along the lower end surface of the main support arm, an air pipe is arranged on the main support arm, and air jet holes for blocking the ambient air around the carrier are arranged on the air pipe; the air pipe is connected to a gas source.

[0009] Based on the structure of the above-mentioned robotic arm for a carrier, the main support arm is of an overall L-shaped structure, the auxiliary hanging arms are uniformly arranged along the length direction of the horizontal end of the main support plate, and the air pipe includes a first air path, a second air path and a third air path; the first air path and the second air path are respectively arranged on both sides of the auxiliary hanging arm, and the first air path and the second air path are connected through the third air path to form a passage.

[0010] Based on the structure of the robotic arm for a flower basket described above, the air jet holes are arranged at a predetermined angle with respect to the vertical plane.

[0011] Based on the structure of the robotic arm for a flower basket described above, both the first air path and the second air path include a horizontal section and a vertical section; the air jet holes are respectively arranged along the horizontal section and the vertical section of the first air path and the second air path, and the third air path is respectively connected to the vertical sections of the first air path and the second air path.

[0012] Based on the structure of the robotic arm for a flower basket described above, the position of the third air path matches the lowest position where the auxiliary hanging arm hangs the flower basket.

[0013] Based on the structure of the robotic arm for a flower basket described above, three auxiliary hanging arms are arranged along the horizontal end of the main support arm, and the auxiliary hanging arm located at the central position is a telescopic structure.

[0014] Based on the structure of the robotic arm for a flower basket described above, a telescopic cylinder and a limit baffle are arranged at the central position of the main support arm. The piston rod of the telescopic cylinder is connected to the limit baffle, and the lower end of the limit baffle is connected to the auxiliary hanging arm.

[0015] Based on the structure of the robotic arm for a flower basket described above, a cavity structure matching the size of the limit baffle is arranged on the main support arm.

[0016] Based on the structure of the robotic arm for a flower basket described above, a hook plate is arranged at the bottom of the auxiliary hanging arm. Hooks are arranged on both sides of the hook plate, a U-shaped groove is arranged at its central position, a movable sensor is arranged at the top position of the U-shaped groove, a water spray pipe is arranged above the movable sensor, and the water outlet of the water spray pipe is close to the monitoring part of the movable sensor.

[0017] Based on the structure of the robotic arm for a flower basket described above, the water spray pipe is communicated with the hot water pipe in the main support arm through a pipeline.

[0018] In summary, due to the adoption of the above technical solutions, the beneficial effects of the present utility model are as follows:

[0019] 1. In this solution, the flower basket is hung by the auxiliary hanging arm, and then air is ejected through the air jet pipe to block the air around the flower basket, thereby minimizing the impact of the environment on the silicon wafers carried on the flower basket.

[0020] 2. In this solution, the end of the movable sensor is cleaned by arranging a water spray pipe, preventing the situation where the basket pressing sensor fails due to the influence of alkali crystallization.

[0021] 3. In this solution, the auxiliary hanging arm at the central position is set as a telescopic structure. When the flower basket is hung on the auxiliary hanging arm, the flower basket can be stretched and tilted. When the flower basket is lifted in the groove, the water droplets on the bottom rod can be diverted, enabling them to slide off the bottom rod of the flower basket as soon as possible and reducing the formation of water droplets. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Structural schematic diagram of the present utility model applied to a vertical gravity retaining wall;

[0023] Figure 2 Structural schematic diagram of the present utility model applied to a battered gravity retaining wall;

[0024] Figure 3 Structural schematic diagram of the present utility model applied to a reclined gravity retaining wall;

[0025] Figure 4 Structural schematic diagram of the present utility model applied to a counterfort retaining wall;

[0026] BRIEF DESCRIPTION OF THE DRAWINGS: 1. Main support arm; 2. Auxiliary hanging arm; 3. First air passage; 4. Second air passage; 5. Third air passage; 6. Horizontal section; 7. Vertical section; 8. Telescopic cylinder; 9. Limit baffle; 10. Hook plate; 11. Hook; 12. U-shaped groove; 13. Movable inductor; 14. Water spray pipe; 15. Air spray pipe; 16. Flower basket. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] All features disclosed in this specification, or all steps in the disclosed methods or processes, except for mutually exclusive features and / or steps, can be combined in any manner.

[0028] Any feature disclosed in this specification (including any additional claims, abstract) can be replaced by other equivalent or similar-purpose alternative features, unless specifically stated otherwise. That is, unless specifically stated otherwise, each feature is only an example of a series of equivalent or similar features.

[0029] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.

[0030] In addition, the terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0031] Example 1

[0032] like Figures 1 to 4 As shown, the utility model provides a technical solution:

[0033] A mechanical arm for a flower basket, which at least includes but is not limited to a main support arm 1 and an auxiliary hanging arm 2; the auxiliary hanging arm 2 is evenly arranged along the lower end surface of the main support arm 1, the main support arm is provided with an air pipe, and the air pipe is provided with an air jet hole 15 for blocking the ambient air around the flower basket 16; the air pipe is connected to an air source.

[0034] Based on the above structure, the flower basket is hung by the auxiliary hanging arm 2, and then the airflow is sprayed through the air jet pipe to block the air around the flower basket, thereby reducing the impact of the environment on the silicon wafers carried on the flower basket as much as possible. The air source is the existing pipeline inside the factory, and no additional air blowing equipment is required.

[0035] As an example, the main support arm 1 is an L-shaped structure as a whole, and the auxiliary hanging arm 2 is evenly arranged along the length direction of the horizontal end of the main support plate. The air pipe may include a first air path 3, a second air path 4 and a third air path 5; the first air path 3 and the second air path 4 are respectively arranged on both sides of the auxiliary hanging arm 2, and the first air path 3 and the second air path 4 are connected by the third air path 5 to form a passage; the air jet hole is set at a predetermined angle to the vertical plane.

[0036] Based on the above structure, a complete loop is formed by the air pipes through the first air path 3, the second air path 4 and the third air path 5, and the injection operation can be completed by a single air source. The air jet hole is set to a predetermined angle, so that the formed air flow surface can converge at a distance from the auxiliary hanging arm 2, avoiding interference when vertically spraying each other and reducing the air flow blocking effect.

[0037] As an example, the first air circuit 3 and the second air circuit 4 both include a horizontal section 6 and a vertical section 7; the air jet holes are respectively arranged along the horizontal section 6 and the vertical section 7 of the first air circuit 3 and the second air circuit 4, and the third air circuit 5 is respectively connected to the vertical section 7 of the first air circuit 3 and the second air circuit 4; the position of the third air circuit 5 matches the lowest position of the auxiliary hanging arm 2 hanging the upper flower basket.

[0038] Based on the above structure, by specially setting the position of the third air passage 5, on the one hand, it can ensure that the air jet holes on the second air passage 4 and the third air passage 5 can laterally and comprehensively cover the area where the flower basket and the auxiliary hanging arm 2 are located, efficiently blocking the environment near the flower basket during its movement. On the other hand, it can avoid waste of pipelines, reduce the overall manufacturing cost, and reduce the later maintenance difficulty.

[0039] As an example, three auxiliary hanging arms 2 are arranged along the horizontal end of the main support arm 1, and the auxiliary hanging arm 2 located at the central position is a telescopic structure.

[0040] Based on the above structure, by setting the auxiliary hanging arm 2 at the central position as a telescopic structure, when the flower basket is hung on the auxiliary hanging arm 2, the flower basket can be stretched and tilted. When the flower basket is lifted in the groove, the water droplets on the bottom rod can be diverted, enabling them to slide off the bottom rod of the flower basket as soon as possible and reducing the formation of water droplets.

[0041] As an example, a telescopic cylinder 8 and a limit baffle 9 can be arranged at the central position of the main support arm 1. The piston rod of the telescopic cylinder 8 is connected to the limit baffle 9, the lower end of the limit baffle 9 is connected to the auxiliary hanging arm 2, and a cavity structure matching the size of the limit baffle 9 is arranged on the main support arm 1.

[0042] Based on the above structure, the telescopic cylinder 8 is used to lift and adjust the auxiliary hanging arm 2 at the center. Since the air source is a commonly used power source within the factory, using a cylinder can reduce the manufacturing cost.

[0043] As an example, a hook plate 10 can be arranged at the bottom of the auxiliary hanging arm 2. Hooks 11 are arranged on both sides of the hook plate 10, a U-shaped groove 12 is arranged at its central position, a movable sensor 13 is arranged at the top position of the U-shaped groove 12, and a water spray pipe 14 is arranged above the movable sensor 13. The water outlet of the water spray pipe 14 is close to the monitoring part of the movable sensor 13.

[0044] Based on the above structure, by spraying water through the water spray pipe 14, the end of the movable sensor 13 is cleaned to prevent the situation where the basket pressing sensor fails due to the influence of alkali crystallization.

[0045] As an example, the water spray pipe 14 is connected to the hot water pipeline inside the main support arm 1 through a pipeline. Hot water is supplied to the water spray pipe 14 through the hot water pipeline, so that the stains on the surface of the movable sensor 13 can be quickly removed.

[0046] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A mechanical arm for a flower basket, characterized in that: At least including but not limited to a main support arm and an auxiliary hanging arm; the auxiliary hanging arm is evenly arranged along the lower end surface of the main support arm, the main support arm is provided with an air pipe, and the air pipe is provided with an air jet hole to block the ambient air around the flower basket; the air pipe is connected to an air source.

2. A mechanical arm for a flower basket as claimed in claim 1, characterized in that: The main support arm is an L-shaped structure as a whole, and the auxiliary hanging arms are evenly arranged along the length direction of the horizontal end of the main support plate. The air pipe includes a first air path, a second air path and a third air path; the first air path and the second air path are respectively arranged on both sides of the auxiliary hanging arm, and the first air path and the second air path are connected by the third air path to form a passage.

3. A mechanical arm for a flower basket as claimed in claim 2, characterized in that: The air injection hole is arranged at a predetermined angle to the vertical plane.

4. A mechanical arm for a flower basket as claimed in claim 3, characterized in that: The first gas path and the second gas path both include a horizontal section and a vertical section; the air jet holes are respectively arranged along the horizontal section and the vertical section of the first gas path and the second gas path, and the third gas path is respectively connected to the vertical sections of the first gas path and the second gas path.

5. A mechanical arm for a flower basket as claimed in claim 4, characterized in that: The position of the third air path matches the lowest position of the auxiliary hanging arm hanging the upper flower basket.

6. A mechanical arm for a flower basket as claimed in claim 1 or 2, characterized in that: The auxiliary hanging arms are arranged in three numbers along the horizontal ends of the main supporting arms, and the auxiliary hanging arm located at the center is a telescopic structure.

7. A mechanical arm for a flower basket as claimed in claim 6, characterized in that: A telescopic cylinder and a limit baffle are arranged at the center of the main support arm, the piston rod of the telescopic cylinder is connected to the limit baffle, and the lower end of the limit baffle is connected to the auxiliary hanging arm.

8. A mechanical arm for a flower basket as claimed in claim 7, characterized in that: The main support arm is provided with a cavity structure matching the size of the limit baffle.

9. A mechanical arm for a flower basket as claimed in claim 8, characterized in that: A hook plate is provided at the bottom of the auxiliary hanging arm, hooks are provided on both sides of the hook plate, a U-shaped groove is provided at the center, a movable sensor is provided at the top of the U-shaped groove, a water spray pipe is provided on the upper part of the movable sensor, and the water outlet of the water spray pipe is close to the monitoring part of the movable sensor.

10. A mechanical arm for a flower basket as claimed in claim 9, characterized in that: The water spray pipe is connected with the hot water pipeline in the main support arm through a pipeline.

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