Purging cover structure and purging cover device

Abstract

The utility model discloses a purging cover structure which comprises an air inlet assembly, an air exhaust assembly and a side sealing plate. The air inlet assembly comprises a first plate and a second plate, the first plate and the second plate are distributed in a spaced mode to form a first air storage cavity, and the axis of a first air outlet hole of the first plate and the axis of a second air outlet hole of the second plate are parallel and distributed in a spaced mode. The air exhaust assembly is located on the side, away from the first plate, of the second plate, an air exhaust hole corresponding to the second air outlet hole is formed in a third plate of the air exhaust assembly, and the axis of the air exhaust hole is parallel to the axis of the second air outlet hole. The first gas outlet hole, the first gas storage chamber, the second gas outlet hole and the closed space of the purging cover structure sequentially guide gas to pass through, and finally the gas is pumped away from the closed space through the gas pumping hole. The air flow can be effectively controlled and guided, so that the efficiency and the uniformity of the substrate degassing process are improved, and the substrate can be ensured to have better quality and performance in the subsequent processing step.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and particularly relates to a purge cover structure and a purge cover device. Background Art

[0002] PVD equipment in the semiconductor industry has high requirements for vacuum cleanliness. Generally, a DEGAS cavity (also known as a degassing cavity or a degassing chamber, which is a device component used in the semiconductor industry and is mainly used for heating and degassing substrates such as wafers and glass panels in a vacuum environment. Its main function is to gradually desorb the water vapor and other impurity gases attached to the substrate surface through heating, and use a vacuum pump to exhaust these gases outside the cavity, so as to maintain a relatively pure process environment.) is configured in the equipment to perform heating and degassing operations on substrates such as wafers or glass panels. Removing impurities such as water vapor attached to the surface is helpful for maintaining a good process environment in the process. When heating the substrate in medium and low vacuum, as the temperature rises to a certain extent, the water vapor and impurity gases adsorbed on the substrate can be gradually desorbed, and due to the action of the vacuum pump for evacuation, they are exhausted outside the cavity. After a period of time, a large amount of water vapor and other impurities can be reduced. After cooling, the degassed substrate is sent to the subsequent chamber for related processes;

[0003] While the DEGAS cavity is heating the substrate, high-purity inert gas, such as nitrogen, is filled in, which can make the heat conduction faster, make the water vapor and other impurities adsorbed on the substrate desorb faster, and at the same time, the desorbed water vapor and other impurities are diluted by nitrogen and then evacuated. At the same time, the nitrogen-filled environment can protect the substrate from being re-polluted by other impurity gases during the heating process.

[0004] In the related art, conventional DEGAS cavity component products mainly perform gas inlet and degassing for a single wafer, and there are few applications for multi-layer substrates such as multi-layer wafers or multi-layer glass panels. The current DEGAS gas inlet and degassing structure generally directly fills high-purity nitrogen for degassing operations. For small cavities, such a method is relatively simple and convenient. However, for large DEGAS cavities with multi-layer substrates, there are usually partition plates between each layer of wafers or glass panels. When directly filling the cavity with gas and evacuating the gas through a certain gas extraction port in the cavity, the direction of gas inlet and extraction cannot be effectively controlled. The inert gas such as nitrogen cannot well ensure the formation of an atmosphere near each layer of substrates, and the efficiency of heat transfer through nitrogen and taking away the desorbed gas is relatively low. Summary of the Utility Model

[0005] The main object of the present utility model is to provide a purging hood structure and a purging hood device, which can effectively control and guide the airflow, thereby improving the efficiency and uniformity of the substrate degassing process, which helps to ensure better quality and performance of the substrate in subsequent processing steps.

[0006] To achieve the above object, some embodiments of the present utility model provide a purging hood structure, including:

[0007] An air inlet assembly, including a first plate member and a second plate member. The first plate member is provided with at least one first air outlet hole, and the second plate member is provided with a plurality of second air outlet holes. Along the axis direction of the first air outlet hole, the first plate member and the second plate member are spaced apart to form a first air storage chamber. The axes of the first air outlet hole and the second air outlet hole are parallel and spaced apart.

[0008] An air extraction assembly, located on the side of the second plate member facing away from the first plate member. The air extraction assembly includes a third plate member. The third plate member faces the second plate member, and the third plate member is provided with air extraction holes corresponding to the second air outlet holes. The axes of the air extraction holes are parallel to the axes of the second air outlet holes.

[0009] A side sealing plate. Along the axis direction of the second air outlet hole, the air inlet assembly and the air extraction assembly are respectively connected to opposite sides of the side sealing plate. The side sealing plate, the air inlet assembly and the air extraction assembly cooperate together to define a closed space, and the closed space is suitable for accommodating a substrate.

[0010] Wherein, the closed space is suitable for being filled with gas. The first air outlet hole, the first air storage chamber, the second air outlet hole and the closed space guide the gas through in sequence, and finally the gas is extracted from the closed space through the air extraction holes.

[0011] In some embodiments, a plurality of second air outlet holes are evenly spaced along the horizontal direction. The third plate member is provided with a plurality of air extraction holes, and the plurality of air extraction holes correspond to the plurality of second air outlet holes one by one.

[0012] In some embodiments, the purging hood structure includes an installation connecting member, and the installation connecting member includes a first connecting portion and a second connecting portion. The first connecting portion connects the side sealing plate, and the second connecting portion connects the air inlet assembly.

[0013] Wherein, the side sealing plate includes a first stopper, and the air inlet assembly includes a second stopper. Along the vertical direction, the first connecting portion abuts against the first stopper, and the second connecting portion abuts against the second stopper, so that the axes of the second air outlet holes and the corresponding air extraction holes are at the same height along the vertical direction.

[0014] In some embodiments, the air inlet assembly includes an air inlet plate, and the air inlet plate includes an air inlet nozzle and a fitting portion. The air inlet nozzle is connected to the fitting portion, and the fitting portion and the first plate member jointly define a second air storage chamber. The second air storage chamber communicates with the first air storage chamber through the first air outlet hole.

[0015] Wherein, an opening is provided on one side of the fitting portion facing the first plate member, and the air inlet nozzle guides gas to fill the second air storage chamber through the opening.

[0016] In some embodiments, the purge hood structure includes a sealing block. The opposite sides of the sealing block are respectively in contact with the first plate member and the second plate member to cooperate with the first plate member and the second plate member to jointly define the first air storage chamber; and / or,

[0017] The opposite sides of the sealing block are respectively in contact with the first plate member and the fitting portion to cooperate with the first plate member and the fitting portion to jointly define the second air storage chamber.

[0018] In some embodiments, the air inlet nozzle is configured in a funnel shape, and the fitting portion is provided with an arc chamfer, and the arc chamfer is adapted to abut against the air inlet nozzle.

[0019] In some embodiments, the air extraction assembly further includes a fourth plate member. One end of the fourth plate member is connected to the third plate member, and the fourth plate member and the third plate member jointly define an air extraction chamber, and the air extraction chamber is adapted to accommodate the gas from the air extraction hole.

[0020] In some embodiments, the blowing hood structure further includes a partition plate, and the partition plate is adapted to carry the substrate so that the height of the substrate is flush with the axis of the second air outlet hole.

[0021] In some embodiments, the partition plate is provided with a heating element so that the partition plate can heat the substrate.

[0022] An embodiment of the second aspect of the present invention provides a purge hood device, including the purge hood structure of any of the above embodiments. The purge hood device further includes a heater, and the heater is provided outside the purge hood structure, and the heater is adapted to heat the purge hood structure.

[0023] According to the above embodiments, the beneficial effects of the present invention are:

[0024] The purging hood structure of the present utility model includes an air inlet assembly, an air extraction assembly, and side sealing plates. The air inlet assembly includes a first plate member and a second plate member. The first plate member is provided with at least one first air outlet hole, and the second plate member is provided with a plurality of second air outlet holes. Along the axial direction of the first air outlet hole, the first plate member and the second plate member are spaced apart to form a first air storage chamber. The axes of the first air outlet hole and the second air outlet hole are parallel and spaced apart. The air extraction assembly is located on the side of the second plate member facing away from the first plate member and includes a third plate member. The third plate member faces the second plate member and is provided with air extraction holes corresponding to the second air outlet holes. The axes of the air extraction holes are parallel to the axes of the second air outlet holes. The side sealing plates are arranged along the axial direction of the second air outlet holes. The air inlet assembly and the air extraction assembly are respectively connected to opposite sides of the side sealing plates. The side sealing plates, the air inlet assembly, and the air extraction assembly cooperate together to define a closed space, and the closed space is suitable for accommodating the substrate. The first air outlet hole, the first air storage chamber, the second air outlet hole, and the closed space guide the gas through in sequence, and finally the gas is evacuated from the closed space through the air extraction holes. The axes of the first air outlet hole and the second air outlet hole are staggered. After the gas passes through the first air outlet hole, it is first stored in the first air storage chamber between the first plate member and the second plate member. As the gas continues to be introduced, the air pressure in the first air storage chamber gradually increases, and then the gas in the first air storage chamber is extruded from the second air outlet hole. It can be understood that the gas jets out from the second air outlet hole. Therefore, the gas jetting out from the second air outlet hole is more likely to flow along the axial direction of the second air outlet hole. In addition, the air extraction holes cooperate with the second air outlet holes to strengthen the restraint on the flow trajectory of the gas jetting out from the second air outlet hole. After the gas shoots out from the second air outlet hole, it is subjected to the attraction from the corresponding air extraction holes and flows more strictly according to the preset trajectory. Therefore, the device of the present solution has a better guiding effect on the gas, can effectively realize the spatial constraint of the gas during purging, and the cooperation of each group of second air outlet holes and air extraction holes can further maintain the guiding of the air flow. When multiple groups of substrates are placed between the corresponding second air outlet holes and air extraction holes, through the layout of the air outlet holes and air extraction holes of the present solution, the air flow can be more effectively controlled and guided, thereby improving the efficiency and uniformity of the substrate degassing process, which helps to ensure that the substrates have better quality and performance in subsequent processing steps.

[0025] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present utility model. Description of the Drawings

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.

[0027] Figure 1 Schematic diagram of the structure of the purging hood as observed from the first perspective in an embodiment of the present utility model;

[0028] Figure 2 is Figure 1 the enlarged view of part A in

[0029] Figure 3 Schematic diagram of the structure of the purging hood as observed from the second perspective in an embodiment of the present utility model;

[0030] Figure 4 is Figure 3 the enlarged view of part B in

[0031] Figure 5 Schematic diagram of the structure of the purging hood as observed from the third perspective in an embodiment of the present utility model;

[0032] Figure 6 Schematic diagram of the structure of the air intake assembly in an embodiment of the present utility model;

[0033] Figure 7 Schematic sectional view of the structure of the purging hood as observed from the fourth perspective in an embodiment of the present utility model;

[0034] Figure 8 is Figure 7 the enlarged view of part C in

[0035] Figure 9 is Figure 7 the enlarged view of part D in

[0036] Figure 10 Figure 6 Partial sectional view of the air intake assembly at A - A in

[0037] Figure 11 is the enlarged view of part E in Figure Figure 10 ;

[0038] Figure 12 Schematic diagram of the structure of the air extraction assembly in an embodiment of the present utility model;

[0039] Figure 13 is Figure 12 the partial sectional view of the air extraction assembly at B - B in , and the enlarged view of part F;

[0040] Figure 14 Schematic diagram of the structure of the purging hood device in an embodiment of the present utility model;

[0041] Figure 15 is Figure 14 the sectional view of the purging hood device at C - C in , and the schematic diagram of the working principle, where the arrow indicates the air flow direction.

[0042] Description of the reference numerals in the attached drawings:

[0043] Intake assembly 100;

[0044] First plate member 110; First air outlet hole 111;

[0045] Second plate member 120; Second air outlet hole 121;

[0046] Second stopper 130;

[0047] Intake plate 140; Intake nozzle 141; Fitting portion 142; Opening 1421;

[0048] Exhaust assembly 200;

[0049] Third plate member 210;

[0050] Exhaust hole 211;

[0051] Fourth plate member 220;

[0052] Side sealing plate 300;

[0053] First stopper 310;

[0054] Sealing block 400;

[0055] Installation connecting member 500;

[0056] First connecting portion 510;

[0057] Second connecting portion 520;

[0058] First air storage chamber 600;

[0059] Second air storage chamber 700;

[0060] Exhaust chamber 800;

[0061] Partition plate 910; Heater 920; Substrate 930.

[0062] The realization, functional features and advantages of the purpose of the present utility model will be further described with reference to the embodiments and the attached drawings. Specific embodiments

[0063] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the attached drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts belong to the scope of protection of the present utility model.

[0064] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of the present utility model, then such directional indications are only used to explain the relative positional relationship, movement conditions, etc. between components in a certain specific posture. If the specific posture changes, then the directional indications will also change accordingly.

[0065] In addition, if there are descriptions such as "first", "second", etc. involved in the embodiments of the present utility model, then such descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, if "and / or", "and / or", or "and / or" appear throughout the text, their meanings include three parallel scenarios. Taking "A and / or B" as an example, it includes scenario A, or scenario B, or the scenario where both A and B are satisfied simultaneously. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0066] In the related art, conventional DEGAS cavity component products mainly perform gas inlet and degassing for a single wafer, and there are few applications in the form of multi-layer substrates such as multi-layer wafers or multi-layer glass panels. The current DEGAS gas inlet and degassing structure generally directly fills high-purity nitrogen for degassing operations. For small cavities, such an approach is relatively simple and convenient. However, for large DEGAS cavities with multi-layer substrates, there are usually separator plates separating between each layer of wafers or glass panels. When directly filling the cavity with gas and evacuating the gas through a certain gas extraction port of the cavity, there is no good effective control over the direction of gas inlet and extraction. The inert gas such as nitrogen cannot well ensure the formation of an atmosphere near each layer of substrates, and the efficiency of heat transfer through nitrogen and taking away the desorbed gas is relatively low.

[0067] Next, refer to Figures 1 to 15 to describe the purge hood structure and purge hood device according to the embodiments of the present utility model.

[0068] Refer to Figure 1 、 Figure 3 、 Figure 5 、 Figure 6 and Figure 11, in some embodiments, the purging hood structure includes an air inlet assembly 100, an air extraction assembly 200, and a side sealing plate 300. The air inlet assembly 100 includes a first plate member 110 and a second plate member 120. The first plate member 110 is provided with at least one first air outlet hole 111, and the second plate member 120 is provided with a plurality of second air outlet holes 121. Along the axial direction of the first air outlet hole 111, the first plate member 110 and the second plate member 120 are spaced apart to form a first air storage chamber 600. The axes of the first air outlet hole 111 and the second air outlet holes 121 are parallel and spaced apart. The air extraction assembly 200 is located on the side of the second plate member 120 facing away from the first plate member 110, and includes a third plate member 210. The third plate member 210 faces the second plate member 120 and is provided with air extraction holes 211 corresponding to the second air outlet holes 121. The axes of the air extraction holes 211 are parallel to the axes of the second air outlet holes 121. The side sealing plate 300 is along the axial direction of the second air outlet holes 121. The air inlet assembly 100 and the air extraction assembly 200 are respectively connected to opposite sides of the side sealing plate 300. The side sealing plate 300, the air inlet assembly 100, and the air extraction assembly 200 cooperate together to define a closed space, and the closed space is adapted to accommodate a substrate 930. The first air outlet hole 111, the first air storage chamber 600, the second air outlet holes 121, and the closed space guide the gas in sequence. Finally, the gas is evacuated from the closed space through the air extraction holes 211. The axes of the first air outlet hole 111 and the second air outlet holes 121 are offset. After the gas passes through the first air outlet hole 111, it is first stored in the first air storage chamber 600 between the first plate member 110 and the second plate member 120. As the gas continues to be introduced, the air pressure in the first air storage chamber 600 gradually increases. Then, the gas in the first air storage chamber 600 is extruded from the second air outlet holes 121. It can be understood that the gas jets out from the second air outlet holes 121. Therefore, the gas jetting out from the second air outlet holes 121 is more likely to flow along the axial direction of the second air outlet holes 121. In addition, the air extraction holes 211 cooperate with the second air outlet holes 121 to strengthen the restraint on the flow trajectory of the gas jetting out from the second air outlet holes 121. After the gas jets out from the second air outlet holes 121, it is subjected to the attraction from the corresponding air extraction holes 211 and flows more strictly along the preset trajectory. Therefore, the device of this solution has a better gas guiding effect, can effectively achieve spatial constraint on the gas during gas purging, and the cooperation of each group of second air outlet holes 121 and air extraction holes 211 can further maintain the guidance of the air flow. When multiple groups of substrates 930 are placed between the corresponding second air outlet holes 121 and air extraction holes 211, through the layout of the air outlet holes and the air extraction holes 211 of this solution, the air flow can be more effectively controlled and guided, thereby improving the efficiency and uniformity of the degassing process of the substrate 930, which helps to ensure that the substrate 930 has better quality and performance in subsequent processing steps.

[0069] It can be understood that in some embodiments, in order to achieve more stable air flow control, the distance between the first plate member 110 and the second plate member 120 is designed to be adjustable, so that the volume of the first air storage chamber 600 can be adjusted according to different application scenarios and air flow requirements, and then the speed and pressure of the air flow can be adjusted. The design of the second air outlet hole 121 can also be fine-tuned as needed, such as by changing the aperture size or quantity to control the air flow intensity and distribution to adapt to different substrate 930 sizes and material properties. In addition, the size and position of the air extraction hole 211 can also be designed according to the actual use situation to ensure that the air flow can be efficiently guided into the air extraction assembly 200, reduce the loss of the air flow, and improve the utilization rate of the air flow. The cooperation between the air extraction hole 211 and the second air outlet hole 121 can not only improve the directivity of the air flow, but also effectively reduce the noise level and improve the working environment. In this way, the utility model can not only achieve efficient air flow control, but also improve the applicability and flexibility of the whole device.

[0070] Referring to Figure 6 , in some embodiments, a plurality of second air outlet holes 121 are evenly distributed at intervals in the horizontal direction, the third plate member 210 is provided with a plurality of air extraction holes 211, and the plurality of air extraction holes 211 correspond to the plurality of second air outlet holes 121 one by one. Such a design makes the air flow more uniform in the horizontal direction, which is beneficial to improving the uniformity of substrate 930 degassing. The uniform distribution of the plurality of second air outlet holes 121 makes the air flow ejected from the second air outlet holes 121 more stable, which is beneficial to the guidance and control of the air flow. The air extraction holes 211 corresponding to the second air outlet holes 121 one by one can better cooperate with the work of the second air outlet holes 121, further improve the directivity of the air flow, ensure that the air flow flows along the preset trajectory, improve the efficiency and uniformity of the substrate 930 degassing process, and thus ensure that the substrate 930 has better quality and performance in subsequent processing steps.

[0071] It can be understood that in some embodiments, the size and position of the air extraction hole 211 are adjusted accordingly according to the layout of the second air outlet hole 121 to ensure that the air flow can be effectively guided into the air extraction assembly 200 and reduce the loss of the air flow. The design of the air extraction holes 211 corresponding to the second air outlet holes 121 one by one not only improves the directivity of the air flow, but also reduces the turbulence phenomenon of the air flow, reduces the noise level, and improves the working environment.

[0072] Referring to Figures 1 to 4, in some embodiments, the purging hood structure includes a mounting connector 500, and the mounting connector 500 includes a first connecting portion 510 and a second connecting portion 520. The first connecting portion 510 is connected to the side sealing plate 300, and the second connecting portion 520 is connected to the air inlet assembly 100. The side sealing plate 300 includes a first stopper 310, and the air inlet assembly 100 includes a second stopper 130. Along the vertical direction, the first connecting portion 510 abuts against the first stopper 310, and the second connecting portion 520 abuts against the second stopper 130, so that the axes of the second air outlet holes 121 and the corresponding air extraction holes 211 are at the same height along the vertical direction. Such a design ensures the alignment between the second air outlet holes 121 and the air extraction holes 211, which is beneficial to improving the air flow directionality and ensuring that the air flow flows along the preset trajectory. The air inlet assembly 100 and the side sealing plate 300 are connected through the cooperation of the mounting connector 500, the first stopper 310 and the second stopper 130, which simplifies the assembly process, makes the purging hood structure of the present application easy to disassemble and assemble, and adapts to various situations by replacing the air inlet assemblies 100 with different distributions.

[0073] Of course, it can be understood that the design of the mounting connector 500 takes into account various situations that may be encountered in actual applications, such as the need for quick disassembly and assembly or the need to adjust the height. The first connecting portion 510 and the second connecting portion 520 can be designed to be adjustable as needed, so that the relative positions between the second air outlet holes 121 and the air extraction holes 211 can be flexibly adjusted to adapt to substrates 930 of different sizes. In addition, the first connecting portion 510 and the second connecting portion 520 can also be designed as quick-connect structures, which is convenient for maintenance and replacement of components. By optimizing the structure of the mounting connector 500, the stability and reliability of the purging hood structure can be further improved, the air flow directionality can be ensured, the efficiency and uniformity of the degassing process of the substrate 930 can be improved, and thus better quality and performance of the substrate 930 in subsequent processing steps can be ensured.

[0074] Refer to Figures 7 to 9, in some embodiments, the intake assembly 100 includes an intake plate 140, and the intake plate 140 includes an intake nozzle 141 and a fitting portion 142. The intake nozzle 141 is connected to the fitting portion 142, and the fitting portion 142 and the first plate member 110 jointly define a second air storage chamber 700. The second air storage chamber 700 communicates with the first air storage chamber 600 through the first air outlet hole 111. An opening 1421 is provided on the side of the fitting portion 142 facing the first plate member 110, and the intake nozzle 141 guides the gas to fill the second air storage chamber 700 through the opening 1421. The design of the intake nozzle 141 ensures that the gas can smoothly enter the second air storage chamber 700. As the gas continues to be filled, the air pressure in the second air storage chamber 700 gradually increases, prompting the gas to enter the first air storage chamber 600 through the first air outlet hole 111. Since the main flow trend of the gas is to first fill the second air storage chamber 700 and then enter the first air storage chamber 600 through the first air outlet hole 111, this structural design ensures the stable supply of the gas, and at the same time guarantees the uniformity of the air flow, which helps to improve the efficiency and uniformity of the gas purge, and ensures the cleanliness of the wafer surface and the quality of the subsequent process.

[0075] It can be understood that, in some embodiments, the specific shape and size of the intake nozzle 141 can be adjusted according to the requirements of the actual application. For example, the intake nozzle 141 can be designed to have a conical or funnel-shaped inlet to facilitate the introduction of the gas and reduce the occurrence of turbulence.

[0076] Specifically, referring to Figures 7 to 9 , in some embodiments, the intake nozzle 141 is configured in a funnel shape, and the fitting portion 142 is provided with a circular arc chamfer, and the circular arc chamfer is adapted to abut against the intake nozzle 141. The funnel-shaped intake nozzle 141 enables the gas to enter the second air storage chamber 700 more smoothly, and the circular arc chamfer of the funnel reduces the frictional resistance of the air flow when entering the air storage chamber, improving the smoothness and efficiency of the air flow. The fitting portion 142 is provided with a circular arc chamfer to fit the funnel-shaped intake nozzle 141, making the connection between the intake nozzle 141 and the fitting portion 142 more stable. In summary, this structural design helps to reduce the turbulence effect of the air flow, ensures that the gas can evenly cover the wafer surface during the purge process, and improves the uniformity and effect of the purge.

[0077] It can be understood that in some embodiments, the funnel shape of the air inlet nozzle 141 can be adjusted according to actual application requirements to adapt to different gas flow rates and pressure requirements. The size and radius of curvature of the arc chamfer of the funnel shape can also be optimized according to the actual situation to achieve the best air flow introduction effect. In addition, the fitting tightness between the air inlet nozzle 141 and the fitting portion 142 can be achieved by designing appropriate tolerance fits to ensure that the air inlet nozzle 141 does not loosen or leak during long-term use. In this way, not only can the efficiency and uniformity of gas purging be improved, but also the service life of the purging hood structure can be extended and the maintenance cost can be reduced.

[0078] Referring to Figure 8 and Figure 9 , in some embodiments, the purging hood structure includes a sealing block 400. The opposite sides of the sealing block 400 are respectively fitted to the first plate member 110 and the second plate member 120 to cooperate with the first plate member 110 and the second plate member 120 to jointly define a first gas storage chamber 600. The function of the sealing block 400 is to ensure the sealing performance of the first gas storage chamber 600, prevent gas leakage, and ensure that gas can fully enter the first gas storage chamber 600 from the first air outlet 111 and be discharged from the second air outlet 121 under appropriate pressure.

[0079] In some embodiments, the sealing block 400 is disposed between the first plate member 110 and the fitting portion 142 to cooperate with the first plate member 110 and the fitting portion 142 to jointly define a second gas storage chamber 700. Such a design ensures the sealing performance of the entire purging hood structure, helps to improve the control accuracy of the air flow, and ensures the uniformity and efficiency of gas purging.

[0080] It can be understood that in some embodiments, the material of the sealing block 400 can be selected as a material with good elasticity and heat resistance to adapt to high-temperature and high-pressure environmental conditions. The design of the sealing block 400 can also consider adding an elastic sealing ring or other sealing structures to further enhance the sealing effect. In addition, the fitting between the sealing block 400 and the first plate member 110 and the second plate member 120 can ensure a good contact surface through precision machining to reduce the possibility of gas leakage. In this way, not only the sealing performance of the purging hood structure is improved, but also the effective control of the air flow is ensured, which helps to improve the efficiency and quality of the purging process.

[0081] Referring to Figure 5 , Figure 12 and Figure 13, in some embodiments, the air extraction assembly 200 further includes a fourth plate member 220. One end of the fourth plate member 220 is connected to the third plate member 210. The fourth plate member 220 and the third plate member 210 together define an air extraction chamber 800, and the air extraction chamber 800 is adapted to accommodate the airflow from the air extraction hole 211. The design of the fourth plate member 220 enables the airflow extracted from the air extraction hole 211 to be effectively collected and guided to the air extraction chamber 800, ensuring the smooth discharge of the airflow. The presence of the air extraction chamber 800 allows the airflow from the air extraction hole 211 to be further integrated, reducing the turbulence of the airflow and improving the air extraction efficiency. In this way, the fourth plate member 220 and the third plate member 210 work together to ensure the smooth progress of the air extraction process and improve the overall performance of the air extraction assembly 200.

[0082] It can be understood that, in some embodiments, the connection between the fourth plate member 220 and the third plate member 210 can be achieved in various ways, such as welding, bolt connection, or snap connection, etc., to ensure a firm connection and airtightness between the two. The design of the air extraction chamber 800 can be adjusted according to actual needs. For example, the airflow circulation path and speed can be adjusted by changing the thickness of the fourth plate member 220 or the volume of the air extraction chamber 800 to adapt to different air extraction requirements. In addition, a flow deflector or other auxiliary structures can be provided inside the air extraction chamber 800 to help the airflow distribute more evenly in the air extraction chamber 800, reduce the turbulence of the airflow, and improve the air extraction efficiency. In this way, not only can the air extraction efficiency be improved, but also the energy loss can be reduced, and the energy efficiency ratio of the entire device can be increased.

[0083] Referring to Figure 14 and Figure 15 , in some embodiments, the air blowing hood structure further includes a partition plate 910. The partition plate 910 is adapted to carry the substrate 930 so that the height of the substrate 930 is flush with the axis of the second air outlet hole 121. The design of the partition plate 910 enables the substrate 930 to be accurately positioned, ensuring that the substrate 930 is in the most suitable air blowing position, thereby improving the air blowing efficiency and uniformity. In this way, the partition plate 910 not only provides the function of supporting the substrate 930, but also ensures the relative positional relationship between the substrate 930 and the air outlet hole, which is beneficial to improving the efficiency and uniformity of the degassing process of the substrate 930 and helps to ensure better quality and performance of the substrate 930 in subsequent processing steps.

[0084] It can be understood that in some embodiments, the material of the separator 910 can be selected from materials with good thermal stability and chemical stability to adapt to high-temperature and corrosive gas environments. The design of the separator 910 can also consider adding positioning pins or clamping mechanisms to ensure the stability of the substrate 930 during the blowing process and avoid the movement of the substrate 930 caused by the impact of the air flow. In addition, the surface of the separator 910 can be designed to be smooth and flat to reduce the friction with the substrate 930 and facilitate the loading and unloading of the substrate 930. In this way, not only can the efficiency and uniformity of the degassing process of the substrate 930 be improved, but also the risk of damage to the substrate 930 can be reduced and the quality of the substrate 930 can be improved.

[0085] Referring to Figure 15 , in some embodiments, the separator 910 is provided with a heating element, so that the separator 910 can heat the substrate 930. The heating function of the separator 910 enables the substrate 930 to be subjected to the blowing treatment in a heated state, improving the degassing effect. By heating, the release of the residual gas on the surface of the substrate 930 can be promoted, and the blowing efficiency can be improved. In addition, heating can also increase the temperature of the substrate 930, which is beneficial to the subsequent processing steps and improves the production efficiency.

[0086] It can be understood that in some embodiments, the heating of the separator 910 can be achieved by an internal electric heating element, and the heating elements can be evenly distributed at the bottom of the separator 910 to ensure uniform heat distribution. The heating temperature can be adjusted according to actual needs, such as setting different heating temperatures through a temperature controller to adapt to different types of substrates 930 and different degassing requirements. In addition, the separator 910 can also be designed to have a heat preservation function, for example, by setting a heat preservation layer around the separator 910 to reduce heat dissipation and improve the heating efficiency. In this way, not only can the efficiency and uniformity of the degassing process of the substrate 930 be improved, but also energy consumption can be saved and the energy efficiency ratio of the entire device can be improved.

[0087] An embodiment of the second aspect of the present utility model provides a purging hood device. The purging hood device includes the purging hood structure of any of the above embodiments. The purging hood device further includes a heater 920 disposed outside the purging hood structure, and the heater 920 is adapted to heat the purging hood structure. Specifically, the purging hood device includes an air inlet assembly 100, an air extraction assembly 200, and a side sealing plate 300. The air inlet assembly 100 includes a first plate member 110 and a second plate member 120. The first plate member 110 is provided with at least one first air outlet hole 111, and the second plate member 120 is provided with a plurality of second air outlet holes 121. Along the axial direction of the first air outlet hole 111, the first plate member 110 and the second plate member 120 are spaced apart to form a first air storage chamber 600. The axes of the first air outlet holes 111 and the second air outlet holes 121 are parallel and spaced apart. The air extraction assembly 200 is located on the side of the second plate member 120 facing away from the first plate member 110, and includes a third plate member 210. The third plate member 210 faces the second plate member 120 and is provided with air extraction holes 211 corresponding to the second air outlet holes 121. The axes of the air extraction holes 211 are parallel to the axes of the second air outlet holes 121. The side sealing plate 300 is along the axial direction of the second air outlet holes 121. The air inlet assembly 100 and the air extraction assembly 200 are respectively connected to opposite sides of the side sealing plate 300. The side sealing plate 300, the air inlet assembly 100, and the air extraction assembly 200 cooperate together to define a closed space, and the closed space is adapted to accommodate a substrate 930. The first air outlet holes 111, the first air storage chamber 600, the second air outlet holes 121, and the closed space guide the gas in sequence, and finally the gas is extracted from the closed space through the air extraction holes 211. The axes of the first air outlet holes 111 and the second air outlet holes 121 are staggered. After the gas passes through the first air outlet holes 111, it is first stored in the first air storage chamber 600 between the first plate member 110 and the second plate member 120. As the gas continues to be introduced, the air pressure in the first air storage chamber 600 gradually increases, and then the gas in the first air storage chamber 600 is extruded from the second air outlet holes 121. It can be understood that the gas jets out from the second air outlet holes 121. Therefore, the gas jetting out from the second air outlet holes 121 is more likely to flow along the axial direction of the second air outlet holes 121. In addition, the air extraction holes 211 cooperate with the second air outlet holes 121 to strengthen the restraint on the flow trajectory of the gas jetting out from the second air outlet holes 121. The air flow is attracted by the corresponding air extraction holes 211 after shooting out from the second air outlet holes 121 and flows more strictly according to the preset trajectory. Therefore, the device of the present solution has a better guiding effect on the air flow, can effectively achieve spatial constraint on the gas during gas purging, and the cooperation of each group of second air outlet holes 121 and air extraction holes 211 can further maintain the guiding of the air flow.When multiple groups of substrates 930 are placed between the corresponding second air outlets 121 and air extraction holes 211, with the layout of the air outlets and air extraction holes 211 in this solution, the air flow can be more effectively controlled and guided, thereby improving the efficiency and uniformity of the degassing process of the substrates 930, which helps to ensure better quality and performance of the substrates 930 in subsequent processing steps.

[0088] The following will refer to Figures 1 to 15 systematically elaborate on the purging hood device of the present utility model. Specifically, refer to Figure 1 , the purging hood device mainly consists of a first plate member 110, a second plate member 120, side sealing plates 300, a third plate member 210, a top sealing plate, mounting connectors 500 and the remaining corresponding screws. The overall mounting structure is realized by the mounting connectors 500 at the four corners for mounting and positioning on the cavity, and the corresponding plate members are closely fitted to form a sealed hood with a small mounting gap. As shown in Figures 1 to 4 , at each corner of the entire structure, such as the intake component 100, the second stop block 130 and the first stop block 310 of the side sealing plate 300 are vertically positioned with the mounting connectors 500 for vertical alignment and fitting installation. In the figure, the top sealing plate is fitted with the intake component 100 and the side sealing plate 300 to ensure a small gap between the plate members of the purging hood structure.

[0089] Refer to Figures 7 to 9 and Figure 11 , the air intake nozzles 141 on the air intake plate 140 are interfaces for nitrogen or other inert gases to enter. The various plate members of the intake component 100 form an air intake distribution space, namely the first air storage chamber 600 and the second air storage chamber 700. After the gas is filled at the air intake nozzles 141, it passes through the opening 1421 to the first air outlets 111 on the first plate member 110, and then through the second air outlets 121 on the second plate member 120 to evenly distribute the gas to each layer and then overflow. The intake component 100 realizes the uniform delivery of air intake to each layer.

[0090] Refer to Figure 5 , Figure 12 and Figure 13 , the air extraction plate consists of a third plate member 210 and a fourth plate member 220. Among them, the fourth plate member 220 is configured as a cover plate, and the third plate member 210 is configured as an orifice plate. The combination of the two parts forms a channel between the air extraction holes 211 on the orifice plate and the air extraction chamber 800 formed by the two plate members. When extracting air, the air flow passes through the small holes, flows through the outlet and is then extracted.

[0091] Refer to Figure 15, during the heating and degassing process, the purge hood structure and each sealing plate combine to form an enclosed structure with relatively small gaps. There are multiple layers of substrates 930 and self-heating partition plates 910 in the middle of the purge hood structure, and heaters 920 are distributed outside the purge hood. During operation, the heater 920 heats the entire purge hood structure. At this time, nitrogen or other inert gases can enter through the air inlet of the air inlet plate 140, be heated while entering the device inside the purge hood through the small holes in the partition layer, and nitrogen is blown into the side of the substrate 930 through the designed air holes with high partitions in the corresponding layer to form a gas atmosphere. During this process, vacuum pumping continues to work. Since the entire purge hood forms a combination of small gaps, compared with these small pumping gaps, the open-type pumping ports of the pumping plate are more conducive to gas pumping. Therefore, the nitrogen atmosphere in each layer will be guided by the gas flow due to the vacuum pumping effect, from the air inlet assembly 100 to the pumping assembly 200, and finally taken away by the pumping pump. In this way, a uniform distribution of hot air flow for each layer of substrate 930 is formed. When heating the substrate 930, the water vapor and miscellaneous gases are desorbed and taken away more effectively at the same time. Some small and light particles can also be blown away from the surface of the substrate 930 through purging.

[0092] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. Any equivalent structural transformation made by using the description and drawings of the present invention under the inventive concept of the present invention, or direct / indirect application in other related technical fields, is included in the patent protection scope of the present invention.

Claims

1. A purging hood structure, characterized in that, include: An air intake assembly comprises a first plate and a second plate, wherein the first plate is provided with at least one first air outlet hole, and the second plate is provided with a plurality of second air outlet holes, and along the axis direction of the first air outlet hole, the first plate and the second plate are spaced apart to form a first air storage chamber, and the axis of the first air outlet hole and the axis of the second air outlet hole are parallel and spaced apart; an air extraction component, located on a side of the second plate away from the first plate, the air extraction component comprising a third plate, the third plate facing the second plate, the third plate being provided with an air extraction hole corresponding to the second air outlet, and the axis of the air extraction hole being parallel to the axis of the second air outlet; A side sealing plate, along the axis direction of the second air outlet, the air inlet assembly and the air extraction assembly are respectively connected to opposite sides of the side sealing plate, the side sealing plate, the air inlet assembly and the air extraction assembly cooperate to define a closed space, and the closed space is suitable for accommodating a substrate; The enclosed space is suitable for introducing gas, and the first air outlet, the first air storage chamber, the second air outlet and the enclosed space guide the gas to pass through in sequence, and finally the gas is extracted from the enclosed space through the exhaust hole.

2. The purging hood structure according to claim 1, wherein, The plurality of second air outlet holes are evenly distributed along the horizontal direction, the third plate is provided with a plurality of the air extraction holes, and the plurality of the air extraction holes correspond to the plurality of the second air outlet holes one by one.

3. The purging hood structure according to claim 1, characterized in that, The purge cover structure includes a mounting connector, the mounting connector includes a first connecting portion and a second connecting portion, the first connecting portion is connected to the side sealing plate, and the second connecting portion is connected to the air intake assembly; Among them, the side sealing plate includes a first block, and the air intake assembly includes a second block. Along the vertical direction, the first connecting part abuts the first block, and the second connecting part abuts the second block, so that the axis of the second air outlet and the corresponding axis of the air exhaust hole are consistent in height along the vertical direction.

4. The purging hood structure according to claim 1, wherein The air intake assembly includes an air intake plate, the air intake plate includes an air intake nozzle and a fitting portion, the air intake nozzle is connected to the fitting portion, the fitting portion and the first plate member jointly define a second air storage chamber, and the second air storage chamber is connected to the first air storage chamber through the first air outlet hole; Wherein, the fitting portion is provided with an opening on one side facing the first plate, and the air inlet nozzle guides the gas through the opening to fill the second air storage chamber.

5. The purging hood structure according to claim 4, characterized in that The purge cover structure includes a sealing block, and opposite sides of the sealing block are respectively attached to the first plate and the second plate, so as to cooperate with the first plate and the second plate to jointly define the first air storage chamber; and / or, The opposite sides of the sealing block are respectively attached to the first plate and the attached portion, so as to cooperate with the first plate and the attached portion to jointly define the second air storage chamber.

6. The purging hood structure according to claim 4, characterized in that, The air inlet nozzle is configured in a funnel shape, and the fitting portion is provided with a circular arc chamfer, and the circular arc chamfer is suitable for abutting against the air inlet nozzle.

7. The purge hood structure according to claim 1, wherein, The air extraction assembly further includes a fourth plate member, one end of the fourth plate member is connected to the third plate member, and the fourth plate member and the third plate member jointly define an air extraction chamber, and the air extraction chamber is adapted to accommodate the gas from the air extraction holes.

8. The purging hood structure according to claim 1, characterized in that The purge cover structure further includes a partition plate, and the partition plate is adapted to carry the substrate so that the height of the substrate is flush with the axis of the second air outlet hole.

9. The purging hood structure according to claim 8, characterized in that, The partition plate is provided with a heating element so that the partition plate can heat the substrate.

10. A purging hood device, comprising the purging hood structure according to any one of claims 1-9, characterized in that, The purge cover device further includes a heater, and the heater is arranged outside the purge cover structure, and the heater is adapted to heat the purge cover structure.

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