Slicing machine

Abstract

The utility model relates to the technical field of hard and brittle material processing, and particularly provides a slicing machine, which comprises a detection device, and the detection device comprises at least one detection assembly, and a moving part. Wherein the moving part comprises a transverse moving assembly, and the transverse moving assembly can drive the at least one detection assembly to move along the axis of a cutting main roller of the slicing machine; the lifting assembly can drive the at least one detection assembly to move in the vertical direction; and the advancing assembly can drive the detection assembly to move in the direction close to / away from the cutting main roller in the radial direction of the cutting main roller. By means of the structure, the detection assembly can reliably reach the corresponding detection position through the moving part formed by combining the transverse moving assembly, the lifting assembly and the advancing assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of wire cutting, and particularly provides a slicing machine. Background Art

[0002] Taking a silicon rod made of hard and brittle material as an example, the devices for processing it usually include a cutting machine for cutting the rod material (round rod) according to the length specification, a squaring machine for cutting a round rod of a certain length into a square rod, a grinding machine for grinding the square rod (grinding surface and chamfer) (such as usually including rough grinding and fine grinding), and a slicing machine for slicing the square rod with qualified precision after grinding. Among them, the working principle of the slicing machine is as follows: after bonding the square rod to the crystal holder, the square rod is sliced by the wire mesh of the cutting machine in the way of wire sawing. Each complete slicing operation corresponding to the wire mesh is called a one-knife cutting operation of the slicing machine.

[0003] The slicing operation of the existing slicing machine is concentrated near the slicing station. Each one-knife cutting operation usually includes dozens of operation steps and is usually completed by one or two operators. Such a processing method often has the following problems: the operation of the slicing machine requires high professionalism and proficiency of the operator. The large number of steps makes it easy for the operator to make mistakes, and once the operator makes a mistake, it may lead to cutting abnormalities of different degrees. In view of this, after fully researching and analyzing the operation of the slicing machine, the inventor aims to propose a process flow for realizing automatic slicing operation and a corresponding structural framework.

[0004] Taking the current non-automatic operation as an example, in the process of slicing single-crystal silicon wafers, it will include but not be limited to such links:

[0005] (1) After each one-knife cutting is completed, it is necessary to manually judge whether the silicon rod is completely cut through by the wire mesh. As is usually the case, the conditions for manually judging that the silicon rod is completely cut through by the wire mesh are: the diamond wire cuts into the crystal holder (resin plate) to a specific depth (such as usually 3-6 mm) and the whole diamond wire mesh remains flat.

[0006] (2) After each one-knife cutting is completed, it is necessary to lift (retract the knife) the processed silicon wafer relative to the cutting mechanism (mainly including the cutting main roller) that constructs the wire mesh. During the process of retracting the knife, it is necessary to manually judge whether there is a problem of wire hanging during retraction. The specific manifestation of wire hanging during retraction is that one or more diamond wire segments in the wire mesh are pulled up by the silicon wafer during the lifting of the silicon rod. If not discovered and processed in time, it will cause the diamond wire to be broken, which will affect the quality of the silicon wafer and the production change efficiency of the slicing machine.

[0007] (3) During the slicing operation, each diamond wire segment of the wire mesh is wound in the wire grooves at corresponding positions on the cutting main roller, so that the slicing operation of the silicon rod is completed by wire sawing along with the reciprocating movement of the wire mesh. However, during the slicing process, a jumper problem may occur between adjacent diamond wire segments in the wire mesh. Specifically, the diamond wire corresponding to one or several wire grooves jumps out of the groove and overlaps with the diamond wire in the adjacent wire groove. If the jumper problem is not handled in time, it will cause wire breakage, affecting the sustainability of the automatic operation of the slicing machine and also the quality of monocrystalline silicon wafers.

[0008] For example, during the process of realizing the automation of the above-mentioned link for slicing operation, it is necessary to perform visual inspection on elements such as the depth of the diamond wire entering the resin plate (which can be used to judge whether the silicon rod is completely cut through by the wire mesh), the height difference between diamond wires at different positions (which can be used to judge whether wire hanging occurs during tool retraction), and the distance between adjacent diamond wires (which can be used to judge whether a jumper problem occurs and can also be used to judge whether wire hanging occurs during tool retraction).

[0009] Correspondingly, the present utility model requires a new technical solution to adaptively complete the visual inspection of the above elements. Summary of the Utility Model

[0010] The present utility model aims to solve at least part of the above technical problems. Specifically, it solves the technical problem of how to detect the image data of the cutting station when the existing slicing machine needs to judge whether the silicon rod is completely cut through by the wire mesh, whether wire hanging occurs during tool retraction, whether a jumper problem of the diamond wire occurs, etc. during the automatic operation.

[0011] In view of this, the present utility model provides a slicing machine, which includes a detection device. The detection device includes: at least one detection component; and a moving part; wherein, the moving part includes: a transverse movement component, which can drive the at least one detection component to move along the axis of the cutting main roller of the slicing machine; a lifting component, which can drive the at least one detection component to move in the vertical direction; and a forward movement component, which can drive the detection component to move in the radial direction of the cutting main roller close to / away from the cutting main roller.

[0012] With such a structure, it is possible to ensure that the detection component can reliably reach the corresponding detection position through the moving part composed of the transverse movement component, the lifting component, and the forward movement component. It should be noted that the radial movement close to / away from the cutting main roller realized by the forward movement component can be a movement close to / away in the horizontal plane or along an inclined plane, a stepped surface, a curved surface, etc.

[0013] It can be understood that those skilled in the art can determine the structural forms of the transverse movement component, the lifting component, and the forward movement component according to the actual situation, as well as the specific manner in which the three are combined into the movement part. Exemplarily, the transverse movement component, the lifting component, and the forward movement component can be three independent movement mechanisms, or at least two of them can share a part of the structure. The movements realized among the transverse movement component, the lifting component, and the forward movement component can be completely independent of each other, or the movements of at least two of them can be related. Exemplarily, the forward movement component can be directly mounted on the transverse movement component or the lifting component, or can be indirectly mounted on the transverse movement component or the lifting component through an intermediate component.

[0014] It can be understood that those skilled in the art can determine the specific structural form of the detection component and the specific manner in which it is mounted to the movement part according to actual requirements, such as cameras, video cameras, image sensors, and components with the function of detecting image / video data, etc. In addition, the detection component can be directly mounted on the movement part or can be mounted on the movement part through an intermediate component.

[0015] For the above-mentioned slicing machine, in a possible implementation manner, the slicing machine includes a first operation door and a second operation door, and the detection component is arranged at a position corresponding to the first operation door and / or the second operation door.

[0016] With such a configuration, the configuration method of the detection component in the detection device is given. For example, the structural forms, installation positions of the detection components corresponding to the two operation doors, and the corresponding movement parts can be the same or different. Exemplarily, the detection component corresponding to the first operation door is located inside the cutting chamber (at different positions inside the cutting chamber in the cases of detection and non-detection), and the detection component corresponding to the second operation door is located outside the cutting chamber (entering the cutting chamber when detection is required).

[0017] For the above-mentioned slicing machine, in a possible implementation manner, the slicing machine includes a support part, and the movement part is arranged on the support part.

[0018] With such a configuration, a possible way for the movement part to form the detection device of the slicing machine is given. For example, the transverse movement component, the lifting component, and the forward movement component in the movement part can be directly or indirectly arranged on the support part. In addition, the support part can be a tabletop structure, a columnar structure, a plate-like structure, etc.

[0019] For the above-mentioned slicing machine, in a possible implementation manner, the support part includes a support base and a first support frame and a second support frame arranged on the support base, and the two movement parts corresponding to the two detection components are respectively arranged on the first support frame and the second support frame.

[0020] With such a configuration, a possible structural form of the support part is given.

[0021] For the above-mentioned slicing machine, in a possible implementation manner, the transverse movement assembly includes a transverse movement driving assembly and a transverse movement transmission assembly, and the transverse movement driving assembly drives the detection assembly to move along the axis direction of the cutting main roller by driving the transverse movement transmission assembly.

[0022] With such a configuration, a possible structural form of the transverse movement assembly is given.

[0023] For the above-mentioned slicing machine, in a possible implementation manner, the transverse movement assembly includes: a transverse movement guiding assembly, and the transverse movement driving assembly drives the detection assembly to move along the axis direction of the cutting main roller under the constraint of the transverse movement guiding assembly by driving the transverse movement transmission assembly; and / or a transverse movement protection assembly, which is used to prevent foreign objects from entering the interior of the transverse movement assembly.

[0024] With such a configuration, it is possible to ensure the movement reliability and cleanliness of the transverse movement assembly.

[0025] For the above-mentioned slicing machine, in a possible implementation manner, the slicing machine includes a support part, and the transverse movement assembly is arranged on the support part.

[0026] With such a configuration, a possible way for the transverse movement assembly to form a moving part is given.

[0027] For the above-mentioned slicing machine, in a possible implementation manner, the lifting assembly includes a lifting ram, a lifting driving assembly and a lifting transmission assembly, and the lifting driving assembly drives the detection assembly to move in the vertical direction by the lifting transmission assembly.

[0028] With such a configuration, a possible structural form of the lifting assembly is given.

[0029] For the above-mentioned slicing machine, in a possible implementation manner, the transverse movement assembly drives the detection assembly to move along the axis direction of the cutting main roller by means of the lifting driving assembly.

[0030] With such a configuration, a possible way for the lifting assembly and the transverse movement assembly to form a moving part is given. For example, the lifting assembly and the detection assembly can be directly connected or indirectly connected.

[0031] For the above-mentioned slicing machine, in a possible implementation manner, the lifting assembly includes: a lifting guiding assembly, and the lifting driving assembly drives the detection assembly to move in the vertical direction under the constraint of the lifting guiding assembly by driving the lifting transmission assembly; and / or a lifting protection assembly, which is used to prevent foreign objects from entering the interior of the lifting assembly.

[0032] With such a configuration, it is possible to ensure the movement reliability and cleanliness of the lifting component.

[0033] For the above slicing machine, in a possible implementation, the advancing component includes a mounting portion, an advancing drive component, and an advancing transmission component. The detection component is disposed on the mounting portion. The advancing drive component drives the advancing transmission component to drive the detection component to move in a direction close to / away from the cutting main roller along the radial direction of the cutting main roller.

[0034] With such a configuration, a possible structural form of the advancing component is given. For example, the mounting portion can be a plate-like structure, a block-like structure, or a mounting bracket, etc.

[0035] For the above slicing machine, in a possible implementation, the advancing drive component drives the advancing transmission component to drive the detection component to move in a direction close to / away from the cutting main roller along the radial direction of the cutting main roller in the horizontal plane.

[0036] With such a configuration, a specific movement direction of the advancing component is given.

[0037] For the above slicing machine, in a possible implementation, the advancing component includes: an advancing guiding component. The advancing drive component drives the advancing transmission component to drive the detection component to move in a direction close to / away from the cutting main roller along the radial direction of the cutting main roller under the constraint of the advancing guiding component; and / or an advancing protection component, which is used to prevent foreign objects from entering the interior of the advancing component.

[0038] With such a configuration, it is possible to ensure the movement reliability and cleanliness of the advancing component. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Hereinafter, taking a silicon rod to be sliced (hereinafter referred to as a silicon rod for short, and the product after processing is a silicon wafer) as an example of the workpiece to be processed, and referring to the drawings, the preferred embodiments of the present invention will be described. In the drawings:

[0040] Figure 1 The structural schematic diagram of a slicing machine (including a detection device) according to an embodiment of the present invention is shown;

[0041] Figure 2 The structural schematic diagram of the detection device of a slicing machine according to an embodiment of the present invention is shown;

[0042] Figure 3 The structural schematic diagram of the cross-moving component in the detection device of a slicing machine according to an embodiment of the present invention is shown;

[0043] Figure 4Schematic diagram of the lifting component in the detection device of a slicing machine showing an embodiment of the present utility model;

[0044] Figure 5 Schematic diagram of the structures of the lifting component and the advancing component in the detection device of a slicing machine showing an embodiment of the present utility model; and

[0045] Figure 6 Schematic diagram of the advancing component in the detection device of a slicing machine showing an embodiment of the present utility model.

[0046] Reference Signs:

[0047] 100. Slicing machine;

[0048] 11. Slicing machine main body; 12. Cutting chamber; 13. Cutting mechanism; 14. Operating table;

[0049] 2. Detection device;

[0050] 21. Detection component;

[0051] 22. Moving part;

[0052] 221. Transverse movement component;

[0053] 2211. Transverse movement drive component; 2212. Transverse movement transmission component; 2213. Transverse movement guiding component; 2214. Transverse movement protection component;

[0054] 222. Lifting component;

[0055] 2221. Lifting ram; 2222. Lifting drive component; 2223. Lifting transmission component; 2224. Lifting guiding component; 2225. Lifting protection component;

[0056] 223. Advancing component;

[0057] 2231. Installation base plate; 2232. Advancing drive component; 2233. Advancing transmission component; 2234. Advancing guiding component; 2235. Advancing protection component;

[0058] 224. Support frame. Detailed implementation manners

[0059] The preferred embodiments of the present utility model will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present utility model and are not intended to limit the protection scope of the present utility model. For example, although in this embodiment, the transverse movement assembly, the lifting assembly, and the forward movement assembly with basically the same drive transmission method are used as examples for introduction, obviously, those skilled in the art can adjust the drive transmission methods of the three assemblies according to actual needs. For example, the lifting assembly can adopt a combination of a motor and a rack and pinion mechanism, etc.

[0060] It should be noted that in the description of the present utility model, unless otherwise clearly specified and limited, the terms "installation", "setting", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can also be the communication inside two components. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0061] In addition, in order to better illustrate the present utility model, numerous specific details are given in the following specific embodiments. Those skilled in the art should understand that the present utility model can also be implemented without some specific details. In some instances, the principles of well-known slicing machines, etc. for those skilled in the art are not described in detail in order to highlight the gist of the present utility model.

[0062] Mainly referring to Figures 1 to 6 , Figure 1 shows a schematic structural diagram of a slicing machine (including a detection device) according to an embodiment of the present utility model, Figure 2 shows a schematic structural diagram of the detection device of a slicing machine according to an embodiment of the present utility model, Figure 3 shows a schematic structural diagram of the transverse movement assembly in the detection device of a slicing machine according to an embodiment of the present utility model, Figure 4 shows a schematic structural diagram of the lifting assembly in the detection device of a slicing machine according to an embodiment of the present utility model, Figure 5 shows a schematic structural diagram of the lifting assembly and the forward movement assembly in the detection device of a slicing machine according to an embodiment of the present utility model, Figure 6 shows a schematic structural diagram of the forward movement assembly in the detection device of a slicing machine according to an embodiment of the present utility model. As Figures 1 to 6As shown, in a possible implementation, the slicing machine 100 is mainly a device for cutting a silicon rod (usually called a square rod) with a grinding accuracy up to standard by using a wire mesh formed by a cutting wire (such as a diamond wire, etc.) to obtain silicon wafers. The slicing machine 100 mainly includes a slicing machine main body 11, and a cutting chamber 12 is formed in the slicing machine main body. A cutting mechanism 13 including a plurality of cutting main rollers around which a wire mesh is wound is arranged in the cutting chamber 12. Generally, the operation mode of the slicing operation is as follows: After sticking the rod (sticking the square rod to be sliced to a backing plate (such as the backing plate can be a plastic plate, a resin plate, a glass plate, etc.), and then sticking the backing plate to a crystal carrier. After that, the crystal carrier is fixed on the feed mechanism of the slicing machine 100. During the reciprocating movement of the wire mesh wound between the cutting main rollers of the cutting mechanism 13, the silicon rod is driven close to the wire mesh by the feed mechanism, and the wire mesh can slice the square rod by means of wire saw cutting. For example, during the slicing operation of the slicing machine on the silicon rod, the liquid supply system needs to continuously spray cutting fluid to the slicing operation area at the slicing station. The main functions of the cutting fluid are to cool, lubricate, and carry away silicon powder generated at the cut seam, etc.

[0063] For a slicing machine including semi-automatic or automatic operations with visual observation, it further includes a detection device 2 for detecting image data of the silicon rod. In a possible implementation, the detection device 2 mainly includes a detection component 21 and a moving part 22. Among them, the detection component is mainly used to collect image data at the image acquisition position (detection point) of the slicing machine, and the moving part 22 is mainly used to accurately move the detection component 21 to the detection point. The slicing machine usually includes a cutting chamber frame (belonging to the slicing machine main body) with a cutting chamber formed. An operation door is provided on each of the left and right sides of the cutting chamber frame. For example, in this example, a detection component (such as a camera, etc.) is arranged at the position of the cutting chamber corresponding to the two operation doors. In the case where relevant image data needs to be collected, the detection component (such as a camera, etc.) can reach the corresponding detection point in a movable manner by means of the corresponding moving part. In addition, an operation console 14 for performing operations such as relevant data display and parameter setting on-site is also arranged on the slicing machine main body 11.

[0064] Based on the detection result of the detection component, when it is determined that the silicon rod is completely cut through by the wire mesh, there is no need to arrange additional cutting operations for the silicon wafers, and subsequent retraction operations, etc. can be continued. However, when it is determined that the silicon rod is not completely cut through by the wire mesh, corresponding additional cutting operations need to be arranged.

[0065] When the feed mechanism reaches a specific position suitable for judging the problem of wire hanging during retraction, the detection component is triggered to collect corresponding image data. Based on the detection result of the detection component, if it is judged that there is no problem of wire hanging during retraction, the current retraction operation can be continued (for example, the retraction operation can be continued according to the original retraction process) and multiple detections for the problem of wire hanging during retraction are triggered during the retraction process. If it is judged that there is a problem of wire hanging during retraction, the working conditions of the slicing machine can be adjusted to be adapted to the current problem of wire hanging during retraction, such as including but not limited to opening the operation doors on both sides of the cutting chamber, adjusting the cutting fluid circulation state (adjusting the water outlet state of the spray pipe, closing the spray pipe above the cutting main roller), stopping the rotation of the cutting main roller, stopping the retraction of the feed mechanism, etc.

[0066] Based on the detection result of the detection component, if it is judged that there is no problem of wire jumping of the diamond wire, the subsequent slicing operation can be continued according to the current slicing program. If it is judged that there is a problem of wire jumping in one or more segments of the diamond wire, the device (corresponding to the position of the cutting chamber or the central control room) should send a reminder message in the form of an alarm to call the relevant operators for manual intervention to eliminate the current wire jumping problem in a timely manner. After the wire jumping problem is solved, the slicing machine can be restored to the normal automated operation state.

[0067] In this example, the two detection components are configured with two relatively independent moving parts. The structures and movement principles of the two moving parts corresponding to the two detection components are substantially the same. Exemplarily, the two moving parts are both arranged on the supporting part. For example, the supporting part includes a supporting base body and two supporting frames 224 arranged on the supporting base body. The two moving parts corresponding to the two detection components are respectively arranged on the corresponding supporting frames, and the structural forms of the two supporting frames are substantially the same. Obviously, this is only an exemplary description, and those skilled in the art can flexibly adjust the degree of association between the two moving parts according to the actual situation, such as including but not limited to sharing at least a part of the two moving parts, different structural forms / numbers of the mechanisms in the two moving parts, being physically independent of each other in the physical space, or being associated in other ways different from the supporting frames.

[0068] In a possible implementation manner, the moving part 22 mainly includes a transverse movement component 221, a lifting component 222, and an advancing component 223. Among them, the transverse movement component is mainly used to realize the movement of the detection component along the axis direction of the cutting main roller, the lifting component is mainly used to realize the movement of the detection component along the vertical direction, and the advancing component is mainly used to realize the movement of the detection component along the diamond wire direction in the horizontal plane.

[0069] Mainly refer to Figures 1 to 3, in a possible implementation, the transverse movement assembly 221 installed on the support frame 224 mainly includes a transverse movement drive assembly 2211 and a transverse movement transmission assembly 2212. The transverse movement drive assembly drives the transverse movement transmission assembly to drive the detection assembly 21 to move along the axis direction of the cutting main roller. As in this example, the detection assembly is arranged on the lifting assembly, and the transverse movement drive assembly drives the transverse movement transmission assembly to drive the lifting assembly and the detection assembly arranged thereon to move along the axis direction of the cutting main roller. In this way, during the detection process, the transverse movement assembly can be used to make the detection assembly move along the axis direction of the cutting main roller, so as to accurately deliver the detection assembly to the detection point where image data can be collected in the dimension along the axis direction of the cutting main roller. Among them, parameters such as the single movement distance and the total movement stroke of the transverse movement assembly can be determined according to the field of view width of the camera, the total length of the silicon rod, etc.

[0070] In this example, the transverse movement drive assembly uses a servo motor, and the transverse movement transmission assembly uses a belt drive transmission method. For example, the servo motor drives the synchronous pulley to drive the synchronous belt matched with the synchronous pulley, so as to drive the detection assembly fixed to the synchronous belt to realize its movement along the axis direction of the cutting main roller. Obviously, this is only an exemplary description. Those skilled in the art can determine the structural forms of the transverse movement drive assembly and the transverse movement transmission assembly and the specific manner of the drive transmission mechanism formed by the cooperation of the two according to actual needs. For example, the transverse movement drive assembly can be a power cylinder (including an electric cylinder, a hydraulic cylinder, a pneumatic cylinder, etc.) or other forms of motors, and the transverse movement transmission assembly can be a gear transmission mechanism, a lead screw nut mechanism, etc.

[0071] In a possible implementation, in order to ensure the stability of the transverse movement corresponding to the transverse movement assembly, the transverse movement assembly 221 further includes a transverse movement guiding assembly 2213 to ensure that the lifting assembly and the detection assembly arranged thereon can accurately move along the axis direction of the cutting main roller through the movement cooperation or restraint of the transverse movement guiding assembly.

[0072] In this example, the transverse movement guiding assembly adopts the form of a guide rail slider assembly. Specifically, the slider fixed to the lifting assembly can slide along the guide rail consistent with the axis direction of the cutting main roller. Obviously, this is only an exemplary description. Those skilled in the art can determine the structural form of the transverse movement guiding assembly according to actual needs. For example, the form of a guide shaft, a guide groove, etc. can also be adopted to realize the transverse movement guiding of the detection assembly along the axis direction of the cutting main roller.

[0073] In a possible implementation, the lateral translation component 221 further includes a lateral translation protection component 2214 to ensure the cleanliness of the lateral translation component, such as preventing cutting fluid, silicon powder, silicon sludge, etc. from entering the interior of the lateral translation component. Exemplarily, the lateral translation protection component includes a pair of guard plates arranged along the movement direction corresponding to the lateral translation component and a bellows guard provided between the pair of guard plates. Obviously, in addition to this, other forms such as only a bellows guard or a housing-like structure can also be used to achieve the corresponding protection function.

[0074] As described above, the lifting component can generate a movement along the axis direction of the cutting main roller by means of the lateral translation component. Mainly referring to Figure 1 , Figure 2 , Figure 4 and Figure 5 , in a possible implementation, the detection component 21 is arranged on the forward movement component 223, and the forward movement component and the detection component can generate a movement along the vertical direction by means of the lifting component 222. In this way, during the detection process, the detection component 21 can be made to generate a movement along the vertical direction by the lifting component 222, so as to accurately deliver the detection component to the detection position where image data can be collected in the vertical dimension. For example, the number and specific positions of the detection positions that the detection component needs to reach by means of the lifting component are determined according to different functional requirements.

[0075] In a possible implementation, the lifting component 222 mainly includes a lifting ram 2221, a lifting drive component 2222, and a lifting transmission component 2223. The slider of the lifting transmission component is fixedly connected to the lifting ram 2221, and the lifting drive component 2222 drives the detection component 21 and the forward movement component 223 to move along the vertical direction by driving the movement of the guide rail of the lifting transmission component 2223. Similar to the aforementioned lateral translation component 221, in this example, the lifting drive component uses a servo motor, and the lifting transmission component uses a belt drive method combined with a synchronous pulley and a synchronous belt. Similarly, obviously, this is only an exemplary description, and those skilled in the art can determine the structural forms of the lifting drive component and the lifting transmission component and the specific manner of the drive transmission mechanism formed by their cooperation according to actual needs. For example, similar to the aforementioned lateral translation component, the lifting drive component can be a power cylinder (including an electric cylinder, a hydraulic cylinder, a pneumatic cylinder, etc.) or other forms of motors, and the lifting transmission component can be a gear transmission mechanism, a lead screw nut mechanism, etc.

[0076] In a possible implementation, in order to ensure the stability of the movement corresponding to the lifting component, the lifting component 222 further includes a lifting guide component 2224 to ensure that the forward movement component and the detection component arranged thereon can accurately move along the vertical direction through the movement cooperation or constraint of the lifting guide component.

[0077] In this example, the lifting and guiding assembly is in the form of a guide rail slider assembly. Specifically, the guide rail fixedly connected to the forward movement assembly can move along the lifting ram fixedly connected to the slider. Obviously, this is only an exemplary description, and those skilled in the art can determine the structural form of the lifting and guiding assembly according to actual needs. For example, the lifting and guiding of the detection assembly in the vertical direction can also be achieved by using forms such as guide shafts and guide grooves.

[0078] In a possible implementation manner, the lifting assembly 222 further includes a lifting protection assembly 2225 to ensure the cleanliness of the lifting assembly, such as preventing cutting fluid, silicon powder, silicon sludge, etc. from entering the interior of the lifting assembly. Exemplarily, the lifting protection assembly includes a pair of guard plates arranged in the vertical direction and a bellows protective cover arranged between the pair of guard plates. Obviously, in addition to this, other forms such as only a bellows protective cover or a housing-like structure can also be used to achieve the corresponding protection function.

[0079] Mainly referring to Figure 1 、 Figure 2 、 Figure 5 and Figure 6 , in a possible implementation manner, the forward movement assembly 223 mainly includes a mounting base plate 2231 as the mounting part, a forward drive assembly 2232, and a forward transmission assembly 2233. The forward drive assembly drives the forward transmission assembly to move on the mounting base plate, thereby driving the detection assembly to move along the direction of the wire saw. Similar to the aforementioned transverse movement assembly and lifting assembly, in this example, the forward drive assembly uses a servo motor, and the forward transmission assembly uses a belt drive method combined with a synchronous pulley and a synchronous belt. Similarly, obviously, this is only an exemplary description, and those skilled in the art can determine the structural forms of the forward drive assembly and the forward transmission assembly and the specific manner of the drive transmission mechanism formed by their cooperation according to actual needs. For example, similar to the aforementioned transverse movement assembly and lifting assembly, the forward drive assembly can be a power cylinder (including an electric cylinder, a hydraulic cylinder, a pneumatic cylinder, etc.) or other forms of motors, etc., and the forward transmission assembly can be a gear transmission mechanism, a lead screw nut mechanism, etc.

[0080] In a possible implementation manner, in order to ensure the stability of the movement corresponding to the forward movement assembly, the forward movement assembly 223 further includes a forward guiding assembly 2234 to ensure that the detection assembly arranged thereon can accurately move along the direction of the wire saw through the movement cooperation or restraint of the forward guiding assembly, such as entering / exit the position corresponding to the operation door along the direction of the wire saw, or entering / exit the detection point corresponding to the operation door in the cutting chamber.

[0081] In this example, the forward guiding component is in the form of a guide rail slider component. Specifically, the slider fixedly connected to the detection component can slide along the guide rail in the direction of the wire saw on the mounting base plate. Obviously, this is only an exemplary description, and those skilled in the art can determine the structural form of the forward guiding component according to actual needs. For example, a guiding shaft, a guiding groove, etc. can also be used to realize the guiding of the detection component along the direction of the wire saw.

[0082] In a possible implementation manner, the forward component 223 further includes a forward protection component 2235 to ensure the cleanliness of the forward component, such as preventing cutting fluid, silicon powder, silicon sludge, etc. from entering the interior of the forward component. Exemplarily, the forward protection component includes a pair of guard plates arranged along the direction of the wire saw and a bellows guard arranged between the pair of guard plates. Obviously, in addition to this, other forms such as only a bellows guard or a housing-like structure can also be used to achieve the corresponding protection function.

[0083] In addition, in this example, the traversing component, the lifting component, and the forward component are all configured with a drag chain 3 that can tow and protect structures such as cables, oil pipes, and water pipes in the corresponding components. Those skilled in the art can determine the number of drag chains and the specific arrangement manner according to actual needs. For example, the drag chains corresponding to the three components can be appropriately integrated on the premise of permission.

[0084] It can be seen that in the detection device of the present utility model, through the cooperation of the lifting component, the traversing component, and the forward component, the detection component can be moved to the detection point corresponding to the visual detection requirement. On this basis, the detection component collects the image data of the detection point. Based on this, by processing the image and cooperating with the corresponding visual algorithm, it can be judged whether, as mentioned in the background art, the silicon rod is completely cut through by the wire mesh, whether there is a problem of wire hanging during retraction of the tool, whether there is a problem of wire jumping, etc.

[0085] So far, the technical solution of the present utility model has been described in combination with the preferred implementation manners shown in the drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present utility model is obviously not limited to these specific implementation manners. Without departing from the principle of the present utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of the present utility model.

Claims

1. A slicing machine, characterized in that, The slicing machine includes a detection device, and the detection device includes: At least one detection component; and A moving part; Wherein, the moving part includes: A transverse movement component that can drive the at least one detection component to move along the axis of the cutting main roller of the slicing machine; A lifting component that can drive the at least one detection component to move in the vertical direction; and A forward movement component that can drive the detection component to move in a direction close to / away from the cutting main roller along the radial direction of the cutting main roller.

2. The slicing machine according to claim 1, wherein, The slicing machine includes a first operation door and a second operation door, and the detection component is arranged at a position corresponding to the first operation door and / or the second operation door.

3. The slicing machine according to claim 2, characterized in that, The slicing machine includes a support part, and the moving part is arranged on the support part.

4. The slicing machine according to claim 3, characterized in that, The support part includes a support base body, a first support frame and a second support frame arranged on the support base body, and two moving parts corresponding to the two detection components are respectively arranged on the first support frame and the second support frame.

5. The slicer according to any one of claims 1 to 4, characterized in that, The transverse movement component includes a transverse movement drive component and a transverse movement transmission component, and the transverse movement drive component drives the detection component to move along the axis direction of the cutting main roller by driving the transverse movement transmission component.

6. The slicer according to claim 5, characterized in that, The transverse movement component includes: A transverse movement guiding component, and the transverse movement drive component drives the detection component to move along the axis direction of the cutting main roller under the constraint of the transverse movement guiding component by driving the transverse movement transmission component; and / or A transverse movement protection component for preventing foreign objects from entering the interior of the transverse movement component.

7. The slicing machine according to claim 5, wherein, The slicing machine includes a support part, and the transverse movement component is arranged on the support part.

8. The slicing machine according to claim 5, characterized in that, The lifting component includes a lifting ram, a lifting drive component and a lifting transmission component, and the lifting drive component drives the detection component to move in the vertical direction by driving the lifting transmission component.

9. The slicing machine according to claim 8, characterized in that, The transverse movement component drives the detection component to move along the axis direction of the cutting main roller by means of the lifting drive component.

10. The slicer according to claim 9, wherein, The lifting component includes: A lifting guiding component, and the lifting drive component drives the detection component to move in the vertical direction under the constraint of the lifting guiding component by driving the lifting transmission component; and / or A lifting protection component for preventing foreign objects from entering the interior of the lifting component.

11. The slicing machine according to claim 8, wherein, The forward movement component includes a mounting part, a forward movement drive component and a forward movement transmission component, the detection component is arranged on the mounting part, and the forward movement drive component drives the detection component to move in a direction close to / away from the cutting main roller along the radial direction of the cutting main roller by driving the forward movement transmission component.

12. The slicing machine according to claim 11, characterized in that, The forward movement drive component drives the detection component to move in a direction close to / away from the cutting main roller along the radial direction of the cutting main roller in the horizontal plane by driving the forward movement transmission component.

13. The slicing machine according to claim 11, characterized in that, The forward movement component includes: A forward movement guiding component, and the forward movement drive component drives the detection component to move in a direction close to / away from the cutting main roller along the radial direction of the cutting main roller under the constraint of the forward movement guiding component by driving the forward movement transmission component; and / or A forward movement protection component for preventing foreign objects from entering the interior of the forward movement component.

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