Slicing machine

Abstract

The utility model relates to the technical field of linear cutting, in particular to a slicing machine which comprises a detection device, and the detection device comprises at least one detection assembly and a control assembly. And a moving part. Wherein the moving part comprises a mechanical arm, and the detection assembly is carried on the mechanical arm; the mechanical arm is arranged on the carrying part, and the mechanical arm can move in at least one direction by means of the carrying part. With this configuration, it is possible to reliably reach the detection unit to the corresponding detection position by means of the motion synthesized by the motion of the robot arm itself and the motion achieved by means of the mounting portion.

Description

Technical Field

[0001] The utility model relates to the technical field of wire cutting, and particularly provides a slicing machine. Background Art

[0002] Taking a silicon rod made of hard and brittle material as an example, the devices for processing it usually include a cutting machine for cutting the rod material (round rod) according to the length specification, a squaring machine for cutting a round rod of a certain length into a square rod, a grinding machine for grinding the square rod (the grinding surface and chamfer) (such as usually including rough grinding and fine grinding), and a slicing machine for slicing the square rod with qualified precision after grinding. Among them, the working principle of the slicing machine is as follows: after bonding the square rod to the crystal carrier, the square rod is sliced by the wire mesh of the cutting machine in the way of wire sawing, and each complete slicing operation corresponding to the wire mesh is called a single-knife cutting operation of the slicing machine.

[0003] The slicing operation of the existing slicing machine is concentrated near the slicing station. Each single-knife cutting operation usually includes dozens of operation steps and is usually completed by one or two operators. Such a processing method often has the following problems: the operation of the slicing machine requires high professionalism and proficiency of the operator. The large number of steps makes it easy for the operator to make mistakes, and once the operator makes a mistake, it may lead to cutting abnormalities of different degrees. In view of this, after fully researching and analyzing the operation of the slicing machine, the inventor aims to propose a process flow for realizing automatic slicing operation and a corresponding structural framework.

[0004] Taking the current non-automatic operation as an example, in the process of slicing single-crystal silicon wafers, it will include but not be limited to such links:

[0005] (1) After each single-knife cutting is completed, it is necessary to manually judge whether the silicon rod is completely cut through by the wire mesh. As is usually the case, the conditions for manually judging that the silicon rod is completely cut through by the wire mesh are: the diamond wire cuts into the crystal carrier (resin plate) to a specific depth (such as usually 3-6 mm) and the whole diamond wire mesh remains flat.

[0006] (2) After each single-knife cutting is completed, it is necessary to lift (retract the knife) the processed silicon wafer relative to the cutting mechanism (mainly including the cutting main roller) that constructs the wire mesh. During the process of retracting the knife, it is necessary to manually judge whether the problem of wire hanging occurs during retraction. The specific manifestation of wire hanging during retraction is that one or more diamond wire segments in the wire mesh are pulled up by the silicon wafer during the lifting of the silicon rod. If not discovered and processed in time, it will cause the diamond wire to be broken, which will affect the quality of the silicon wafer and the production change efficiency of the slicing machine.

[0007] (3) During the slicing operation, each diamond wire segment of the wire mesh is wound in the wire grooves at corresponding positions on the main cutting roller, so as to complete the slicing operation of the silicon rod in the form of wire saw cutting along with the reciprocating movement of the wire mesh. However, during the slicing process, a wire jumping problem may occur between adjacent diamond wire segments in the wire mesh. Specifically, the diamond wire corresponding to one or several wire grooves jumps out of the groove and overlaps with the diamond wire in the adjacent wire groove. If the wire jumping problem is not handled in time, it will cause wire breakage, affecting the sustainability of the automated operation of the slicing machine and the quality of monocrystalline silicon wafers at the same time.

[0008] For example, during the process of automating the aforementioned slicing operation, visual inspection of elements such as the depth of the diamond wire entering the resin plate (which can be used to determine whether the silicon rod is completely cut through by the wire mesh), the height difference between diamond wires at different positions (which can be used to determine whether wire hanging occurs during tool retraction), and the distance between adjacent diamond wires (which can be used to determine whether wire jumping occurs and can also be used to determine whether wire hanging occurs during tool retraction) is required.

[0009] Accordingly, the present utility model requires a new technical solution to adaptively complete the visual inspection of the above elements. Summary of the Utility Model

[0010] The present utility model aims to solve at least part of the above technical problems. Specifically, it solves the technical problem of how to detect the image data of the cutting station when the existing slicing machine needs to determine whether the silicon rod is completely cut through by the wire mesh, whether wire hanging occurs during tool retraction, whether wire jumping of the diamond wire occurs, etc. during the automated operation.

[0011] In view of this, the present utility model provides a slicing machine, which includes a detection device. The detection device includes: at least one detection component; and a moving part. Wherein, the moving part includes: a robotic arm, the detection component is mounted on the robotic arm; and a mounting part, on which the robotic arm is arranged, and the robotic arm can achieve movement in at least one direction by means of the mounting part.

[0012] With such a structure, it is possible to ensure that the detection component can reliably reach the corresponding detection position through the movement of the robotic arm itself and the combined movement achieved by means of the mounting part. For example, the machine can be an ordinary robotic arm (relatively low cost, relatively few dimensions) or a joint robot with more abundant dimensions, etc.

[0013] It is understandable that those skilled in the art can determine the structural form of the robotic arm, the motion dimensions it can achieve, and the motion range in each dimension according to the actual situation. In addition, those skilled in the art can determine the structural form of the carrying part, the connection form between the robotic arm and it, the motion dimensions achieved by the carrying part with the help of the robotic arm, and the motion range in the corresponding dimensions according to the actual needs. For example, the carrying part can move relative to the robotic arm and / or the robotic arm can drive the carrying part to move, etc.

[0014] It is understandable that those skilled in the art can determine the specific structural form of the detection component and the specific way of mounting it to the moving part according to the actual needs. For example, it can be a camera, a webcam, an image sensor, and components with the function of detecting image / video data, etc. In addition, the detection component can be directly mounted on the moving part or can be mounted on the moving part through an intermediate component.

[0015] For the above slicing machine, in a possible implementation manner, the slicing machine includes a first operation door and a second operation door, and the slicing machine is configured with the detection component at a position corresponding to the first operation door and / or the second operation door.

[0016] With such a configuration, a possible way of configuring the detection component in the detection device is given. For example, the structural form, installation position of the detection components corresponding to the two operation doors, and the corresponding moving parts can be the same or different. Exemplarily, the detection component corresponding to the first operation door is located inside the cutting chamber (at different positions inside the cutting chamber in the cases of detection and non-detection), and the detection component corresponding to the second operation door is located outside the cutting chamber (entering the cutting chamber when detection is required).

[0017] For the above slicing machine, in a possible implementation manner, the carrying part includes a lifting component, and the lifting component can drive the at least one detection component to move in the vertical direction.

[0018] With such a configuration, a possible way for the carrying part to form the moving part is given.

[0019] It is understandable that those skilled in the art can determine the structural form of the lifting component and the specific way of combining it with the manipulator to form the motion corresponding to the moving part according to the actual situation. Exemplarily, the motions completed by the lifting component and the manipulator can be motions with different dimensions or motions with overlapping dimensions. Exemplarily, the lifting component can be directly provided with linear power by, for example, a power cylinder, a linear module, etc., or can be provided with linear power through the combination of, for example, a motor and a screw-nut mechanism, a gear-rack mechanism, etc.

[0020] For the above slicing machine, in a possible implementation, the lifting assembly includes a lifting ram, a lifting drive assembly, and a lifting transmission assembly, and the lifting drive assembly drives the detection assembly to move in the vertical direction by driving the lifting transmission assembly.

[0021] With such a configuration, a possible structural form of the lifting assembly is given.

[0022] For the above slicing machine, in a possible implementation, the lifting assembly includes: a lifting guide assembly, and the lifting drive assembly drives the detection assembly to move in the vertical direction under the constraint of the lifting guide assembly by driving the lifting transmission assembly; and / or a lifting protection assembly, which is used to prevent foreign objects from entering the interior of the lifting assembly.

[0023] With such a configuration, it is possible to ensure the movement reliability and cleanliness of the lifting assembly.

[0024] For the above slicing machine, in a possible implementation, the carrying part includes a supporting part, and the lifting assembly is arranged on the supporting part.

[0025] With such a configuration, a possible structural form of the carrying part is given.

[0026] It can be understood that those skilled in the art can determine the structural form, number, and specific form of the slicing machine formed by the supporting part according to actual needs. For example, the supporting part can be a support plate, a support frame, a support seat, etc., the supporting part and the detection assembly can be one-to-one or one-to-many, etc., and the supporting part can be arranged on the slicing machine or configured on the slicing machine in a non-connected manner.

[0027] For the above slicing machine, in a possible implementation, the supporting part includes a support frame, and the support frame is arranged on the slicing machine.

[0028] With such a configuration, a possible structural form of the supporting part is given.

[0029] For the above slicing machine, in a possible implementation, the support frame includes a horizontal part and a vertical part, and a strengthening structure is arranged between the horizontal part and the vertical part.

[0030] With such a configuration, a possible structural form of the support frame is given.

[0031] It can be understood that those skilled in the art can determine the structural forms of the horizontal / vertical parts and the strengthening structure and the specific form of the support frame formed thereby according to actual needs. For example, the structures of the horizontal part and the vertical part can be the same or different, and the strengthening structure can be a reinforcing plate, a reinforcing rib, etc.

[0032] For the above slicing machine, in a possible implementation manner, the strengthening structure is disposed between the horizontal portion and the vertical portion in a diagonal tension manner.

[0033] With such a configuration, it is possible to enhance the strength and stiffness of the support frame.

[0034] For the above slicing machine, in a possible implementation manner, the support portion includes a support base body, the lifting assembly is fixedly arranged or arranged in a movable manner on the support base body, and the support base body is disposed at a position of the slicing machine corresponding to the first operation door and / or the second operation door.

[0035] With such a configuration, a possible structural form of the support portion is given. For example, the support base body can be placed at the ground or the like at a position of the slicing machine corresponding to the first / second operation door in a non-connected manner. For example, the support base body can be a support seat, a support table or a support rod, etc.

[0036] For the above slicing machine, in a possible implementation manner, the support base body includes a truss, and the lifting assembly is arranged on the truss in a manner that can move along the truss.

[0037] With such a configuration, a possible structural form of the support base body is given. For example, the movable parts of the detection components corresponding to the two operation doors can be the same or different. For example, a truss can be configured for each of the two operation doors, or a truss can be configured for one of the detections and the other detection component can be arranged on the slicing machine through the support frame mentioned above. For example, the truss is arranged on the ground or fixed to the side of the slicing machine, etc.

[0038] For the above slicing machine, in a possible implementation manner, the carrying portion includes a movable transfer cart, and the robotic arm is arranged on the transfer cart.

[0039] With such a configuration, it is possible to drive the robotic arm to move through the movement of the transfer cart, so that the movement required for the detection component to reach the detection point is synthesized by the movement of the robotic arm itself and the movement of the transfer cart. For example, the transfer cart can be an AGV, an RGV, etc. that can travel in the ground area where the slicing machine is placed. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The following takes a silicon rod to be sliced (hereinafter simply referred to as a silicon rod, and the processed product is a silicon wafer) as the workpiece to be processed, and the moving part composed of "a support frame, a lifting assembly and a robotic arm" as an example, and describes the preferred implementation manner of the present invention with reference to the accompanying drawings. In the drawings:

[0041] Figure 1 The structural schematic diagram of a slicing machine (including a detection device) showing an embodiment of the present invention is shown;

[0042] Figure 2 Schematic perspective view of the detection device of a slicing machine showing an embodiment of the present utility model;

[0043] Figure 3 Front view schematic of the detection device of a slicing machine showing an embodiment of the present utility model; and

[0044] Figure 4 Schematic structural view of the lifting component in the detection device of a slicing machine showing an embodiment of the present utility model, with the lifting drive component removed in the figure to show the lifting transmission component (rack therein).

[0045] Reference Signs:

[0046] 100. Slicing machine;

[0047] 11. Slicing machine main body; 12. Cutting chamber; 13. Operating table;

[0048] 2. Detection device;

[0049] 21. Detection component;

[0050] 22. Moving part;

[0051] 221. Support frame;

[0052] 2211. Horizontal part; 2212. Vertical part; 2213. Reinforcement structure;

[0053] 222. Lifting component;

[0054] 2221. Lifting ram; 2222. Lifting drive component; 2223. Lifting transmission component; 2224. Lifting guiding component;

[0055] 223. Articulated robot. Detailed implementation manners

[0056] The preferred implementation manners of the present utility model will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these implementation manners are only used to explain the technical principle of the present utility model and are not intended to limit the protection scope of the present utility model. For example, although in this implementation manner, the moving part composed of a support frame, a lifting component and an articulated robot is taken as an example for introduction, obviously, those skilled in the art can adjust the composition form of the moving part according to actual needs.

[0057] It should be noted that in the description of the present utility model, unless otherwise clearly specified and defined, the terms "installation", "setting", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can also be the communication inside two components. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0058] In addition, for better illustration of the present utility model, numerous specific details are given in the following specific embodiments. Those skilled in the art should understand that the present utility model can also be implemented without certain specific details. In some instances, the principles of slicing machines and the like that are well-known to those skilled in the art are not described in detail to highlight the gist of the present utility model.

[0059] Mainly referring to Figures 1 to 4 , Figure 1 shows a schematic structural diagram of a slicing machine according to an embodiment of the present utility model, Figure 2 shows a three-dimensional schematic diagram of a detection device of a slicing machine according to an embodiment of the present utility model, Figure 3 shows a front view schematic diagram of a detection device of a slicing machine according to an embodiment of the present utility model, Figure 4 shows a schematic structural diagram of a lifting assembly in a detection device of a slicing machine according to an embodiment of the present utility model. As Figures 1 to 4 shown, in a possible implementation manner, the slicing machine 100 is mainly a device for cutting a silicon rod (usually called a square rod) with a grinding accuracy up to standard by using a wire mesh formed by a cutting wire to obtain silicon wafers. The slicing machine 100 mainly includes a slicing machine main body 11, and a cutting chamber 12 is formed in the slicing machine main body. A cutting mechanism including a plurality of cutting main rollers around which a wire mesh is wound is provided in the cutting chamber 12. Usually, the operation mode of the slicing operation is as follows: After completing the stick-on operation (sticking the square rod to be sliced onto a backing plate (such as the backing plate can be a plastic plate, a resin plate, a glass plate, etc.), and then bonding the backing plate to the crystal carrier. Then, the crystal carrier is fixed on the feed mechanism of the slicing machine 100. During the reciprocating movement of the wire mesh wound between the cutting main rollers of the cutting mechanism, the silicon rod is driven to approach the wire mesh by the feed mechanism, and the wire mesh can slice the square rod by means of wire saw cutting. For example, during the slicing operation of the slicing machine on the silicon rod, the liquid supply system needs to continuously spray cutting fluid to the slicing operation area at the slicing station. The main functions of the cutting fluid are to cool, lubricate, and carry away silicon powder generated at the cut seam.

[0060] For a slicing machine for semi-automated or automated operations including visual observation, it further includes a detection device for detecting image data of a silicon rod. In a possible implementation, the detection device 2 mainly includes a detection component 21 and a moving part 22. Among them, the detection component is mainly used to collect image data at the image acquisition position (detection point) of the slicing machine, and the moving part is mainly used to accurately transfer the detection component to the detection point. The slicing machine usually includes a cutting chamber frame (belonging to the slicing machine main body) with a cutting chamber formed therein. An operation door is provided on each of the left and right sides of the cutting chamber frame. For example, in this example, a detection component (such as a camera, etc.) is arranged at a position corresponding to the two operation doors in the cutting chamber. In the case where relevant image data needs to be collected, the detection component (such as a camera, etc.) can reach the corresponding detection point in a movable manner by means of the corresponding moving part. In addition, an operation console 13 for performing operations such as relevant data display and parameter setting on-site is also configured on the slicing machine main body 11.

[0061] Based on the detection result of the detection component, when it is determined that the silicon rod is completely cut through by the wire mesh, there is no need to arrange additional cutting operations for the silicon wafers, and subsequent operations such as retracting the knife can be continued. When it is determined that the silicon rod is not completely cut through by the wire mesh, corresponding additional cutting operations need to be arranged.

[0062] For example, when the feed mechanism reaches a specific position suitable for judging the problem of wire hanging during retraction, the detection component is triggered to collect corresponding image data. Based on the detection result of the detection component, when it is determined that there is no problem of wire hanging during retraction, the current retraction operation can be continued (such as continuing the retraction operation according to the original retraction process) and multiple detections for the problem of wire hanging during retraction are triggered during the retraction process. When it is determined that there is a problem of wire hanging during retraction, the working condition of the slicing machine can be adjusted to be adapted to the current problem of wire hanging during retraction, including but not limited to opening the operation doors on both sides of the cutting chamber, adjusting the cutting fluid circulation state (adjusting the water outlet state of the spray pipe, closing the spray pipe above the cutting main roller), stopping the rotation of the cutting main roller, and stopping the retraction of the feed mechanism.

[0063] Based on the detection result of the detection component, when it is determined that there is no problem of wire jumping of the diamond wire, the subsequent slicing operation can be continued according to the current slicing program. When it is determined that there is a problem of wire jumping in one or more segments of the diamond wire, the device (corresponding to the position of the cutting chamber or the central control room) should send reminder information in the form of an alarm to call relevant operators for manual intervention to eliminate the current wire jumping problem in a timely manner. After the wire jumping problem is solved, the slicing machine can be restored to the normal automated operation state.

[0064] In this example, the two detection components are configured with two relatively independent moving parts. The structures and movement principles of the two moving parts corresponding to the two detection components are substantially the same. Exemplarily, the two moving parts are both arranged on the supporting part. For example, the supporting part includes a support frame 221, and the support frame includes a horizontal part 2211 arranged at the top of the slicing machine and a vertical part 2212 located in the middle of the horizontal part 2211. An enhanced structure 2213 is arranged between the vertical part and the two ends of the horizontal part in a diagonal tension manner to ensure the strength of the support frame. The two moving parts corresponding to the two detection components are respectively arranged on the two ends of the horizontal part. Obviously, the specific structure of this supporting part is only an exemplary description, and those skilled in the art can flexibly adjust the degree of association between the two moving parts corresponding to the two detection components according to the actual situation. For example, a support frame can be configured for each of the two moving parts, etc.

[0065] In a possible implementation manner, in addition to the aforementioned support frame 221, the moving part 22 further includes a lifting assembly 222 arranged on the support frame and an articulated robot 223 arranged on the lifting assembly. Among them, the support frame is mainly used to carry the moving part onto the slicing machine, and the lifting assembly is mainly used to realize the vertical movement of the detection component. After the lifting assembly delivers the articulated robot carrying the detection component to an appropriate height, the detection component can be delivered to the detection point adapted to the detection requirement by means of the multi-dimensional movement of the articulated robot. Exemplarily, a flexible articulated robot is adopted for the articulated robot to improve the safety of operation.

[0066] For example, in this example, the support frame as the carrying part is arranged on the top of the slicing machine, and the lifting assembly is arranged thereon. Obviously, this is only an exemplary description, and those skilled in the art can flexibly adjust the structural form of the carrying part. For example, the support frame arranged on the slicing machine can be replaced with a truss arranged on the ground where the slicing machine is placed. In addition to realizing the vertical movement of the robotic arm, the lifting assembly can also drive the articulated robot to move horizontally.

[0067] In a possible implementation, the lifting assembly 222 mainly includes a lifting ram 2221, a lifting drive assembly 2222, and a lifting transmission assembly 2223. The slider of the lifting transmission assembly is fixedly connected to the lifting ram 2221. The lifting drive assembly 2222 drives the guide rail of the lifting transmission assembly 2223 to move, thereby driving the detection assembly 21 and the articulated robot 223 to move in the vertical direction. In this example, the lifting drive assembly uses a servo motor, and the lifting transmission assembly uses a rack and pinion transmission mechanism. Obviously, this is only an exemplary description. Those skilled in the art can determine the structural forms of the lifting drive assembly and the lifting transmission assembly, as well as the specific manner of the drive transmission mechanism formed by their cooperation according to actual needs. For example, the lifting drive assembly can be a power cylinder (including an electric cylinder, a hydraulic cylinder, a pneumatic cylinder, etc.) or other forms of motors, etc. The lifting transmission assembly can be a belt drive method combined with a synchronous pulley and a synchronous belt, a lead screw nut mechanism, etc.

[0068] In a possible implementation, to ensure the stability of the movement corresponding to the lifting assembly, the lifting assembly 222 further includes a lifting guiding assembly 2224 to ensure that the articulated robot and the detection assembly disposed thereon can accurately move in the vertical direction through the movement cooperation or restraint of the lifting guiding assembly.

[0069] In this example, the lifting guiding assembly adopts the form of a guide rail slider assembly. Specifically, the guide rail fixedly connected to the articulated robot can move along the lifting ram fixedly connected to the slider. Obviously, this is only an exemplary description. Those skilled in the art can determine the structural form of the lifting guiding assembly according to actual needs. For example, a guiding shaft, a guiding groove, etc. can also be used to achieve the lifting guidance of the detection assembly in the vertical direction.

[0070] In a possible implementation, the lifting assembly 222 further includes a lifting protection assembly (not shown) to ensure the cleanliness of the lifting assembly, such as preventing cutting fluid, silicon powder, silicon mud, etc. from entering the interior of the lifting assembly. Exemplarily, the lifting protection assembly includes a pair of guard plates arranged in the vertical direction and a bellows guard disposed between the pair of guard plates. Obviously, in addition to this, other forms such as only a bellows guard or a housing-like structure can also be used to achieve the corresponding protection function.

[0071] As an alternative implementation, the carrying part includes a truss configured in the ground area of the shelving slicing machine. By carrying the articulated robot and the lifting assembly in the moving part on the truss, a moving part adapted to the detection assembly of the present invention can be formed. For example, in this case, the lifting assembly can move horizontally along the truss. Obviously, the structural form of this lifting assembly can be the same as or different from the lifting assembly described above.

[0072] As another alternative embodiment, the carrying part includes an AGV (or RGV) configured in the ground area of the shelving slicer. By arranging the articulated robot in the moving part on the AGV, the moving part adapted to the detection component of the present utility model can be formed. If necessary, a lifting component capable of realizing lifting movement can also be installed on the AGV. Obviously, the structural form of this lifting component can be the same as or different from the lifting component described above.

[0073] It can be seen that in the detection device of the present utility model, through the cooperation of the lifting component, the articulated robot and the carrying part, the detection component can be transferred to the detection point corresponding to the visual detection requirement. On this basis, the detection component collects the image data of the detection point. Based on this, by processing the image and cooperating with the corresponding visual algorithm, it can be judged whether, as mentioned in the background art, the silicon rod is completely cut through by the wire mesh, whether there is wire hanging during retraction of the tool, whether there is a wire jumping problem, etc.

[0074] So far, the technical solution of the present utility model has been described in conjunction with the preferred embodiments shown in the drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present utility model is obviously not limited to these specific embodiments. Without departing from the principle of the present utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present utility model.

Claims

1. A slicing machine, characterized in that, The slicing machine includes a detection device, and the detection device includes: at least one detection component; and a moving part; wherein, the moving part includes: a robotic arm, on which the detection component is mounted; and a mounting part, on which the robotic arm is arranged, and the robotic arm can move in at least one direction by means of the mounting part.

2. The slicing machine according to claim 1, wherein, The slicing machine includes a first operation door and a second operation door, and the detection component is arranged at a position corresponding to the first operation door and / or the second operation door of the slicing machine.

3. The slicing machine according to claim 2, wherein The mounting part includes a lifting component, and the lifting component can drive the at least one detection component to move in the vertical direction.

4. The slicer according to claim 3, characterized in that, The lifting component includes a lifting ram, a lifting drive component and a lifting transmission component, and the lifting drive component drives the robotic arm carrying the detection component to move in the vertical direction by driving the lifting transmission component.

5. The slicing machine according to claim 4, characterized in that, The lifting component includes: a lifting guiding component, and the lifting drive component drives the detection component to move in the vertical direction under the constraint of the lifting guiding component by driving the lifting transmission component; and / or a lifting protection component, which is used to prevent foreign objects from entering the interior of the lifting component.

6. The slicer according to any one of claims 3 to 5, characterized in that The mounting part includes a supporting part, and the lifting component is arranged on the supporting part.

7. The slicing machine according to claim 6, wherein The supporting part includes a supporting frame, and the supporting frame is arranged on the slicing machine.

8. The slicing machine according to claim 7, characterized in that, The supporting frame includes a horizontal part and a vertical part, and a strengthening structure is arranged between the horizontal part and the vertical part.

9. The slicer according to claim 8, characterized in that, The strengthening structure is arranged between the horizontal part and the vertical part in a diagonal bracing manner.

10. The slicing machine according to claim 6, characterized in that, The supporting part includes a supporting base, and the lifting component is fixedly arranged or movably arranged on the supporting base, and the supporting base is arranged at a position of the slicing machine corresponding to the first operation door and / or the second operation door.

11. The slicing machine according to claim 10, characterized in that, The supporting base includes a truss, and the lifting component is arranged on the truss in a manner that can move along the truss.

12. The slicing machine according to claim 10, characterized in that, The mounting part includes a movable transfer cart, and the robotic arm is arranged on the transfer cart.

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