Cooling baffle and winding system

Abstract

The utility model relates to the field of coating, in particular to a cooling baffle which is arranged in a vacuum chamber and is close to the two ends of a coating roller, and a base material film is spread on the coating roller, so that gaps for heat conduction are formed between the cooling baffle and the two sides of the base material film; the cooling baffle comprises a panel, a side plate and a water hose, the side plate is coaxial with the coating roller, the upper edge of the side plate is an arc coincident with the edge of the end surface of the coating roller, and the panel is connected with the upper edge of the side plate to form an arc surface flush with the peripheral surface of the coating roller, so that the two sides of the substrate film are kept in a close-range adjacent state; a water hose through which a refrigerant passes is connected with the panel, and heat on the panel is taken away through the refrigerant; the cooling baffle is integrally detached in the vacuum chamber, so that the action of rebounding is avoided, and the problem of safety is solved; heat transfer is carried out on two sides of the substrate film in a non-contact mode, and the temperature of the two sides of the substrate film is reduced.

Description

Technical Field

[0001] The utility model relates to the field of coating, especially a cooling baffle and a winding system. Background Technique

[0002] Coating equipment, such as the magnetron sputtering machine with the application number 202410160901.0 and the name retrieved, while keeping the tension of the substrate constant, as much as possible eliminates the influence brought by the substrate fluctuation through the tension adjustment mechanism, avoids frequent adjustment of the power source for substrate conveying, makes the tension adjustment more convenient and stable, especially has a better control effect when there are large fluctuations in the instantaneous tension, and avoids the tension fluctuation when the substrate enters another coating mechanism due to the adjustment of the power of one coating mechanism.

[0003] However, it is also particularly important to ensure that the substrate will not be deformed and damaged by heat. Obviously, the retrieved prior art does not have technical means to solve the above problems.

[0004] The positions of heat deformation and heat damage are mainly reflected on both sides 31 of the substrate film. As Figure 8 shown, during the coating process, a large amount of heat is generated in the vacuum chamber by the sputtering process. At this time, both sides 31 of the substrate film will continuously heat up. Without corresponding cooling means, both sides 31 of the substrate film will be directly burned, resulting in the phenomenon of burned edges and even film breakage.

[0005] In order to provide corresponding cooling means, it is necessary to consider the specific coating method. For example, the width dimension of the substrate film is smaller than the axial length dimension of the coating roller. If the width of the substrate film is 1350 mm, then the length of the coating roller should be at least more than 1500 mm. Therefore, even if the width dimension range of the substrate film is relatively large, after covering the coating roller, both ends of the coating roller are still partially exposed outside the width of the substrate film. So, the specific selection of the cooling means cannot interfere with the rotation of the coating roller;

[0006] In addition, it is also necessary to consider specific operation requirements. For example, both sides 31 of the substrate film must be blocked and not allowed to be coated to prevent wire dropping during the coating process. The existing blocking cannot cool the substrate film. As the temperature rises, another heat source will be formed. At the same time, this blocked part will be deformed by heat. Therefore, it will not only cause burned edges to both sides 31 of the substrate film, but also cause damage to the substrate film due to deformation;

[0007] To sum up, it is necessary to design a cooling mechanism that can solve the above technical problems at the same time. While cooling the coating roller, additional cooling means are added to cool both sides 31 of the substrate film;

[0008] In the existing practice, a heat conducting plate is installed in the vacuum chamber to conduct heat away from the two sides 31 of the substrate film. The heat conducting plate is fixed in the vacuum chamber by bolts. The heat conducting plate has a flow channel for the refrigerant to pass through. The heat conducting plate is arranged near the two sides 31 of the substrate film to conduct heat away.

[0009] However, after using the heat transfer plate, it was found that the cooling effect was not obvious. The reason is that the heat transfer plate is not close enough to the two sides 31 of the substrate film (the distance between the heat transfer plate and the two sides of the substrate film is greater than 10 mm). The coating roller is a cylindrical structure. In the absence of corresponding technical complexity parameters, the use of mechanical equipment cannot allow the heat transfer plate to obtain a precise bending coefficient. In other words, the curvature of the inner arc surface of the heat transfer plate prepared in this case has not reached a level close to the arc surface of the coating roller. Therefore, the heat radiation in the vacuum chamber cannot be fully transferred to the heat transfer plate. As a result, the cooling effect is not obvious and does not meet the design and use requirements.

[0010] There is another problem when using this type of heat sink. When the heat conductive plate is fixed by bolts, the deformation of the heat conductive plate will be aggravated for a second time (the first deformation: the initial state of the heat conductive plate is horizontal, and after being bent by mechanical equipment, it obtains a corresponding degree of bending), which further constrains its bending degree. However, this does not change the degree of bending of the heat conductive plate in a free state. Therefore, during disassembly, the heat conductive plate will elastically reset due to the loosening of the bolts. This uncontrollable rebound action can easily hit the operator and cause harm to the operator. Utility Model Content

[0011] In order to solve the above problems, the utility model provides a cooling baffle and a winding system, which mainly solve the poor cooling effect and the safety problems existing during disassembly.

[0012] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a cooling baffle, characterized in that, in the vacuum chamber, it is close to the two ends of the coating roller, and the substrate film is spread on the coating roller, so that the cooling baffle and the two sides of the substrate film form a heat conduction gap; the cooling baffle includes a panel, a side panel, and a water belt. The side panel is coaxial with the coating roller, and its upper edge is an arc that coincides with the edge of the end face of the coating roller. After the upper edges of the panel and the side panels are connected, an arc surface flush with the outer peripheral surface of the coating roller is formed, thereby maintaining a close proximity to the two sides of the substrate film. The water belt for the passage of refrigerant is connected to the panel, and the heat on the panel is taken away by the refrigerant.

[0013] Furthermore, the side panels are connected to the front panel in such a manner that a semi-enclosed space is formed, and the water hose is located in the space and is arranged on the back side of the front panel.

[0014] Furthermore, the central axis of the panel coincides with the central axis of the coating roller.

[0015] Further, it further includes a connecting column located in the above space, with both ends thereof connected to the side plates respectively.

[0016] Further, the side plates and the main board are fixed by welding.

[0017] Further, the lower edge of the side plate is formed with a plurality of inner angles or is arc-shaped.

[0018] A winding system includes the above cooling baffle.

[0019] Further, the winding system further includes a coating roller, which includes an inner cylinder body and an outer cylinder body. A plurality of spiral outer rotation rings are formed on the outer peripheral surface of the inner cylinder body. After the outer cylinder body is sleeved on the inner cylinder body, the outer rotation rings and the inner surface of the outer cylinder body form a multi-head spiral water channel.

[0020] Advantages of the present utility model:

[0021] 1. The cooling baffle composed of a panel, side plates and a water belt is used to replace the heat dissipation plate in the prior art. The arc surface of the panel is maintained by the side plates. Therefore, the cooling baffle is removed in the vacuum chamber as a whole, so there will be no rebound action, thus solving the safety problem.

[0022] 2. For the side plate that coincides with the edge of the end face of the coating roller, after its upper edge is connected to the panel, it restricts the panel and makes the deformation of the panel flush with the outer peripheral surface of the coating roller. For the base material film covering the outer peripheral surface of the coating roller, this flush state brings the relationship that the two sides of the panel and the base material film are adjacent at a short distance. In addition, this short-distance adjacent setting method makes the distance between the two sides of the base material film and the panel remain in a state with a gap (the gap is that the distance between the two sides of the base material film and the panel is less than 3 mm), and heat transfer is carried out on the two sides of the base material film in a non-contact manner to reduce the temperature of the two sides of the base material film.

[0023] 3. The short-distance adjacency between the base material film and the panel will also make the side plates adjacent to the end faces of both ends of the coating roller at a short distance. This adjacency will form a shielding effect. Mainly, there is a large space between the two ends of the coating tube and the inside of the vacuum chamber, and the cooling baffle has corresponding dimensions in the above space. The surface of the panel blocks the movement of copper atoms towards the two ends of the coating roller. That is to say, the copper atoms are blocked by the panel and cannot enter the above space, and thus cannot be transferred to the end faces of the two ends of the coating roller, preventing the formation of a coating on the two ends of the coating roller. This purpose of preventing the formation of a coating can avoid damaging the surface quality of the coating roller. At the same time, it also avoids the situation of slag falling off at the two ends of the coating roller due to deposition during coating. During coating, it prevents the slag from being transferred to the base material film to avoid damaging the base material film.

[0024] 4. The close adjacent relationship between the panel and the base film prevents coating on both sides of the base film. While retaining the solution to the problem of wire breakage, the two sides of the base film are cooled, and it can also solve the problem in the prior art that the substrate film is damaged due to the heat deformation of the blocked part. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a perspective view of this embodiment.

[0026] Figure 2 is Figure 1 a perspective view of another view.

[0027] Figure 3 is a perspective view of the cooling baffle ( Figure 2 the arrow in is the moving direction of copper ions).

[0028] Figure 4 is Figure 3 an enlarged schematic view of part A of.

[0029] Figure 5 is Figure 3 a perspective view of another view.

[0030] Figure 6 is a cross-sectional view of the coating roller.

[0031] Figure 7 is Figure 6 an enlarged schematic view of part B of.

[0032] Figure 8 is a schematic view of the base film spread on the electroplating roller.

[0033] Figure 9 is a perspective view of the inner cylinder. DETAILED DESCRIPTION OF THE INVENTION

[0034] Figure 1-2 shows a winding system in magnetron sputtering.

[0035] The winding system includes two parts, a coating roller 1 and a cooling baffle 2. The cooling baffle 2 is distributed outside both ends of the coating roller 1. By being closely adjacent to both ends of the coating roller 1, a heat conduction gap is formed between the cooling baffle 2 and both sides of the base film 3, and the two sides 31 of the base film 3 are cooled in a non-contact manner.

[0036] As Figure 3-5As shown, the cooling baffle 2 includes a panel 21, side plates 22, and a water belt 23. The upper edge of the side plate 22 is arc-shaped, and the upper edge of the side plate 22 coincides with the peripheral edge of the end face of the coating tube 1. After the upper edge of the side plate 22 is connected to the side of the panel 21, the panel 21 obtains a corresponding arc shape. Thus, the surface of the panel 21 is flush with the outer peripheral surface of the coating roller 1.

[0037] After the side plate 22 is connected to the panel 21, a semi-enclosed space is formed. The panel 21 serves as one side of this space and is the inner surface. The water belt 23 is assembled into the panel 21. There is flowing coolant (in this embodiment, the coolant is refrigerant) in the water belt 23. For the base material film 3 laid on the coating roller 1, the heat of both sides 31 of it is transferred to the panel 21 in a non-contact form, and with the help of the coolant on the inner surface of the panel 21, the heat on the panel 21 is taken away.

[0038] It should be noted that the base material film 3 covers the coating roller 1, and the surface of the panel 21 is flush with the outer peripheral surface of the coating roller 1, which also makes the position of the panel 21 in a close relationship with both sides 31 of the base material film 3.

[0039] The cooling baffle 2 is fixed in the vacuum chamber through the side plate 22. It is not difficult to see that when disassembling the cooling baffle 2, the connection between the panel 21 and the side plate 22 can always maintain the arc shape of the panel 21, and there will be no spring-back action as recorded in the prior art. Therefore, the problem of danger during disassembly is solved.

[0040] The water belt 23 is assembled onto the panel 21 after the panel 21 is connected to the side plate 22. Therefore, there will be no problem of coolant leakage at the connection due to stress.

[0041] In some embodiments, connection columns 24 are also provided to maintain the stability of the side plate 22 on the panel 21. The connection columns 24 are located in the above-mentioned space, and both ends thereof are connected to the above-mentioned side plate 22.

[0042] Furthermore, the side plate 22 and the panel 21 are fixed by welding, so that the connection stability between the side plate 22 and the panel 21 can be further improved.

[0043] The lower edge of the side plate 22 is formed with a plurality of inner angles 22a or is arc-shaped. Preferably, the way of forming the inner angles 22a is more convenient for processing.

[0044] Such as Figure 6 、 7 、9 shown, inside the coating roller 1, a multi-head spiral water channel 100 is provided. This setting method mainly enables the water channel to be close to the outer peripheral surface of the coating roller 1 and flow quickly, which is beneficial to the rapid cooling of the base material film 3.

[0045] Specifically, the coating roller 1 includes an inner cylinder body 101 and an outer cylinder body. An outer spiral ring 102 is formed on the outer peripheral surface of the inner cylinder body. After the outer cylinder body is sleeved on the inner cylinder body 101, the outer spiral ring 102 and the inner surface of the outer cylinder body form a spiral water channel 100. At the same time, for every one revolution of this spiral water channel 100, the coolant in the spiral water channel 100 is advanced by a pitch. With the continuous rotation of the coating roller 1, the coolant can be transported from the water inlet to the water outlet. Therefore, the cyclic iteration of the coolant in the spiral water channel 100 also ensures that the surface temperature of the coating roller 1 is always in a cooled state.

[0046] Each spiral water channel 100 supplies the flow of one path of coolant, and the coolants between the multiple spiral water channels 100 are not connected.

[0047] The above embodiments are only descriptions of the preferred embodiments of the present invention, and do not limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations and improvements made by those of ordinary skill in the art to the technical solutions of the present invention shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A cooling baffle, characterized in that, In a vacuum chamber, adjacent to both ends of the coating roller at a short distance, the substrate film is spread on the coating roller, such that a heat conduction gap is formed between the cooling baffle and both sides of the substrate film; the cooling baffle includes a panel, side plates, and a water belt. The side plates coaxial with the coating roller have an upper edge that is an arc coinciding with the edge of the end face of the coating roller. After the panel is connected to the upper edge of the side plates, an arc surface flush with the outer peripheral surface of the coating roller is formed, so as to maintain a state of being adjacent to both sides of the substrate film at a short distance. The water belt for the refrigerant to pass through is connected to the panel, and the heat on the panel is taken away by the refrigerant.

2. The cooling baffle according to claim 1, characterized in that, The connection mode between the side plates and the panel forms a semi-enclosed space, and the water belt is located in the space and is arranged on the back surface of the panel.

3. A cooling baffle according to claim 1, characterized in that, The central axis on the panel coincides with the central axis of the coating roller.

4. The cooling baffle according to claim 2, characterized in that, It further includes connecting columns. The connecting columns are located in the above space, and both ends thereof are respectively connected to the side plates.

5. A cooling baffle according to claim 1, characterized in that, The side plates and the main board are fixed by welding.

6. A cooling baffle according to claim 1, characterized in that, The lower edge of the side plates is formed with multiple inner angles or is arc-shaped.

7. A winding system, characterized in that, It includes the cooling baffle according to any one of claims 1-6.

8. A winding system according to claim 7, characterized in that, The winding system further includes a coating roller. The coating roller includes an inner cylinder and an outer cylinder. Multiple spiral outer rotating rings are formed on the outer peripheral surface of the inner cylinder. After the outer cylinder is sleeved on the inner cylinder, the outer rotating rings and the inner surface of the outer cylinder form a multi-head spiral water channel.

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