Carbon fiber carrier plate

Abstract

The utility model relates to the field of vacuum coating carrier plates, in particular to a carbon fiber carrier plate which comprises an outer frame and a supporting plate, the supporting plate is mounted on the outer frame and used for storing silicon wafers, a supporting mechanism is arranged on the outer frame and comprises a supporting assembly and a reinforcing assembly, and the supporting assembly comprises a plurality of supporting rods. The supporting rods are arranged on the outer frame in the width direction of the outer frame, the reinforcing assembly comprises a plurality of reinforcing rods, one end of each reinforcing rod is detachably installed on the inner wall of one end of the outer frame, and the other end of each reinforcing rod is detachably installed on the inner wall of the other end of the outer frame in the direction perpendicular to the axis of the corresponding supporting rod. According to the carrier plate, the problem that the service life of the carrier plate is affected due to the fact that the carrier plate is prone to deformation in a traditional mode is solved, and the effect of prolonging the service life of the carrier plate can be achieved.

Description

Technical Field

[0001] This application relates to the field of vacuum coating carrier plates, and particularly to a carbon fiber carrier plate. Background Art

[0002] A chemical vapor deposition equipment is a device for preparing thin films by plasma enhanced chemical vapor deposition (PECVD) technology. By loading silicon wafers on a carrier plate and then transporting the carrier plate with the silicon wafers into the vacuum chamber of the coating equipment, the silicon wafers on the carrier plate can be coated.

[0003] Currently, traditional carrier plates generally consist of a support frame and a support plate. The support plate is installed on the support frame, and the support plate is used to store silicon wafers. There are also several cross beams and longitudinal beams arranged on the support frame, and the several cross beams and longitudinal beams form a grid shape. Then, by welding reinforcing ribs to the cross beams or longitudinal beams, the strength of the cross beams or longitudinal beams can be improved, thereby improving the support capacity of the support frame, and thus achieving the effect of improving the load-bearing capacity of the carrier plate.

[0004] However, for this method of welding reinforcing ribs to the cross beams or longitudinal beams of the support frame, although the strength of the cross beams or longitudinal beams is increased, it also leads to an increase in the weight of the cross beams or longitudinal beams themselves. When the silicon wafers carried on the support plate reach a certain weight or exceed the support capacity of the cross beams or longitudinal beams, it is easy for the cross beams or longitudinal beams to bend and deform, resulting in the deformation of the support frame and thus reducing the service life of the carrier plate. Utility Model Content

[0005] In order to improve the service life of the carrier plate, this application provides a carbon fiber carrier plate.

[0006] This application provides a carbon fiber carrier plate, adopting the following technical solution:

[0007] A carbon fiber carrier plate includes an outer frame and a support plate. The support plate is installed on the outer frame, and the support plate is used to store silicon wafers. A support mechanism is provided on the outer frame. The support mechanism includes a support component and a reinforcement component. The support component includes several support rods, and the several support rods are arranged on the outer frame along the width direction of the outer frame. The reinforcement component includes several reinforcement rods. One end of the reinforcement rod is detachably installed on the inner wall of one end of the outer frame, and the other end is detachably installed on the inner wall of the other end of the outer frame along the direction perpendicular to the axis of the support rod, and the reinforcement rod sequentially passes through the side walls of the several support rods.

[0008] By adopting the above technical solution, the support plate is installed on the outer frame, and the support plate is supported by the outer frame and the support rods arranged on the outer frame. At the same time, by arranging a detachable reinforcing rod on the outer frame, and straightening the reinforcing rod and passing it through several support rods, the support rods are supported by the tightened reinforcing rod, thereby improving the support performance of the support rods, and thus facilitating the improvement of the support performance of the carrier plate. At the same time, by detachably connecting the reinforcing rod to the outer frame, when the reinforcing rod is deformed after long-term use, by replacing the reinforcing rod, the support strength of the support rods is maintained again, thereby facilitating the improvement of the service life of the carrier plate.

[0009] In a specific feasible implementation, the reinforcing assembly further includes several pull rods, the pull rods are installed on the inner wall of the outer frame, and one end of the pull rod is also detachably connected to the end of the reinforcing rod, and both the pull rod and the reinforcing rod are made of carbon fiber material.

[0010] By adopting the above technical solution, by arranging a pull rod on the outer frame, the reinforcing rod is tightened by the pull rod, thereby facilitating the support of the support rods, and by detachably connecting the pull rod to the reinforcing rod, when the reinforcing rod is deformed, by replacing the reinforcing rod, the support ability of the outer frame and the support rods for the support plate is maintained.

[0011] In a specific feasible implementation, the outer frame and the support rods are made of carbon fiber material.

[0012] By adopting the above technical solution, by using carbon fiber material to make the outer frame and the support rods, while reducing the weight of the carrier plate itself, the strength of the carrier plate can also be increased, thereby improving the support performance of the carrier plate.

[0013] In a specific feasible implementation, a collision block is detachably installed on the side wall of the end of the outer frame through a quick-release mechanism, and one end of the collision block extends away from the outer frame.

[0014] By adopting the above technical solution, by arranging a collision block on the outer frame, when a collision occurs during the transportation of the carrier plate, the collision block contacts with external objects, thereby reducing the direct contact between the outer frame and the support plate with external objects, which may cause damage to the carrier plate and affect the service life of the carrier plate.

[0015] In a specific feasible implementation, a slider is installed on the side wall of the collision block, and a sliding groove for the slider to slide horizontally is opened on the side wall of the outer frame.

[0016] By adopting the above technical solution, by arranging a slider on the collision block, the collision block is slidably installed on the outer frame by relying on the slider, thereby facilitating the maintenance of the stability of the collision block installed on the outer frame.

[0017] In a specific feasible implementation scheme, the quick-release mechanism includes a locking component and an unlocking component, the locking component includes a locking block and a positioning block, the locking block is installed at one end of the anti-collision block, the positioning block is installed on the outer frame, a locking rod is installed on the bottom wall of the positioning block, and a locking groove for inserting the locking rod is opened on the side wall of the locking block, the unlocking component is installed on the outer frame, and the unlocking component is connected to the positioning block.

[0018] By adopting the above technical solution, when installing the anti-collision block, the locking block is positioned by engaging the positioning block with the card slot on the locking block, thereby achieving the anti-collision block being installed on the outer frame.

[0019] In a specific possible implementation scheme, the unlocking assembly includes an unlocking rod and an unlocking spring, wherein the unlocking rod is mounted on a positioning block, and the unlocking rod passes through a side wall of the outer frame and is slidably connected to the outer frame, the unlocking spring is also mounted on the outer frame, and one end of the unlocking spring is connected to the positioning block.

[0020] By adopting the above technical solution, when the anti-collision block needs to be removed, the unlocking rod is slid to drive the positioning block to move, so that the positioning block is separated from the locking block, thereby facilitating the removal of the anti-collision block from the outer frame.

[0021] In a specific possible implementation scheme, the quick release mechanism also includes a buffer assembly, the buffer assembly includes a buffer spring, a sliding sleeve is also installed on the outer frame at the unlocking assembly, the sliding sleeve is connected to the locking block, the sliding sleeve is also connected to the unlocking assembly, the buffer spring is installed on the outer frame, and the buffer spring is also connected to the sliding sleeve.

[0022] By adopting the above technical solution, when the anti-collision block collides with an external object, the anti-collision block slides along the side wall of the outer frame, so that the locking block contacts the sliding sleeve, causing the sliding sleeve to compress the buffer spring, thereby buffering the collision occurring during the transportation of the carrier, thereby facilitating the protection of the carrier.

[0023] In summary, the present application includes at least one of the following beneficial effects:

[0024] 1. The present application provides a reinforcing assembly, and detachably mounts the reinforcing rods in the reinforcing assembly on the outer frame, thereby utilizing the reinforcing rods to increase the supporting strength of the outer frame and the support rods. When the reinforcing rods are deformed after the carrier plate has been used for a long time, the reinforcing rods can be disassembled and replaced, thereby maintaining the continuous use of the carrier plate, thereby facilitating the improvement of the service life of the carrier plate.

[0025] 2. The present application provides an anti-collision block to protect the carrier when a collision occurs during the transportation of the carrier, thereby reducing damage to the carrier.

[0026] 3. By providing a quick-release mechanism in this application, it is convenient to replace the anti-collision block in a timely manner after wear, thus facilitating the maintenance of the protection ability of the anti-collision block for the carrier plate and improving the service life of the carrier plate. Description of the Drawings

[0027] Figure 1 It is a schematic structural diagram of the carbon fiber carrier plate of this application.

[0028] Figure 2 It is a schematic diagram when the outer frame and the support plate are separated in the embodiment of this application.

[0029] Figure 3 It is a schematic diagram when the anti-collision block and the outer frame are separated in the embodiment of this application.

[0030] Figure 4 It is a schematic structural diagram of the quick-release mechanism in the embodiment of this application.

[0031] Figure 5 It is an exploded view of the quick-release mechanism in the embodiment of this application.

[0032] Description of the Reference Numerals:

[0033] 1. Outer frame; 11. Chute; 12. Unlock groove; 2. Support plate; 3. Support mechanism; 31. Support component; 311. Support rod; 32. Reinforcement component; 321. Reinforcement rod; 322. Tie rod; 4. Anti-collision block; 41. Slide block; 5. Quick-release mechanism; 51. Locking component; 511. Locking block; 5111. Locking groove; 512. Positioning block; 5121. Locking rod; 513. Sleeve; 5131. Kidney-shaped groove; 52. Unlock component; 521. Unlock rod; 522. Unlock spring; 53. Buffer component; 531. Buffer spring. Detailed Description of the Embodiment

[0034] The following further elaborates on this application with reference to the drawings.

[0035] The embodiment of this application discloses a carbon fiber carrier plate. Referring to Figure 1 and Figure 2 , it includes an outer frame 1 and a support plate 2. The outer frame 1 is rectangular, and the support plate 2 is also rectangular. The support plate 2 is detachably installed on the top wall of the outer frame 1, and the top wall of the support plate 2 is used for storing silicon wafers. A support mechanism 3 is installed on the outer frame 1, and the support mechanism 3 is used to support the support plate 2.

[0036] Referring to Figure 1 and Figure 2, the support mechanism 3 includes a support component 31 and a reinforcement component 32. The support component 31 includes a number of support rods 311. A number of support rods 311 are fixedly installed on the outer frame 1, and a number of support rods 311 are arranged on the outer frame 1 along the width direction of the outer frame 1, and a number of support rods 311 are all used to support the support plate 2. The reinforcement component 32 includes a number of tension rods 322 and a number of reinforcement rods 321. A number of tension rods 322 are arranged along the length direction of the outer frame 1, and the axis of the tension rod 322 is perpendicular to the axis of the support rod 311. Tension rods 322 are provided at both ends in the width direction of the outer frame 1, and one end of each tension rod 322 is fixedly installed at one end in the width direction of the outer frame 1 through a bolt. The other end of the tension rod 322 extends in the axial direction of the width direction of the outer frame 1. A number of reinforcement rods 321 correspond to a number of tension rods 322 one by one. One end of the reinforcement rod 321 is detachably connected to one end of the tension rod 322 located at one end of the outer frame 1 through a bolt, and the other end of the reinforcement rod 321 is detachably connected to one end of the tension rod 322 located at the other end of the outer frame 1 through a bolt, and the reinforcement rod 321 sequentially passes through the side walls of a number of support rods 311. The outer frame 1, the support rods 311, the tension rods 322, and the reinforcement rods 321 are all made of carbon fiber material.

[0037] Referring to Figure 1 and Figure 2 , by installing the support plate 2 on the top wall of the outer frame 1, a number of support rods 311 are used to support the support plate 2. At the same time, the tension rod 322 provided on the outer frame 1 tightens the reinforcement rod 321, so that the reinforcement rod 321 supports the support rod 311, thereby facilitating the improvement of the bearing capacity of the support plate 2, and thus facilitating the reduction of the situation where the support plate 2 sags under the gravity of the silicon wafers when storing a large number of silicon wafers on the support plate 2.

[0038] Referring to Figure 2 and Figure 3 , at both ends in the traveling direction of the outer frame 1, that is, both ends in the width direction of the outer frame 1 are detachably installed with anti-collision blocks 4 through a quick-release mechanism 5. Four anti-collision blocks 4 are provided and are distributed at the four corners of the rectangular outer frame 1. The anti-collision blocks 4 are made of metal materials. The anti-collision blocks 4 are arranged along the width direction of the outer frame 1, and one end of the anti-collision block 4 extends away from the outer frame 1 along the width direction of the outer frame 1, and the end of the anti-collision block 4 is used to touch the adjacent carrier plate or coating equipment. A slider 41 is fixedly installed on the side wall of the anti-collision block 4 close to the outer frame 1. A sliding groove 11 for the slider 41 to slide is opened on the side wall of the outer frame 1 in the horizontal direction. The anti-collision block 4 is slidably connected to the outer frame 1 through the slider 41.

[0039] Referring to Figure 3 and Figure 4, the quick-release mechanism 5 includes a locking component 51 and an unlocking component 52. The locking component 51 includes a locking block 511 and a positioning block 512. The locking block 511 is fixedly installed at the end of the end where the anti-collision block 4 is connected to the outer frame 1 along the length direction of the anti-collision block 4. A plugging slot for the locking block 511 to be plugged into is provided on the side wall of the outer frame 1. A sliding sleeve 513 is slidably installed in the plugging slot, and the sliding route of the sliding sleeve 513 is the same as that of the locking block 511. Refer to Figure 4 and Figure 5 , the positioning block 512 is slidably installed in the sliding sleeve 513 along the direction perpendicular to the axis of the locking block 511. A locking rod 5121 is fixedly installed on the bottom wall of the positioning block 512, and a locking slot 5111 for the locking rod 5121 to be plugged into is provided on the top wall of the locking block 511. The unlocking component 52 includes an unlocking block and an unlocking spring 522. The unlocking rod 521 is fixedly installed on the side wall of the positioning block 512 along the horizontal direction, and one end of the unlocking rod 521 sequentially passes through the side wall of the sliding sleeve 513 and the plugging slot and extends to the outside of the outer frame 1. A waist-shaped slot 5131 for the unlocking rod 521 to slide is provided on the side wall of the sliding sleeve 513, and an unlocking slot 12 for the unlocking rod 521 to slide is provided on the side wall of the outer frame 1. The unlocking spring 522 is installed in the sliding sleeve 513, and one end of the unlocking spring 522 abuts against the inner top wall of the sliding sleeve 513, and the other end abuts against the top wall of the positioning block 512.

[0040] Refer to Figure 4 and Figure 5 , the quick-release mechanism 5 further includes a buffer component 53. The buffer component 53 includes a buffer spring 531. The buffer spring 531 is installed in the plugging slot, and the buffer spring 531 is located on the side of the sliding sleeve 513 away from the locking block 511. One end of the buffer spring 531 abuts against the side wall of the plugging slot, and the other end abuts against the side wall of the sliding sleeve 513.

[0041] Refer to Figure 4 and Figure 5, when installing the anti-collision block 4, push the unlocking lever 521 upward, thereby driving the positioning block 512 and the locking lever 5121 to move upward. Then, insert the locking block 511 into the sliding sleeve 513 in the insertion slot through the anti-collision block 4, so that the end of the locking block 511 moves to abut against the side wall of the sliding sleeve 513, making the locking groove 5111 on the locking block 511 align with the locking lever 5121 on the positioning block 512. Then release the unlocking lever 521, so that the positioning block 512 slides downward under the action of the unlocking spring 522, making the locking lever 5121 inserted into the locking groove 5111, thereby completing the locking of the locking block 511, and thus realizing the positioning of the anti-collision block 4 on the outer frame 1. When a collision occurs during the transportation of the carrier plate, the anti-collision block 4 on the outer frame 1 of the carrier plate first contacts the object being collided. Under the action of an external force, the anti-collision block 4 moves towards the sliding sleeve 513, and pushes the sliding sleeve 513 to move and compress the buffer spring 531 through the locking block 511. Under the action of the buffer spring 531, the impact generated by the collision of the carrier plate is buffered, so as to reduce the damage suffered by the anti-collision block 4 and extend the service life of the anti-collision block 4.

[0042] Referring to Figure 4 and Figure 5 , when the anti-collision block 4 is worn and needs to be replaced after the carrier plate has been used for a long time, push the unlocking lever 521 upward, so that the unlocking lever 521 drives the positioning block 512 to move upward and compress the unlocking spring 522, thereby separating the locking lever 5121 on the positioning block 512 from the locking groove 5111 on the locking block 511, thus unlocking the locking block 511, making it convenient to pull out the locking block 511 from the sliding sleeve 513, and thus facilitating the replacement of the anti-collision block 4.

[0043] The working principle of the embodiment of the present application is: by installing the support plate 2 on the outer frame 1, and supporting the carrier plate through the support rod 311 on the outer frame 1. At the same time when the support rod 311 supports the support plate 2, the supportability of the support rod 311 is further strengthened by the pull rod 322 and the reinforcing rod 321 provided on the outer frame 1, thereby reducing the situation that the support plate 2 sinks due to storing a large number of silicon wafers, thus affecting the coating effect of the silicon wafers.

[0044] And during the transportation of the carrier plate, collisions are likely to occur at both ends of the carrier plate in the traveling direction with the coating equipment or other running carrier plates. During the collision, the anti-collision block 4 on the outer frame 1 of the carrier plate contacts the object being collided, and the collision generated by the anti-collision block 4 is buffered through the buffer spring 531, thereby protecting the anti-collision block 4 and extending the service life of the anti-collision block 4.

[0045] When the anti-collision block 4 is worn after long-term use, the anti-collision block 4 needs to be replaced, so as to reduce the damage to the carbon fiber outer frame 1 directly when the subsequent carrier plate collides. When replacing the anti-collision block 4, by pushing the unlocking rod 521 upward, the unlocking rod 521 drives the positioning block 512 to move upward, so that the locking rod 5121 is separated from the locking block 511, thereby releasing the locking of the locking block 511, enabling the anti-collision block 4 to be removed from the outer frame 1. Then, the new anti-collision block 4 is slidably installed on the outer frame 1 through the slider 41, and the locking block 511 on the anti-collision block 4 is inserted into the sliding sleeve 513. Then, the unlocking rod 521 is released, and the positioning block 512 moves downward under the action of the unlocking spring 522, thereby driving the locking rod 5121 to be inserted into the locking groove 5111 on the locking block 511, thereby positioning the locking block 511 in the sliding sleeve 513, and thus realizing the installation of the new anti-collision block 4 on the outer frame 1.

[0046] The above is the preferred embodiment of the present application. It does not limit the protection scope of the present application accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A carbon fiber carrier plate, comprising an outer frame (1) and a support plate (2), the support plate (2) is installed on the outer frame (1), and the support plate (2) is used for storing silicon wafers, and is characterized in that: A support mechanism (3) is provided on the outer frame (1). The support mechanism (3) includes a support component (31) and a reinforcement component (32). The support component (31) includes a number of support rods (311). A number of the support rods (311) are arranged on the outer frame (1) along the width direction of the outer frame (1). The reinforcement component (32) includes a number of reinforcement rods (321). One end of the reinforcement rod (321) is detachably installed on the inner wall of one end of the outer frame (1), and the other end is detachably installed on the inner wall of the other end of the outer frame (1) along a direction perpendicular to the axis of the support rod (311), and the reinforcement rod (321) sequentially passes through the side walls of a number of support rods (311).

2. The carbon fiber carrier board according to claim 1, characterized in that: The reinforcement component (32) further includes a number of tie rods (322). The tie rods (322) are installed on the inner wall of the outer frame (1), and one end of the tie rod (322) is also detachably connected to the end of the reinforcement rod (321), and both the tie rod (322) and the reinforcement rod (321) are made of carbon fiber material.

3. The carbon fiber carrier board according to claim 1, characterized in that: The outer frame (1) and the support rods (311) are made of carbon fiber material.

4. A carbon fiber carrier plate according to claim 1, characterized in that: A collision prevention block (4) is detachably installed on the side wall of the end of the outer frame (1) through a quick-release mechanism (5). One end of the collision prevention block (4) extends away from the outer frame (1).

5. A carbon fiber carrier board according to claim 4, characterized in that: A slider (41) is installed on the side wall of the collision prevention block (4). A sliding groove (11) for the horizontal sliding of the slider (41) is provided on the side wall of the outer frame (1).

6. A carbon fiber carrier plate according to claim 4, characterized in that: The quick-release mechanism (5) includes a locking component (51) and an unlocking component (52). The locking component (51) includes a locking block (511) and a positioning block (512). The locking block (511) is installed at one end of the collision prevention block (4). The positioning block (512) is installed on the outer frame (1). A locking rod (5121) is installed on the bottom wall of the positioning block (512), and a locking groove (5111) for the insertion of the locking rod (5121) is provided on the side wall of the locking block (511). The unlocking component (52) is installed on the outer frame (1), and the unlocking component (52) is connected to the positioning block (512).

7. The carbon fiber carrier plate according to claim 6, wherein: The unlocking component (52) includes an unlocking rod (521) and an unlocking spring (522). The unlocking rod (521) is installed on the positioning block (512), and the unlocking rod (521) passes through the side wall of the outer frame (1) and is slidably connected to the outer frame (1). The unlocking spring (522) is also installed on the outer frame (1), and one end of the unlocking spring (522) is connected to the positioning block (512).

8. A carbon fiber carrier plate according to claim 6, characterized in that: The quick-release mechanism (5) further includes a buffer component (53). The buffer component (53) includes a buffer spring (531). A sliding sleeve (513) is also installed on the outer frame (1) at the position of the unlocking component (52). The sliding sleeve (513) is connected to the locking block (511), and the sliding sleeve (513) is also connected to the unlocking component (52). The buffer spring (531) is installed on the outer frame (1), and the buffer spring (531) is also connected to the sliding sleeve (513).

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