Feeding device and crystal growing device

Abstract

The embodiment of the utility model relates to the technical field of crystal growth, in particular to a feeding device and a crystal growth device. The embodiment of the utility model aims to solve the problem that the production cost is relatively high due to the fact that the feeding device is possibly damaged in the feeding process. According to the feeding device provided by the embodiment, the feeding part is provided with the feeding cavity and the feeding opening, the feeding cavity is used for containing the crystal powder, the feeding part is used for conveying the crystal powder in the feeding cavity to the crystal growing furnace, the feeding part is detachably connected with the feeding part, and if any one of the feeding part and the feeding part is damaged, the feeding opening is opened. The damaged one of the charging piece and the feeding piece can be independently replaced, the whole charging device does not need to be replaced, and the production cost is reduced.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of crystal growth, and in particular, to a feeding device and a crystal growth device. Background Art

[0002] Crystal growth is a preparation technology for semiconductor materials. Crystal growth technology includes the melt growth method. The melt growth method obtains a melt by heating crystal powder in a crystal growth furnace, and then generates crystals from the melt. Since the density of the melt is greater than that of the crystal powder, the volume of the crystal powder shrinks during the heating process. Therefore, it is necessary to add materials to the crystal growth furnace multiple times to improve the utilization rate of the equipment. However, due to the high temperature inside the crystal growth furnace, the feeding device may be damaged during the feeding process, resulting in high production costs. Summary of the Utility Model

[0003] The embodiments of the present application provide a feeding device and a crystal growth device, which can reduce production costs.

[0004] In a first aspect, the embodiments of the present application provide a feeding device, including: a feeding member and a feeding component. The feeding member is provided with a feeding cavity for containing crystal powder, and the feeding member is further provided with a feeding port communicating with the feeding cavity. The feeding component is provided with a feeding channel. The feeding component is detachably connected to the feeding member to communicate the feeding channel with the feeding port, so that the crystal powder in the feeding cavity can enter the feeding channel from the feeding port, and then be transported to the crystal growth furnace via the feeding channel.

[0005] With the above arrangement, if any one of the feeding member and the feeding component is damaged, the damaged one of the feeding member and the feeding component can be replaced separately, without replacing the entire feeding device, thereby reducing the production cost.

[0006] In some embodiments that may include the above embodiments, the melting point of the feeding member is lower than the melting point of the feeding component.

[0007] With the above arrangement, the feeding member can be made of a material with a melting point lower than that of the feeding component to reduce the production cost.

[0008] In some embodiments that may include the above embodiments, the feeding member is provided with a first insertion section, and an external thread is provided on the first insertion section. The feeding component has a second insertion section, and an internal thread is provided on the second insertion section. The internal thread is used to cooperate with the external thread to thread-connect the feeding member and the feeding component.

[0009] With the above arrangement, the feeding member and the feeding component are detachably connected.

[0010] In some embodiments that may include the above embodiments, the feeding member is provided with a first insertion section, the feeding port is located at the first insertion section, the feeding member is provided with a second insertion section, an interface is provided on the second insertion section, the interface communicates with the feeding channel, and the first insertion section and the second insertion section are detachably connected.

[0011] Through the above settings, the interface and the feeding port can be connected, and at the same time, the feeding member and the feeding member can be detachably connected.

[0012] In some embodiments that may include the above embodiments, the first insertion section is inserted into the second insertion section from the interface. Through the above settings, the insertion fit between the first insertion section and the second insertion section is realized.

[0013] In some embodiments that may include the above embodiments, the second insertion section is inserted into the first insertion section from the feeding port. Through the above settings, the insertion fit between the first insertion section and the second insertion section is realized.

[0014] In some embodiments that may include the above embodiments, the feeding member is provided with a guiding portion for guiding the first insertion section to be inserted into the second insertion section from the interface.

[0015] Through the above settings, it is convenient to connect the feeding member and the feeding member.

[0016] In some embodiments that may include the above embodiments, the guiding portion is provided at one end of the feeding member close to the feeding member, the guiding portion is arranged towards the feeding member, the guiding portion is provided with a guiding channel, the guiding channel communicates with the feeding channel in the second insertion section, the guiding channel includes a first end and a second end, the first end communicates with the interface to communicate the guiding channel and the feeding channel, the second end faces the feeding member, and the end face area of the second end is larger than that of the first end.

[0017] Through the above settings, the first insertion section is easily inserted into the guiding channel from the second end, so as to be easily inserted into the second insertion section.

[0018] In some embodiments that may include the above embodiments, the cross-sectional area of the guiding channel gradually decreases in the direction from the second end to the first end.

[0019] Through the above settings, the inner wall of the guiding channel is a continuous inclined surface, so as to facilitate guiding the first insertion section to be inserted into the second insertion section from the interface.

[0020] In some embodiments that may include the above embodiments, the feeding channel is arranged in a straight line direction. Through the above settings, the speed of conveying the crystal powder into the crystal growth furnace can be increased.

[0021] In some embodiments that may include the above embodiments, the feeding member includes a first feeding section and a second feeding section. The first feeding section is connected to the second feeding section. The feeding channel extends from the first feeding section to the second feeding section. The second feeding section is configured to extend into the crystal growth furnace to communicate the feeding channel with the interior of the crystal growth furnace, so as to convey the crystal powder into the crystal growth furnace. Both the first feeding section and the second feeding section extend in a straight line direction, and there is a preset included angle between the first feeding section and the second feeding section.

[0022] With the above arrangement, the speed of the crystal powder passing through the feeding channel can be reduced, thereby facilitating the control of the speed of conveying the crystal powder into the crystal growth furnace.

[0023] In some embodiments that may include the above embodiments, the feeding member is provided with an exhaust port. The exhaust port is in communication with the feeding channel, and the exhaust port is provided at the connection between the first feeding section and the second feeding section.

[0024] With the above arrangement, it is convenient for the gas in the crystal growth furnace to be discharged from the exhaust port, and thus it is convenient for the crystal powder in the feeding channel to be conveyed into the crystal growth furnace. At the same time, the exhaust port can reduce the gas entering the furnace cavity of the feeding member from the feeding channel, reduce the risk of damage to the feeding member due to high temperature, and reduce the production cost.

[0025] In an alternative embodiment, a gas valve is provided on the feeding member. The gas valve is in communication with the exhaust port. With the above arrangement, the opening and closing of the exhaust port can be controlled.

[0026] In some embodiments that may include the above embodiments, the feeding member is provided with an exhaust cavity. The exhaust cavity is in communication with the feeding channel, and the exhaust port is in communication with the exhaust cavity. The exhaust cavity is provided at the connection between the first feeding section and the second feeding section.

[0027] With the above arrangement, it is convenient for the gas in the furnace cavity to be discharged upward, reduce the amount of gas entering the first feeding section, and improve the exhaust effect.

[0028] In some embodiments that may include the above embodiments, the exhaust cavity is spherical.

[0029] With the above arrangement, it is convenient for the gas in the furnace cavity to be discharged from the exhaust port. At the same time, the amount of crystal powder discharged from the exhaust port along with the gas in the furnace cavity is reduced.

[0030] In some embodiments that may include the above embodiments, the feeding member includes a stirring paddle, and the stirring paddle is rotatably arranged in the feeding cavity.

[0031] With the above arrangement, the stirring paddle can stir the crystal powder in the feeding cavity to prevent the crystal powder from depositing or caking, and facilitate the complete discharge of the crystal powder in the feeding cavity.

[0032] In some embodiments that may include the above embodiments, the feeding member includes a gas supply device that communicates with the feeding chamber, and the gas supply device is configured to deliver gas to the feeding chamber.

[0033] With the above arrangement, crystal powder deposition or caking can be prevented, and it is convenient to completely discharge the crystal powder in the feeding chamber.

[0034] In some embodiments that may include the above embodiments, the feeding chamber is provided with a contraction section that is arranged in the vertical direction. The bottom end of the contraction section is close to the feeding port and communicates with the feeding port. The cross-sectional area of the top end of the contraction section is larger than that of the bottom end of the contraction section, and the cross-sectional area of the contraction section gradually decreases from the top end to the bottom end of the contraction section.

[0035] With the above arrangement, it is convenient to completely discharge the crystal powder in the feeding chamber.

[0036] In some embodiments that may include the above embodiments, the feeding member further includes a control assembly that is configured to control the speed at which the feeding member delivers crystal powder to the crystal growth furnace.

[0037] With the above arrangement, the speed at which the feeding member delivers crystal powder to the crystal growth furnace can be controlled.

[0038] In some embodiments that may include the above embodiments, the control assembly includes a control wheel, and a plurality of material pushing plates are equiangularly arranged on the control wheel. The control wheel is rotatably arranged in the feeding channel.

[0039] With the above arrangement, by changing the input current of the first motor, the speed at which the feeding member delivers crystal powder to the crystal growth furnace can be controlled.

[0040] In some embodiments that may include the above embodiments, the control assembly includes a baffle. The feeding member is provided with a socket that communicates with the feeding channel, and the baffle is inserted into the feeding channel from the socket.

[0041] With the above arrangement, by changing the depth at which the baffle is inserted into the feeding channel, the speed at which the feeding member delivers crystal powder to the crystal growth furnace can be controlled.

[0042] In some embodiments that may include the above embodiments, the feeding device further includes a first vibration device that is arranged on the feeding member, and the first vibration device is configured to vibrate the feeding member.

[0043] With the above arrangement, the crystal powder in the feeding chamber can be conveyed into the feeding channel.

[0044] In some embodiments that may include the above embodiments, the feeding device further includes a first ultrasonic device that has a spacing distance from the feeding member, and the first ultrasonic device is configured to emit ultrasonic waves to the feeding member.

[0045] With the above settings, the crystal powder in the feeding cavity can be vibrated, and then the crystal powder in the feeding cavity is conveyed into the feeding channel.

[0046] In some embodiments that may include the above embodiments, there are multiple first ultrasonic devices, and there is a spacing distance between any two of the multiple first ultrasonic devices.

[0047] With the above settings, the vibration effect can be enhanced.

[0048] In some embodiments that may include the above embodiments, the feeding device further includes a second ultrasonic device. There is a spacing distance between the second ultrasonic device and the feeding member, and the second ultrasonic device is used to emit ultrasonic waves to the feeding member.

[0049] With the above settings, the crystal powder in the feeding channel can be vibrated, and then the crystal powder in the feeding channel is conveyed into the crystal growth furnace.

[0050] In a second aspect, an embodiment of the present application provides a crystal growth device, including: a crystal growth furnace, a furnace cover, and the feeding device of any of the above embodiments. The crystal growth furnace encloses a furnace cavity, the furnace cover is arranged on the crystal growth furnace to close the furnace cavity, and a through hole is provided on the furnace cover, and the through hole communicates with the furnace cavity. In the feeding state, the feeding member passes through the through hole to extend into the furnace cavity.

[0051] With the above settings, the feeding device can convey the crystal powder into the crystal growth furnace, avoiding the problem of raw material pollution that may be caused during the process of making the crystal powder into crystal cake materials, and can continue to convey the crystal powder into the crystal growth furnace without waiting for the melt to cool after the crystal powder in the crystal growth furnace melts into a melt, shortening the feeding time, improving the production efficiency, and reducing the energy consumption. At the same time, the feeding device can convey the crystal powder into the crystal growth furnace multiple times, improving the equipment utilization rate. The feeding member and the feeding member are detachably connected, so that when the feeding device is damaged by high temperature, only the damaged one of the feeding member and the feeding member can be replaced separately, reducing the production cost.

[0052] In some embodiments that may include the above embodiments, the crystal growth device includes a lifting rod. In the growth state, the lifting rod passes through the through hole to extend into the furnace cavity, and then lifts the crystal melt in the furnace cavity.

[0053] With the above settings, both the feeding device and the lifting rod extend into the furnace cavity through the through hole, avoiding adding holes to the crystal growth furnace or the furnace cover, reducing the openings communicating with the furnace cavity, and making the temperature in the furnace cavity more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] Figure 1 It is a schematic structural diagram of the crystal growth device provided by the embodiment of the present application in the feeding state;

[0055] Figure 2 Schematic structural diagram of the crystal growth apparatus provided by the embodiment of the present application in the growth state;

[0056] Figure 3 Schematic structural diagram of the feeding device provided by the embodiment of the present application;

[0057] Figure 4 Schematic structural diagram of the feeding member in the feeding device provided by the embodiment of the present application;

[0058] Figure 5 Schematic structural diagram of the material feeding member in the feeding device provided by the embodiment of the present application;

[0059] Figure 6 Schematic structural diagram of the feeding device provided by the embodiment of the present application in the feeding state Figure 1 ;

[0060] Figure 7 Schematic structural diagram of the feeding device provided by the embodiment of the present application in the feeding state Figure 2 .

[0061] Description of reference numerals:

[0062] 10: Feeding device; 100: Feeding member; 110: Feeding cavity; 111: Converging section; 120: Feeding port; 130: Cavity port; 140: First insertion section; 200: Material feeding member; 210: Material feeding channel; 220: Interface; 230: Second insertion section; 240: Guide portion; 241: Guide channel; 250: First material feeding section; 260: Second material feeding section; 270: Exhaust port; 280: Exhaust cavity; 310: Baffle; 400: First ultrasonic device; 500: Second ultrasonic device; 600: First vibration device; 700: Second vibration device; 800: Support device; 20: Crystal growth furnace; 21: Furnace body; 22: Furnace cavity; 23: Crucible; 24: Thermal insulation layer; 30: Furnace cover; 31: Through hole; 40: Lifting rod; 50: Heating device; 60: Lifting device. Detailed embodiments

[0063] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0064] The embodiment of the present application provides a crystal growth apparatus. With reference to Figure 1, the crystal growth device includes a crystal growth furnace 20. The crystal growth furnace 20 includes a furnace body 21, and the furnace body 21 encloses a furnace cavity 22. The furnace body 21 is provided with a furnace opening, and the furnace opening communicates with the furnace cavity 22. The furnace opening is provided at the top end of the furnace body 21 and is arranged upward. The crystal growth furnace 20 further includes a crucible 23 for containing crystal powder materials. The crucible 23 is arranged at the bottom of the furnace cavity 22, and the crucible opening of the crucible 23 communicates with the furnace cavity 22, and the crucible opening is arranged facing the furnace opening. The crystal growth furnace 20 further includes a heat insulation layer 24, and the heat insulation layer 24 is arranged in the furnace cavity 22. The heat insulation layer 24 is sandwiched between the furnace body 21 and the crucible 23, and the heat insulation layer 24 is used to maintain the temperature in the furnace cavity 22. In some implementation manners, the heat insulation layer 24 can be an asbestos board or a ceramic fiber.

[0065] Please refer to Figure 1 , the crystal growth device according to the embodiment of the present application further includes a furnace cover 30. The furnace cover 30 is arranged at the top end of the crystal growth furnace 20, and the furnace cover 30 is used to cover the furnace opening to close the furnace cavity 22. A through hole 31 is provided on the furnace cover 30. The through hole 31 extends in the vertical direction and penetrates through the furnace cover 30 to communicate with the furnace cavity 22. One end of the through hole 31 close to the furnace cavity 22 is arranged facing the crucible opening.

[0066] Please refer to Figure 1 , the crystal growth device according to the embodiment of the present application further includes a heating device 50. The heating device 50 is used to heat the crystal powder materials in the crystal growth furnace 20 so that the crystal powder materials are melted to form a melt. In some implementation manners, the heating device 50 heats the crystal powder materials using the principle of resistance heating. Exemplarily, the heating device 50 includes a resistance wire, and the resistance wire is energized to heat the crystal powder materials. Or, in other implementation manners, the heating device 50 heats the crystal powder materials using the principle of intermediate frequency induction heating. Exemplarily, the heating device 50 includes a coil, and the coil is passed through an intermediate frequency current to generate a magnetic field, and then the crystal growth furnace 20 located in the magnetic field is heated.

[0067] In an optional embodiment, the heating device 50 is arranged in the crystal growth furnace 20 to directly heat the crystal powder materials. Or, in other optional embodiments, the heating device 50 is arranged outside the crystal growth furnace 20 to heat the crystal growth furnace 20, and then indirectly heat the crystal powder materials in the crystal growth furnace 20. In some implementation manners, the heating device 50 is arranged on the crystal growth furnace 20. Or, in other implementation manners, the heating device 50 is arranged at an interval from the crystal growth furnace 20. In the embodiment where the heating device 50 is arranged at an interval from the crystal growth furnace 20, the heating device 50 can be arranged to form a heating field, and the crystal growth furnace 20 is arranged in the heating field. Through the above arrangement, the crystal powder materials can be heated evenly.

[0068] Please refer to Figure 1, the crystal growth apparatus according to the embodiment of the present application further includes a feeding device 10, and the feeding device 10 is configured to convey crystal powder into the crystal growth furnace 20. The feeding device 10 includes a feeding member 200, and the feeding member 200 is provided with a feeding channel 210. In the feeding state, a part of the feeding member 200 penetrates through the through hole 31 to communicate the feeding channel 210 with the furnace chamber 22. The feeding device 10 further includes a feeding component 100, and the feeding component 100 is configured to convey crystal powder into the feeding channel 210. The feeding component 100 and the feeding member 200 are detachably connected. In the feeding state, the feeding component 100 is connected to the feeding member 200.

[0069] For the crystal growth apparatus provided by the embodiment of the present application, the furnace chamber 22 is configured to accommodate crystal powder, and the furnace lid 30 is configured to seal the furnace chamber 22. The feeding device 10 includes a feeding member 200, and the feeding member 200 is provided with a feeding channel 210. In the feeding state, a part of the feeding member 200 penetrates through the through hole 31 of the furnace lid 30 to convey crystal powder into the crystal growth furnace 20. Through the above arrangement, the feeding device 10 conveys crystal powder to the crystal growth furnace 20, avoiding the possible pollution problems during the process of processing crystal powder into crystal cake. The feeding device 10 conveys crystal powder into the crystal growth furnace 20 through the through hole 31, so that after the crystal powder in the crystal growth furnace 20 melts into a melt, crystal powder can be continuously conveyed into the crystal growth furnace 20 without waiting for the melt to cool, shortening the feeding time, improving the production efficiency, and reducing the energy consumption. At the same time, the feeding device 10 can convey crystal powder into the crystal growth furnace 20 multiple times, improving the equipment utilization rate. The feeding device 10 further includes a feeding component 100, and the feeding component 100 and the feeding member 200 are detachably connected, so that when the feeding device 10 is damaged by high temperature, only the damaged one of the feeding component 100 and the feeding member 200 needs to be replaced, without replacing the whole feeding device 10, reducing the production cost.

[0070] Please refer to Figure 2 , the crystal growth apparatus according to the embodiment of the present application further includes a pulling rod 40, and one end of the pulling rod 40 is provided with a seed crystal. The seed crystal is the seed for crystal growth, and the crystal growth apparatus is used to grow a crystal with the same crystal orientation as the seed crystal based on the seed crystal. In the growth state, the pulling rod 40 is arranged in the vertical direction, the pulling rod 40 penetrates through the through hole 31, and the end of the pulling rod 40 provided with the seed crystal is arranged in the crystal growth furnace 20. Exemplarily, in the growth state, the pulling rod 40 is driven to rotate, and at the same time, the pulling rod 40 is driven to move downward in the vertical direction so that the seed crystal contacts the melt, and then the pulling rod 40 is driven to move upward in the vertical direction to grow a crystal from the melt. Through the above arrangement, both the feeding device 10 and the pulling rod 40 extend into the furnace chamber 22 through the through hole 31, avoiding adding holes to the crystal growth furnace 20 or the furnace lid 30, reducing the openings communicating with the furnace chamber 22, and making the temperature in the furnace chamber 22 more uniform.

[0071] Please refer to Figure 2 , the crystal growth apparatus according to the embodiment of the present application further includes a lifting device 60. The lifting device 60 is connected to one end of the lifting rod 40 away from the crystal growth furnace 20. The lifting device 60 is configured to drive the lifting rod 40 to move in the vertical direction, so as to drive the seed crystal on the lifting rod 40 to move in the vertical direction. At the same time, the lifting device 60 is configured to drive the lifting rod 40 to rotate around its own axis, so as to drive the seed crystal on the lifting rod 40 to rotate.

[0072] In an alternative embodiment, the lifting device 60 includes a lifting device and a rotating device. The rotating device is connected to the lifting rod 40, and the rotating device is configured to drive the lifting rod 40 to rotate around its own axis. The rotating device is disposed on the lifting device, and the lifting device is configured to drive the rotating device to move in the vertical direction, so as to drive the lifting rod 40 to move in the vertical direction. In some implementation manners, the lifting device includes a ball screw or a cylinder; the rotating device includes a DC motor or an AC motor.

[0073] Exemplarily, the crystal growth steps may include:

[0074] "Seeding": The lifting device 60 drives the lifting rod 40 to rotate. At the same time, the lifting device 60 drives the lifting rod 40 to move downward in the vertical direction, so that the seed crystal contacts the melt.

[0075] "Necking": The lifting device 60 drives the seed crystal to rotate. At the same time, the lifting device 60 drives the seed crystal to move vertically upward, and the seed crystal drives the melt to move vertically upward to generate a crystal. At the same time, the diameter of the lifted crystal is made smaller than the diameter of the seed crystal.

[0076] "Shoulder broadening": The speed at which the lifting device 60 drives the seed crystal to move upward in the vertical direction is reduced, so that the diameter of the lifted crystal increases.

[0077] "Constant diameter": The speed at which the lifting device 60 drives the seed crystal to move upward in the vertical direction is increased, so that the crystal grows with a preset diameter.

[0078] "Pulling off": The diameter of the lifted crystal is gradually reduced until the crystal is separated from the melt.

[0079] "Cooling": Annealing treatment is performed on the crystal.

[0080] Please refer to Figure 3 , the feeding device 10 provided by the embodiment of the present application. The feeding device 10 can be used to convey the crystal powder required in the crystal growth process of the above embodiment. Of course, this device can also be used to convey the raw materials required in other process, and the present application does not limit this.

[0081] Please refer to Figure 3 and Figure 4, the feeding device 10 includes a feeding member 100. The feeding member 100 is provided with a feeding cavity 110, a cavity opening 130 and a feeding port 120. Both the cavity opening 130 and the feeding port 120 are in communication with the feeding cavity 110. The feeding cavity 110 is used for containing crystal powder. The cavity opening 130 is used for adding crystal powder into the feeding cavity 110, and the cavity opening 130 can be arranged vertically upward. The feeding port 120 is used for communicating with the furnace cavity 22 (such as Figure 1 shown) to convey the crystal powder in the feeding cavity 110 to the crystal growth furnace 20 (such as Figure 1 shown). The area of the cavity opening 130 can be larger than the area of the feeding port 120. In an optional embodiment, the feeding member 100 is provided with a cavity cover which is movably arranged on the feeding member 100 to close the cavity opening 130. In some implementation manners, the feeding cavity 110 can be spherical, cylindrical, ellipsoidal or cuboid. Exemplarily, the feeding cavity 110 is cylindrical with a diameter of 130 mm; or the feeding cavity 110 is spherical with a diameter of 130 mm; or the feeding cavity 110 is cube-shaped with a side length of 200 mm. In some implementation manners, the height of the feeding cavity 110 can be 30 mm - 1000 mm.

[0082] In an optional embodiment, the feeding member 100 includes a stirring paddle which is rotatably arranged in the feeding cavity 110. The stirring paddle is used for stirring the crystal powder in the feeding cavity 110 to prevent the crystal powder from depositing or caking, and facilitating the complete discharge of the crystal powder in the feeding cavity 110.

[0083] In an optional embodiment, the feeding member 100 includes a gas supply device which is in communication with the feeding cavity 110. The gas supply device is used for supplying gas to the feeding cavity 110 to prevent the crystal powder from depositing or caking, and facilitating the complete discharge of the crystal powder in the feeding cavity 110. In some implementation manners, the gas supply device includes a piston pump or a turbine pump.

[0084] Please refer to Figure 4, in the embodiment of the present application, the feeding cavity 110 includes a contraction section 111, and the contraction section 111 is located between the cavity opening 130 and the feeding port 120. The contraction section 111 extends in the vertical direction. The contraction section 111 includes a top end and a bottom end. The top end of the contraction section 111 is communicated with the cavity opening 130, and the top end of the contraction section 111 is arranged close to the cavity opening 130. The bottom end of the contraction section 111 is communicated with the feeding port 120, and the bottom end of the contraction section 111 is arranged close to the feeding port 120. The top end face of the contraction section 111 and the bottom end face of the contraction section 111 can both be parallel to the horizontal plane. The cross-sectional area of the top end of the contraction section 111 is larger than the cross-sectional area of the bottom end of the contraction section 111, and the cross-sectional area of the contraction section 111 gradually decreases from the top end of the contraction section 111 to the bottom end of the contraction section 111, so as to drain the crystal powder in the feeding cavity 110 completely.

[0085] Please refer to Figure 4 , in an alternative embodiment, the cross-sectional area of the top end of the contraction section 111 is equal to the area of the cavity opening 130, and the cross-sectional area of the feeding cavity 110 remains unchanged from the cavity opening 130 to the top end of the contraction section 111. In an alternative embodiment, the cross-section of the top end of the contraction section 111 can be circular, and the diameter of the cross-section of the top end of the contraction section 111 can be 50 mm - 1000 mm. In an alternative embodiment, the cross-section of the bottom end of the contraction section 111 can be circular, and the diameter of the cross-section of the bottom end of the contraction section 111 can be 10 mm - 100 mm.

[0086] The feeding device 10 of the embodiment of the present application further includes a feeding member 200. Please refer to Figure 4 and Figure 5 , the feeding member 200 is provided with a feeding channel 210. In the feeding state, the feeding channel 210 is communicated with the feeding port 120 and the furnace cavity 22 (as shown in Figure 1 ), so as to convey the crystal powder in the feeding cavity 110 to the inside of the crystal growth furnace 20 (as shown in Figure 1 ) through the feeding channel 210. In some implementation manners, the diameter of the feeding channel 210 can be 10 mm - 100 mm.

[0087] In an alternative embodiment, the feeding channel 210 is arranged in the vertical direction.

[0088] Please refer to Figure 5, in the embodiments of the present application, the feeding member 200 includes a first feeding section 250 and a second feeding section 260. The first feeding section 250 is connected to the second feeding section 260, and the feeding channel 210 is located within the first feeding section 250 and the second feeding section 260. Both the first feeding section 250 and the second feeding section 260 can be tubular. The diameter of the first feeding section 250 can be equal to the diameter of the second feeding section 260, or the diameter of the first feeding section 250 can be greater than the diameter of the second feeding section 260. The diameter of the feeding channel 210 within the first feeding section 250 can be equal to the diameter of the feeding channel 210 within the second feeding section 260, or the diameter of the feeding channel 210 within the first feeding section 250 can be greater than the diameter of the feeding channel 210 within the second feeding section 260. Exemplarily, the first feeding section 250 is tubular, the length of the first feeding section 250 is 50 mm, the diameter of the feeding channel 210 within the first feeding section 250 is 30 mm, the second feeding section 260 is tubular, the length of the second feeding section 260 is 240 mm, and the diameter of the second feeding section 260 is 25 mm; or the first feeding section 250 is tubular, the length of the first feeding section 250 is 100 mm, the diameter of the feeding channel 210 within the first feeding section 250 is 40 mm, the second feeding section 260 is tubular, the length of the second feeding section 260 is 300 mm, and the diameter of the second feeding section 260 is 30 mm.

[0089] Please refer to Figure 1 and Figure 3 , in the feeding state, the first feeding section 250 is close to the feeding member 100, and the first feeding section 250 is used to connect the feeding channel and the feeding port 120; the second feeding section 260 is close to the crystal growth furnace 20. The second feeding member 200 is used to extend into the crystal growth furnace 20 to connect the feeding channel and the furnace chamber 22. Both the first feeding section 250 and the second feeding section 260 extend in a linear direction. The second feeding section 260 can be arranged in the vertical direction. There is a preset angle between the first feeding section 250 and the second feeding section 260, so that the first feeding section 250 is arranged at an angle with the vertical direction in the feeding state, thereby facilitating the control of the speed of transporting crystal powder into the crystal growth furnace 20. In some implementation manners, the preset angle between the first feeding section 250 and the second feeding section 260 is greater than 90° and less than 180°. Exemplarily, the preset angle between the first feeding section 250 and the second feeding section 260 can be 110°, or 135°, or 160°. In the feeding state, the length of the feeding channel 210 extending into the crystal growth furnace 20 can be 50 mm - 1000 mm, and the length of the feeding channel 210 not extending into the crystal growth furnace 20 can be 10 mm - 1000 mm.

[0090] Please refer to Figure 6, in the embodiment of the present application, the feeding member 200 is provided with an exhaust port 270, and the exhaust port 270 is communicated with the feeding channel 210. The exhaust port 270 is used to discharge the gas in the furnace chamber 22, so that the crystal powder in the feeding channel 210 can be conveyed into the crystal growth furnace 20. At the same time, the exhaust port 270 can reduce the gas entering the furnace chamber 22 of the feeding member 100 from the feeding channel 210, reduce the risk of the feeding member 100 being damaged by high temperature, and reduce the production cost. In some implementation manners, the radius of the exhaust port 270 can be 1 mm - 10 mm. In an alternative embodiment, a gas valve is provided on the feeding member 200, and the gas valve is used to control the opening and closing of the exhaust port 270.

[0091] In an alternative embodiment, the exhaust port 270 is provided in the second feeding section 260. In the feeding state, the exhaust port 270 is located between the connection of the second feeding section 260 and the first feeding section 250 and the crystal growth furnace 20. In some implementation manners, the feeding member 200 is provided with an exhaust channel, one end of the exhaust channel is communicated with the exhaust port 270, the other end of the exhaust channel is communicated with the atmosphere, and the end of the exhaust channel communicated with the atmosphere is higher than the end of the exhaust channel communicated with the exhaust port 270. Or, in other implementation manners, the feeding device 10 further includes an exhaust pipe, one end of the exhaust pipe is communicated with the exhaust port 270, and the other end of the exhaust pipe is a free end.

[0092] Please refer to Figure 6 , in the embodiment of the present application, the exhaust port 270 is provided at the connection of the first feeding section 250 and the second feeding section 260, and the exhaust port 270 is arranged upward. It can be understood that the gas temperature in the furnace chamber 22 is relatively high and the density is relatively small. Through the above setting, it is convenient for the gas in the furnace chamber 22 to be discharged upward, reduce the amount of gas entering the first feeding section 250, and improve the exhaust effect.

[0093] Please refer to Figure 6 , in the embodiment of the present application, the feeding member 200 is provided with an exhaust cavity 280, and the exhaust cavity 280 communicates the exhaust port 270 and the feeding channel 210, so as to facilitate the gas in the furnace chamber 22 to be discharged from the exhaust port 270. At the same time, the exhaust cavity 280 separates the exhaust port 270 from the feeding channel 210 to reduce the amount of crystal powder discharged from the exhaust port 270 along with the gas in the furnace chamber 22.

[0094] Please refer to Figure 6, in the embodiment of the present application, the exhaust cavity 280 is spherical. The cross-sectional area of the connection end between the exhaust cavity 280 and the feeding channel 210 is larger than the area of the exhaust port 270. The cross-sectional area of the exhaust cavity 280 gradually decreases from the connection end between the exhaust cavity 280 and the feeding channel 210 towards the exhaust port 270. Through the above settings, it is convenient for the gas in the furnace cavity 22 to be discharged from the exhaust port 270. At the same time, the amount of crystal powder discharged from the exhaust port 270 along with the gas in the furnace cavity 22 is reduced. In the above embodiment, the radius of the exhaust cavity 280 can be 10 mm - 200 mm. In other alternative embodiments, the exhaust cavity 280 is cylindrical or conical.

[0095] Please refer to Figure 6 , in the embodiment of the present application, the feeding device 10 further includes a control component, and the control component is used to control the speed at which the feeding member 200 conveys crystal powder to the crystal growth furnace 20.

[0096] In an alternative implementation manner, the control component includes a control wheel. A plurality of feeding plates are provided on the control wheel at equal circumferential angles. The control wheel is rotatably arranged in the feeding channel 210. The control wheel rotates to drive the feeding plates to rotate, so as to stir the crystal powder and convey the crystal powder into the crystal growth furnace 20. The control component further includes a first motor, and the first motor is connected to the control wheel. The first motor is used to drive the control wheel to rotate. By changing the input current of the first motor, the speed at which the feeding member 200 conveys crystal powder to the crystal growth furnace 20 is controlled.

[0097] Please refer to Figure 6 , in the embodiment of the present application, the control component includes a baffle 310. The feeding member 200 is provided with a socket, and the socket is communicated with the feeding channel 210. The baffle 310 is inserted into the socket to block the feeding channel 210 and reduce the speed at which the feeding member 200 conveys crystal powder to the crystal growth furnace 20. By changing the depth at which the baffle 310 is inserted into the feeding channel 210, the speed at which the feeding member 200 conveys crystal powder to the crystal growth furnace 20 is controlled.

[0098] Please refer to Figure 6 , in an alternative embodiment, the feeding device 10 of the embodiment of the present application further includes a first vibration device 600. The first vibration device 600 is arranged on the feeding member 100, and the first vibration device 600 is used to vibrate the feeding member 100 to convey the crystal powder in the feeding cavity 110 into the feeding channel. In some implementation manners, the first vibration device 600 includes an electromagnetic vibrator or a pneumatic vibrator. In an alternative embodiment, there are multiple first vibration devices 600, and the multiple first vibration devices 600 are arranged at intervals on the feeding member 100.

[0099] Please refer to Figure 6, in an alternative embodiment, the feeding device 10 of the embodiments of the present application further includes a second vibration device 700. The second vibration device 700 is provided on the feeding member 200, and the second vibration device 700 is configured to vibrate the feeding member 200 to convey the crystal powder in the feeding channel 210 to the crystal growth furnace 20. The working principle of the second vibration device 700 is the same as that of the first vibration device 600. In an alternative embodiment, there are a plurality of second vibration devices 700, and the plurality of second vibration devices 700 are arranged at intervals on the feeding member 100.

[0100] Please refer to Figure 7 , the feeding device 10 of the embodiments of the present application further includes a first ultrasonic device 400. The first ultrasonic device 400 is arranged at an interval from the feeding member 100. The first ultrasonic device 400 is configured to emit ultrasonic waves to the feeding member 100 to vibrate the crystal powder in the feeding cavity 110, and then convey the crystal powder in the feeding cavity 110 to the feeding channel. In some implementation manners, the first ultrasonic device 400 includes an ultrasonic vibrating plate, an ultrasonic transducer, and an ultrasonic power supply. The ultrasonic power supply is electrically connected to the ultrasonic transducer, and the ultrasonic power supply is configured to output high-frequency alternating current to the ultrasonic transducer. The ultrasonic transducer is arranged at an interval from the ultrasonic vibrating plate. The ultrasonic transducer is configured to convert the input high-frequency alternating current into ultrasonic waves and output them to the ultrasonic vibrating plate. The ultrasonic vibrating plate is arranged at an interval from the feeding member 100. The ultrasonic vibrating plate is configured to vibrate at a high frequency under the action of ultrasonic waves and transmit the ultrasonic waves to the feeding member 100 to vibrate the crystal powder in the feeding cavity 110.

[0101] Please refer to Figure 7 , in an alternative embodiment, there are a plurality of first ultrasonic devices 400, and the plurality of first ultrasonic devices 400 are arranged at intervals. In some implementation manners, the plurality of first ultrasonic devices 400 can be arranged in a dot matrix.

[0102] Please refer to Figure 7 , the feeding device 10 of the embodiments of the present application further includes a second ultrasonic device 500. The second ultrasonic device 500 is arranged at an interval from the feeding member 200. The second ultrasonic device 500 is configured to emit ultrasonic waves to the feeding member 200 to vibrate the crystal powder in the feeding channel 210, and then convey the crystal powder in the feeding channel 210 to the crystal growth furnace 20. The working principle of the second ultrasonic device 500 is the same as that of the first ultrasonic device 400. In an alternative embodiment, there are a plurality of second ultrasonic devices 500, and the plurality of second ultrasonic devices 500 are arranged at intervals. In some implementation manners, the plurality of second ultrasonic devices 500 can be arranged in a dot matrix.

[0103] Please refer to Figure 7, in an alternative embodiment, the feeding device 10 of the embodiments of the present application further includes a supporting device 800, and the supporting device 800 is connected to the feeding member 100. In the feeding state, the supporting device 800 abuts against the crystal growth furnace 20 to support the feeding device 10 on the crystal growth furnace 20. In some implementation manners, there are multiple supporting devices 800.

[0104] Please refer to Figure 3 and Figure 4 , in the embodiments of the present application, the feeding member 100 is detachably connected to the feeding component 200 to communicate the feeding port 120 and the feeding channel 210.

[0105] For the feeding device 10 provided by the embodiments of the present application, the feeding member 100 is provided with a feeding cavity 110 for containing crystal powder, and the feeding component 200 is used to convey the crystal powder in the feeding cavity 110 to the crystal growth furnace 20. The feeding member 100 is detachably connected to the feeding component 200. If any one of the feeding member 100 and the feeding component 200 is damaged, the damaged one of the feeding member 100 and the feeding component 200 can be replaced separately, without replacing the entire feeding device 10, reducing the production cost.

[0106] Exemplarily, please refer to Figure 1 , when conveying crystal powder to the crystal growth furnace 20: install the feeding component 200 on the crystal growth furnace 20, and then install the feeding member 100 on the feeding component 200, and add crystal powder into the feeding cavity 110 to convey the crystal powder to the crystal growth furnace 20. After the conveyance of crystal powder to the crystal growth furnace 20 is completed: remove the feeding member 100 from the feeding component 200, and then remove the feeding component 200 from the crystal growth furnace 20.

[0107] Please refer to Figure 1 , in an alternative embodiment, the melting point of the feeding member 100 is lower than that of the feeding component 200. In some implementation manners, the material for making the feeding member 100 can be selected from any one of resin, polytetrafluoroethylene, polyvinylidene fluoride, and polyvinyl chloride. In some implementation manners, the material for making the feeding component 200 can be selected from any one of platinum, iridium, tungsten, molybdenum, and graphite. It can be understood that in the feeding state, the feeding component 200 is close to the crystal growth furnace 20, and the feeding component 200 can be made of high melting point materials such as platinum, iridium, tungsten, molybdenum, and graphite, with a relatively high production cost. The feeding member 100 is far from the crystal growth furnace 20, and the probability of the feeding member 100 being damaged by high temperature is relatively low. The feeding member 100 can be made of materials with a melting point lower than that of the feeding component 200, such as resin, polytetrafluoroethylene, polyvinylidene fluoride, and polyvinyl chloride, to reduce the production cost. Exemplarily, the feeding member 100 is made of resin and the feeding component 200 is made of platinum; or the feeding member 100 is made of polytetrafluoroethylene and the feeding component 200 is made of iridium.

[0108] Please refer to Figure 3 In an alternative embodiment, the feeding member 100 is provided with a first insertion section 140, and an external thread is provided on the first insertion section 140. The feeding member 200 has a second insertion section 230, and an internal thread is provided on the second insertion section 230. The internal thread is used to cooperate with the external thread to thread-connect the feeding member 100 and the feeding member 200.

[0109] Please refer to Figure 3 In an alternative embodiment, the feeding device 10 further includes a connecting pipe. One end of the connecting pipe is inserted into the feeding member 100, and the other end of the connecting pipe is inserted into the feeding member 200 to detachably connect the feeding member 100 and the feeding member 200. Through the above arrangement, the feeding member 100 is separated from the crystal growth furnace 20, reducing the probability of the feeding member 100 being damaged by high temperature. In some implementation manners, the connecting pipe can be a flexible pipe, which is convenient for connecting the feeding member 100 and the feeding member 200, and at the same time, is convenient for arranging the feeding member 100 at different positions.

[0110] Please refer to Figure 3 、 Figure 4 and Figure 5 In the embodiment of the present application, the feeding member 100 is provided with a first insertion section 140, the feeding port 120 is arranged on the first insertion section 140, and the feeding port 120 is located at the bottom end of the first insertion section 140. The first insertion section 140 is arranged at the bottom end of the feeding cavity 110. In an embodiment where the feeding cavity 110 includes a contraction section 111, the first insertion section 140 is arranged at the bottom end of the contraction section 111. The feeding member 200 has a second insertion section 230, and an interface 220 is provided on the second insertion section 230. The interface 220 is arranged at the top end of the second insertion section 230, and the interface 220 communicates with the feeding channel 210. The first insertion section 140 is inserted into the second insertion section 230 to detachably connect the feeding member 100 and the feeding member 200, and at the same time communicate the feeding port 120 and the interface 220. Both the first insertion section 140 and the second insertion section 230 can be tubular.

[0111] In some implementations, the length of the first insertion section 140 can be 50 mm - 1000 mm. Both the first insertion section 140 and the second insertion section 230 can be tubular. The diameter of the first insertion section 140 can be 10 mm - 100 mm. Exemplarily, the first insertion section 140 is tubular, the diameter of the first insertion section 140 is 28 mm, the length of the first insertion section 140 is 100 mm, the second insertion section 230 is tubular, the length of the second insertion section 230 is 50 mm, the interface 220 is circular, and the diameter of the interface 220 is 30 mm; or, the first insertion section 140 is tubular, the diameter of the first insertion section 140 is 38 mm, the length of the first insertion section 140 is 100 mm, the second insertion section 230 is tubular, the length of the second insertion section 230 is 100 mm, the interface 220 is circular, and the diameter of the interface 220 is 40 mm.

[0112] Please refer to Figure 5 , in the embodiment where the feeding member 200 includes a first feeding section 250 and a second feeding section 260, the second insertion section 230 is connected to the first feeding section 250, and the second insertion section 230 and the first feeding section 250 can extend along the same straight line. In an alternative embodiment, a preset angle is provided between the second insertion section 230 and the first feeding section 250. In other alternative embodiments, the first feeding section 250 includes the second insertion section 230.

[0113] In an alternative embodiment, at least a part of the second insertion section 230 is inserted into the feeding port 120, and the outer wall of the second insertion section 230 is slidably connected to the inner wall of the first insertion section 140.

[0114] Please refer to Figure 3 , in the embodiment of the present application, at least a part of the first insertion section 140 is inserted into the interface 220 (as Figure 5 shown), and the outer wall of the first insertion section 140 is slidably connected to the inner wall of the feeding channel.

[0115] Please refer to Figure 3 , in the embodiment of the present application, a guiding portion 240 is provided on the feeding member 200, and the guiding portion 240 is used to guide the first insertion section 140 to be inserted into the interface 220.

[0116] Please refer to Figure 3 and Figure 5, in some implementations, the guiding portion 240 is provided at one end of the second insertion segment 230 facing the feeding member 100, and the guiding portion 240 is provided at the edge of the interface 220. A guiding surface is provided on the guiding portion 240, and the guiding surface is connected to the inner wall of the feeding channel 210 and extends along the extending direction of the second insertion segment 230. The guiding surface is used for slidably connecting with the first insertion segment 140 to guide the first insertion segment 140 to be inserted into the interface 220. Exemplarily, when the first insertion segment 140 needs to be inserted into the interface 220, the first insertion segment 140 is brought into contact with the guiding surface, and then the first insertion segment 140 is slid on the guiding surface along the extending direction of the guiding surface to insert the first insertion segment 140 into the interface 220.

[0117] Please refer to Figure 3 and Figure 5 , in the embodiment of the present application, the guiding portion 240 is provided at one end of the feeding member 200 facing the feeding member 100. A guiding channel 241 is provided on the guiding portion 240, and the guiding channel 241 extends along the extending direction of the second insertion segment 230. The guiding channel 241 includes a first end and a second end. The first end is close to the interface 220, and the first end is in communication with the interface 220. The end face area of the first end may be equal to the area of the interface 220. The second end is arranged facing the feeding member 100, and the end face area of the second end is larger than the end face area of the first end. At the same time, the end face area of the second end is larger than the end face area of one end of the first insertion segment 140 facing the feeding member 200, so as to facilitate the first insertion segment 140 to be inserted into the guiding channel 241, and further guide the first insertion segment 140 to be inserted into the interface 220.

[0118] Please refer to Figure 3 , in the embodiment of the present application, the cross-sectional area of the guiding channel 241 gradually decreases from the second end to the first end direction, so as to facilitate the first insertion segment 140 to be inserted into the interface 220. In some implementations, the guiding channel 241 may be frustum-shaped.

[0119] It should be noted that in the description of the embodiments of the present application, unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it may be a fixed connection or an integral connection; it may also be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, or it may be the communication inside two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0120] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A feeding device, characterized in that, Comprising: A feeding member, the feeding member is provided with a feeding cavity and a feeding port, the feeding port is communicated with the feeding cavity, and the feeding cavity is used for containing crystal powder materials; A feeding component, the feeding component is provided with a feeding channel, the feeding member is detachably connected to the feeding component to communicate the feeding port and the feeding channel, and the feeding component is used for conveying the crystal powder materials in the feeding cavity to a crystal growth furnace.

2. The feeding device according to claim 1, characterized in that, The feeding member is provided with a first insertion section, the feeding port is arranged on the first insertion section, the feeding component has a second insertion section, an interface is arranged on the second insertion section, the interface is communicated with the feeding channel, and the first insertion section is inserted into the second insertion section.

3. The feeding device according to claim 2, wherein, At least a part of the first insertion section is inserted into the interface.

4. The feeding device according to claim 2 or 3, characterized in that, A guiding portion is arranged on the feeding component, and the guiding portion is used for guiding the first insertion section to be inserted into the interface.

5. The feeding device according to claim 4, characterized in that, The guiding portion is arranged at one end of the feeding component facing the feeding member, a guiding channel is arranged on the guiding portion, the guiding channel includes a first end and a second end, the first end is communicated with the interface, the second end faces the feeding member, and the end face area of the second end is larger than that of the first end.

6. The feeding device according to claim 5, wherein The cross-sectional area of the guiding channel gradually decreases from the second end to the first end.

7. The feeding device according to any one of claims 1-3, characterized in that The feeding component includes a first feeding section and a second feeding section, the first feeding section is connected to the second feeding section, the feeding channel is located in the first feeding section and the second feeding section, the second feeding section is used for extending into the crystal growth furnace, both the first feeding section and the second feeding section extend along a straight line direction, and a preset included angle is provided between the first feeding section and the second feeding section.

8. The feeding device according to claim 7, characterized in that, The feeding component is provided with an exhaust port, the exhaust port is communicated with the feeding channel, and the exhaust port is arranged at the connection of the first feeding section and the second feeding section.

9. The feeding device according to claim 8, characterized in that, The feeding component is provided with an exhaust cavity, the exhaust cavity communicates the exhaust port and the feeding channel, and the exhaust cavity is arranged at the connection of the first feeding section and the second feeding section.

10. The feeding device according to claim 9, wherein The exhaust cavity is spherical.

11. The feeding device according to any one of claims 1 to 3, characterized in that, The feeding cavity includes a contraction section, the cross-sectional area of the top end of the contraction section is larger than that of the bottom end of the contraction section, the feeding port is communicated with the bottom end of the contraction section, and the cross-sectional area of the contraction section gradually decreases from the top end of the contraction section to the bottom end of the contraction section.

12. The feeding device according to any one of claims 1-3, characterized in that, The feeding device further includes a control component, and the control component is used for controlling the speed at which the feeding component conveys the crystal powder materials to the crystal growth furnace.

13. The feeding device according to claim 12, characterized in that, The control component includes a baffle, the feeding component is provided with a socket, the socket is communicated with the feeding channel, and the baffle is inserted into the socket.

14. The feeding device according to any one of claims 1-3, characterized in that, The feeding device further includes a first ultrasonic device, the first ultrasonic device is arranged at an interval with the feeding member, and the first ultrasonic device is used for emitting ultrasonic waves to the feeding member.

15. The feeding device according to claim 14, characterized in that, There are multiple first ultrasonic devices, and each first ultrasonic device is arranged at an interval.

16. The feeding device according to any one of claims 1-3, characterized in that, The feeding device further includes a second ultrasonic device, the second ultrasonic device is arranged at an interval with the feeding component, and the second ultrasonic device is used for emitting ultrasonic waves to the feeding component.

17. A crystal growth apparatus, characterized in that, Comprising: A crystal growth furnace, a furnace cover, and a feeding device according to any one of claims 1-16, wherein the crystal growth furnace is provided with a furnace chamber, the furnace cover covers the crystal growth furnace body to enclose the furnace chamber, and a through hole is provided on the furnace cover; In the feeding state, part of the feeding member is inserted through the through hole.

18. The crystal growth apparatus according to claim 17, wherein The crystal growth device further includes a lifting rod, and in the growth state, the lifting rod is inserted through the through hole to lift the crystal melt in the furnace chamber.

Images