Visual dial plate type high-vacuum manual baffle angle valve capable of accurately adjusting conductance

Abstract

The utility model discloses a visual dial type high-vacuum manual baffle angle valve capable of accurately adjusting conductance. An opening reference indication assembly used for visually and quantitatively controlling the opening of a valve body is coaxially arranged on the portion, between the top of a valve body cover and the bottom face of a hand wheel body, of the periphery of a lead screw. The beneficial effects of the utility model are that the rotation angles of the screw rod and the lower sealing plate can be intuitively known through a mode that the indication marking line is contrasted with the circumferential reference mark, and the number of rotation turns of the screw rod and the lower sealing plate can be intuitively known through a mode that the height reference mark beside the indication marking line refers to the annular dial; then, the opening degree of the valve body can be quantitatively controlled by visually knowing the rotating angle and the rotating circle number of the lead screw and the lower sealing plate, the valve body can be conveniently and rapidly adjusted to the opening degree meeting the use requirement, and the valve body opening degree adjusting mode of multiple times of adjustment and observation verification is replaced; and the conductance adjusting process of the valve body is facilitated.

Description

Technical Field

[0001] The utility model relates to the field of high-vacuum angle valve auxiliary components, and particularly relates to a high-vacuum manual baffle angle valve with a visual dial for precisely adjusting the conductance. Background Technique

[0002] The high-vacuum angle valve is a control valve component in the pipeline fluid transportation system. The main function of the vacuum angle valve is to change the passage cross-section and the flow direction of the medium, and it has functions such as guiding, shutting off, adjusting, throttling, check valve, shunting or overflow pressure relief. The high-vacuum angle valve is widely used in semiconductor equipment. Compared with ordinary high-vacuum angle valves, the high-vacuum angle valve applied to semiconductor equipment has higher requirements for sealing performance. Currently, there are various types and models of high-vacuum angle valves on the market, and they can all play the roles of guiding and shutting off.

[0003] When the high-vacuum manual angle valve is actually applied, usually by rotating the handwheel body, the lead screw moves up and down to stretch or compress the metal bellows. When the metal bellows is in the stretched state, the lower sealing plate at the bottom will tightly press on the valve body to block the air outlet. At this time, a sealed environment is formed in the valve body chamber. When the metal bellows is in the compressed state, the lower sealing plate drives the lower sealing plate to displace upward to open the air outlet, so that the medium can flow from the air inlet to the air outlet to form a connection.

[0004] However, in the process of specific use of the existing high-vacuum manual angle valve, when adjusting the opening degree, it is usually adjusted by the operator's hand-twisting method. Since there is no reference object for controlling the opening degree in this process, it is often completed by slowly hand-twisting and observing and verifying multiple times. It is very difficult to quickly adjust the high-vacuum manual angle valve to the opening degree that meets the use, resulting in very inconvenient adjustment of the conductance of the high-vacuum manual angle valve. Content of the Utility Model

[0005] The purpose of the utility model is to provide a high-vacuum manual baffle angle valve with a visual dial for precisely adjusting the conductance to solve the above problems. By comparing the indicating scale line with the circumferential reference mark, the rotation angle of the lead screw and the lower sealing plate can be intuitively understood. At the same time, by referring to the height reference mark beside the indicating scale line and the annular scale disk, the number of rotations of the lead screw and the lower sealing plate can be intuitively understood. Then, by intuitively understanding the rotation angle and the number of rotations of the lead screw and the lower sealing plate, the opening degree of the valve body can be quantitatively controlled, which is convenient for quickly adjusting the valve body to the opening degree that meets the use. See the following for details.

[0006] To achieve the above purpose, the utility model provides the following technical solutions:

[0007] The utility model provides a high-vacuum manual baffle angle valve with a visual dial for precisely adjusting the conductance, which comprises a valve body and a valve body cover. The top of the valve body is hermetically fixed with the valve body cover. A nut sleeve is coaxially fixed at the lower part inside the valve body cover. A lead screw is coaxially inserted through the nut sleeve in a threaded fit manner, and the top end of the lead screw extends out of the top of the valve body cover and is coaxially installed with a handwheel body.

[0008] At the coaxial combination position of the valve body cover and the valve body, an upper sealing plate is coaxially fixed. At the position of the bottom surface of the upper sealing plate around the nut sleeve, a corrugated pipe is coaxially fixed. The bottom end of the corrugated pipe is coaxially fixed with a lower sealing plate, and the middle part of the top surface of the lower sealing plate is coaxially fixed with the bottom end of the lead screw, so as to drive the lower sealing plate to vertically move upward or downward in a threaded engagement manner of the lead screw along the nut sleeve.

[0009] On the part of the periphery of the lead screw between the top of the valve body cover and the bottom surface of the handwheel body, an opening degree reference indicating component is coaxially arranged for visually quantitatively controlling the opening degree of the valve body.

[0010] Preferably, a medium discharge port and a medium inlet are respectively arranged at the lower part and one side of the valve body. When the lower sealing plate moves downward, the top end of the medium discharge port is tightly blocked. When the lower sealing plate moves upward, the medium inlet and the medium discharge port are communicated with each other.

[0011] Preferably, an upper sealing ring is coaxially pressed at the joint position of the top of the valve body and the upper sealing plate, so that the valve body cover and the upper sealing plate can be hermetically fixed at the top of the valve body.

[0012] Preferably, a whole-ring lower sealing ring is coaxially fixed at the bottom of the lower sealing plate, and the medium discharge port is sealed and blocked by the part of the lower sealing ring that abuts against the top end of the medium discharge port.

[0013] Preferably, the opening degree reference indicating component comprises an indicator main body and an annular scale disk. The part of the periphery of the lead screw between the top of the valve body cover and the bottom surface of the handwheel body is coaxially sleeved and fixed with the indicator main body, and the top end of the indicator main body abuts against the bottom end of the handwheel body. The annular scale disk is fixed around the top end of the valve body cover and is coaxial with the indicator main body.

[0014] Preferably, an indicating marking line is erected on the periphery of the indicator main body. A height reference mark is arranged at the position beside the indicating marking line on the periphery of the indicator main body. A circumferential reference mark is printed on the top surface of the annular scale disk.

[0015] Preferably, the indicating marking line is a vertically arranged straight groove.

[0016] Preferably, the outer part of the handwheel body is provided with handwheel fixing holes that can be inserted with screws to be tightened against the periphery of the lead screw, and the outer part of the indicator body is provided with indicator fixing holes that can be inserted with bolts to be tightened against the periphery of the lead screw.

[0017] Preferably, the circumferential reference marks are indicating numbers from 1 to 12 and are evenly printed on the circumference of the annular scale disk, and the height reference marks are indicating numbers from 1 to 3 and are printed at the position of the indicator body beside the indicating marking line and increase from top to bottom.

[0018] Using the above-mentioned high-vacuum manual baffle angle valve with a visual dial for precise conductance adjustment, specifically during the process of adjusting the opening degree of the valve body, due to the setting of the opening degree reference indicating assembly, and the opening degree reference indicating assembly includes the indicator body coaxially at the bottom of the handwheel body and the annular scale disk coaxially fixed on the top circumference of the valve body cover, and the indicating marking line and the height reference marks are erected on the periphery of the indicator body, and the circumferential reference marks are printed on the top surface of the annular scale disk. In this way, during the process of rotating the handwheel body, the rotation angle of the lead screw and the lower sealing plate can be intuitively understood by comparing the indicating marking line with the circumferential reference marks, and the number of rotations of the lead screw and the lower sealing plate can be intuitively understood by referring to the annular scale disk through the height reference marks beside the indicating marking line. Then, by intuitively understanding the rotation angle and the number of rotations of the lead screw and the lower sealing plate, the opening degree of the valve body can be quantitatively controlled, which is convenient for quickly adjusting the valve body to the opening degree that meets the use requirements, replacing the opening degree adjustment method of the valve body that requires multiple adjustments and observation verifications, facilitating the conductance adjustment process of the valve body. And because the circumferential reference marks are indicating numbers from 1 to 12 and are evenly printed on the circumference of the annular scale disk, and the height reference marks are indicating numbers from 1 to 3 and are printed at the position of the indicator body beside the indicating marking line and increase from top to bottom, in this way, by referring to and observing the circumferential reference marks and the height reference marks, the valve body can have 36 different opening degree size reference positions, ensuring that the valve body has a sufficiently wide and use-required selectable range when adjusting the opening degree size, further facilitating the conductance adjustment process of the valve body.

[0019] The beneficial effects are as follows: 1. The present utility model is provided with an opening reference indicating component. The opening reference indicating component includes an indicator main body coaxially at the bottom of the handwheel body and an annular scale disk coaxially fixed on the top periphery of the valve body cover. An indicating marking line and a height reference mark are erected on the periphery of the indicator main body, and a circumferential reference mark is printed on the top surface of the annular scale disk. In this way, during the process of rotating the handwheel body, the rotation angle of the lead screw and the lower sealing plate can be intuitively understood by comparing the indicating marking line with the circumferential reference mark. At the same time, the number of turns of the lead screw and the lower sealing plate can be intuitively understood by referring to the annular scale disk with the height reference mark beside the indicating marking line. Then, by intuitively understanding the rotation angle and the number of turns of the lead screw and the lower sealing plate, the opening degree of the valve body can be quantitatively controlled, which is convenient for quickly adjusting the valve body to the opening degree that meets the use requirements, replacing the valve body opening degree adjustment method of multiple adjustments and observation verifications, and facilitating the flow conductance adjustment process of the valve body;

[0020] 2. The circumferential reference marks are indicating numbers from 1 to 12 and are evenly printed on the circumference of the annular scale disk. The height reference marks are indicating numbers from 1 to 3 and are printed at the position beside the indicating marking line on the indicator main body and increase from top to bottom. In this way, by referring to and observing the circumferential reference marks and the height reference marks, the valve body can have 36 different opening degree size reference positions, ensuring that the valve body has a sufficiently wide and usage-required selectable range when adjusting the opening degree size, and further facilitating the flow conductance adjustment process of the valve body. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 is the front sectional view schematic diagram of the present utility model;

[0023] Figure 2 is the overall axonometric schematic diagram of the present utility model;

[0024] Figure 3 is the present utility model Figure 2 partial enlarged view at A.

[0025] The description of the reference numerals in the drawings is as follows:

[0026] 1. Handwheel body; 101. Handwheel fixing hole; 2. Opening reference indicating component; 201. Indicator body; 202. Indicator fixing hole; 203. Circumferential reference mark; 204. Ring scale; 205. Indicating marking line; 206. Height reference mark; 3. Valve body cover; 4. Upper sealing plate; 5. Upper sealing ring; 6. Bellows; 7. Lower sealing plate; 8. Lower sealing ring; 9. Valve body; 10. Nut sleeve; 11. Lead screw; 12. Medium inlet; 13. Medium outlet. Detailed implementation mode

[0027] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions of the present utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other implementation manners obtained by those of ordinary skill in the art without making creative efforts fall within the scope protected by the present utility model.

[0028] See Figures 1-3 As shown, the present utility model provides a high-vacuum manual baffle angle valve with a visual dial for precisely adjusting the conductance, including a valve body 9 and a valve body cover 3. The top of the valve body 9 is hermetically fixed with the valve body cover 3. A nut sleeve 10 is coaxially fixed to the lower inner part of the valve body cover 3. A lead screw 11 is coaxially inserted through the nut sleeve 10 in a threaded fit manner. The top end of the lead screw 11 extends out of the top of the valve body cover 3 and is coaxially installed with a handwheel body 1. An upper sealing plate 4 is coaxially fixed at the combined position of the valve body cover 3 and the valve body 9. A bellows 6 is coaxially fixed to the bottom surface of the upper sealing plate 4 at the position outside the nut sleeve 10. The bottom end of the bellows 6 is coaxially fixed with a lower sealing plate 7. The middle part of the top surface of the lower sealing plate 7 is coaxially fixed with the bottom end of the lead screw 11, so as to drive the lower sealing plate 7 to vertically move upward or downward by the threaded engagement of the lead screw 11 with the nut sleeve 10. A medium outlet 13 and a medium inlet 12 are respectively arranged at the lower part and one side of the valve body 9. The function of such a setting is to facilitate tightly pressing and blocking the top end of the medium outlet 13 by the downward movement of the lower sealing plate 7, and at the same time to form a connection between the medium inlet 12 and the medium outlet 13 by the upward movement of the lower sealing plate 7.

[0029] See Figure 1As shown, a position on the outer periphery of the lead screw 11 between the top of the valve body cover 3 and the bottom surface of the handwheel body 1 is coaxially provided with an opening reference indicating assembly 2 for visually and quantitatively controlling the opening degree of the valve body 9. Specifically, the opening reference indicating assembly 2 includes an indicator body 201 and an annular scale plate 204. The indicator body 201 is coaxially sleeved and fixed on the outer periphery of the lead screw 11 between the top of the valve body cover 3 and the bottom surface of the handwheel body 1, and the top end of the indicator body 201 abuts against the bottom end of the handwheel body 1. The annular scale plate 204 is fixed on the periphery of the top end of the valve body cover 3, and the annular scale plate 204 is coaxial with the indicator body 201. An indicating marking line 205 is vertically arranged on the outer periphery of the indicator body 201, and a height reference mark 206 is arranged at a position beside the indicating marking line 205 on the outer periphery of the indicator body 201. A circumferential reference mark 203 is printed on the top surface of the annular scale plate 204. The purpose of such a setting is that during the process of rotating the handwheel body 1, the rotation angle of the lead screw 11 and the lower sealing plate 7 can be intuitively understood by comparing the indicating marking line 205 with the circumferential reference mark 203. At the same time, the number of turns of the lead screw 11 and the lower sealing plate 7 can be intuitively understood by referring to the annular scale plate 204 with the height reference mark 206 beside the indicating marking line 205. Then, the opening degree of the valve body 9 can be quantitatively controlled by intuitively understanding the rotation angle and the number of turns of the lead screw 11 and the lower sealing plate 7, which is convenient for quickly adjusting the valve body 9 to an opening degree suitable for use.

[0030] See Figures 1-3As shown, the following optimizations are respectively carried out on the valve body 9 and the opening reference indicating assembly 2. Specifically for the valve body 9, an upper sealing ring 5 is coaxially pressed at the position where the top of the valve body 9 is joined to the upper sealing plate 4, so as to enable the valve body cover 3 and the upper sealing plate 4 to be hermetically fixed at the top of the valve body 9. Optionally, a whole-circle lower sealing ring 8 is coaxially fixed at the bottom of the lower sealing plate 7, so as to seal and block the medium discharge port 13 by means of the lower sealing ring 8 pressing against the top part of the medium discharge port 13. Specifically for the opening reference indicating assembly 2, the indicating scale line 205 is a vertically arranged straight groove. Such a setting facilitates the obvious recognizability of the indicating scale line 205 and is convenient for directly observing the indicating scale line 205. Optionally, a handwheel fixing hole 101 capable of inserting and installing a screw to tightly press against the periphery of the lead screw 11 is provided on the outside of the handwheel body 1, and an indicator fixing hole 202 capable of inserting and installing a bolt to the periphery of the lead screw 11 is provided on the outside of the indicator body 201. Preferably, the indicator fixing hole 202 is a countersunk hole, so as to smoothly coaxially fix the handwheel body 1 and the indicator body 201 to the periphery of the lead screw 11 by means of inserting and installing screws through the handwheel fixing hole 101 and the indicator fixing hole 202 respectively. Further optionally, the circumferential reference marks 203 are indicating numbers from 1 to 12 and are evenly printed on the circumference of the annular scale disk 204, and the height reference marks 206 are indicating numbers from 1 to 3 and are printed on the position of the indicator body 201 beside the indicating scale line 205 and increase from top to bottom. With such a setting, it is convenient to enable the valve body 9 to have 36 different opening size reference positions by referring to and observing the circumferential reference marks 203 and the height reference marks 206, ensuring that the valve body 9 has a wide enough and suitable selectable range when adjusting the opening size.

[0031] With the above structure, specifically during the use of the valve body 9 for opening adjustment, due to the provision of the opening reference indicating assembly 2, and the opening reference indicating assembly 2 includes the indicator body 201 coaxially disposed at the bottom of the handwheel body 1 and the annular scale 204 coaxially fixed to the periphery of the top end of the valve body cover 3. And the indicating line 205 and the height reference mark 206 are erected on the periphery of the indicator body 201, and the circumferential reference mark 203 is printed on the top surface of the annular scale 204. Thus, during the process of rotating the handwheel body 1, the rotation angle of the lead screw 11 and the lower sealing plate 7 can be intuitively understood by comparing the indicating line 205 with the circumferential reference mark 203. At the same time, the number of turns of rotation of the lead screw 11 and the lower sealing plate 7 can be intuitively understood by referring to the annular scale 204 through the height reference mark 206 beside the indicating line 205. Then, by intuitively understanding the rotation angle and the number of turns of rotation of the lead screw 11 and the lower sealing plate 7, the opening of the valve body 9 can be quantitatively controlled, which is convenient for quickly adjusting the valve body 9 to the opening that meets the use requirements, replacing the opening adjustment method of the valve body 9 that requires multiple adjustments and observation verifications, facilitating the conductance adjustment process of the valve body 9. And because the circumferential reference mark 203 is the indicating numbers from 1 to 12 and are evenly printed on the circumference of the annular scale 204, and the height reference mark 206 is the indicating numbers from 1 to 3 and is printed at the position beside the indicating line 205 on the indicator body 201 and increases from top to bottom. Thus, by referring to and observing the circumferential reference mark 203 and the height reference mark 206, the valve body 9 has 36 different opening size reference positions, ensuring that the valve body 9 has a sufficiently wide and suitable selectable range when adjusting the opening size, further facilitating the conductance adjustment process of the valve body 9.

[0032] The above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of changes or substitutions, which should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A high-vacuum manual baffle angle valve with a visual dial for precisely adjusting the conductance, comprising a valve body (9) and a valve body cover (3), characterized in that: The valve body cover (3) is fixedly sealed at the top of the valve body (9). A nut sleeve (10) is coaxially fixed at the lower inner part of the valve body cover (3). A lead screw (11) is coaxially inserted through the nut sleeve (10) in a threaded fit manner, and the top end of the lead screw (11) extends out of the top of the valve body cover (3) and is coaxially installed with a handwheel body (1). An upper sealing plate (4) is coaxially fixed at the combined position of the valve body cover (3) and the valve body (9). A bellows (6) is coaxially fixed at the bottom surface of the upper sealing plate (4) at the position around the nut sleeve (10). The bottom end of the bellows (6) is coaxially fixed with a lower sealing plate (7), and the middle part of the top surface of the lower sealing plate (7) is coaxially fixed with the bottom end of the lead screw (11), so as to drive the lower sealing plate (7) to vertically move upward or downward by the threaded engagement of the lead screw (11) along the nut sleeve (10). A part of the periphery of the lead screw (11) between the top of the valve body cover (3) and the bottom surface of the handwheel body (1) is coaxially provided with an opening reference indicating assembly (2) for visually quantitatively controlling the opening degree of the valve body (9).

2. The high-vacuum manual baffle angle valve for precisely adjusting conductance with a visual dial according to claim 1, wherein: A medium discharge port (13) and a medium inlet port (12) are respectively arranged at the lower part and one side of the valve body (9), so as to tightly press and block the top end of the medium discharge port (13) by the downward movement of the lower sealing plate (7), and at the same time, make the medium inlet port (12) communicate with the medium discharge port (13) by the upward movement of the lower sealing plate (7).

3. The high-vacuum manual baffle angle valve for precisely adjusting the conductance in a visual dial type according to claim 2, wherein: An upper sealing ring (5) is coaxially pressed at the joint position of the top of the valve body (9) and the upper sealing plate (4), so as to enable the valve body cover (3) and the upper sealing plate (4) to be fixedly sealed at the top of the valve body (9).

4. The high-vacuum manual baffle angle valve for precisely adjusting conductance with a visual dial according to claim 2, wherein: A whole-ring lower sealing ring (8) is coaxially fixed at the bottom of the lower sealing plate (7), so as to seal and block the medium discharge port (13) by the part of the lower sealing ring (8) abutting against the top end of the medium discharge port (13).

5. A high-vacuum manual baffle angle valve for visual dial-type precise adjustment of conductance according to any one of claims 1-4, characterized in that: The opening reference indicating assembly (2) includes an indicator main body (201) and an annular scale disk (204). A part of the periphery of the lead screw (11) between the top of the valve body cover (3) and the bottom surface of the handwheel body (1) is coaxially sleeved and fixed with the indicator main body (201), and the top end of the indicator main body (201) abuts against the bottom end of the handwheel body (1). The annular scale disk (204) is fixed around the top end of the valve body cover (3), and the annular scale disk (204) is coaxial with the indicator main body (201).

6. The high-vacuum manual baffle angle valve for precisely adjusting conductance with a visual dial according to claim 5, characterized in that: An indicating scale line (205) is vertically arranged on the periphery of the indicator main body (201). A height reference mark (206) is arranged at the position beside the indicating scale line (205) on the periphery of the indicator main body (201). A circumferential reference mark (203) is printed on the top surface of the annular scale disk (204).

7. The high-vacuum manual baffle angle valve for precisely adjusting conductance in a visual dial type according to claim 6, wherein: The indicating scale line (205) is a vertically arranged straight groove.

8. The high-vacuum manual baffle angle valve for precisely adjusting conductance with a visual dial according to claim 7, wherein: The outer part of the handwheel body (1) is provided with handwheel fixing holes (101) that can be inserted and equipped with screw tops to be tightened around the lead screw (11), and the outer part of the indicator body (201) is provided with indicator fixing holes (202) that can be inserted and equipped with bolts to be tightened around the lead screw (11).

9. The high-vacuum manual baffle angle valve for precisely adjusting the conductance in a visual dial type according to claim 6, 7 or 8, characterized in that: The circumferential reference marks (203) are indication numbers from 1 to 12 and are evenly printed on the circumference of the annular scale plate (204), and the height reference marks (206) are indication numbers from 1 to 3 and are printed on the position of the indicator body (201) beside the indicating scale line (205) and increase from top to bottom.

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