Parallelism measuring device

Abstract

The utility model provides a parallelism measuring device, which comprises a measuring assembly and a movable assembly, and is characterized by further comprising a mounting assembly for connecting the measuring assembly and the movable assembly, the installation assembly comprises at least one installation plate and at least one fixing piece, the installation plate is provided with at least one installation hole, the fixing piece penetrates through the installation hole so that one end of the installation plate can be fastened to the movable assembly, and the other end of the installation plate can be fastened to the measuring assembly. According to the scheme of the invention, the installation assembly enables the measurement assembly to be firmly installed on the movable assembly, improves the operation convenience, reduces the measurement error caused by the unstable installation, and improves the measurement precision of the measurement assembly.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing, and particularly to a parallelism measuring device. Background Art

[0002] During precision machining, the grinding head of the machining equipment and the workpiece on the working platform need to be kept parallel. The dial indicator is a precision measuring tool used to measure the minute changes on the surface of the workpiece and the parallelism between the grinding head and the workpiece. The dial indicator is installed on the robotic arm of the machining equipment, so that it can slide on the surface of the workpiece as the robotic arm moves. According to the parallelism data measured by the dial indicator, it can be determined whether the grinding head and the workpiece are parallel. If the parallelism is within the allowable error range, it is considered that the two are parallel; if the parallelism is not within the allowable error range, it is considered that the two are not parallel and further adjustment is required.

[0003] Currently, in the process of measuring parallelism, the main problem is that the dial indicator cannot be directly installed on the robotic arm of the machining equipment, resulting in the inability to accurately measure the parallelism between the grinding head and the workpiece. The reason is that the robotic arm of the machining equipment lacks the corresponding interface design for installing the dial indicator, making it impossible for the dial indicator to stably adhere to the robotic arm, thus affecting the measurement accuracy and operation convenience.

[0004] Therefore, how to improve the connection stability between the robotic arm and the dial indicator is a technical problem that those skilled in the art urgently need to solve. Utility Model Content

[0005] This application provides a parallelism measuring device, which realizes the stable connection between the movable component and the measuring component.

[0006] To achieve the above object, a parallelism measuring device is provided, including a measuring component and a movable component, characterized in that it further includes an installation component for connecting the measuring component and the movable component;

[0007] The installation component includes at least one mounting plate member and at least one fixing member. The mounting plate member is provided with at least one mounting hole, and the fixing member passes through the mounting hole to fasten one end of the mounting plate member to the movable component and the other end to the measuring component.

[0008] Preferably, the mounting plate member includes a first mounting plate member and a second mounting plate member that are vertically connected;

[0009] The bottom end of the first mounting plate member fits with the movable component;

[0010] The side wall of the second mounting plate member fits with the measuring component.

[0011] Preferably, the fixing member includes a first fixing member and a second fixing member;

[0012] The mounting holes include a first mounting hole and a second mounting hole. The first mounting hole is provided on the first mounting plate member, and the second mounting hole is provided on the second mounting plate member;

[0013] The first fixing member passes through the first mounting hole and is fastened to the bottom end of the movable component;

[0014] The second fixing member passes through the second mounting hole and is fastened to the side wall of the measuring component.

[0015] Preferably, the number of the second mounting holes is multiple;

[0016] The multiple second mounting holes are arranged along the length direction of the second mounting plate member.

[0017] Preferably, the movable component is arranged above the workpiece to be measured.

[0018] Preferably, an installation end is provided on the surface of the movable component facing the workpiece to be measured. The installation end is configured to install a processing component, and the processing component is configured to process the workpiece to be measured under the drive of the movable component.

[0019] Preferably, the measuring component includes a measuring end. The measuring component is configured to move the measuring end along a preset direction on the surface of the workpiece to be measured under the drive of the movable component to measure the parallelism between the movable component and the workpiece to be measured, so as to determine the parallelism between the processing component and the workpiece to be measured.

[0020] Preferably, the workpiece to be measured includes a main body and an auxiliary member placed on the surface of the main body; wherein, the preset parallelism error value between the auxiliary member and the main body conforms to the first preset interval;

[0021] The measuring end contacts the surface of the auxiliary member and is configured to move along the preset direction on the surface of the auxiliary member, and obtain the parallelism between the movable component and the main body through the auxiliary member to determine the parallelism between the processing component and the main body.

[0022] Preferably, the preset direction is formed by the movable component rotating along the axial direction of the processing component.

[0023] Preferably, the workpiece to be measured includes a plurality of adsorption holes penetrating therethrough; the adsorption holes are distributed along the circumferential direction of the workpiece to be measured; wherein, there is no overlap between the preset direction and the arrangement position of the adsorption holes.

[0024] Preferably, the measuring component includes a dial indicator or a micrometer.

[0025] Preferably, the processing component includes a grinding head.

[0026] Combined with the specific embodiments provided in the present application, the following technical effects are disclosed:

[0027] In the technical solution of the present application, a parallelism measuring device is provided, which includes a measuring component and a movable component. It is characterized in that it further includes an installation component for connecting the measuring component and the movable component; the installation component includes at least one installation plate member and at least one fixing member. The installation plate member is provided with at least one installation hole, and the fixing member passes through the installation hole to fasten one end of the installation plate member to the movable component and the other end to the measuring component. In the solution of the present application, the setting of the installation component enables the measuring component to be firmly installed on the movable component, improving the convenience of operation, and at the same time reducing the measurement error caused by unstable installation, thereby improving the measurement accuracy of the measuring component. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0029] Figure 1 is one of the schematic diagrams of the installation component provided by the embodiment of the present application;

[0030] Figure 2 is another schematic diagram of the installation component provided by the embodiment of the present application;

[0031] Figure 3 is the third schematic diagram of the installation component provided by the embodiment of the present application;

[0032] Figure 4 is the schematic diagram of the parallelism measuring device provided by the embodiment of the present application.

[0033] BRIEF DESCRIPTION OF THE DRAWINGS: 10. First installation plate member; 20. Second installation plate member; 30. Movable component; 40. Measuring component; 41. Measuring end; 50. Workpiece to be measured; 70. Auxiliary member; 100. First installation hole; 200. Second installation hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0034] The following describes some embodiments of the present application with reference to the drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present application and are not intended to limit the protection scope of the present application.

[0035] As described in the background art, currently in the process of measuring parallelism, the main problem is that the dial indicator cannot be directly installed on the robotic arm of the processing equipment, resulting in the inability to accurately measure the parallelism between the grinding head and the workpiece. The reason is that the robotic arm of the processing equipment lacks the corresponding interface design for installing the dial indicator, making it impossible for the dial indicator to be stably attached to the robotic arm, thereby affecting the measurement accuracy and operational convenience.

[0036] To solve the above problems, the core of this application is to provide a parallelism measurement device to achieve a stable connection between the movable component and the measurement component.

[0037] Embodiment 1

[0038] Embodiment 1 of this application provides a parallelism measurement device, which includes a measurement component and a movable component, and also includes an installation component for connecting the measurement component and the movable component; the installation component includes at least one mounting plate member and at least one fixing member. The mounting plate member is provided with at least one mounting hole, and the fixing member passes through the mounting hole to fasten one end of the mounting plate member to the movable component and the other end to the measurement component.

[0039] Among them, the installation component consists of at least one mounting plate member and at least one fixing member. Through the mounting hole, a firm connection between the measurement component and the movable component is achieved. This not only simplifies the installation process, improves the operational convenience, but also reduces the errors caused by unstable installation, thereby ensuring the accuracy of the measurement results. In addition, due to the stability of the installation component, the measurement component can maintain a consistent measurement standard during the movement process, further improving the reliability of the measurement data and meeting the requirements of precision machining.

[0040] Preferably, referring to Figure 1 and Figure 4 , the mounting plate member includes a first mounting plate member 10 and a second mounting plate member 20 that are vertically connected; the first mounting plate member 10 fits against the bottom end of the movable component 30; the second mounting plate member 20 fits against the side wall of the measurement component 40.

[0041] Preferably, referring to Figure 1 and Figure 4 , the fixing member includes a first fixing member (not shown in the figure) and a second fixing member (not shown in the figure); the mounting hole includes a first mounting hole 100 and a second mounting hole 200. The first mounting hole 100 is provided on the first mounting plate member 10, and the second mounting hole 200 is provided on the second mounting plate member 20; the first fixing member passes through the first mounting hole 100 and is fastened to the bottom end of the movable component 30; the second fixing member passes through the second mounting hole 200 and is fastened to the side wall of the measurement component 40.

[0042] Among them, through the vertically connected first mounting plate member 10 and second mounting plate member 20, precise fitting with the movable component 30 and the measuring component 40 is respectively achieved, enhancing the structural stability of the entire measuring device to a certain extent; the fitting of the first mounting plate member 10 with the bottom end of the movable component 30 and the fitting of the second mounting plate member 20 with the side wall of the measuring component 40 ensure the accurate positioning of the measuring component on the movable component. At the same time, by passing the first fixing member and the second fixing member through the first mounting hole 100 and the second mounting hole 200 respectively, a firm connection of the movable component and the measuring component is achieved. In this way, not only the installation convenience is improved, but also the installation error is reduced, significantly enhancing the measuring accuracy of the measuring component 40.

[0043] Preferably, referring to Figure 4 , the number of the second mounting holes 200 is multiple; the multiple second mounting holes 200 are arranged along the length direction of the second mounting plate member 20.

[0044] Among them, the arrangement of the multiple second mounting holes 200 enables the second mounting plate member 20 to adapt to the installation of measuring components 40 with different heights and sizes, improving the installation compatibility; at the same time, through the configuration of the multiple second mounting holes 200, the staff can select the most suitable installation position according to specific measurement requirements to achieve the best measurement accuracy and stability. In addition, the installation process is thus simplified because there is no need to customize specific mounting plate members for different measuring components, thereby reducing the manufacturing and maintenance costs. Such an installation scheme also helps to quickly adjust and replace the measuring component 40, improving the working efficiency of the measuring device.

[0045] In some embodiments of the present application, the number of the first mounting holes is multiple to improve the connection stability between the first mounting plate member and the adjustable component.

[0046] Embodiment 2

[0047] Based on Embodiment 1, Embodiment 2 of the present application provides the related functions of the movable component, the processing component, and the measuring component.

[0048] Preferably, referring to Figure 4 , the movable component 30 is arranged above the workpiece 50 to be measured.

[0049] Preferably, referring to Figure 4 , an installation end (not shown in the figure) is provided on the side of the movable component 30 facing the workpiece 50 to be measured, and the installation end is configured to install a processing component (not shown in the figure), and the processing component is configured to process the workpiece 50 to be measured under the drive of the movable component 30.

[0050] Among them, the movable component 30 and the processing component are detachably connected. The movable component 30 can drive the measuring component 40 to move above the workpiece 50 to be measured, facilitating the measuring component 40 to obtain the parallelism data between the movable component 30 and the workpiece 50 to be measured, and then determining the parallelism between the processing component and the workpiece 50 to be measured, improving the flexibility of the measuring operation. Utilizing the moving ability of the movable component 30, the measuring component 40 can comprehensively collect the parallelism data of the movable component 30 and the workpiece 50 to be measured from different positions and angles, ensuring the comprehensiveness and accuracy of the measurement results.

[0051] Preferably, referring to Figure 4 , the measuring component 40 includes a measuring end 41. The measuring component 40 is configured to drive the measuring end 41 to move along a preset direction on the surface of the workpiece 50 to be measured under the drive of the movable component 30 to measure the parallelism between the movable component 30 and the workpiece 50 to be measured, so as to determine the parallelism between the processing component and the workpiece 50 to be measured.

[0052] Among them, the continuous and dynamic measurement of the parallelism between the movable component 30 and the workpiece 50 to be measured is realized through the measuring end 41. By moving along a specific direction, the parallel situation between the two can be comprehensively captured, and then the parallelism between the processing component and the workpiece 50 to be measured can be determined. In this way, the coverage range and accuracy of the measurement are improved, ensuring the reliability of the measurement results.

[0053] In some embodiments of the present application, the processing component and the measuring component are not installed on the movable component at the same time. First, the measuring component is fixed to one side of the movable component through the mounting component, and the measuring component is used to measure the parallelism between the movable component and the workpiece to be measured. Then, after the parallelism meets the requirements, the measuring component is removed, and the processing component is installed parallel to the bottom of the movable component through several screws or bolts for subsequent processing operations.

[0054] In some embodiments of the present application, the above-mentioned movable component adopts a robotic arm.

[0055] In some embodiments of the present application, the above-mentioned measuring component adopts a dial indicator or a micrometer.

[0056] Embodiment 3

[0057] Based on Embodiment 2, Embodiment 3 of the present application provides a method for measuring the parallelism between the processing component and the workpiece to be measured.

[0058] Preferably, referring to Figure 4, the workpiece 50 to be measured includes a main body and an auxiliary part 70 placed on the surface of the main body; wherein, the preset parallelism error value between the auxiliary part 70 and the main body conforms to the first preset range; the measuring end 41 contacts the surface of the auxiliary part 70 and is configured to move along a preset direction on the surface of the auxiliary part 70, and the parallelism between the movable component 30 and the main body is obtained through the auxiliary part 70 to determine the parallelism between the processing component and the main body.

[0059] Preferably, the preset direction is formed by the axial rotation of the movable component along the processing component.

[0060] Among them, the axial rotation reduces the errors introduced due to improper operation or inconsistent measurement paths, and improves the accuracy of measurement.

[0061] Reference Figure 4 , since there are several adsorption holes (not shown in the figure) on the workpiece 50 to be measured, as the measuring component 40 moves, it is inevitable that the measuring end 41 will contact the adsorption holes. Once it contacts the adsorption holes, the parallelism data will change greatly, affecting the measurement accuracy; the parallelism between the main body and the processing component is indirectly obtained through the auxiliary part 70, thus effectively avoiding the errors that may be introduced by directly measuring on the surface of the workpiece 50 to be measured. At the same time, the use of the auxiliary part 70 simplifies the measurement process and improves the stability and operation convenience during the measurement.

[0062] In some embodiments of the present application, the above-mentioned processing component includes a grinding head or a dresser, and the above-mentioned workpiece to be measured includes a grinding disc; this parallelism measuring device can be used to measure the parallelism between the grinding head and the grinding disc to ensure that the grinding head and the grinding disc are parallel to each other, and further ensure the dressing effect of the grinding head on the grinding pad placed on the grinding disc.

[0063] In some embodiments of the present application, the auxiliary part has a disc-shaped structure.

[0064] In an embodiment of the present application, a method for measuring the parallelism between a grinding head and a grinding disc using an auxiliary part is provided. First, adjust the flatness of the grinding disc so that the flatness of the grinding disc meets the requirement of ±20um. Then, place the auxiliary part on the surface of the grinding disc so that the flatness error of the contact surface between the auxiliary part and the grinding disc does not exceed 10um. Then, connect the dial indicator to the robotic arm through the mounting component, make the measuring end of the dial indicator contact the auxiliary part, zero the dial indicator, and finally start the robotic arm to rotate, so that the dial indicator rotates around the axis of the robotic arm. The staff observes the numerical changes of the dial indicator at any time to obtain the parallelism data between the robotic arm and the grinding disc, and further ensure that the relative position between the grinding head and the grinding disc meets the requirements when the grinding head is installed on the robotic arm subsequently.

[0065] Among them, the grinding head and the robotic arm are coaxial, and the two are connected by several screws or bolts to form a connection surface, and the radius of the cross-section perpendicular to the length direction of the grinding head is not greater than the radius of the connection surface.

[0066] Preferably, the workpiece to be measured includes a plurality of adsorption holes penetrating therethrough; the adsorption holes are arranged circumferentially along the workpiece to be measured; wherein, there is no overlap between the preset direction and the arrangement position of the adsorption holes.

[0067] Among them, if the auxiliary part is not used, the moving route of the measuring component is avoided from the position of the adsorption hole, thereby avoiding the interference that the adsorption hole may cause to the measurement result and improving the measurement accuracy.

[0068] In another embodiment of the present application, a method for directly measuring the parallelism between the grinding head and the grinding disc is provided. First, connect the dial indicator to the robotic arm through the mounting component, make the measuring end of the dial indicator contact the surface of the grinding disc without adsorption holes, zero the dial indicator, then start the robotic arm to rotate, make the dial indicator move along the radial direction of the grinding disc, and the staff observes the numerical change of the dial indicator at any time to obtain the parallelism data between the robotic arm and the grinding disc, so as to ensure that the relative position between the grinding head and the grinding disc meets the requirements when the grinding head is subsequently installed on the robotic arm. It should be noted that the arrangement of the adsorption holes on the grinding disc is a plurality of concentric rings with gradually increasing radii, the initial measurement point of the dial indicator does not contact the adsorption hole, and the moving path of the dial indicator does not pass through the adsorption hole.

[0069] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0070] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0071] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be construed as limiting the present application. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. A parallelism measuring device, comprising a measuring component and a movable component, characterized in that, It further includes a mounting component for connecting the measurement component and the movable component; The mounting component includes at least one mounting plate member and at least one fixing member. The mounting plate member is provided with at least one mounting hole, and the fixing member passes through the mounting hole to fasten one end of the mounting plate member to the movable component and the other end to the measurement component.

2. The parallelism measuring device according to claim 1, characterized in that The mounting plate member includes a first mounting plate member and a second mounting plate member which are vertically connected; The bottom end of the first mounting plate member is in contact with the movable component; The side wall of the second mounting plate member is in contact with the measurement component.

3. The parallelism measuring device according to claim 2, wherein The fixing member includes a first fixing member and a second fixing member; The mounting hole includes a first mounting hole and a second mounting hole. The first mounting hole is provided on the first mounting plate member, and the second mounting hole is provided on the second mounting plate member; The first fixing member passes through the first mounting hole and is fastened to the bottom end of the movable component; The second fixing member passes through the second mounting hole and is fastened to the side wall of the measurement component.

4. The parallelism measuring device according to claim 3, wherein The number of the second mounting holes is multiple; The multiple second mounting holes are arranged along the length direction of the second mounting plate member.

5. The parallelism measuring device according to any one of claims 1 to 4, characterized in that, The movable component is arranged above the workpiece to be measured.

6. The parallelism measuring device according to claim 5, characterized in that, One side of the movable component facing the workpiece to be measured is provided with a mounting end, and the mounting end is configured to mount a processing component, and the processing component is configured to process the workpiece to be measured under the drive of the movable component.

7. The parallelism measuring device according to claim 6, wherein The measurement component includes a measurement end. The measurement component is configured to, under the drive of the movable component, move the measurement end along a preset direction on the surface of the workpiece to be measured to measure the parallelism between the movable component and the workpiece to be measured, so as to determine the parallelism between the processing component and the workpiece to be measured.

8. The parallelism measuring device according to claim 7, characterized in that The workpiece to be measured includes a main body and an auxiliary member placed on the surface of the main body; wherein, the preset parallelism error value between the auxiliary member and the main body conforms to a first preset interval; The measurement end is in contact with the surface of the auxiliary member and is configured to move along the preset direction on the surface of the auxiliary member, and obtain the parallelism between the movable component and the main body through the auxiliary member to determine the parallelism between the processing component and the main body.

9. The parallelism measuring device according to claim 8, characterized in that, The preset direction is formed by the movable component rotating along the axial direction of the processing component.

10. The parallelism measuring device according to claim 7, characterized in that, The workpiece to be measured includes a plurality of adsorption holes penetrating through; the adsorption holes are distributed along the circumferential direction of the workpiece to be measured; wherein, there is no overlap between the preset direction and the arrangement position of the adsorption holes.

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