Safety control module, device and semiconductor equipment

Abstract

The utility model provides a safety control module, a device and a semiconductor device, the safety control module comprises a line concentration module, the line concentration module comprises a substrate, first connection interfaces symmetrically arranged at two sides of the substrate, and connectors which are connected with the first connection interfaces in a one-to-one correspondence manner and are symmetrically arranged; the shell is used for packaging the line concentration module and exposing the connector; the plurality of switching devices are connected with the connectors in the line concentration module in a one-to-one correspondence manner; and the plurality of driving mechanisms are connected with the plurality of switching devices in a one-to-one correspondence manner and are used for changing the switching states of the corresponding switching devices. By adopting the above technical scheme, the operation space of the connector is improved.

Description

Technical Field

[0001] The embodiments of the utility model relate to the field of intelligent control technology, and in particular to a safety control module, a device and a semiconductor device. Background Art

[0002] With the development of industrial automation, a large number of automation equipment are applied to processing and manufacturing. In the actual operation process, these automation equipment may fail or have other adverse conditions, so it is necessary to stop these automation equipment quickly to avoid personal injury or equipment damage.

[0003] In order to meet this demand, the emergency stop safety control switch came into being. When the emergency stop safety control switch is triggered, the connection between the equipment and the power supply will be disconnected and the equipment will stop running.

[0004] At present, the emergency stop safety control switch is connected to the control circuit through a connector to control the operating status of the equipment. However, when operating the connector, it is difficult to operate, or other connectors are accidentally triggered during the same operation process, which may cause the equipment to be accidentally shut down. Therefore, the current emergency stop solution needs to be improved. Utility Model Content

[0005] In view of this, embodiments of the present invention provide a safety control module, a device and a semiconductor equipment, which can increase the operating space of the connector.

[0006] An embodiment of the utility model provides a safety control module, comprising: a wiring hub module, the wiring hub module comprising a substrate, a first connection interface symmetrically arranged on both sides of the substrate, and connectors symmetrically arranged and connected to the first connection interface in a one-to-one correspondence; a shell for encapsulating the wiring hub module and exposing the connector; a plurality of switching devices connected in a one-to-one correspondence with the connectors in the wiring hub module; and a plurality of driving mechanisms connected in a one-to-one correspondence with the plurality of switching devices for changing the switching states of the corresponding switching devices.

[0007] Optionally, a plurality of the connectors are symmetrically arranged side by side on the surface of the housing.

[0008] Optionally, the housing further comprises an extension plate, and the extension plate comprises a mounting hole;

[0009] Wherein, the extension direction of the extension plate is consistent with the symmetry axis of the first connection interface;

[0010] The mounting hole is used to mount the hub module to the semiconductor device.

[0011] Optionally, along the length direction of the housing, the distance between any adjacent connectors is 30 mm to 35 mm;

[0012] Along the width direction of the housing, the distance between any adjacent driving mechanisms is greater than or equal to 29 mm;

[0013] Along the normal direction of the shell surface, the distance between any one of the driving mechanisms and the shell is 35 mm to 40 mm.

[0014] Optionally, the housing has identification information for identifying each connector.

[0015] Optionally, the length of the shell is 150 mm to 155 mm, and the width of the shell is 45 mm to 55 mm.

[0016] Optionally, the line hub module further includes a second connection interface disposed on the substrate, and the second connection interface is cascade-connected to a plurality of the first connection interfaces;

[0017] The first connection interface is used to receive a state detection signal of a corresponding switch device, and the second connection interface is used to output a state detection signal of a triggered switch device.

[0018] Optionally, the number of the second connection interface is 1.

[0019] Optionally, the switch device includes:

[0020] A switch, the switch comprising a control end, a first end and a second end, and the control end of the switch is connected to the driving mechanism;

[0021] a third connection interface, the third connection interface being connected to the corresponding first connection interface and the switch respectively through the connector;

[0022] Among them, the third connection interface includes: a first type connection terminal pair, which corresponds one-to-one to the switch, the first type connection terminal pair includes a third connection terminal, one of the third connection terminals in the first type connection terminal pair is connected to the first end of the switch, and the other third connection terminal is connected to the second end of the switch.

[0023] Optionally, the switch is a normally closed switch.

[0024] An embodiment of the utility model further provides a safety control device, comprising: the safety control module described in any of the above examples; and a processor, electrically connected to the safety control module, for processing a status detection signal.

[0025] An embodiment of the utility model further provides a semiconductor device, comprising a safety control device as described in any of the aforementioned examples.

[0026] Compared with the prior art, the technical solution of the embodiment of the utility model has the following advantages:

[0027] In the safety control module provided by the embodiment of the utility model, the wiring hub module includes a substrate, and a first connection interface symmetrically arranged on both sides of the substrate, and the connectors are connected to the first connection interfaces one by one and are symmetrically arranged, so that the setting positions of the connectors can be reasonably planned, and the intervals between adjacent connectors can be increased, thereby increasing the operating space of the connectors, improving the convenience of users operating the connectors, and reducing the size of the substrate, so that when it is packaged by a shell, the size of the shell can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the drawings required for use in the embodiments of this specification or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 A schematic diagram of the structure of a safety control module in an embodiment of the utility model is shown;

[0030] Figure 2 A schematic diagram of the packaging structure of a line hub module in an embodiment of the utility model is shown;

[0031] Figure 3 Shows Figure 2 A schematic diagram of a top view of the packaging structure;

[0032] Figure 4 Shows Figure 2 Schematic diagram of the test structure of the package structure;

[0033] Figure 5 A schematic diagram showing the structure of another safety control module in an embodiment of the utility model is shown;

[0034] Figure 6 A specific structural schematic diagram of a safety control module in an embodiment of the utility model is shown;

[0035] Figure 7 A structural schematic diagram of a safety control device in an embodiment of the utility model is shown. DETAILED DESCRIPTION

[0036] As described in the background technology, the current emergency stop solution needs to be improved. This is because the distances between adjacent connectors are different, and the distances between some connectors are small. This makes it difficult to operate the connectors, or other connectors are mistakenly triggered during the same operation, causing the risk of the equipment being mistakenly shut down.

[0037] In order to solve the above technical problems, an embodiment of the utility model provides a safety control module, including: a wiring hub module, the wiring hub module including a substrate, a first connection interface symmetrically arranged on both sides of the substrate, and connectors symmetrically arranged and connected to the first connection interface in a one-to-one correspondence; a shell, used to encapsulate the wiring hub module and expose the connector; a plurality of switching devices, connected in a one-to-one correspondence with the connectors in the wiring hub module; and a plurality of driving mechanisms, connected in a one-to-one correspondence with the plurality of the switching devices, for changing the switching state of the corresponding switching devices.

[0038] In the safety control module provided by the embodiment of the utility model, the first connection interface is symmetrically arranged on both sides of the substrate, the connectors are connected to the first connection interfaces one by one, and are symmetrically arranged, so that the setting position of the connectors can be reasonably planned, and the interval between adjacent connectors can be increased, thereby increasing the operating space of the connectors, improving the convenience of users operating the connectors, reducing or avoiding the probability of mis-conduction of the switching device, improving the operating safety of the semiconductor equipment, and reducing the size of the substrate, so that when it is packaged through a shell, the size of the shell can be reduced.

[0039] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is described below with reference to the accompanying drawings.

[0040] See also Figure 1 and Figure 2 ,in, Figure 1 This is a schematic diagram of the structure of a safety control module in an embodiment of the utility model. Figure 2 FIG. 1 is a schematic diagram of a packaging structure of a line hub module in an embodiment of the utility model. Figure 1 and Figure 2 As shown, the security control module may include:

[0041] The line collection module (not shown) includes a substrate 110, first connection interfaces symmetrically arranged on both sides of the substrate 110, and connectors that are connected to the first connection interfaces in a one-to-one correspondence and are symmetrically arranged.

[0042] In this embodiment, the first connection interface is used to receive a state detection signal of a corresponding switch device.

[0043] In this embodiment, the hub module may include a first connection interface 121 to a first connection interface 12n, where n is an integer greater than 1.

[0044] As a non-limiting embodiment, the hub module may include first connection interfaces 121 to 128 , that is, n is 8.

[0045] In this embodiment, the substrate 110 may include a wiring hub circuit board, so that the state detection signals of the corresponding switch devices received at the first connection interfaces 121 to 12n can be transmitted to the processor through the lines inside the wiring hub circuit board.

[0046] In this embodiment, the connectors are connected to the first connection interfaces in a one-to-one correspondence.

[0047] As a non-limiting example, Figure 2 As shown, the line hub module may include connectors Ct1 to Ct8 , wherein the connector Ct1 is connected to the first connection interface 121 , the connector Ct2 is connected to the first connection interface 122 , … , and the connector Ct8 is connected to the first connection interface 128 .

[0048] The housing 140 is used to encapsulate the line hub module and expose the connectors (eg, connectors Ct1 to Ct8).

[0049] On the one hand, by packaging the hub module block, the hub module can be protected from physical damage, dust, moisture and other environmental factors, and the shell 140 provides additional structural support, making the hub module block more stable, reducing the problem of unstable connection caused by vibration or impact, and improving the service life of the hub module block; on the other hand, by exposing the connector, it is convenient to achieve connection between the first connection interface and the switching device.

[0050] Furthermore, by rationally planning the location of the connector, the space on the substrate 110 can be effectively utilized, thereby reducing the size of the substrate, thereby reducing the size of the housing 140 when packaging through the housing 140, thereby reducing the packaging size.

[0051] In this embodiment, the material of the shell 140 can be metal. Metal has high strength and durability, can provide solid protection, resist impact and wear, and can further improve the service life of the hub module.

[0052] In this embodiment, the metal may be a steel plate, wherein the steel plate has high strength and rigidity, can provide good protection and support, and improve the service life of the hub module.

[0053] In a specific embodiment, the steel sheet may be a stainless steel sheet. The stainless steel sheet has good corrosion resistance and is suitable for use in various environments, especially in humid or chemically corrosive environments.

[0054] In some other embodiments, the shell may also be made of other materials, which is not limited in the embodiments of the present invention, as long as it can encapsulate the wiring hub module.

[0055] A plurality of switch devices (eg, switch devices 131 to 13n) are connected to the connectors in the line hub module in a one-to-one correspondence.

[0056] In the actual structure, the switch device 131 is connected to the first connection interface 121 through the connector Ct1, the switch device 132 is connected to the first connection interface 122 through the connector Ct2, ..., the switch device 13n is connected to the first connection interface 12n through the connector Ctn.

[0057] In this embodiment, whether the switching device is triggered can be determined by the state change of the switching device, so that based on the triggered switching device, an emergency stop process can be set for the semiconductor device corresponding to the triggered switching device.

[0058] A plurality of driving mechanisms (eg, driving mechanisms E1 to En) correspond one-to-one to the plurality of switching devices and are symmetrically arranged to change the switching states of the corresponding switching devices.

[0059] Among them, the driving mechanism E1 is connected to the switching device 131 and is used to change the switching state of the switching device 131; the driving mechanism E2 is connected to the switching device 132 and is used to change the switching state of the switching device 132; ...; the driving mechanism En is connected to the switching device 13n and is used to change the switching state of the switching device 13n.

[0060] In this embodiment, by setting a one-to-one correspondence between the switch device and the first connection interface, the predictability of the setting position of another part of the safety control module (such as the switch device and the other one of the first connection interface) can be improved on the basis of determining a part of the safety control module (such as the switch device and the other one of the first connection interface), which is beneficial to improving the convenience of users operating the driving mechanism.

[0061] In this embodiment, the symmetry axis of the first connection interface can be Figure 1 The symmetry axis L shown can reasonably plan the arrangement position of the connector and reduce the size of the substrate by symmetrically arranging the first connection interface along the symmetry axis L.

[0062] It should be noted that, first, Figure 1The layout of the schematic first connection interface, the switching device, and the driving mechanism is only for illustrative purposes and is used to represent the arrangement of various different types of devices in the safety control module, and should not be construed as a limitation of the present invention; second, Figure 1 The connection relationship between the schematic first connection interface and the switching device, and the connection relationship between the switching device and the driving mechanism are also for illustrative purposes and are used to represent the one-to-one correspondence among the three, and do not represent the actual connection relationship; third, Figure 1 The number of the schematic first connection interface, the switching device, and the driving mechanism is also for illustrative purposes. In actual applications, the number of the first connection interface, the switching device, and the driving mechanism can be flexibly set according to requirements. For example, the number of the first connection interface, the switching device, and the driving mechanism can be in the range of 6 to 8; fourth, Figure 1 Only the topological structure of some structures in the safety control module is schematically shown, and the plug-in connectors are not schematically shown.

[0063] In this embodiment, refer to Figures 2 to 4 , in which, Figure 3 is Figure 2 a top view structure schematic diagram of Figure 4 is Figure 2 a side view of Figures 2 to 4 As shown, when encapsulating through the housing 140, the plug-in connectors Ct1 to Ct8 can be symmetrically arranged side by side on the surface of the housing 140, so that the external space on both sides of the plug-in connectors can be fully utilized, meeting the operating space while minimizing the overall size to the greatest extent.

[0064] In this embodiment, the length d1 of the housing 140 can be 150 mm to 155 mm, the width w1 of the housing 140 can be 45 mm to 55 mm, and the height h1 of the housing 140 can be 30 to 40 mm.

[0065] More specifically, the length d1 of the housing 140 is 154 mm, the width w1 of the housing 140 is 50 mm, and the height h1 of the housing 140 is 35 mm.

[0066] In this embodiment, along the length direction of the housing 140, the distance d2 between any adjacent plug-in connectors is 30 mm to 35 mm.

[0067] By making the distance d2 between adjacent plug-in connectors greater than or equal to 30 mm, the distance between adjacent plug-in connectors is appropriate, which is convenient for operating the plug-in connectors and preventing accidental triggering of other plug-in connectors; and by making the distance d2 between adjacent plug-in connectors less than or equal to 35, the effective space can be fully utilized and the encapsulation size can be reduced.

[0068] It should be noted that the distance between adjacent connectors along the length direction of the housing 140 refers to the distance between the center positions of the driving mechanisms.

[0069] For example, the distance between the connectors Ct1 and Ct3 can be 30 mm, 31 mm, 32 mm, etc.

[0070] In this embodiment, the distance w2 between any adjacent connectors is greater than or equal to 29 mm along the width direction of the housing 140. By making the distance w2 between adjacent connectors greater than or equal to 29 mm, multi-finger operation is facilitated, reducing the difficulty of manipulating the connectors.

[0071] It should be noted that the distance w2 between adjacent connectors cannot exceed the width of the housing. For example, the distance w2 between adjacent connectors is less than 50 mm.

[0072] As an example, the distance between connectors Ct1 and Ct2 may be 29 mm, 30 mm, 32 mm, etc.

[0073] In this embodiment, along the normal direction of the surface of the housing 140, the distance d3 between any connector and the housing 140 is 35 mm to 40 mm.

[0074] By making the distance d3 between the connector and the housing 140 greater than or equal to 35 mm, the connector can have a sufficiently long key travel to facilitate driving the corresponding switch; by making the distance d3 between the connector and the housing 140 less than or equal to 40 mm, the probability of accidental touching due to the excessively long key travel of the connector can be avoided.

[0075] In a specific embodiment, the distance d3 between the connector Ct7 and the housing 140 is 37.366 mm.

[0076] In this embodiment, the housing 140 further has an extension plate EP.

[0077] In this embodiment, the extension direction of the extension plate EP is consistent with the symmetry axis of the first connection interface.

[0078] By arranging the extension plate EP in a direction parallel to the symmetry axis of the first connection interface, the extension plate EP may provide an additional installation area, so that the housing 140 may be installed to the semiconductor device without destroying the integrity of the housing 140 itself.

[0079] More specifically, the extension plate EP has a mounting hole H, which is used to install the hub module to the semiconductor device. This can fix the hub module, reduce the risks caused by moving or adjusting the position, and improve the operating stability of the hub module.

[0080] In this embodiment, the housing 140 has identification information (eg, identification information U1 to U8) for identifying the connector, so that the corresponding relationship between the connector and the first connection interface can be accurately identified through the identification information, thereby reducing the difficulty of wiring.

[0081] In this embodiment, the first connection interface is used to receive the status detection signal of the corresponding switching device. For example, the first connection interface 121 is used to receive the status detection signal of the switching device 131, the first connection interface 122 is used to receive the status detection signal of the switching device 132, ..., the first connection interface 12n is used to receive the status detection signal of the switching device 13n.

[0082] In this case, in order to better transmit the status detection signal when different switch devices are triggered, see Figure 5 As shown in the structural schematic diagram of the safety control module of the second embodiment of the utility model, the line hub module may also include a second connection interface 111 arranged on the substrate 110, and the second connection interface 111 and multiple first connection interfaces are cascadedly connected, so that when any switch device is triggered, a status detection signal can be output through the second connection interface 111.

[0083] In this embodiment, the cascade connection may refer to: one end of the first connection interface 121 is connected to the second connection interface 111, the other end of the first connection interface 121 is connected to one end of the first connection interface 122, the other end of the first connection interface 122 is connected to one end of the first connection interface 123,... the other end of the first connection interface 12n is connected to the second connection interface 111.

[0084] In other words, a series loop is formed between the first connection interfaces 121 to 12n and the second connection interface 111, and the status detection signals received by each first connection interface can be output through the second connection interface 111, thereby simplifying the connection lines while satisfying the normal working conditions of the hub module.

[0085] In this embodiment, the number of the second connection interface 111 is one, and multiple first connection interfaces share one second connection interface 111. This can reduce the wiring complexity within the line hub module and reduce the size of the line hub module while meeting signal transmission requirements.

[0086] It should be noted that, when the line hub module further includes the second connection interface 111 , the second connection interface 111 is also exposed on the surface of the housing 140 to facilitate plugging and unplugging operations.

[0087] In this embodiment, the switching device includes: a switch, the switch includes a control end, a first end and a second end, and the control end of the switch is connected to the driving mechanism; a third connection interface, the third connection interface is connected to the corresponding first connection interface and the switch respectively through the connector.

[0088] See also Figure 5 The switch device 131 may include a switch K1 and a third connection interface 1311 , wherein the switch K1 is electrically connected to the driving mechanism E1 and the third connection interface 1311 respectively, and the third connection interface 1311 is electrically connected to the first connection opening 121 through the connector.

[0089] In this embodiment, by setting the switch K1, the state change of the switch device 131 can be sensed in real time, so when it is determined that the state of the switch K1 has changed, it can be determined that the switch device 131 is triggered.

[0090] In this embodiment, the switch K1 can be a normally closed switch or a normally open switch. If the switch K1 is a normally closed switch, when it is determined that the switch K1 is in the disconnected state, it can be determined that the switch device 131 is triggered; or, if the switch K1 is a normally open switch, when it is determined that the switch K1 is in the on state, it can be determined that the switch device 131 is triggered.

[0091] In a specific embodiment, the switch K1 is a normally closed switch. Under normal circumstances, the switch is closed, and it can be determined that the device is in a normal operating state; when the switch device is triggered, the switch can be quickly disconnected, and the device can quickly switch from a running state to a stopped state, thereby improving the stability of the device operation.

[0092] In this embodiment, the control end of the switch K1 is used to receive a control signal from the driving mechanism E1 to change its own switch state; the first end and the second end are used to electrically connect the switch K1 to the third connection interface 1311 .

[0093] More specifically, the third connector may include: a first type terminal pair corresponding one-to-one to the switches.

[0094] In other words, the first end and the second end of the switch can be connected to the first type terminal pair in a one-to-one correspondence, so that the switch can be electrically connected to the loop of the switching device to achieve the connection and disconnection of the line between the switching device and the line hub module.

[0095] In this embodiment, the first type connection terminal pair includes a third connection terminal, one of the third connection terminals in the first type connection terminal pair is connected to the first end of the switch, and the other third connection terminal is connected to the second end of the switch.

[0096] By using terminal pairs to connect switches, standardized connections can be achieved, making the electrical connection between the switch and the device more standardized and unified, improving the stability of the electrical connection; and simplifying the wiring process, enabling quick access to the switch. In addition, the terminal pairs can be arranged compactly, saving space for the wiring module.

[0097] In this embodiment, when the driving mechanism is connected to the control end of the switch, when the driving mechanism is in an untouched state, the switch is in an original state (for example, an on state or an off state); when the driving mechanism is in a touched state, the state of the switch changes (for example, from an on state to an off state, or from an off state to an on state), so the on-off state of the switch can be changed by operating the driving mechanism, so that an emergency stop operation can be performed on the corresponding setting.

[0098] In a specific implementation example, the driving mechanism may be an emergency stop switch (Emergency Off, EMO).

[0099] It should be noted that the structures of the switch devices 132 to 13n can refer to the detailed description of the switch device 131, which will not be described again here.

[0100] To facilitate understanding, the implementation of the safety control module in the embodiment of the present utility model is described by way of example.

[0101] Combination Figure 1 and Figure 5 , see Figure 6 A specific structural diagram of a safety control module in an embodiment of the utility model is shown in FIG. Figure 6 As shown, for ease of explanation, the first connection interface 12i represents any first connection interface, the third connection interface 13i1 represents any third connection interface, switches Ki1 and Ki2 identify switches in any switching device, and the drive structure Ei represents any drive structure, wherein i is any integer from 1 to n.

[0102] The switching device may include normally closed switches Ki1 and Ki2, so that when the switching states of the normally closed switches Ki1 and Ki2 are inconsistent (for example, the normally closed switch Ki1 is in the disconnected state, while the normally closed switch Ki2 is still in the on state), or when the current state of the normally closed switches Ki1 and Ki2 is the disconnected state, it indicates that the switching device is triggered.

[0103] It should be noted that this embodiment is described as a switch device having two switches. In some other embodiments, the number of switches can also be one or more than three. The embodiment of the utility model does not impose any restriction on the number of switches, as long as the triggering state of the switch device can be identified.

[0104] In this embodiment, the normally-closed switches Ki1 and Ki2 can share a control terminal, so that the switching states between the normally-closed switches K1 and K2 can be controlled simultaneously, and the switching states between the normally-closed switches K1 and K2 can be unified.

[0105] The first connection interface 12i may include a second-type terminal pair composed of the first connection terminals p1 and p4, and a second-type terminal pair composed of the first connection terminals p2 and p3; the third connection interface 13i1 may include a first-type terminal pair composed of the third connection terminals n1 and n4, and a first-type terminal pair composed of the third connection terminals n2 and n3.

[0106] Among them, for one of the first-type terminal pairs, the first end of the third connection terminal n1 is connected to the first end of the switch Ki1, and the second end of the third connection terminal n1 is connected to the first connection terminal p1; the first end of the third connection terminal n4 is connected to the second end of the switch Ki1, and the second end of the third connection terminal n4 is connected to the first connection terminal p4.

[0107] For the other first-type terminal pair, the first end of the third connection terminal n2 is connected to the first end of the switch Ki2, and the second end of the third connection terminal n2 is connected to the first connection terminal p2; the first end of the third connection terminal n3 is connected to the second end of the switch Ki2, and the second end of the third connection terminal n3 is connected to the first connection terminal p3.

[0108] This embodiment also provides a safety control device. Refer to Figure 7 the structural schematic diagram of a safety control device shown in Figure 7 As shown, the safety control device 300 may include the safety control module 100 and the processor 200 described in any of the foregoing embodiments. The processor 200 is electrically connected to the safety control module 100 and is used to process the status detection signal.

[0109] Among them, the specific structure and working principle of the safety control module can be referred to the foregoing examples and will not be elaborated here.

[0110] The processor can be implemented by a processing chip such as a Central Processing Unit (CPU) or a Field Programmable Gate Array (FPGA), or can also be implemented by an Application Specific Integrated Circuit (ASIC), a Programmable Logic Controller (PLC), or one or more integrated circuits configured to implement the embodiments of the present specification.

[0111] Specifically, when the processor receives the status detection signal from the security control module, by processing the status detection signal, it can determine that there is a triggered switch module, thereby reminding the operator to perform maintenance and reset operations.

[0112] This embodiment also provides a semiconductor device, which may include the security control device described in any of the foregoing embodiments.

[0113] In this embodiment, the semiconductor device includes a plurality of processing chambers, and the plurality of processing chambers are all electrically connected to the security control device.

[0114] More specifically, a security control device includes a plurality of switching devices, and the plurality of switching devices are electrically connected to the plurality of processing chambers in a one-to-one correspondence, so that when an abnormality occurs in the processing chamber, the corresponding switching device can be triggered to cut off the power supply to the processing chamber, improving the safety during the operation of the processing chamber.

[0115] Although this specification discloses the above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope defined by the claims.

Claims

1. A security control module, characterized in that, include: A line collection module, the line collection module comprising a substrate, first connection interfaces symmetrically arranged on both sides of the substrate, and connectors symmetrically arranged and connected to the first connection interfaces in a one-to-one correspondence; A housing, used to encapsulate the wiring hub module and expose the connector; A plurality of switch devices are connected one by one with the connectors in the line hub module; A plurality of driving mechanisms are connected to the plurality of switch devices in a one-to-one correspondence, and are used to change the switch states of the corresponding switch devices.

2. The security control module according to claim 1, wherein A plurality of connectors are symmetrically arranged side by side on the surface of the housing.

3. The security control module according to claim 1, characterized in that The housing also has an extension plate, and the extension plate has a mounting hole; Wherein, the extension direction of the extension plate is consistent with the symmetry axis of the first connection interface; The mounting hole is used to mount the hub module to the semiconductor device.

4. The security control module according to claim 1, wherein, Along the length direction of the housing, the distance between any adjacent connectors is 30 mm to 35 mm; Along the width direction of the housing, the distance between any adjacent connectors is greater than or equal to 29 mm; Along the normal direction of the shell surface, the distance between any one of the connectors and the shell is 35 mm to 40 mm.

5. The safety control module according to claim 1, characterized in that The housing has identification information for identifying each connector.

6. The security control module according to claim 1, characterized in that, The length of the shell is 150 mm to 155 mm, and the width of the shell is 45 mm to 55 mm.

7. The security control module according to claim 1, wherein The line hub module further includes a second connection interface disposed on the substrate, wherein the second connection interface is cascade-connected to a plurality of the first connection interfaces; The first connection interface is used to receive a state detection signal of a corresponding switch device, and the second connection interface is used to output a state detection signal of a triggered switch device.

8. The safety control module according to claim 7, wherein, The number of the second connection interface is 1.

9. The safety control module according to claim 1, characterized in that The switch device comprises: A switch, the switch comprising a control end, a first end and a second end, and the control end of the switch is connected to the driving mechanism; a third connection interface, the third connection interface being connected to the corresponding first connection interface and the switch respectively through the connector; Among them, the third connection interface includes: a first type connection terminal pair, which corresponds one-to-one to the switch, the first type connection terminal pair includes a third connection terminal, one of the third connection terminals in the first type connection terminal pair is connected to the first end of the switch, and the other third connection terminal is connected to the second end of the switch.

10. The safety control module according to claim 9, characterized in that, The switch is a normally closed switch.

11. A safety control device, characterized in that, include: The safety control module according to any one of claims 1 to 10; A processor is electrically connected to the safety control module and is used to process the status detection signal.

12. A semiconductor device, characterized in that, Comprising the safety control device as claimed in claim 11.

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