Carrying device

Abstract

The embodiment of the utility model discloses a carrying device. The carrying device comprises a shell, a picking mechanism, a walking mechanism and a reader-writer, the reader-writer is arranged on the side face, in the advancing direction of the reader-writer, of the shell, and a first preset angle is formed between the center line of a lens of the reader-writer and the side face, where the lens of the reader-writer is installed, of the shell so that label information arranged on the ground can be recognized. According to the embodiment of the invention, the reader-writer is arranged on the side surface of the shell, and the first preset angle is formed between the center line of the lens of the reader-writer and the side surface of the shell where the lens of the reader-writer is mounted, so that the lens of the reader-writer can cover the ground range from the side surface of the shell to the shell of the adjacent carrying device; and then label information arranged on the ground is read, so that a worker can timely obtain position information or working procedures where the carrying device is located, then the walking mechanism drives the shell to move to the corresponding position or working procedure, and then the wafer container is carried to a set position through the picking mechanism.

Description

Technical Field

[0001] The present application relates to the technical field of wafer handling, and particularly to a handling device. Background Art

[0002] In the semiconductor manufacturing process flow, in order to improve the transfer efficiency of wafers between different processes, generally multiple wafers are placed in a carrier (wafer cassette), and then a handling device is used to transport the wafer cassette from the current process position to the next process position.

[0003] Currently, some wafer cassette handling devices use radio frequency identification technology (RFID, full name: Radio Frequency Identification). The target can be identified non-contactingly through radio frequency signals. Specifically, a semiconductor RFID reader / writer is installed on the wafer cassette handling device to achieve fast and accurate identification and tracking of the moving position of the wafer cassette handling device. During the movement of the wafer cassette handling device, generally, the semiconductor RFID reader / writer reads the tag information (tag) set on the traveling route, and then obtains the position information or process of the current wafer cassette handling device for management. Since the width of the traveling route where the wafer cassette handling device is located is relatively narrow, when two or more wafer cassette handling devices travel side by side, the wafer cassette handling device will block the reading and writing field of view of the semiconductor RFID reader / writer of its adjacent wafer cassette handling device, resulting in the inability of the staff to obtain the position information or process of the wafer cassette handling device. Summary of the Utility Model

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. For this reason, the present application provides a handling device to solve the problem that the position information or process of the handling device cannot be obtained when multiple handling devices travel side by side in the prior art.

[0005] The present application provides a handling device, including:

[0006] A housing, on which a storage area for carrying a wafer container is provided;

[0007] A picking mechanism, which is arranged on the housing and is used to pick up the wafer container to a set position;

[0008] A traveling mechanism, which is used to drive the housing to move along a set route;

[0009] A reader / writer, which is arranged on the side of the housing along its traveling direction, and there is a first preset angle between the lens center line of the reader / writer and the side of the housing on which it is installed to identify the tag information set on the ground.

[0010] Based on the above-described embodiments of the handling device, by setting the reader-writer on the side of the housing, and there being a first preset angle between the lens center line of the reader-writer and the side of the housing where it is installed, the lens of the reader-writer can cover the ground range from this side of the housing to the housing of the adjacent handling device, thereby reading the label information set on the ground, so that the staff can timely obtain the position information or process of the handling device, and then the traveling mechanism drives the housing to move to the corresponding position or process, and then the picking mechanism transports the wafer container to the set position.

[0011] In one embodiment of the above-described handling device, an installation component is provided inside the housing, the reader-writer is installed inside the housing through the installation component, a side portion of the housing is inclined inward at a second preset angle to form a reading space, and the reading space extends vertically into the housing, so that the lens of the reader-writer reads the label information set on the ground through the reading space.

[0012] In one embodiment of the above-described handling device, the installation component includes a fixing frame and an adjusting frame, the fixing frame is installed inside the housing, the adjusting frame is used to fix the reader-writer, the fixing frame is provided with an arc-shaped hole and a positioning hole, the adjusting frame is provided with a first fitting hole and a second fitting hole, a first locking rod passes through the first fitting hole and the positioning hole, and a second locking rod passes through the second fitting hole, and the second locking rod is used to move and lock along the arc in the arc-shaped hole to adjust the angle between the adjusting frame and the vertical direction.

[0013] In one embodiment of the above-described handling device, a first limiting member and a second limiting member are provided in the storage area, the first limiting member and the second limiting member are oppositely arranged to form a limiting space, and the limiting space is used to limit the movement of the wafer container in the horizontal and / or vertical directions.

[0014] In one embodiment of the above-described handling device, the first limiting member includes a bottom plate and a vertical plate that are perpendicular to each other, side baffles are respectively provided on opposite sides of the vertical plate along its length direction, and an intermediate plate is provided on the bottom plate along its length direction to form a first card slot for clamping the edge of the wafer container with the side baffles;

[0015] Second card slots are respectively provided on opposite sides of the second limiting member along its length direction.

[0016] In one embodiment of the above-described handling device, a first sensor is provided between the first limiting member and the second limiting member, and the first sensor is used to detect whether the wafer container is in the limiting space;

[0017] The first limiting member and / or the second limiting member is provided with a second sensor along its length direction, and the second sensor is used to detect whether the wafer container is installed on the first limiting member and / or the second limiting member.

[0018] In an embodiment of the above-mentioned handling device, the storage area is provided with at least two groups of corresponding first limiting members and second limiting members to form at least two limiting spaces.

[0019] In an embodiment of the above-mentioned handling device, the reader-writer is provided on both opposite sides of the housing along its traveling direction.

[0020] In an embodiment of the above-mentioned handling device, the traveling mechanism includes a battery module provided in the housing. The battery module has a charging port. The housing is provided with a charging channel penetrating along the axis of the charging port, and detachable baffles are provided at both ends of the charging channel along its own axial direction and installed on the housing.

[0021] In an embodiment of the above-mentioned handling device, an ultrasonic sensor is provided in the housing, and an elastic anti-collision strip is provided on the outer side of the housing. The anti-collision strip is electrically connected to the traveling mechanism;

[0022] and / or,

[0023] A lidar is provided in the housing, and the lidar is used to receive and feedback spatial information on a set route.

[0024] One or more of the above embodiments of the present application have at least one or more of the following beneficial effects:

[0025] By setting the reader-writer on the side of the housing, and there is a first preset angle between the lens center line of the reader-writer and the side of the housing where it is installed, so that the lens of the reader-writer can cover the ground range from this side of the housing to the housing of the adjacent handling device, and then read the label information set on the ground, so that the staff can timely obtain the position information or process of the handling device, and then the traveling mechanism drives the housing to move to the corresponding position or process, and then the picking mechanism transports the wafer container to the set position.

[0026] Additional aspects and advantages of the present application will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present application. Description of the Drawings

[0027] Referring to the accompanying drawings, the disclosure of the present application will become easier to understand. It is easy for those skilled in the art to understand that: these drawings are only for illustrative purposes and are not intended to limit the protection scope of the present application. In addition, similar numbers in the figures are used to represent similar components, where:

[0028] Figure 1 is a schematic structural diagram provided by an embodiment of the present application for showing the structure of a handling device;

[0029] Figure 2 is a schematic structural diagram provided by an embodiment of the present application for showing the installation position of a reader-writer;

[0030] Figure 3 is a schematic structural diagram provided by an embodiment of the present application for showing an installation component;

[0031] Figure 4 is Figure 2 an enlarged view of part A in

[0032] Figure 5 is a schematic structural diagram provided by an embodiment of the present application for showing a charging channel;

[0033] Figure 6 is a schematic structural diagram provided by an embodiment of the present application for showing a jaw;

[0034] Figure 7 is a schematic structural diagram provided by an embodiment of the present application for showing the inside of a jaw.

[0035] Explanation of reference numerals:

[0036] 1. Housing; 11. Storage area; 12. Battery module; 13. Charging channel; 131. Removable baffle; 14. Ultrasonic sensor; 15. Anti-collision strip; 16. LiDAR; 2. Pickup mechanism; 21. Manipulator; 22. Jaw; 221. Transmission unit; 222. Clamping unit; 2221. Clamping part; 223. Driving unit; 224. Sub-bracket; 3. Traveling mechanism; 4. Reader-writer; 5. Installation component; 51. Reading space; 52. Fixed bracket; 521. Arc-shaped hole; 522. Positioning hole; 53. Adjusting bracket; 531. First mating hole; 532. Second mating hole; 6. First limiting member; 61. Bottom plate; 62. Vertical plate; 63. Side baffle; 64. Intermediate plate; 65. First card slot; 7. Second limiting member; 71. Limiting space; 72. Second card slot; 73. First sensor; 74. Second sensor; 8. Wafer container. Detailed implementation manners

[0037] The following describes some embodiments of the present application with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present application and are not intended to limit the protection scope of the present application.

[0038] As described in the background art, when multiple wafer cassette handling devices travel side by side on the travel route, due to the narrow width of the travel route, the wafer cassette handling device will block the reading and writing field of view of the semiconductor RFID reader of its adjacent wafer cassette handling device, thereby causing the staff to be unable to obtain the position information or process of the wafer cassette handling device.

[0039] Therefore, the present application creatively proposes a handling device, which includes a housing, a picking mechanism, a traveling mechanism, and a reader. By setting the reader on the side of the housing, and there is a first preset angle between the lens center line of the reader and the side of the housing where it is installed, so that the lens of the reader can cover the ground range from this side of the housing to the housing of the adjacent handling device, and then read the label information set on the ground, so that the staff can timely obtain the position information or process of the handling device, and then the traveling mechanism drives the housing to move to the corresponding position or process, and then the picking mechanism transports the wafer container to the set position.

[0040] The following will specifically elaborate on the present application through specific embodiments.

[0041] Referring to Figures 1 to 7 As shown, an embodiment of the present application provides a handling device, which includes a housing 1, a picking mechanism 2, a traveling mechanism 3, and a reader 4. A storage area 11 for carrying a wafer container 8 is provided on the housing 1. The picking mechanism 2 is arranged on the housing 1 and is used to pick up the wafer container 8 to the set position. The traveling mechanism 3 is used to drive the housing 1 to move along the set route; the reader 4 is arranged on the side of the housing 1 along its own traveling direction, and there is a first preset angle between the lens center line of the reader 4 and the side of the housing 1 where it is installed to identify the label information set on the ground.

[0042] It can be understood that referring to Figure 1 and Figure 2 As shown, the set position includes the storage area 11. During the handling process, the handling device will transport the wafer container 8 at a certain process to the storage area 11 through the picking mechanism 2, then move to another process through the traveling mechanism 3, and then transport the wafer container 8 at the storage area 11 to this process through the picking mechanism 2. In addition, the set route can be the route between wafer processing processes or a route that can be arbitrarily set according to needs.

[0043] In some examples, the first preset angle is between 0° and 40°. In this embodiment, the first preset angle is 22°.

[0044] In this embodiment, the reader 4 is a semiconductor RFID reader.

[0045] In some examples, the traveling mechanism 3 can be an AGV cart, and the traveling mechanism 3 can also be other transportation devices that can achieve the functions of traveling and handling.

[0046] It should be noted that the "side along its own traveling direction" here is the same as the ordinary side, which means that when the observer's viewing direction is the front, the left and right sides in the front are the sides.

[0047] Specifically, when two or more handling devices are traveling side by side on a certain set route, even if the width of the set route is relatively narrow, the lens of the reader-writer 4 provided on the side of the housing 1 in the traveling direction has a certain angle with the vertical direction, so that the lens of the reader-writer 4 can cover the ground between two adjacent handling devices, thereby reading the label information provided on the ground, enabling the staff to timely obtain the process position where the handling device is located, so as to track and manage the wafer cassette carried by the handling device, and thus better manage the entire production process of the wafer. At the same time, the handling device itself can also obtain its current location in order to perform the work corresponding to its current location, such as transporting the wafer container 8 at this place to the storage area 11 of the housing 1 through the picking mechanism 2.

[0048] Further, referring to Figure 2 With Figure 3 As shown, in some examples, an installation component 5 is provided in the housing 1, and the reader-writer 4 is installed in the housing 1 through the installation component 5. A side portion of the housing 1 is inclined inward by a second preset angle to form a reading space 51, and the reading space 51 extends into the housing 1 along the vertical direction, so that the lens of the reader-writer 4 reads the label information provided on the ground through the reading space 51.

[0049] In some examples, the second preset angle includes between 0° and 40°. In this embodiment, the second preset angle is 22°.

[0050] Specifically, by inclining the side portion of the housing 1 inward, the maximum width dimension of the handling device is ensured to be the dimension of the housing 1, so that when the handling devices are traveling side by side, the problem of collision of the reader-writer 4 will not occur. The second preset angle can be the same as the first preset angle, so as to facilitate the staff to observe whether the lens of the reader-writer 4 is installed correctly; the second preset angle can be smaller than the first preset angle, so that the reading space 51 can be larger to avoid the part of the housing 1 inclined inward from blocking the viewing field of the lens of the reader-writer 4.

[0051] In some examples, referring to Figure 2 With Figure 3As shown, the installation component 5 includes a fixing bracket 52 and an adjusting bracket 53. The fixing bracket 52 is installed inside the housing 1, and the adjusting bracket 53 is used to fix the reader-writer 4. The fixing bracket 52 is provided with an arc-shaped hole 521 and a positioning hole 522. The adjusting bracket 53 is provided with a first mating hole 531 and a second mating hole 532. A first locking rod passes through the first mating hole 531 and the positioning hole 522, and a second locking rod passes through the second mating hole 532. The second locking rod is used to move along the arc in the arc-shaped hole 521 and lock to adjust the angle between the adjusting bracket 53 and the vertical direction.

[0052] It can be understood that the locking methods of the first locking rod and the second locking rod include various methods such as clamping and threaded connection. In this example, the threaded connection method is adopted.

[0053] In this embodiment, both the adjusting bracket 53 and the fixing bracket 52 are right-angled bending plates, and they can also be any other installation structures that can achieve the function of fixed installation. The first mating hole 531, the second mating hole 532, and the positioning hole 522 are all circular through holes.

[0054] Specifically, before or after the debugging of the handling device is completed, the angle of the reader-writer 4 relative to the vertical direction can be adjusted through the installation component 5, that is, the first preset angle between the reader-writer 4 and the side surface of the housing 1 where it is installed is adjusted, so that the reader-writer 4 can quickly and accurately identify the label information set on the ground. During adjustment, the fixing bracket 52 has been installed inside the housing 1, and the adjusting bracket 53 has been installed with the reader-writer 4; first, align the first mating hole 531 with the positioning hole 522, and then insert the first locking rod into the first mating hole 531 and the positioning hole 522 to achieve the preliminary positioning of the adjusting bracket 53 and the fixing bracket 52; then insert the second locking rod into the second mating hole 532 and the arc-shaped hole 521 respectively, and then move the second rod along the arc in the arc-shaped hole 521, thereby driving the fixing bracket 52 to move along the arc, so as to change the angle of the fixing bracket 52 relative to the vertical direction, and then fix the angle of the reader-writer 4 relative to the vertical direction by screwing nuts on the first locking rod and the second locking rod and tightening them respectively.

[0055] It can be understood that the installation component 5 can also be other structures that can achieve angle adjustment, such as a metal bellows with a set toughness. The metal bellows can be bent by an external force and maintain the bent state unless it is subjected to a certain external force again. By installing the reader-writer 4 on the metal bellows, the angle of the reader-writer 4 relative to the vertical direction can be adjusted by bending the metal bellows.

[0056] In some examples, refer to Figure 2 and Figure 4As shown in the figure, a first restricting member 6 and a second restricting member 7 are provided in the storage area 11. The first restricting member 6 and the second restricting member 7 are oppositely arranged to form a restricting space 71 for restricting the movement of the wafer container 8 in the horizontal and / or vertical directions.

[0057] It can be understood that the first restricting member 6 and the second restricting member 7 can be strip-shaped, triangular prisms, quadrangular prisms or other multi-prisms, or hemispherical, spherical, etc., as long as they can restrict the wafer container 8. In this embodiment, the first restricting member 6 and the second restricting member 7 are integrally strip-shaped.

[0058] Further, in some examples, referring to Figure 4 As shown in the figure, the first restricting member 6 includes a bottom plate 61 and a vertical plate 62 that are perpendicular to each other. Side baffles 63 are respectively provided on the opposite sides of the vertical plate 62 along its length direction. The bottom plate 61 is provided with an intermediate plate 64 along its length direction to form a first card slot 65 for clamping the edge of the wafer container 8 with the side baffle 63; second card slots 72 are respectively provided on the opposite sides of the second restricting member 7 along its length direction.

[0059] It should be noted that the wafer container 8 generally has edges for being clamped or placed.

[0060] Specifically, when the picking mechanism 2 transports the wafer container 8 to the storage area 11, the picking mechanism 2 places the wafer container 8 on the intermediate plate 64, and then inserts the edges of a relative side of the corresponding wafer container 8 into the corresponding first card slots 65 respectively. At the same time, the vertical plate 62 will also restrict one surface of the wafer container 8; then insert the edges of the other two relative sides of the wafer container 8 into the corresponding second card slots 72, so as to realize the restriction of the wafer container 8 in the horizontal direction and ensure the placement stability of the wafer container 8 during the movement of the handling device.

[0061] It can be understood that the first restricting member 6 and the second restricting member can also be respectively arranged in a semi-circular ring structure to realize the restriction of at least four corners of the wafer container, so as to realize the restriction of the wafer container 8 in the horizontal direction.

[0062] Further, in some examples, a first sensor 73 is provided between the first restricting member 6 and the second restricting member 7 for detecting whether the wafer container 8 is in the restricting space 71; a second sensor 74 is provided along the length direction of the first restricting member 6 and / or the second restricting member 7 for detecting whether the wafer container 8 is installed on the first restricting member 6 and / or the second restricting member 7.

[0063] Among them, Figures 1 to 5 the radially arranged cylinders in the figure represent the detection directions of the sensors, Figure 4The first sensor 73 is referred to by referring to the detection direction of the first sensor 73, and the first sensor 73 is provided directly below the restricted space 71.

[0064] It should be noted that, in this embodiment, in order to make full use of the space and reduce the moving path of the picking mechanism 2, the picking mechanism 2 is arranged at the middle position on the top of the housing 1, and a storage area 11 is respectively arranged on both sides of the picking mechanism 2 (both sides along the width direction of the housing 1) to increase the number of wafer containers 8 that the handling device can carry in a single trip.

[0065] Furthermore, at least two sets of corresponding first restricting members 6 and second restricting members 7 are provided in the storage area 11 to form at least two restricted spaces 71, so that multiple wafer containers 8 can be placed in the same storage area 11.

[0066] Specifically, when the picking mechanism 2 transports the wafer container 8 to the storage area 11, the first sensor 73 can timely know whether there is a wafer container 8 in the corresponding restricted space 71 to avoid misplacement; then the second sensor 74 can also be used to know whether the wafer container 8 is installed in place to avoid abnormal movement or dropping of the wafer container 8 during the walking process of the handling device.

[0067] In some examples, readers 4 are provided on both opposite sides of the housing 1 along its own traveling direction, so as to improve the adaptability of the handling device during the traveling process. The handling device can select one side of the reader 4 or both sides of the readers 4 to work according to needs, so as to read the label information in a narrow space.

[0068] In some examples, referring to Figure 5 shown, Figure 5 is a view of one side of the housing 1 with the detachable baffle 131 removed. The traveling mechanism 3 includes a battery module 12 provided in the housing 1. The battery module 12 has a charging port. The housing 1 is provided with a charging channel 13 penetrating along the axis of the charging port. Detachable baffles 131 are installed at both ends of the charging channel 13 along its own axial direction. When the handling device needs to be charged, the detachable baffle 131 can be opened on any side of the axial direction of the charging channel 13, so that the staff can charge the battery module 12 or remove the battery module 12 in the case of multiple handling devices running side by side.

[0069] Furthermore, in some examples, referring to Figure 1 and Figure 2 shown, an ultrasonic sensor 14 is provided in the housing 1, and an elastic anti-collision strip 15 is provided on the outside of the housing 1. The anti-collision strip 15 is electrically connected to the traveling mechanism 3;

[0070] and / or,

[0071] Inside the housing 1, there is a lidar 16 which is used to receive and feedback the spatial information on the set route.

[0072] In this embodiment, a plurality of lidars 16 are arranged along the circumferential side of the housing 1 (outside the traveling mechanism 3). Among them, at least one lidar 16 is provided on each side of the housing 1 to fully detect the obstacles on the circumferential side of the traveling mechanism 3, so as to completely receive the spatial information on the set route and feedback it to the handling device. When an obstacle enters the set range, the traveling mechanism 3 can be made to reduce its running speed or stop, thus avoiding collisions between the handling device and the obstacles. At the same time, a plurality of ultrasonic sensors 14 are arranged along the circumferential side of the housing 1, which can detect obstacles including glass materials around the handling device. When an obstacle enters the set range, the traveling mechanism 3 can be made to reduce its running speed so that the handling device can make arrangements for the next step and reduce the occurrence of collisions. In addition, at least anti-collision strips 15 are installed on the circumferential edges of the housing 1. When the handling device touches an obstacle, the pressure signal is converted into an electrical signal through the anti-collision strips 15, causing the corresponding components to short-circuit, and then making the traveling mechanism 3 brake emergently.

[0073] In some examples, the picking mechanism 2 is a multi-axis manipulator 21, such as a five-axis or six-axis one, and the user can select according to the space and grasping requirements. A gripper 22 for gripping the wafer container 8 is provided at the grasping end of the manipulator 21. In this embodiment, referring to Figure 1 , Figure 6 and Figure 7 as shown, the gripper 22 includes a transmission unit 221, a clamping unit 222 and a driving unit 223; at both ends of the transmission unit 221 along its transmission direction, a sub-bracket 224 is respectively provided, and the sub-bracket 224 has at least two mounting surfaces located on the same plane; and the clamping unit 222 includes at least two pairs of clamping parts 2221, and one clamping part 2221 is provided on each mounting surface. A first preset angle is formed between two adjacent clamping parts 2221 on the sub-bracket 224 to adapt to the wafer containers 8 in different placement states; the driving unit 223 is connected to the transmission unit 221 and drives the two sub-brackets 224 to approach or separate from each other, so as to drive each pair of clamping parts 2221 to clamp or open, realizing the picking and placing of the wafer container 8.

[0074] Specifically, after learning the placement state of the wafer container 8, the gripper 22 moves to the side of the wafer container 8 and places a corresponding pair of clamping portions 2221 on the opposite sides of the wafer container 8 respectively. Then, the driving unit 223 is activated to drive the two sub-brackets 224 to approach each other, thereby driving the pair of clamping portions 2221 to clamp the wafer container 8. After the gripper 22 moves the wafer container 8 to the corresponding station, the pair of clamping portions 2221 can be released. When the gripper 22 needs to clamp a wafer container 8 in other placement states, only a corresponding pair of clamping portions 2221 needs to be selected. Moreover, since the mounting surfaces on the sub-brackets 224 are all in the same plane, the clamping portions 2221 that do not need to clamp the wafer container 8 are not likely to interfere with the wafer container 8 to be clamped. At the same time, a first preset angle is formed between two adjacent clamping portions 2221 on the sub-bracket 224, which further reduces the possibility of the clamping portions 2221 that do not need to clamp the wafer container 8 interfering with the wafer container 8 to be clamped.

[0075] In the description of this specification, the descriptions with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0076] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0077] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present application. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. A handling device, characterized in that, The handling device includes: a housing, on which a storage area for carrying a wafer container is provided; a picking mechanism, which is arranged on the housing and is used for picking up the wafer container to a set position; a traveling mechanism, which is used for driving the housing to move along a set route; a reader-writer, which is arranged on the side of the housing along its traveling direction, and there is a first preset angle between the lens center line of the reader-writer and the side of the housing on which it is installed, so as to identify the label information set on the ground.

2. The handling device according to claim 1, characterized in that, An installation component is arranged in the housing, and the reader-writer is installed in the housing through the installation component. A side part of the housing inclines inward at a second preset angle to form a reading space, and the reading space extends into the housing along the vertical direction, so that the lens of the reader-writer reads the label information set on the ground through the reading space.

3. The handling device according to claim 2, characterized in that, The installation component includes a fixing frame and an adjusting frame. The fixing frame is installed in the housing, and the adjusting frame is used for fixing the reader-writer. The fixing frame is provided with an arc-shaped hole and a positioning hole. The adjusting frame is provided with a first fitting hole and a second fitting hole. A first locking rod passes through the first fitting hole and the positioning hole, and a second locking rod passes through the second fitting hole. The second locking rod is used to move and lock along the arc in the arc-shaped hole to adjust the included angle between the adjusting frame and the vertical direction.

4. The handling device according to claim 1, characterized in that, A first limiting member and a second limiting member are arranged in the storage area. The first limiting member and the second limiting member are arranged oppositely to form a limiting space, and the limiting space is used for limiting the movement of the wafer container in the horizontal and / or vertical directions.

5. The handling device according to claim 4, characterized in that, The first limiting member includes a bottom plate and a vertical plate that are perpendicular to each other. Side baffles are respectively arranged on the opposite sides of the vertical plate along its length direction. An intermediate plate is arranged on the bottom plate along its length direction to form a first card slot for clamping the edge of the wafer container with the side baffles; Second card slots are respectively arranged on the opposite sides of the second limiting member along its length direction.

6. The handling device according to claim 5, characterized in that A first sensor is arranged between the first limiting member and the second limiting member, and the first sensor is used for detecting whether the wafer container is in the limiting space; A second sensor is arranged on the first limiting member and / or the second limiting member along its length direction, and the second sensor is used for detecting whether the wafer container is installed on the first limiting member and / or the second limiting member.

7. The handling device according to claim 5, characterized in that, At least two groups of the corresponding first limiting members and the second limiting members are arranged in the storage area to form at least two limiting spaces.

8. The handling device according to any one of claims 1-7, characterized in that, The reader-writers are arranged on the two opposite sides of the housing along its traveling direction.

9. The handling device according to any one of claims 1-7, characterized in that, The traveling mechanism includes a battery module arranged in the housing. The battery module has a charging port. A charging channel is axially penetrated through the housing along the axis of the charging port. Removable baffles installed on the housing are arranged at both ends of the charging channel along its own axis.

10. The handling device according to any one of claims 1-7, characterized in that, An ultrasonic sensor is arranged in the housing, and an elastic anti-collision strip is arranged on the outer side of the housing. The anti-collision strip is electrically connected to the traveling mechanism; and / or a lidar is arranged in the housing, and the lidar is used for receiving and feedbacking the space information on the set route.

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