Double-vision alignment device

Abstract

The utility model provides a double-vision alignment device, and belongs to the technical field of semiconductors. The double-vision alignment device comprises a box body, a first vision structure, a second vision structure and a light reflection assembly. A containing cavity is defined by the box body, and a first light-transmitting part and a second light-transmitting part which communicate with the containing cavity are arranged on the two opposite sides of the box body in the first direction correspondingly. The first visual structure is at least partially accommodated in the accommodating cavity, and the first visual structure is used for shooting a first target object; the second visual structure is adjacent to the first visual structure, the axis of the second visual structure is parallel to the axis of the first visual structure, and the second visual structure is used for shooting a second target object; the light reflecting assembly can reflect light penetrating through the first light transmitting part to the first visual structure and reflect light penetrating through the second light transmitting part to the second visual structure. The double-vision alignment device provided by the utility model not only can improve the adjustment efficiency of the light path and reduce the production cost, but also can improve the alignment precision of the double-vision alignment device.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a double-vision alignment device. Background Art

[0002] In recent years, applications of visual positioning using cameras have been increasing, and the requirements for positioning accuracy have also been getting higher and higher, especially in the field of semiconductor manufacturing. In the process of semiconductor manufacturing, problems such as poor alignment effect and slow speed of a single set of vision systems have become increasingly prominent. At present, a double-vision alignment system has been successively adopted in multiple manufacturing processes, such as the dicing process, the bonding process, etc.

[0003] Currently, the double-vision alignment systems on the market have problems such as poor positioning accuracy and high costs, which affect the system accuracy of each process equipment in the semiconductor manufacturing process. Summary of the Utility Model

[0004] In view of this, the purpose of the utility model is to overcome the deficiencies in the prior art and provide a double-vision alignment device.

[0005] The utility model provides the following technical solution: A double-vision alignment device, comprising:

[0006] A box body defining an accommodation cavity. Along a first direction, two opposite sides of the box body are respectively provided with a first light-transmitting part and a second light-transmitting part communicating with the accommodation cavity;

[0007] A first vision structure, at least partially received in the accommodation cavity, and the first vision structure is used for photographing a first target object;

[0008] A second vision structure, adjacent to the second vision structure, and the axis of the second vision structure is parallel to the axis of the first vision structure. The second vision structure is used for photographing a second target object;

[0009] A light reflection component, received in the accommodation cavity and connected to the box body. The light reflection component can reflect the light passing through the first light-transmitting part to the first vision structure, and reflect the light passing through the second light-transmitting part to the second vision structure.

[0010] In some embodiments, the light reflection component includes a first mirror body, a second mirror body and a double-sided mirror;

[0011] The double-sided mirror is arranged between the first mirror body and the second mirror body and is rotatably connected to the box body;

[0012] The double-sided mirror has a first reflecting surface and a second reflecting surface arranged back to back. The first reflecting surface faces the first light-transmitting part and the first mirror body, and the second reflecting surface faces the second light-transmitting part and the second mirror body.

[0013] In some embodiments, the angle between the axis of the first light-transmitting part and the first reflecting surface is equal to the angle between the axis of the second light-transmitting part and the second reflecting surface;

[0014] The angle between the reflecting surface of the first mirror body and the first reflecting surface is equal to the angle between the reflecting surface of the second mirror body and the second reflecting surface.

[0015] In some embodiments, the box body includes a support frame, the support frame is received in the accommodation cavity, the support frame is arranged between the first mirror body and the second mirror body, and the double-sided mirror is rotatably connected to the support frame.

[0016] In some embodiments, the midpoint of the double-sided mirror is located on the axis of the first light-transmitting part, and the axes of the first light-transmitting part and the second light-transmitting part coincide;

[0017] The first light-transmitting part and the second light-transmitting part are centrosymmetric about the rotation axis of the double-sided mirror.

[0018] In some embodiments, the first mirror body is a first reflecting mirror or a first prism;

[0019] The second mirror body is a second reflecting mirror or a second prism.

[0020] In some embodiments, the first visual structure includes a first lens and a first camera, and the first camera is arranged on the side of the first lens away from the light reflection assembly.

[0021] In some embodiments, the second visual structure includes a second lens and a second camera, and the second camera is arranged on the side of the second lens away from the light reflection assembly.

[0022] In some embodiments, the first lens is provided with a first built-in coaxial light source;

[0023] The second lens is provided with a second built-in coaxial light source, and the first built-in coaxial light source and the second built-in coaxial light source are arranged in opposite directions and have coincident axes.

[0024] In some embodiments, the box body includes a base and a cover body. The base is connected to the cover body, and the cover body is provided with an opening communicating with the accommodation cavity, and the opening faces the adjustment parts of the first lens and the second lens.

[0025] The embodiments of the present utility model have the following advantages: By providing a light reflection component in the box body, enabling the light reflection component to adjust the optical paths of the first visual structure and the second visual structure simultaneously, it can not only improve the adjustment efficiency of the optical path, but also simplify the internal structure of the dual-vision alignment device, reduce the production cost, and thus effectively improve the production efficiency; By calibrating the relative positions of the first visual structure and the second visual structure with respect to the light reflection component respectively, the symmetry accuracy of the visual centers of the first light-transmitting part and the second light-transmitting part can be improved, and further the alignment accuracy of the dual-vision alignment device can be significantly improved.

[0026] In order to make the above objects, features, and advantages of the present utility model more obvious and understandable, the following specifically presents preferred embodiments and, in conjunction with the accompanying drawings, provides detailed descriptions as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0028] Figure 1 Shows a schematic structural diagram of a perspective view of a dual-vision alignment device provided by some embodiments of the present utility model;

[0029] Figure 2 Shows a schematic structural diagram of another perspective view of a dual-vision alignment device provided by some embodiments of the present utility model;

[0030] Figure 3 Shows Figure 2 A cross-sectional view of part A-A in

[0031] Figure 4 Shows a schematic structural diagram of a perspective view of the interior of a dual-vision alignment device provided by some embodiments of the present utility model.

[0032] MAIN ELEMENT SYMBOL DESCRIPTION:

[0033] 100 - Box body; 110 - First light-transmitting part; 120 - Second light-transmitting part; 200 - First visual structure; 300 - Second visual structure; 400 - Light reflection component; 410 - First mirror body; 420 - Second mirror body; 430 - Double-sided mirror; 500 - Support frame; 210 - First lens; 310 - Second lens; 600 - First built-in coaxial light source; 700 - Second built-in coaxial light source; 431 - First reflecting surface; 432 - Second reflecting surface; 130 - Base; 140 - Cover body; 141 - Opening. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0034] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as limiting the present utility model.

[0035] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. On the contrary, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration.

[0036] In the present utility model, unless otherwise clearly defined and limited, terms such as "installed", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0037] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "a plurality" is two or more unless otherwise clearly and specifically defined.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. The terms used in the description of the template herein are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0039] As Figures 1 to 4 shown, some embodiments of the present utility model provide a dual-vision alignment device, which is mainly used to improve the alignment accuracy and reduce the production cost.

[0040] The dual-vision alignment device includes a box body 100, a first vision structure 200, a second vision structure 300, and a light reflection component 400.

[0041] The box body 100 defines an accommodation cavity. Along a first direction, two opposite sides of the box body 100 are respectively provided with a first light-transmitting part 110 and a second light-transmitting part 120 that communicate with the accommodation cavity, and the axis of the first light-transmitting part 110 coincides with the axis of the second light-transmitting part 120, so that the light entering the first vision structure 200 can be reflected by the light reflection component 400 and emitted from the first light-transmitting part 110, and the light entering the second vision structure 300 can be reflected by the light reflection component 400 and emitted from the second light-transmitting part 120.

[0042] Wherein, at least part of the first vision structure 200 is received in the accommodation cavity. It can be understood that a part of the first vision structure 200 is arranged in the accommodation cavity, and another part of the first vision structure 200 is arranged outside the box body 100.

[0043] In this embodiment, the first vision structure 200 is used to photograph a first target object.

[0044] In addition, the second vision structure 300 is adjacent to the second vision structure 300, and the axis of the second vision structure 300 is parallel to the axis of the first vision structure 200. The second vision structure 300 is used to photograph a second target object.

[0045] The light reflection component 400 is received in the accommodation cavity. The light reflection component 400 is connected to the box body 100 to adjust the optical path direction through the light reflection component 400. In this embodiment, the user can adjust the optical path in different directions according to actual usage requirements.

[0046] The light reflection component 400 can reflect the light passing through the first vision structure 200 to the first light-transmitting part 110. It should be noted that the light reflected by the light reflection component 400 can enter the first light-transmitting part 110, and the light entering the first vision structure 200 is parallel to the axis of the first vision structure 200.

[0047] In addition, the light reflection component 400 can also reflect the light passing through the second vision structure 300 to the second light-transmitting part 120. It should be noted that the light enters the second light-transmitting part 120 after being reflected by the light reflection component 400, and the light entering the second vision structure 300 is parallel to the axis of the second vision structure 300.

[0048] The optical path of the first visual structure 200 and the second visual structure 300 can be adjusted simultaneously through the optical reflection component 400, which can not only improve the adjustment efficiency of the optical path, but also simplify the internal structure of the dual-vision alignment device, reduce the production cost, and thus effectively improve the production efficiency. By calibrating the first visual structure 200 and the second visual structure 300 with the optical reflection component 400 respectively, the symmetry accuracy of the visual centers of the first light-transmitting part 110 and the second light-transmitting part 120 can be improved, and further the alignment accuracy of the dual-vision alignment device can be significantly improved.

[0049] As Figure 4 shown, in some embodiments of the present invention, the optical reflection component 400 includes a first mirror body 410, a second mirror body 420 and a double-sided mirror 430. The double-sided mirror 430 is disposed between the first mirror body 410 and the second mirror body 420, and the double-sided mirror is rotatably connected to the box body 100.

[0050] Wherein, the double-sided mirror 430 has a first reflection surface 431 and a second reflection surface 432 arranged back to back, and the first reflection surface 431 is parallel to the second reflection surface 432. It should be noted that, in another embodiment, the double-sided mirror 430 is formed by combining two single-sided mirrors.

[0051] Specifically, the first reflection surface 431 faces the first light-transmitting part 110 and the first mirror body 410, so as to reflect the light passing through the first mirror body 410 to the first light-transmitting part 110 through the first reflection surface 431. It should be noted that the reflection surface of the first mirror body 410 faces the first visual structure 200 and the first reflection surface 431, so as to reflect the light passing through the first visual structure 200 to the first reflection surface 431 through the reflection surface of the first mirror body 410, and the light is reflected to the first light-transmitting part 110 by the first reflection surface 431.

[0052] In addition, the second reflection surface 432 faces the second light-transmitting part 120 and the second mirror body 420, so as to reflect the light passing through the second mirror body 420 to the second light-transmitting part 120 through the second reflection surface 432. It should be noted that the reflection surface of the second mirror body 420 faces the second visual structure 300 and the second reflection surface 432, so as to reflect the light passing through the second visual structure 300 to the second reflection surface 432 through the reflection surface of the second mirror body 420, and the light is reflected to the second light-transmitting part 120 by the second reflection surface 432.

[0053] As Figure 2 and Figure 3As shown, in some embodiments of the present utility model, the angle between the axis of the first light-transmitting portion 110 and the first reflecting mirror surface 431 is equal to the angle between the axis of the second light-transmitting portion 120 and the second reflecting mirror surface 432, and the angle between the reflecting surface of the first mirror body 410 and the first reflecting mirror surface 431 is equal to the angle between the reflecting surface of the second mirror body 420 and the second reflecting mirror surface 432, thereby ensuring the symmetry of the optical paths of the first visual structure 200 and the second visual structure 300, making the centers of the two visual field ranges of the first light-transmitting portion 110 and the second light-transmitting portion 120 of the double-visual alignment device centrosymmetrically coincide, and thus improving the alignment accuracy.

[0054] In addition, it should be noted that the first light-transmitting portion 110 and the second light-transmitting portion 120 are centrosymmetric with respect to the rotation axis of the double-sided reflecting mirror 430, so as to ensure that during the rotation of the double-sided reflecting mirror 430, the angle between the axis of the first light-transmitting portion 110 and the first reflecting mirror surface 431 always changes in the same way as the angle between the axis of the second light-transmitting portion 120 and the second reflecting mirror surface 432; thereby ensuring that during the rotation of the double-sided reflecting mirror 430, the optical path passing through the first visual structure 200 is always parallel to the axis of the first visual structure 200, the optical path passing through the second visual structure 300 is always parallel to the axis of the second visual structure 300, and the optical path passing through the first visual structure 200 is always parallel to the optical path passing through the second visual structure 300, which can not only improve the efficiency of positioning adjustment, but also improve the positioning accuracy.

[0055] As Figure 4 As shown, in some embodiments of the present utility model, the box body 100 includes a support frame 500, the support frame 500 is received in the accommodation cavity, the support frame 500 is connected to the inner wall of the box body 100, and the support frame 500 is disposed between the first mirror body 410 and the second mirror body 420, and the double-sided reflecting mirror 430 is rotatably connected to the support frame 500, so as to provide support and limit for the double-sided reflecting mirror 430 through the support frame 500, to ensure the stability of the double-sided reflecting mirror 430 in the accommodation cavity and the convenience of angle adjustment of the double-sided reflecting mirror 430, thereby improving the adjustment efficiency to meet different needs of users.

[0056] In addition, the rotation axis of the double-sided reflecting mirror 430 is parallel to the axis of the first visual structure 200, thereby ensuring that the first optical path and the second optical path can be synchronously adjusted during the rotation of the double-sided reflecting mirror 430, to ensure that the first optical path and the second optical path always remain symmetric, and thus improving the accuracy of alignment adjustment.

[0057] Furthermore, in some embodiments of the present utility model, the midpoint of the double-sided mirror 430 is located on the axis of the first light-transmitting portion 110, and the axes of the first light-transmitting portion 110 and the second light-transmitting portion 120 coincide. This enables the double-sided mirror 430 to simultaneously adjust the light entering the first visual structure 200 and the light entering the second visual structure 300 during rotation. This not only improves the adjustment efficiency of the light path direction but also saves the internal space of the box body 100, improves the utilization rate of the internal space of the box body 100, makes the internal structure of the dual-vision alignment device more concise, and thus can effectively reduce costs.

[0058] In addition, it should be noted that during the rotation of the double-sided mirror 430, the angle between the first reflecting surface and the axis of the first light-transmitting portion 110 is equal to the angle between the second reflecting surface and the axis of the second light-transmitting portion 120. This enables the double-sided mirror 430 to simultaneously adjust the light paths of the first visual structure 200 and the second visual structure 300 during rotation, and the light path of the first visual structure 200 is always parallel to the light path of the second visual structure 300, which can significantly improve the symmetry accuracy of the visual centers of the first light-transmitting portion 110 and the second light-transmitting portion 120, thereby improving the accuracy of the dual-vision alignment device.

[0059] Based on any of the above embodiments, in this embodiment, the first mirror body 410 is a first reflector or a first prism, and the second mirror body 420 is a second reflector or a second prism.

[0060] It can be understood that both the first prism, the first reflector, the second prism, and the second reflector can reflect light, that is, the first mirror body 410 and the second mirror body 420 can be specifically selected according to actual needs.

[0061] As Figure 1 and Figure 4 shown, in some embodiments of the present utility model, the first visual structure 200 includes a first lens 210 and a first camera (not shown in the figure). The connection method between the first lens 210 and the first camera includes any one of snap connection, threaded connection, and bolt connection, which can be specifically set according to actual situations.

[0062] Among them, the first camera is arranged on the side of the first lens 210 away from the light reflection assembly 400, and the axes of the first lens 210 and the first camera coincide to improve the positioning accuracy and positioning precision of the first visual structure 200.

[0063] As Figure 4As shown, in some embodiments of the present utility model, the second vision structure 300 includes a second lens 310 and a second camera (not shown in the figure). The connection manner between the second lens 310 and the second camera includes any one of snap connection, threaded connection, and bolt connection, which can be specifically set according to actual situations.

[0064] Among them, the second camera is disposed on a side of the second lens 310 away from the light reflection assembly 400, and the axes of the second lens 310 and the second camera coincide, so as to improve the positioning accuracy and positioning precision of the first vision structure 200.

[0065] In this embodiment, both the first lens 210 and the second lens 310 are telecentric lenses. It should be noted that a telecentric lens can keep the image magnification unchanged within a certain object distance range to improve the resolution.

[0066] As Figure 2 and Figure 4 shown, in some embodiments of the present utility model, the first lens 210 is provided with a first built-in coaxial light source 600. The light emitting end of the first built-in coaxial light source 600 is communicated with the light incident end of the first lens 210, so that the light emitted by the first built-in coaxial light source 600 can enter the first lens 210 through the light incident end.

[0067] The second lens 310 is provided with a second built-in coaxial light source 700. In this embodiment, the axes of the first built-in coaxial light source 600 and the second built-in coaxial light source 700 coincide, and the first built-in coaxial light source 600 and the second built-in coaxial light source 700 are arranged in opposite directions.

[0068] As Figure 1 shown, in some embodiments of the present utility model, the box body 100 includes a base 130 and a cover body 140. The base 130 is connected to the cover body 140. An installation groove is provided on a side of the base 130 facing the cover body 140. The cover body 140 is disposed at the notch of the installation groove and covers the installation groove, so as to define a receiving cavity by the base 130 and the cover body 140.

[0069] Among them, the cover body 140 is provided with an opening 141 communicated with the receiving cavity. The opening 141 faces the adjusting parts of the first lens 210 and the second lens 310, so that a user can adjust the working distance of the first lens 210 and the second lens 310 through the opening 141, thereby ensuring the convenience of the user during use.

[0070] In all the examples shown and described here, any specific value should be construed as merely exemplary, not as a limitation. Therefore, other examples of the exemplary embodiments may have different values.

[0071] It should be noted that like reference numerals and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further definition and explanation thereof is not required in subsequent figures.

[0072] The above-described embodiments merely represent several implementation manners of the present utility model, and the description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several variations and improvements can still be made, and these all belong to the protection scope of the present utility model.

Claims

1. A dual-vision alignment device, characterized in that, include: A box body defines a receiving cavity, and along a first direction, two opposite sides of the box body are respectively provided with a first light-transmitting portion and a second light-transmitting portion communicating with the receiving cavity; A first visual structure, at least partially contained in the accommodating cavity, the first visual structure being used to photograph a first target object; a second visual structure, adjacent to the second visual structure, wherein an axis of the second visual structure is parallel to an axis of the first visual structure, and the second visual structure is used to photograph a second target object; A light reflecting component is accommodated in the accommodating cavity and connected to the box body. The light reflecting component can reflect the light passing through the first light-transmitting portion to the first visual structure, and reflect the light passing through the second light-transmitting portion to the second visual structure.

2. The dual-vision alignment device according to claim 1, wherein The light reflection assembly comprises a first mirror body, a second mirror body and a double-sided reflector; The double-sided reflector is arranged between the first mirror body and the second mirror body, and is rotatably connected to the box body; The double-sided reflector has a first reflective mirror surface and a second reflective mirror surface that are arranged opposite to each other, wherein the first reflective mirror surface faces the first light-transmitting portion and the first mirror body, and the second reflective mirror surface faces the second light-transmitting portion and the second mirror body.

3. The double-vision alignment device according to claim 2, wherein The angle between the axis of the first light-transmitting portion and the first reflective mirror surface is equal to the angle between the axis of the second light-transmitting portion and the second reflective mirror surface; The angle between the reflection surface of the first mirror body and the first reflection mirror surface is equal to the angle between the reflection surface of the second mirror body and the second reflection mirror surface.

4. The dual-vision alignment device according to claim 2, wherein The box body comprises a support frame, the support frame is accommodated in the accommodating cavity, the support frame is arranged between the first mirror body and the second mirror body, and the double-sided reflector is rotatably connected to the support frame.

5. The double-vision alignment device according to claim 2, characterized in that, The first mirror body is a first reflector or a first prism; The second mirror body is a second reflecting mirror or a second prism.

6. The dual-vision alignment device according to claim 2, characterized in that, The midpoint of the double-sided reflector is located on the axis of the first light-transmitting portion, and the axis of the first light-transmitting portion coincides with the axis of the second light-transmitting portion; The first light-transmitting portion and the second light-transmitting portion are centrally symmetrical about the rotation axis of the double-sided reflector.

7. The dual-vision alignment device according to any one of claims 1 to 6, characterized in that The first visual structure includes a first lens and a first camera, and the first camera is arranged on a side of the first lens away from the light reflection component.

8. The double-vision alignment device according to claim 7, wherein The second visual structure includes a second lens and a second camera, and the second camera is arranged on a side of the second lens away from the light reflection component.

9. The dual-vision alignment device according to claim 8, wherein, The first lens is provided with a first built-in coaxial light source; The second lens is provided with a second built-in coaxial light source, and the first built-in coaxial light source and the second built-in coaxial light source are arranged in opposite directions, and their axes coincide with each other.

10. The dual-vision alignment device according to claim 8, wherein, The box body includes a base and a cover body, wherein the base is connected to the cover body, and the cover body is provided with an opening communicating with the accommodating cavity, wherein the opening faces the adjustment parts of the first lens and the second lens.

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