Positioning device of crystal block grinding machine

Abstract

The utility model discloses a positioning device of a crystal block grinding machine, and relates to the technical field of semiconductor grinding, the positioning device comprises a clamping mechanism and an angle adjusting mechanism; the clamping mechanism is provided with an adjustable clamping station for clamping a crystal block; the angle adjusting mechanism is connected with the clamping mechanism and used for adjusting the rotating angle of the clamping mechanism. By adding the angle adjusting mechanism, the positioning device not only has a positioning clamping function, but also has a rotating angle adjusting function, so that the grinding angle of the crystal block can be adjusted, different grinding requirements can be flexibly met, and the applicability is improved.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor grinding, and particularly to a positioning device for a crystal block grinding machine. Background Art

[0002] Grinding is a thinning process in the semiconductor processing. The purpose of grinding is to remove the damaged layer on the surface of the crystal block (wafer / crystal) after cutting to improve the surface quality. To ensure the grinding effect, a corresponding positioning device is used to fix the crystal block. However, the current positioning device for fixing the crystal block only has a single clamping and fixing function, and cannot flexibly adapt to different grinding requirements, so the applicability is poor. Summary of the Utility Model

[0003] In view of this, the purpose of this application is to provide a positioning device for a crystal block grinding machine to solve the technical problem of poor applicability of the existing positioning device.

[0004] To achieve the above technical purpose, this application provides a positioning device for a crystal block grinding machine, including a clamping mechanism and an angle adjustment mechanism;

[0005] The clamping mechanism is provided with an adjustable clamping station for clamping the crystal block;

[0006] The angle adjustment mechanism is connected to the clamping mechanism and is used to adjust the rotation angle of the clamping mechanism.

[0007] Further, the clamping mechanism includes a mounting base plate, fixed side plates, and a clamping assembly;

[0008] There are two fixed side plates, symmetrically and fixedly connected to both sides of the top of the mounting base plate;

[0009] There are two clamping assemblies, which are respectively installed on the fixed side plates in one-to-one correspondence, and the adjustable clamping station is formed between them.

[0010] Further, the clamping assembly includes a clamping block, an adjusting screw, and a guide shaft;

[0011] The guide shaft movably passes through the fixed side plate, and one end is fixedly connected to the clamping block;

[0012] The adjusting screw movably passes through the fixed side plate and is threadedly connected to the fixed side plate;

[0013] One end of the adjusting screw passing through the fixed side plate is rotatably connected to the clamping block.

[0014] Further, the clamping assembly further includes an elastic member;

[0015] The elastic member is connected between the clamping block and the fixed side plate, with one end in contact with the clamping block and the other end in contact with the fixed side plate.

[0016] Further, the elastic member is a spring sleeved on the guide shaft.

[0017] Further, a bushing is embedded in the fixed side plate;

[0018] The guide shaft movably passes through the bushing;

[0019] There are two guide shafts symmetrically arranged with respect to the adjusting screw;

[0020] The other end of the adjusting screw is provided with an adjusting head;

[0021] The outer peripheral surface of the adjusting head is provided with anti-slip threads.

[0022] Further, the clamping assembly further includes a shock pad;

[0023] The shock pad is attached to the clamping surface of the clamping block.

[0024] Further, the angle adjusting mechanism includes a positioning base, a rotating plate and a third locking member;

[0025] The rotating plate is rotatably connected to the positioning base through a rotating connection assembly;

[0026] The rotating plate is fixedly connected to the clamping mechanism;

[0027] The third locking member is used to lock the connection between the rotating plate and the positioning base after the rotating plate adjusts its rotation angle.

[0028] Further, the rotating connection assembly includes a pin shaft and a snap ring;

[0029] The pin shaft movably passes through the positioning base and the rotating plate;

[0030] The snap ring is clamped on one end of the pin shaft passing through the positioning base.

[0031] Further, several locking threaded holes are circumferentially arranged around the rotation center of the rotating plate;

[0032] An arc through hole is provided on the positioning base;

[0033] The circumferential line where the centers of several locking threaded holes are located coincides with the center line of the arc through hole;

[0034] The third locking member passes through the arc through hole and is threadedly connected to the locking threaded hole to fasten the positioning base and the rotating plate together.

[0035] As can be seen from the above technical solutions, the positioning device of the crystal block grinding machine designed in this application, by adding an angle adjustment mechanism, enables the positioning device to not only have a positioning and clamping function, but also have a rotation angle adjustment function, so as to be able to adjust the grinding angle of the crystal block, flexibly adapt to different grinding requirements, and improve the applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0037] Figure 1 A perspective view of a positioning device of a crystal block grinding machine provided in the present application;

[0038] Figure 2 An exploded view of a positioning device of a crystal block grinding machine provided in the present application;

[0039] Figure 3 A schematic structural view of a pin shaft of a positioning device of a crystal block grinding machine provided in the present application;

[0040] Figure 4 A schematic structural view of a guide rod member of a positioning device of a crystal block grinding machine provided in the present application;

[0041] Figure 5 A schematic structural view of an adjusting screw of a positioning device of a crystal block grinding machine provided in the present application;

[0042] Figure 6 Another schematic view of the cooperation structure between the adjusting screw and the clamping block of a positioning device of a crystal block grinding machine provided in the present application;

[0043] In the figure: 100, clamping mechanism; 200, angle adjustment mechanism; 01, positioning base; 011, bevel edge; 012, rounded corner; 013, kidney-shaped connection hole; 014, second center hole; 015, arc through hole; 02, pin shaft; 021, annular clamping groove; 022, second chamfer; 023, second relief groove; 03, snap ring; 04, rotating plate; 041, first connection hole; 042, first center hole; 043, locking threaded hole; 05, mounting base plate; 06, fixed side plate; 061, second connection hole; 062, side plate threaded hole; 063, side plate through hole; 07, guide shaft; 071, first shaft body; 072, first step; 073, first shaft end; 074, first chamfer; 08, bushing; 09, elastic member; 10, adjusting screw; 101, adjusting head; 102, second shaft body; 103, second step; 104, second shaft end; 105, internal threaded hole; 106, third chamfer; 11, clamping block; 111, connecting counterbore; 112, connecting threaded hole; 113, shock-absorbing connection hole; 114, pressing block; 115, connecting portion; 116, head; 117, notch groove; 118, stepped portion; 12, shock-absorbing pad; 13, crystal block. Detailed implementation manners

[0044] Next, the technical solutions of the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the embodiments of the present application.

[0045] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0046] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0047] The embodiment of the present application discloses a positioning device for a crystal block grinding machine.

[0048] Please refer to Figure 1 , an embodiment of a positioning device for a crystal block grinding machine provided in the embodiments of the present application includes:

[0049] A clamping mechanism 100 and an angle adjustment mechanism 200.

[0050] The clamping mechanism 100 is provided with an adjustable clamping station for clamping the crystal block 13.

[0051] The angle adjustment mechanism 200 is connected to the clamping mechanism 100 and is used to adjust the rotation angle of the clamping mechanism 100. The rotation angle is specifically the rotation angle or the flipping angle of the clamping mechanism 100 in the horizontal direction.

[0052] By adding the angle adjustment mechanism 200, the positioning device not only has the positioning and clamping function, but also has the rotation angle adjustment function, so that the grinding angle of the crystal block 13 can be adjusted, which can flexibly meet different grinding requirements and improve the applicability.

[0053] The above is the first embodiment of a positioning device for a crystal block grinding machine provided by the embodiments of the present application. The following is the second embodiment of a positioning device for a crystal block grinding machine provided by the embodiments of the present application. For details, please refer to Figures 1 to 6 .

[0054] Based on the solution of the above first embodiment:

[0055] Furthermore, for the design of the clamping mechanism 100, it includes a mounting base plate 05, fixed side plates 06, and a clamping assembly.

[0056] There are two fixed side plates 06, which are symmetrically and fixedly connected to both sides of the top of the mounting base plate 05. There are two clamping assemblies, which are respectively mounted on the fixed side plates 06 and form an adjustable clamping station therebetween.

[0057] Further, the fixed side plate 06 is in an L-shaped structure, and the clamping assembly is installed on the vertical side of the fixed side plate 06. Two second connection holes 061 are opened on the right-angle side of the fixed side plate 06 close to the mounting base plate 05. By passing screws through the second connection holes 061 and the corresponding threaded holes of the mounting base plate 05 in sequence, the fixed side plate 06 can be fixedly connected to the upper surface of the mounting base plate 05.

[0058] Further, the clamping assembly includes a clamping block 11, an adjusting screw 10, and a guide shaft 07.

[0059] The guide shaft 07 movably passes through the fixed side plate 06 and is fixedly connected to the clamping block 11 at one end. The guide shaft 07 includes a first shaft body 071, a first step 072, a first shaft end 073, and a first chamfer 074. The first shaft end 073 is provided with an external thread for connecting to the connecting threaded hole 112 of the clamping block 11.

[0060] The adjusting screw 10 movably passes through the fixed side plate 06 and is threadedly connected to the fixed side plate 06. One end of the adjusting screw 10 passing through the fixed side plate 06 is rotatably connected to the clamping block 11.

[0061] Specifically, a side plate threaded hole 062 and two side plate through holes 063 are opened on the right-angle side of the fixed side plate 06 away from the mounting base plate 05. The two side plate through holes 063 are symmetrically arranged with respect to the side plate threaded hole 062. Correspondingly, there are two guide shafts 07, which are symmetrically arranged with respect to the adjusting screw 10 and correspond to the two side plate through holes 063 one by one. In order to reduce the contact wear between the guide shaft 07 and the fixed side plate 06, a bushing 08 is embedded in the side plate through hole 063. The bushing 08 is made of wear-resistant material. The outer surface of the bushing 08 penetrates the inner surface of the side plate through hole 063 of the fixed side plate 06, and one end of the guide shaft 07 penetrates and is slidably connected to the inner surface of the bushing 08.

[0062] For the convenience of operation, an adjusting head 101 is provided at the other end of the adjusting screw 10. The adjusting screw 10 is designed to include features such as a second shaft body 102, an adjusting head 101, a second step 103, a second shaft end 104, and a third chamfer 106. The diameter of the second shaft end 104 is smaller than that of the second shaft body 102.

[0063] The adjusting head 101 is cylindrical, and the outer peripheral surface of the adjusting head 101 is provided with anti-slip threads. The shaft body of the adjusting screw 10 is provided with external threads, and the end surface of the second shaft end 104 of the adjusting screw 10 is provided with an internal threaded hole 105. The second shaft body 102 of the adjusting screw 10 penetrates through the fixed side plate 06 and is in threaded cooperation with the fixed side plate 06. The clamping block 11 is provided with a connecting counterbore. By passing a countersunk screw through the connecting counterbore 111 of the clamping block 11 and threadedly connecting it to the internal threaded hole 105 at the second shaft end 104 of the adjusting screw 10, the adjusting screw 10 can be fixedly connected to the clamping block 11, and the clamping block 11 and the adjusting screw 10 are relatively rotatably matched, but are fixedly matched with the clamping block 311 in the axial direction. Then, by rotating the adjusting screw 10, the clamping block 11 can be driven to move to clamp the crystal block 13.

[0064] As Figure 6 shown, it can also be that a T-shaped head integrally connected is provided at the end surface of the shaft section of the adjusting screw 10. The T-shaped head includes a head 116 and a connecting portion 115. The head 116 is integrally connected to the shaft section of the adjusting screw 10 through the connecting portion 115, and the diameter of the head 116 is larger than the diameter of the connecting portion 115, and the diameter of the shaft section is larger than the diameter of the connecting portion 115. A notch groove 117 in the shape of an inverted convex character is formed on the top surface of the clamping block 311. The notch groove 117 is composed of an upper groove portion and a lower groove portion. The notch groove 117 penetrates through the clamping surface of the clamping block 11 and the surface opposite to the clamping surface. A step portion 118 is provided in the lower groove portion of the notch groove 117. The T-shaped head can be movably inserted into the lower groove portion, and the head 116 can contact and abut against the step portion 118 in the direction away from the clamping surface, and the end surface of the shaft section of the adjusting screw 10 can contact and abut against the surface of the clamping block 11 opposite to the clamping surface, realizing the relative rotational cooperation between the adjusting screw 10 and the clamping block 11, but being fixedly matched with the clamping block 11 in the axial direction. Then, by rotating the adjusting screw 10, the clamping block 11 can be driven to move to clamp the crystal block 13. A pressing block 114 is detachably installed in the upper groove portion of the notch groove 117, and the pressing block 114 can prevent the adjusting screw 10 from disengaging from the upper groove portion.

[0065] In this application, there are two fixed side plates 06, and correspondingly two clamping assemblies, that is, a total of four guide shafts 07 and two adjusting screws 10 are involved, which will not be elaborated here.

[0066] Further, the clamping assembly further includes an elastic member 09, which is connected between the clamping block 11 and the fixed side plate 06, with one end in contact with the clamping block 11 and the other end in contact with the fixed side plate 06. Specifically, by adding the elastic member 09, the clamping force can be made more stable. The elastic member 09 can be a spring, which is sleeved on the guide shaft 07. In this application, in order to exert the elastic force of the elastic member 09, the entire shaft body of the adjusting screw 10 is provided with external threads, and its middle or rear section is designed as a smooth shaft. When it rotates to the position where the smooth shaft section cooperates with the fixed side plate 06, at this time, the clamping is completely achieved by the elastic force of the elastic member 09 to ensure the stability of the clamping force. When it rotates to the position where the external thread part cooperates with the fixed side plate 06, the clamping block 11 can be in a fixed open state to facilitate the taking or placing of the crystal block 13. Of course, the clamping assembly can also include an inner clamping block and an inner guide rod; the inner clamping block is movably installed on the inner side surface of the clamping block 11 through the inner guide rod, and the third elastic member 09 is sleeved on the inner guide rod again. At this time, the rod body of the adjusting screw 10 can be provided with external threads throughout. At this time, by rotating the adjusting screw 10 to drive the clamping block 11 to move, and then driving the inner clamping block to move. After the inner clamping block clamps the crystal block 13, continuing to rotate the adjusting screw 10 can further squeeze the elastic member 09, thereby providing a greater and stable clamping force. A limiting member is provided at one end of the inner guide rod that movably passes through the clamping block 11 to prevent the inner guide rod from detaching from the clamping block 11.

[0067] Further, for the design of the angle adjustment mechanism 200, it specifically includes a positioning base 01, a rotating plate 04, and a third locking member.

[0068] The positioning base 01 is fixedly connected to the machine body, and the rotating plate 04 is rotatably connected to the positioning base 01 through a rotating connection assembly.

[0069] The rotating plate 04 is fixedly connected to the clamping mechanism 100, specifically to the mounting base plate 05. The rotating plate 04 is provided with a first connection hole 041 for connecting the mounting base plate 05.

[0070] The third locking member is used to lock the connection between the rotating plate 04 and the positioning base 01 after the rotating plate 04 adjusts its rotation angle.

[0071] Specifically, the positioning base 01 is L-shaped. Two waist-shaped connection holes 013 are opened on one right-angled side to facilitate the fixed connection with the operating table of the machine body. The upper parts on both sides of the other right-angled side are cut with bevel edges 011 and rounded corners 012. To improve the stability of adjustment, two such angle adjustment mechanisms 200 are designed, symmetrically arranged relative to the mounting base plate 05 and respectively connected to the mounting base plate 05 to jointly adjust the rotation angle of the mounting base plate 05.

[0072] Further, for the design of the rotating connection assembly, it includes a pin shaft 02 and a snap ring 03.

[0073] The pin shaft 02 movably passes through the positioning base 01 and the rotating plate 04, and the snap ring 03 is clamped on one end of the pin shaft 02 passing through the positioning base 01. Specifically, the rotating plate 04 is provided with a first central hole 042, and the positioning base 01 is provided with a second central hole 014. The pin shaft 02 sequentially passes through the two central holes, and an annular clamping groove 021 is provided on one end thereof passing through the two central holes. The snap ring 03 is clamped in the annular clamping groove 021 to prevent the pin shaft 02 from falling off, and the rotating plate 04 is rotatably connected to the positioning base 01 through the pin shaft 02. The pin shaft 02 is also provided with features such as a second chamfer 022 and a second relief groove 023.

[0074] Furthermore, a plurality of locking threaded holes 043 are circumferentially arranged around the rotation center of the rotating plate 04 itself. The plurality of locking threaded holes 043 are circumferentially distributed around the central hole on the rotating plate 04, and the plurality of locking threaded holes 043 are distributed on the same circumference, and the center of this circumference coincides with the center of the central hole.

[0075] The positioning base 01 is provided with an arc through hole 015, and the center of the arc through hole 015 coincides with the center of the central hole on the positioning base 01.

[0076] The circumferential line where the centers of the plurality of locking threaded holes 043 are located coincides with the center line of the arc through hole 015.

[0077] The third locking member passes through the arc through hole 015 and is threadedly connected to the locking threaded hole 043 to fasten the positioning base 01 and the rotating plate 04 together. Specifically, the third locking member can be a screw. After rotating the rotating plate 04 by a certain angle, the third locking member can be passed through the arc through hole 015 and threadedly connected to the corresponding locking threaded hole 043 on the rotating plate 04, and the rotating plate 04 can be fixed at the adjusted angle.

[0078] Furthermore, the clamping assembly further includes a shock pad 12, and the shock pad 12 is attached to the clamping surface of the clamping block 11 and is connected to the shock connection hole 113 of the clamping block 11. The shock pad 12 is a non-slip and wear-resistant plastic, and by adding the shock pad 12, the clamping damage to the crystal block 13 can be reduced.

[0079] Working principle:

[0080] By rotating the adjusting screws 10 at both ends of the positioning device, the clamping block 11 and the shock pad 12 fixedly connected thereto can be pushed to move relative to each other, thereby clamping the crystal block 13; under the elastic force of the elastic member 09 installed, the clamping force of the crystal block 13 can be made more stable, and at the same time, a certain buffering effect is achieved. After rotating the rotating plate 04 by a certain angle, passing a screw through the positioning base 01 and threadedly connecting it to the corresponding locking threaded hole 043 of the rotating plate 04 can fix the rotating plate 04 at this angle.

[0081] Generally speaking, the crystal block 13 grinding machine designed in this application has the effects of convenient positioning, economic practicality, high grinding efficiency, cleanliness and environmental protection, etc.

[0082] The positioning device of a crystal block grinding machine provided in this application has been introduced in detail above. For those of ordinary skill in the art, according to the idea of the embodiments of this application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to this application.

Claims

1. A positioning device for a crystal block grinding machine, characterized in that It includes a clamping mechanism (100) and an angle adjustment mechanism (200); The clamping mechanism (100) is provided with an adjustable clamping station for clamping the crystal block (13); The angle adjustment mechanism (200) is connected to the clamping mechanism (100) and is used to adjust the rotation angle of the clamping mechanism (100); The angle adjustment mechanism (200) includes a positioning base (01), a rotating plate (04) and a third locking member; The rotating plate (04) is rotatably connected to the positioning base (01) through a rotating connection assembly; The rotating plate (04) is fixedly connected to the clamping mechanism (100); The third locking member is used to lock the connection between the rotating plate (04) and the positioning base (01) after the rotating plate (04) adjusts its rotation angle.

2. The positioning device of a crystal block grinding machine according to claim 1, characterized in that, The clamping mechanism (100) includes a mounting base plate (05), fixed side plates (06) and a clamping assembly; There are two fixed side plates (06), which are symmetrically and fixedly connected to both sides of the top of the mounting base plate (05); There are two clamping assemblies, which are respectively mounted on the fixed side plates (06) and form the adjustable clamping station therebetween.

3. The positioning device of a crystal block grinding machine according to claim 2, characterized in that, The clamping assembly includes a clamping block (11), an adjusting screw (10) and a guide shaft (07); The guide shaft (07) movably passes through the fixed side plate (06), and one end is fixedly connected to the clamping block (11); The adjusting screw (10) movably passes through the fixed side plate (06) and is threadedly connected to the fixed side plate (06); One end of the adjusting screw (10) passing through the fixed side plate (06) is rotatably connected to the clamping block (11).

4. The positioning device of a crystal block grinding machine according to claim 3, characterized in that, The clamping assembly further includes an elastic member (09); The elastic member (09) is connected between the clamping block (11) and the fixed side plate (06), with one end in contact and abutted against the clamping block (11) and the other end in contact and abutted against the fixed side plate (06).

5. The positioning device of a crystal block grinding machine according to claim 4, characterized in that, The elastic member (09) is a spring and is sleeved on the guide shaft (07).

6. The positioning device of a crystal block grinding machine according to claim 3, characterized in that, A bushing (08) is embedded in the fixed side plate (06); The guide shaft (07) movably passes through the bushing (08); There are two guide shafts (07), which are symmetrically arranged with respect to the adjusting screw (10); The other end of the adjusting screw (10) is provided with an adjusting head (101); The outer peripheral surface of the adjusting head (101) is provided with anti-slip threads.

7. The positioning device of a crystal block grinding machine according to claim 3, characterized in that, The clamping assembly further includes a shock pad (12); The shock pad (12) is attached to the clamping surface of the clamping block (11).

8. The positioning device of a crystal block grinding machine according to claim 3, characterized in that, The rotating connection assembly includes a pin shaft (02) and a snap ring (03); The pin shaft (02) movably passes through the positioning base (01) and the rotating plate (04); The snap ring (03) is clamped on one end of the pin shaft (02) passing through the positioning base (01).

9. The positioning device of a crystal block grinding machine according to claim 8, characterized in that, A plurality of locking threaded holes (043) are circumferentially arranged around the rotation center of the rotating plate (04); An arc through hole (015) is provided on the positioning base (01); The circumferential line where the centers of the plurality of locking threaded holes (043) are located coincides with the center line of the arc through hole (015); The third locking member passes through the arc-shaped through hole (015) and is threadedly connected to the locking threaded hole (043) to fasten the positioning base (01) and the rotating plate (04) together.

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