Target baffle device of PVD (Physical Vapor Deposition) vacuum coating machine

Abstract

The utility model relates to a target baffle device of a PVD (Physical Vapor Deposition) vacuum coating machine. The target baffle device comprises a fixed baffle, an oscillating cylinder, a movable baffle, a rotating shaft and a chute base, a target is arranged in the center of the target frame, fixed baffles, movable baffles and sliding groove bases are symmetrically arranged on the two sides of the target, the movable baffles are slidably arranged on the outer sides of the fixed baffles, the lower ends of the movable baffles are slidably connected with the sliding groove bases, and the upper ends of the movable baffles are slidably connected with the target frame. A horizontal sliding rod is slidably arranged between the sliding groove bases, a rotating shaft is arranged below the horizontal sliding rod, and an oscillating cylinder is connected below the rotating shaft through magnetofluid. By arranging the horizontal sliding rod, the two movable baffles can synchronously move through the oscillating cylinder, the inner side space and the outer side space of the cavity are saved, the manufacturing cost is reduced, by arranging the sliding groove base, the moving tracks of the movable baffles are fixed, it is guaranteed that the single oscillating cylinder controls the stability of the movable baffles on the two sides, and the target baffles are convenient to open and close; the control is convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating equipment manufacturing, and specifically relates to a target baffle device for a PVD vacuum coating machine. Background Technique

[0002] A PVD vacuum coating machine is mainly used to convert a target into gaseous atoms, molecules or ions by physical methods in a vacuum environment and deposit them on the surface of a substrate to form a film; with the development of vacuum coating technology, various new film systems such as multi-component composite coatings and multi-layer composite coatings have emerged. Therefore, coating equipment is required to have multiple groups of targets, and multiple groups of targets can work simultaneously, and the simultaneous operation of multiple groups of targets can also improve the coating production efficiency in industrial production.

[0003] The target is the substance that is bombarded in this process to release coating materials, and the target baffle is used to control the sputtering direction of the coating materials and block the target to prevent it from directly sputtering into unnecessary areas, thereby protecting other components in the coating chamber and also protecting the target from being coated by other targets.

[0004] Patent CN219508003U discloses a cathode protection device for a stretchable and retractable vacuum coating machine. Through the cooperation of a reduction motor, a worm, a worm gear and a double-thread, the first L-shaped baffle and the second L-shaped baffle are driven to move relatively and abut against each other to block the target and prevent the target surface of the target from being contaminated; however, in a PVD vacuum coating machine, a vacuum environment needs to be maintained, and a magnetic fluid is usually used to drive the internal rotating shaft of the PVD vacuum coating machine, and the external wires connected to the motor are likely to cause poor sealing.

[0005] Patent CN109536900A discloses a cathode protection device for a stretchable and retractable vacuum coating machine. The rotating shaft of the protection baffle is rotated on a rotating track by a swing cylinder and a magnetic fluid arranged up and down to protect the target on the cathode. However, this solution has magnetic fluid motors arranged both up and down, which occupies a large space of the equipment and has a high assembly cost. Summary of the Utility Model

[0006] To solve the technical problem of how to make the target baffle in a PVD vacuum coating machine switch conveniently and occupy a small space, the utility model provides a target baffle device for a PVD vacuum coating machine.

[0007] The purpose of the utility model can be achieved by the following technical solutions:

[0008] A target baffle device for a PVD vacuum coating machine includes a target rack, a target, a fixed baffle, a swing cylinder, a moving baffle, a rotating shaft and a chute base.

[0009] A target is arranged in the center of the target holder. Fixed baffles, movable baffles and chute bases are symmetrically arranged on both sides of the target. The movable baffle is slidably arranged outside the fixed baffle. The lower end of the movable baffle is slidably connected to the chute base, and the upper end of the movable baffle is slidably connected to the target holder.

[0010] A horizontal sliding rod is slidably arranged between the chute bases. A rotating shaft is arranged below the horizontal sliding rod, and a swinging cylinder is connected below the rotating shaft through a magneto-fluid.

[0011] Furthermore, a sliding rod limiting groove is formed in the middle of the chute base, making the chute base in a "C" shape. The left and right ends of the horizontal sliding rod are slidably arranged in the sliding rod limiting groove.

[0012] Furthermore, a rotating shaft chute is arranged at the lower end of the horizontal sliding rod. The rotating shaft slider of the rotating shaft is slidably connected in the rotating shaft chute, and the length of the rotating shaft chute is the same as the length of the rotating shaft.

[0013] Furthermore, when the rotating shaft rotates to be parallel to the horizontal sliding rod, the rotating shaft coincides with the rotating shaft chute.

[0014] Furthermore, baffle chutes are arranged at the left and right ends of the horizontal sliding rod, and the length of the baffle chutes is the same as the length of the sliding rod limiting groove.

[0015] Furthermore, a baffle limiting groove is penetrated through the upper end of the chute base.

[0016] Furthermore, the baffle limiting groove is arc-shaped, so that the baffle slider of the movable baffle slides along the outside of the fixed baffle.

[0017] Furthermore, baffle sliders are symmetrically arranged at the upper and lower ends of the movable baffle. The upper baffle slider is slidably arranged in the baffle limiting groove on the target holder, and the lower baffle slider passes through the baffle limiting groove of the chute base and is slidably arranged in the baffle chute.

[0018] The beneficial effects of the present utility model: By arranging the horizontal sliding rod, the present utility model enables the two movable baffles to move synchronously through a single swinging cylinder, saving the space inside and outside the chamber and the manufacturing cost. By arranging the chute base, a baffle limiting groove is arranged between the baffle chute of the horizontal sliding rod and the baffle slider of the movable baffle, enabling the movable baffle to move along the baffle limiting groove, fixing the moving track of the movable baffle. At the same time, the sliding rod limiting groove of the chute base also enables the horizontal sliding rod to move horizontally back and forth in the sliding rod limiting groove without deviation, thereby ensuring the stability of controlling the two-side movable baffles by a single swinging cylinder, making the target baffle convenient to open and close and easy to control. Description of the Drawings

[0019] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the attached drawings required for the description of the embodiments. Obviously, the attached drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other attached drawings can be obtained based on these attached drawings.

[0020] Figure 1 One of the structural schematic diagrams of the present utility model;

[0021] Figure 2 Another structural schematic diagram of the present utility model;

[0022] Figure 3 One of the moving state diagrams of the present utility model;

[0023] Figure 4 Another moving state diagram of the present utility model;

[0024] Figure 5 Structural schematic diagram of the horizontal sliding rod, rotating shaft and chute base of the present utility model.

[0025] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0026] 1. Target rack; 2. Target; 3. Moving baffle; 301. Baffle slider; 4. Fixed baffle; 5. Horizontal sliding rod; 501. Baffle chute; 502. Rotating shaft chute; 6. Rotating shaft; 601. Rotating shaft slider; 7. Swing cylinder; 8. Chute base; 801. Baffle limit groove; 802. Sliding rod limit groove. Detailed implementation manners

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the attached drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0028] Please refer to Figures 1 - 2 As shown, a target baffle device of a PVD vacuum coating machine includes a target rack 1, a fixed baffle 4, a moving baffle 3, a rotating shaft 6 and a swing cylinder 7.

[0029] The target rack 1 is in a "C" shape, with a target 2 arranged in the center. Fixed baffles 4, moving baffles 3 and chute bases 8 are symmetrically arranged on both sides of the target 2. The moving baffle 3 is slidably arranged outside the fixed baffle 4. The lower end of the moving baffle 3 is slidably connected to the chute base 8, and the upper end of the moving baffle 3 is slidably connected to the target rack 1.

[0030] A horizontal slide bar 5 is slidably arranged between the chute bases 8. A rotating shaft 6 is arranged below the horizontal slide bar 5. The rotating shaft 6 is connected to a swinging cylinder 7 through a magnetorheological fluid. The swinging cylinder 7 makes the rotating shaft 6 reciprocate in the horizontal and vertical directions, causing the horizontal slide bar 5 to reciprocate between the chute bases 8, so that the movable baffle 3 can be opened and closed.

[0031] Please refer to Figures 3 - 5 As shown in the figure, a slide bar limiting groove 802 is opened in the middle of the chute base 8, making the chute base 8 in a "C" shape. The left and right ends of the horizontal slide bar 5 are slidably arranged in the slide bar limiting groove 802; a rotating shaft chute 502 is arranged at the lower end of the horizontal slide bar 5, and a rotating shaft slider 601 of the rotating shaft 6 is slidably connected in the rotating shaft chute 502. The length of the rotating shaft chute 502 is the same as the length of the rotating shaft 6. When the rotating shaft 6 is horizontal with the horizontal slide bar 5, the rotating shaft chute 502 coincides with the rotating shaft 6; baffle chutes 501 are arranged at the left and right ends of the horizontal slide bar 5, and the length of the baffle chutes 501 is the same as the length of the slide bar limiting groove 802; a baffle limiting groove 801 is penetrated and arranged at the upper end of the chute base 8.

[0032] Baffle sliders 301 are symmetrically arranged at the upper and lower ends of the movable baffle 3. The upper baffle slider 301 is slidably arranged in the baffle limiting groove 801 on the target rack 1, and the lower baffle slider 301 passes through the baffle limiting groove 801 of the chute base 8 and is slidably arranged in the baffle chute 501. The baffle limiting groove 801 is arc-shaped, so that the baffle sliders 301 of the movable baffle 3 slide along the outside of the fixed baffle 4.

[0033] Working principle:

[0034] The swinging cylinder 7 makes the rotating shaft 6 reciprocate through the magnetorheological fluid, making the rotating shaft 6 in a horizontal and vertical state with the horizontal slide bar 5. When the rotating shaft 6 is in a horizontal state with the horizontal slide bar 5, the rotating shaft slider 601 is located at the outermost end of the rotating shaft chute 502. At this time, the rotating shaft 6 coincides with the horizontal slide bar 5, and the horizontal slide bar 5 is located at the innermost end of the slide bar limiting groove 802, so that the baffle sliders 301 in the baffle chute 501 of the horizontal slide bar 5 are also located at the innermost end of the baffle limiting groove 801, so that the two movable baffles 3 are attached to the outside of the two fixed baffles 4, making the movable baffle 3 coincide with the fixed baffle 4, so that the target 2 can work normally; when the rotating shaft 6 is in a vertical state with the horizontal slide bar 5, the rotating shaft slider 601 is located at the innermost end of the rotating shaft chute 502, and the horizontal slide bar 5 is located at the outermost end of the slide bar limiting groove 802, so that the baffle sliders 301 in the baffle chute 501 of the horizontal slide bar 5 are also located at the outermost end of the baffle limiting groove 801, so that the two movable baffles 3 slide symmetrically along the outside of the two fixed baffles 4 to the front of the target 2 to shield and protect the target 2.

[0035] The utility model synchronizes the movement of two moving baffles 3 by arranging a horizontal sliding rod 5, eliminating the problem of separately controlling the baffles on both sides by two swing cylinders 7, saving the space outside the chamber and the manufacturing cost. By arranging a chute base 8, a baffle limiting groove 801 is arranged between the baffle chute 501 of the horizontal sliding rod 5 and the baffle slider 301 of the moving baffle 3, enabling the moving baffle 3 to move along the baffle limiting groove 801, fixing the moving track of the moving baffle 3. Meanwhile, the slide rod limiting groove 802 of the chute base 8 also enables the horizontal sliding rod 5 to move horizontally back and forth within the slide rod limiting groove 802 without deviation.

[0036] In the description of the specification, the description referring to terms such as "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0037] The above content is only an example and explanation of the structure of the utility model. Those skilled in the art of this technology can make various modifications or supplements to the described specific embodiments or use similar methods for substitution. As long as it does not deviate from the structure of the utility model or exceed the scope defined by this claim book, it shall fall within the protection scope of the utility model.

Claims

1. A target baffle device for a PVD vacuum coating machine, comprising a target rack (1), a target (2), a fixed baffle (4) and a swing cylinder (7), characterized in that, It further includes a movable baffle (3), a rotating shaft (6) and a chute base (8); A target (2) is provided at the center of the target holder (1), and fixed baffles (4), a movable baffle (3) and a chute base (8) are symmetrically arranged on both sides of the target (2). The movable baffle (3) is slidably arranged outside the fixed baffle (4). The lower end of the movable baffle (3) is slidably connected to the chute base (8), and the upper end of the movable baffle (3) is slidably connected to the target holder (1); A horizontal slide bar (5) is slidably arranged between the chute bases (8). A rotating shaft (6) is arranged below the horizontal slide bar (5), and a swing cylinder (7) is connected to the rotating shaft (6) through a magnetorheological fluid below; 2. The target baffle device of a PVD vacuum coating machine according to claim 1, characterized in that, A slide bar limiting groove (802) is formed in the middle of the chute base (8), so that the chute base (8) is in a "C" shape. The left and right ends of the horizontal slide bar (5) are slidably arranged in the slide bar limiting groove (802); 3. The target baffle device of a PVD vacuum coating machine according to claim 2, characterized in that, A rotating shaft chute (502) is arranged at the lower end of the horizontal slide bar (5). A rotating shaft slider (601) of the rotating shaft (6) is slidably connected in the rotating shaft chute (502), and the length of the rotating shaft chute (502) is the same as the length of the rotating shaft (6); 4. The target baffle device of a PVD vacuum coating machine according to claim 3, characterized in that, When the rotating shaft (6) rotates to be parallel to the horizontal slide bar (5), the rotating shaft (6) coincides with the rotating shaft chute (502); 5. The target baffle device of a PVD vacuum coating machine according to claim 4, characterized in that Baffle chutes (501) are arranged at the left and right ends of the horizontal slide bar (5), and the length of the baffle chutes (501) is the same as the length of the slide bar limiting groove (802); 6. The target baffle device of a PVD vacuum coating machine according to claim 5, characterized in that, A baffle limiting groove (801) is arranged through the upper end of the chute base (8); 7. The target baffle device of a PVD vacuum coating machine according to claim 6, characterized in that, The baffle limiting groove (801) is arc-shaped, so that the baffle slider (301) of the movable baffle (3) slides along the outside of the fixed baffle (4); 8. The target baffle device of a PVD vacuum coating machine according to claim 7, characterized in that, Baffle sliders (301) are symmetrically arranged at the upper and lower ends of the movable baffle (3). The upper baffle slider (301) is slidably arranged in the baffle limiting groove (801) on the target holder (1), and the lower baffle slider (301) passes through the baffle limiting groove (801) of the chute base (8) and is slidably arranged in the baffle chute (501).

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