Grooving chuck for single crystal furnace

Abstract

The utility model discloses a slotting chuck for a single crystal furnace, which comprises a chuck body, a base arranged at the bottom of the chuck body, a primary mounting hole formed in the middle of the top of the chuck body, a dismounting groove formed in the outer side of the chuck body, and a positioning opening formed in the middle of the top of the chuck body. A dismounting groove is formed in the surface of the chuck, the bottom of the dismounting groove is of an arc-shaped structure, a second-stage mounting hole is formed in the bottom of the first-stage mounting hole, a third-stage mounting hole is formed in the bottom of the second-stage mounting hole, the second-stage mounting hole is of an inclined plane structure, and the diameter of the first-stage mounting hole is larger than that of the third-stage mounting hole. And the heating condition of the seed crystal is optimized through the guide groove, so that the probability of oxidation and color emission of the seed crystal is reduced. According to the grooving chuck device, the problems that the chuck and a heavy punch are stuck in a high-temperature environment in the industry, seed crystals are prone to discoloring and the like are solved, and the single crystal manufacturing efficiency and the crystal quality are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field related to the manufacture of photovoltaic single crystals, and particularly relates to a grooved chuck for a single crystal furnace. Background Technique

[0002] The single crystal furnace chuck is a key component in semiconductor manufacturing equipment, mainly used to fix and guide the growth of the seed crystal in the single crystal furnace. It ensures the stability of the seed crystal during the single crystal growth process, avoids the fracture or displacement of the seed crystal caused by temperature changes or mechanical vibrations, thereby guaranteeing the quality and integrity of the single crystal silicon rod. The application of the single crystal furnace chuck in the single crystal furnace is crucial. It not only relates to the growth quality of the single crystal silicon rod but also affects the production efficiency. A good chuck design can, to a certain extent, improve the uniformity and stability of single crystal growth, which is very important for the production of high-performance single crystal silicon materials.

[0003] However, in the existing chuck in a high-temperature environment, the chuck and the weight are prone to jamming. Due to the high temperature, high-temperature gloves need to be worn. The surface of the graphite chuck is smooth and difficult to turn, making it difficult to disassemble and assemble. Frequent knocking on the chuck will cause damage to the graphite chuck. In severe cases, it will lead to a decrease in the load-bearing capacity of the graphite chuck, ultimately resulting in the dropping of the rod, causing significant economic losses and potential risks to personal property safety. In addition, the internal structure of the single crystal furnace makes the seed crystal easily affected by high temperature and change color. After discoloration, the mechanical properties of the seed crystal change, increasing the possibility of fracture, posing a huge hidden danger to production. Content of the Utility Model

[0004] The purpose of the utility model is to provide a grooved chuck for a single crystal furnace to solve the problems in the above-mentioned background technique, that is, in a high-temperature environment, the chuck and the weight are prone to jamming. Due to the high temperature, high-temperature gloves need to be worn. The surface of the graphite chuck is smooth and difficult to turn, making it difficult to disassemble and assemble. Frequent knocking on the chuck will cause damage to the graphite chuck. In severe cases, it will lead to a decrease in the load-bearing capacity of the graphite chuck, ultimately resulting in the dropping of the rod, causing significant economic losses and potential risks to personal property safety. In addition, the internal structure of the single crystal furnace makes the seed crystal easily affected by high temperature and change color. After discoloration, the mechanical properties of the seed crystal change, increasing the possibility of fracture, posing a huge hidden danger to production.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A grooved chuck for a single crystal furnace, comprising a chuck body;

[0006] A base is arranged at the bottom position of the chuck body, and a primary mounting hole is arranged at the middle position of the top of the chuck body;

[0007] A disassembly groove is arranged at the outer side position of the chuck body, and a positioning port is arranged at the middle position of the top of the chuck body.

[0008] Preferably, the disassembly grooves are provided in four annular arrays, the bottom of the disassembly grooves are provided in an arc-shaped structure, and the disassembly grooves are embedded in the chuck body.

[0009] Preferably, a secondary mounting hole is arranged at the bottom of the primary mounting hole, and a tertiary mounting hole is arranged at the bottom of the secondary mounting hole.

[0010] Preferably, the secondary mounting hole is an inclined structure, and the diameter of the primary mounting hole is larger than the diameter of the tertiary mounting hole.

[0011] Preferably, the chuck body is provided with a through-hole inside, the chuck body is a circular structure, and the chuck body is made of a molybdenum-rhenium alloy.

[0012] Compared with the prior art, the utility model provides a slotting chuck for a single crystal furnace, which has the following beneficial effects:

[0013] The device not only increases the friction during disassembly and assembly and reduces the difficulty of disassembly and assembly by arranging the disassembly groove and the positioning opening, but also optimizes the heating condition of the seed crystal through the guide groove and reduces the probability of the seed crystal oxidizing and discoloring. The slotted chuck device of the present invention solves the problems of the chuck and the heavy hammer being stuck in the high temperature environment in the industry and the seed crystal being easy to change color, thereby improving the efficiency of single crystal manufacturing and the crystal quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the utility model.

[0015] Figure 2 It is a schematic structural diagram of the cross section of the multifunctional slotting chuck for a single crystal furnace in the utility model.

[0016] Figure 3 It is a three-view drawing of the multifunctional slotting chuck for single crystal furnace in the utility model.

[0017] In the figure: 1. chuck body; 2. base; 3. disassembly slot; 4. positioning hole; 5. primary mounting hole; 6. secondary mounting hole; 7. tertiary mounting hole. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] The utility model provides Figures 1 - 3 A slotting chuck for a single crystal furnace shown includes a chuck body 1;

[0020] A base 2 is provided at the bottom position of the chuck body 1, and a primary mounting hole 5 is provided at the middle position of the top of the chuck body 1;

[0021] A disassembly groove 3 is formed at the outer position of the chuck body 1, and a positioning port 4 is provided at the middle position of the top of the chuck body 1.

[0022] Four disassembly grooves 3 are arranged in a circular array. The disassembly groove 3 also serves as an air flow guiding groove. The bottom position of the disassembly groove 3 is set as an arc-shaped structure, and the disassembly groove 3 is embedded in the chuck body 1.

[0023] A secondary mounting hole 6 is provided at the bottom position of the primary mounting hole 5, and a tertiary mounting hole 7 is provided at the bottom position of the secondary mounting hole 6.

[0024] The secondary mounting hole 6 is of an inclined plane structure, and the diameter of the primary mounting hole 5 is larger than the diameter of the tertiary mounting hole 7.

[0025] The inside of the chuck body 1 is provided with a through hole. The chuck body 1 is of a circular structure and is made of molybdenum rhenium alloy. The disassembly groove 3 also serves as an air flow guiding groove.

[0026] In this embodiment, the specific implementation steps of a slotted chuck for a single crystal furnace are as follows: Ensure that the chuck body 1 of the single crystal furnace is in a clean state without debris or dirt. Check whether all components of the chuck body 1 are intact without damage or abnormality. Check whether the cooling system is operating normally to ensure that the chuck body 1 can maintain a stable working temperature in a high-temperature environment. Place the single crystal rod in the single crystal furnace and adjust its position to make it suitable for clamping by the chuck body 1. Adjust the clamping force or clamping angle of the chuck body 1 as needed to ensure that the single crystal rod can grow stably and vertically. Start the clamping mechanism and gently clamp the single crystal rod with the chuck body 1 to ensure that the clamping force is uniform and appropriate, avoiding excessive extrusion or insufficient clamping. Monitor the temperature change during the clamping process to ensure that the single crystal rod and the chuck body 1 are within a safe range. During the operation of the single crystal furnace, continuously monitor the growth condition of the single crystal rod to ensure that its quality and crystallinity meet the requirements. Regularly check the working state of the chuck body 1 to ensure its normal operation and promptly handle any abnormal conditions. After the single crystal growth is completed, stop the operation of the clamping mechanism and carefully remove the single crystal rod from the chuck body 1. Clean and maintain the chuck body 1 to ensure that it is still in good working condition for the next use.

[0027] Such as Figures 1 - 3As shown in the figure, a base 2 is provided at the bottom of the chuck body 1, a primary mounting hole 5 is provided at the middle position of the top of the chuck body 1, a disassembly groove 3 is formed at the outer side position of the chuck body 1, a positioning port 4 is provided at the middle position of the top of the chuck body 1, four disassembly grooves 3 are arranged in a circular array, the disassembly groove 3 also serves as an air flow guiding groove, the bottom position of the disassembly groove 3 is set as an arc-shaped structure, the disassembly groove 3 is embedded in the chuck body 1, a secondary mounting hole 6 is provided at the bottom position of the primary mounting hole 5, a tertiary mounting hole 7 is provided at the bottom position of the secondary mounting hole 6, the secondary mounting hole 6 is a bevel structure, and the diameter of the primary mounting hole 5 is larger than the diameter of the tertiary mounting hole 7.

[0028] Preferably, a base 2 is provided at the bottom position of the chuck body 1 to support the fixed position of the chuck in the single crystal furnace. Disassembly grooves 3 are formed at the outer side position of the chuck body 1, which are used to facilitate the disassembly and maintenance of the chuck. A positioning port 4 is provided at the middle position of the top of the chuck body 1 to position the chuck and adjust the range, making the installation more flexible and convenient. The disassembly grooves 3 not only increase the friction during disassembly and assembly, making the disassembly and assembly of the chuck and the weight hammer more convenient and reducing the disassembly and assembly difficulty, but also serve as air flow guiding grooves, which can guide the air flow in the single crystal furnace to blow the surface of the seed crystal, reduce the surface temperature of the seed crystal, and reduce the probability of oxidation and coloration of the seed crystal. The design of the disassembly grooves 3 can also be optimized according to the specific structure of the single crystal furnace and the size of the seed crystal to ensure the best disassembly and assembly effect and seed crystal cooling effect.

[0029] As Figures 1 - 3 shown in the figure, the inside of the chuck body 1 is through, the chuck body 1 is a circular structure, and the chuck body 1 is made of molybdenum rhenium alloy.

[0030] Optionally, the through setting inside the chuck body 1 may help to achieve better temperature control and heat conduction during the operation of the single crystal furnace, ensure the heat balance between the chuck and the single crystal rod, and thus improve the growth quality and stability. The circular structure of the chuck body 1 may have more uniform force distribution characteristics, provide a more stable clamping effect, and avoid the deformation or damage of the single crystal rod caused by excessive local pressure. Molybdenum rhenium alloy has good high-temperature performance and corrosion resistance, can work stably for a long time in the high-temperature environment of the single crystal furnace, and has high mechanical strength and hardness, ensuring the long-term reliability and durability of the chuck.

[0031] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A slotting chuck for a single crystal furnace, comprising a chuck body (1); A base (2) is provided at the bottom of the chuck body (1), and a primary mounting hole (5) is provided at the middle of the top of the chuck body (1); It is characterized in that: A disassembly groove (3) is provided at the outer side of the chuck body (1), and a positioning opening (4) is provided at the middle position of the top of the chuck body (1).

2. The grooved chuck for a single crystal furnace according to claim 1, wherein: Four disassembly grooves (3) are arranged in an annular array. The disassembly grooves (3) also serve as airflow guiding grooves. The bottom of the disassembly grooves (3) is arranged as an arc-shaped structure. The disassembly grooves (3) are embedded in the chuck body (1).

3. The grooved chuck for a single crystal furnace according to claim 1, wherein: A secondary mounting hole (6) is arranged at the bottom of the primary mounting hole (5), and a tertiary mounting hole (7) is arranged at the bottom of the secondary mounting hole (6).

4. The grooved chuck for a single crystal furnace according to claim 3, characterized in that: The secondary mounting hole (6) is an inclined surface structure, and the diameter of the primary mounting hole (5) is greater than the diameter of the tertiary mounting hole (7).

5. A grooved chuck for a single crystal furnace according to claim 1, characterized in that: The chuck body (1) is provided with a through-hole inside, the chuck body (1) is a circular structure, and the chuck body (1) is made of a molybdenum-rhenium alloy.

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