Multi-chip tool based on vertical liquid phase epitaxial growth
By designing the workpiece body and inclined surface top table with a multilateral column structure, the problems of low production efficiency and mother liquor residues of vertical liquid phase epitaxial tooling are solved, and efficient wafer growth and high yield production are achieved.
Patent Information
- Application Number
- CN202422224777.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-11
- Publication Date
- 2025-07-08
- Estimated Expiration
- 2034-09-11
AI Technical Summary
The existing vertical liquid phase epitaxial tooling has low production efficiency and the mother liquor is prone to residue, resulting in low substrate yield.
Design a workpiece body with a multilateral column structure, combining the inclined top table and the outer edge area to ensure smooth flow of mother liquor and avoid residue.
It improves the chip growth efficiency, reduces mother liquor residues, and improves the production efficiency and yield of the substrate.
Smart Images
Figure CN223074315U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of semiconductor substrate wafers, and particularly to a multi-wafer tooling based on vertical liquid phase epitaxial growth. Background Art
[0002] Due to its advantages of high thermal conductivity, few impurities and low pollution, high-purity graphite has become a commonly used material for vertical liquid phase epitaxial tooling. However, due to the limited length of the equipment temperature field and the limitation of the inner diameter size of the vertical liquid phase epitaxial equipment cavity, the design height and width of the graphite tooling are restricted. In addition, during the growth process of the substrate, the substrate is required to have good single crystal quality and meet requirements such as uniformity, deposition phase, EPD, etc. As a result, the yield of large substrates is relatively low, and a large number of small-sized wafers will be produced during the actual growth process.
[0003] For existing vertical liquid phase epitaxial tooling, the production efficiency for small-sized wafers is relatively low, and the mother liquor will remain on the tooling. Summary of the Utility Model
[0004] In view of this, the purpose of this application is to provide a multi-wafer tooling based on vertical liquid phase epitaxial growth, which is used to solve the problems that the production efficiency of existing vertical liquid phase epitaxial tooling is relatively low and the mother liquor will remain on the tooling.
[0005] To achieve the above technical purpose, this application provides a multi-wafer tooling based on vertical liquid phase epitaxial growth, including: a tooling main body, a top platform and a base;
[0006] The tooling main body is a vertically arranged multi-sided prism;
[0007] The top surface of the base is provided with a central area and an outer edge area located outside the central area;
[0008] The tooling main body is arranged on the central area;
[0009] The top platform covers the tooling main body;
[0010] The top surface of the outer edge area is an inclined surface sloping downward;
[0011] The top surface of the top platform is an inclined surface sloping downward.
[0012] Further, the tooling main body is a hexagonal prism.
[0013] Further, the outer edge area includes a plurality of petal-shaped pieces;
[0014] The plurality of petal-shaped pieces surround the tooling main body in a petal shape, and the number of the petal-shaped pieces is in one-to-one correspondence with the sides of the tooling main body and is connected;
[0015] The top surface of the petal-shaped piece is an inclined surface sloping downward.
[0016] Further, it further includes a plurality of gaskets;
[0017] Grooves are provided on each side surface of the tooling main body;
[0018] The gasket is disposed on the groove, and the outer end surface of the gasket is flush with the outer groove edge of the groove.
[0019] Further, the sides of the plurality of gaskets are sequentially abutted end to end.
[0020] Further, the outer peripheral edge of the top platform along the horizontal direction is flush with the gasket.
[0021] Further, the gasket is a quartz sheet.
[0022] Further, the included angle between the top surface of the base and the horizontal plane is 10 to 25°.
[0023] Further, the included angle between the top surface of the base and the horizontal plane is 13°, 20° or 22°.
[0024] Further, threaded holes are provided on the tooling main body and / or the top platform.
[0025] As can be seen from the above technical solutions, the present application provides a multi-piece tooling based on vertical liquid phase epitaxial growth, including: a tooling main body, a top platform and a base; the tooling main body is a vertically arranged multi-sided column; the top surface of the base is provided with a central region and an outer edge region located outside the central region; the tooling main body is disposed on the central region; the top platform covers the tooling main body; the top surface of the outer edge region is an inclined surface sloping downward; the top surface of the top platform is an inclined surface sloping downward.
[0026] In this solution, the tooling main body with a multi-sided column structure can install multiple growth substrates at the same time, improving the wafer growth efficiency; at the same time, the outer edge region and the top platform are both inclined surface structures, enabling the mother liquor to flow out of the tooling smoothly, avoiding the mother liquor remaining on the tooling, and effectively solving the problems of low production efficiency of the existing vertical liquid phase epitaxial tooling and the mother liquor remaining on the tooling. Description of the Drawings
[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0028] Figure 1Schematic diagram of a multi - wafer tooling based on vertical liquid - phase epitaxial growth provided by an embodiment of the present application;
[0029] Figure 2 Top - view of the base of a multi - wafer tooling based on vertical liquid - phase epitaxial growth provided by an embodiment of the present application;
[0030] Figure 3 Schematic diagram of a multi - wafer tooling based on vertical liquid - phase epitaxial growth provided by an embodiment of the present application after setting gaskets and small - sized wafers;
[0031] Figure 4 Side - view sectional view of a multi - wafer tooling based on vertical liquid - phase epitaxial growth provided by an embodiment of the present application;
[0032] In the figure: 10, tooling main body; 11, groove; 20, top platform; 30, base; 31, central area; 32, outer edge area; 33, petal; 40, gasket; 50, small - sized wafer; a, angle between the top surface of the base and the horizontal plane. Detailed implementation manners
[0033] Next, the technical solutions of the embodiments of the present application will be clearly and completely described with reference to the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this specification without creative efforts belong to the scope claimed by the present application.
[0034] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.
[0035] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.
[0036] Please refer toFigures 1 to 3 , a multi - wafer tooling provided in an embodiment of the present application based on vertical liquid - phase epitaxial growth, includes: a tooling main body 10, a top platform 20, and a base 30.
[0037] The tooling main body 10 is a vertically - arranged multi - sided prism. Optionally, the tooling main body 10 can be a hexagonal prism; in practical applications, small - size wafers 50 are attached to the side surface of the tooling main body 10 as growth substrates. Using a hexagonal prism as the tooling main body 10 can make the tooling main body 10 more suitable for small - size wafers and is also convenient for processing.
[0038] The top surface of the base 30 is provided with a central region 31 and an outer - edge region 32 located outside the central region 31; the tooling main body 10 is arranged on the central region 31, that is, the outer - edge region 32 is located outside the tooling main body 10 in the horizontal direction, so that the mother liquor left from the tooling main body 10 will flow to the top surface of the outer - edge region 32.
[0039] The top platform 20 covers the tooling main body 10; the top surface of the outer - edge region 32 is an inclined surface sloping downward; the top surface of the top platform 20 is an inclined surface sloping downward. Here, the slope direction refers to the orientation of the inclined surface, that is, the direction of the projection of the slope normal on the horizontal plane, and can also be generally understood as the direction from high to low of the inclined surface.
[0040] In this embodiment, the inclined surface can be a plane or an arc - shaped surface. By setting the top surface of the top platform 20 and the top surface of the outer - edge region 32 as inclined surfaces, it can effectively make the mother liquor slide off from the top platform 20 and the outer - edge region 32, avoiding the phenomenon of residual mother liquor on the entire tooling.
[0041] Optionally, the top surface of the top platform 20 and the top surface of the outer - edge region 32 can be an arched inclined structure, that is, a shape similar to the top of an umbrella, or a straight - line inclined structure, that is, a shape similar to a gable - roof, as long as the mother liquor can slide off smoothly.
[0042] In applications, please refer to Figure 2 Refer to Figure 4 , the outer - edge region 32 includes a plurality of petals 33; the plurality of petals 33 surround the tooling main body 10 in a petal - like shape, and the number of petals 33 corresponds to and is connected to the side surfaces of the tooling main body 10 one by one; the top surface of the petal 33 is an inclined surface sloping downward.
[0043] In this embodiment, the inner side of the petal 33 is linear and is connected to the side surface of the tooling main body 10 to ensure that the mother liquor sliding off any position on the side surface of the tooling main body 10 can fall on the petal 33; the outer side of the petal 33 is arc - shaped.
[0044] In Figure 2In the top view shown, a plurality of petals 33 of the base 30 are arranged in a petal shape; this structure has the advantage of being easy to process on the one hand, and on the other hand, it can ensure that the mother liquor slides down without dead corners.
[0045] In the base 30 provided in this embodiment, the included angle a between the top surface of the base 30 and the horizontal plane is 10 to 25°.
[0046] In practical applications, the larger the angle a, the smoother the sliding of the mother liquor. Correspondingly, the processing difficulty is also higher. The inventor found that when the included angle a is in the range of 10 to 25°, it can take into account the smooth sliding of the mother liquor and the effect of being easy to process, and has good applicability.
[0047] Optionally, the included angle a between the top surface of the base 30 and the horizontal plane is 13°, 20° or 22°, so that while the base 30 can meet the above-mentioned effects of the smooth sliding of the mother liquor and being easy to process, it is also convenient to cooperate with other toolings.
[0048] In another embodiment, please refer to Figure 3 And Figure 4 , it further includes a plurality of gaskets 40; grooves 11 are provided on each side surface of the tooling main body 10; the gaskets 40 are arranged on the grooves 11, and the outer end surface of the gasket 40 is flush with the outer groove edge of the groove 11.
[0049] Specifically, the top view of the gasket 40 can be trapezoidal. The gasket 40 can be a quartz sheet. The gasket 40 being flush with the outer groove edge of the groove 11 can prevent the mother liquor from penetrating into the groove 11.
[0050] Furthermore, the sides of the plurality of gaskets 40 are sequentially abutted end to end, which can further prevent the mother liquor from penetrating into the gaps between the gaskets 40.
[0051] Furthermore, the outer peripheral edge of the top table 20 in the horizontal direction is flush with the gasket 40, so that the mother liquor sliding down from the top table 20 can slide onto the gasket 40 and contact the small-sized wafer 50.
[0052] In other embodiments, threaded holes are provided on the tooling main body 10 and / or the top table 20, which can fix the gasket fixture.
[0053] In the multi-wafer tooling based on vertical liquid phase epitaxial growth provided in this embodiment, the tooling main body 10, the top table 20 and the base 30 can be an integrally formed structure, and then the above-mentioned inclined surface and groove 11 are formed by cutting.
[0054] The above are the preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the foregoing examples, or perform equivalent replacements for some of the technical features. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.
Claims
1. A multi-chip tooling based on vertical liquid phase epitaxial growth, characterized in that Comprising: A tooling main body (10), a top platform (20) and a base (30); The tooling main body (10) is a vertically arranged polygonal column; The top surface of the base (30) is provided with a central region (31) and an outer edge region (32) located on the outer periphery of the central region (31); The tooling main body (10) is arranged on the central region (31); The top platform (20) covers the tooling main body (10); The top surface of the outer edge region (32) is an inclined surface sloping downward; The top surface of the top platform (20) is an inclined surface sloping downward.
2. The multi-chip tooling based on vertical liquid phase epitaxial growth according to claim 1, wherein The tooling main body (10) is a hexagonal column.
3. The multi-wafer tooling based on vertical liquid phase epitaxial growth according to claim 1 or 2, wherein The outer edge region (32) includes a plurality of petals (33); The plurality of petals (33) surround the tooling main body (10) in a petal shape, and the number of the petals (33) is in one-to-one correspondence with the sides of the tooling main body (10) and is connected; The top surface of the petal (33) is an inclined surface sloping downward.
4. The multi-chip tooling based on vertical liquid phase epitaxial growth according to claim 1, wherein It further includes a plurality of gaskets (40); Grooves (11) are provided on each side surface of the tooling main body (10); The gasket (40) is arranged on the groove (11), and the outer end surface of the gasket (40) is flush with the outer groove edge of the groove (11).
5. The multi-wafer tooling based on vertical liquid phase epitaxial growth according to claim 4, characterized in that The sides of the plurality of gaskets (40) are sequentially abutted end to end.
6. The multi-chip tooling based on vertical liquid phase epitaxial growth according to claim 4 or 5, characterized in that The outer peripheral edge of the top platform (20) in the horizontal direction is flush with the gasket (40).
7. The multi-chip tooling based on vertical liquid phase epitaxial growth according to claim 4, characterized in that The gasket (40) is a quartz sheet.
8. The multi-wafer tooling based on vertical liquid phase epitaxial growth according to claim 1, characterized in that, The included angle between the top surface of the base (30) and the horizontal plane is 10 to 25°; 9. The multi-wafer tooling based on vertical liquid phase epitaxial growth according to claim 8, wherein, The included angle between the top surface of the base (30) and the horizontal plane is 13°, 20° or 22°.
10. The multi-chip tooling based on vertical liquid phase epitaxial growth according to claim 1, characterized in that, Threaded holes are provided on the tooling main body (10) and / or the top platform (20).