Circulating cleaning and maintaining system for vacuumizing device

Abstract

A circulating cleaning and maintaining system for a vacuumizing device comprises a vacuumizing unit and a liquid supply unit, the vacuumizing unit comprises the vacuumizing device composed of a vacuum pump set, the vacuum pump set comprises at least one vacuum pump, an air inlet of the vacuum pump set is connected to a medium area to be pumped through a main air inlet pipe, and an air inlet main valve is arranged on the main air inlet pipe; the gas outlet is connected with a main gas outlet pipe and is provided with a gas outlet main valve; an external air inlet pipe is arranged between the air inlet main valve and the vacuum pump set, and an air inlet valve is arranged on the external air inlet pipe; a circulating pipe is arranged on one side of the vacuum pump set and provided with a circulating valve. The liquid supply unit is used for providing cleaning liquid or maintenance liquid. The vacuum pump set is adopted as a cleaning power source and matched with the circulating pipe to form high-speed flowing circulating air flow, cleaning liquid is stirred and dispersed into the air flow, comprehensive washing and cleaning are conducted on the vacuum pump set, the cleaning effect is good, cost is low, consumed time is short, and complete automatic cleaning and maintenance can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pump equipment, and particularly relates to a circulating cleaning and maintenance system for a vacuum pumping device. Background Art

[0002] In industrial processing and manufacturing, media composed of a large amount of waste gas and fine debris are often generated. Especially in processes such as film processing, photovoltaic manufacturing, and pharmaceutical packaging, media such as unstable low-molecular polymers and pharmaceutical powders are generated. To prevent these media from affecting the quality of production and processing, it is necessary to evacuate the above media from the processing area through a vacuum pumping device during the production process.

[0003] However, due to the high temperature during the operation of the vacuum pumping device, when the vacuum pumping device stops operating, as the temperature decreases, some media will adhere to the inside of the vacuum pumping device. To ensure the hygiene and stable operation of the vacuum pumping device, it is necessary to clean it regularly.

[0004] There are mainly two traditional cleaning methods. One is to remove the vacuum pumping device and clean and maintain its interior through a cleaning device. In this method, the power for transporting the cleaning liquid is provided by an external cleaning device, so the flow of the cleaning liquid will be restricted by structures such as the rotating vane inside the vacuum pumping device, and the cleaning takes an extremely long time. It is easy to leave dirt in the dead corners inside the vacuum pumping device after cleaning. The other method is to inject the cleaning liquid into the vacuum pumping device during its operation and use the contact between the high-speed operating vacuum pumping device and the cleaning liquid to quickly clean it. Although this method is fast, due to the short contact time between the cleaning liquid and the vacuum pumping device, the cleaning effect of the vacuum pumping device cannot be guaranteed. If the supply amount of the cleaning liquid is increased, the cleaning cost will be greatly increased, and at the same time, a large amount of cleaning liquid discharged into the air will also increase the impact on the environment.

[0005] Therefore, in view of the deficiencies of the existing technology, it is necessary to design a circulating cleaning and maintenance system for a vacuum pumping device to solve the above problems.

[0006] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solution of the present utility model and facilitating the understanding of those skilled in the art. It cannot be considered that the above content is well-known to those skilled in the art just because these contents are described in the background art of the present utility model. Summary of the Utility Model

[0007] To overcome the above deficiencies in the existing technology, the purpose of the present utility model is to disclose a circulating cleaning and maintenance system for a vacuum pumping device to ensure the stable operation of the vacuum pumping device.

[0008] The present utility model discloses a circulating cleaning and maintenance system for a vacuum pumping device, including a vacuum pumping unit and a liquid supply unit, wherein:

[0009] The vacuum pumping unit includes a vacuum pumping device composed of a vacuum pump group. The vacuum pump group includes at least one vacuum pump. The air inlet of the vacuum pump group is connected to the area of the medium to be pumped through the main inlet pipe for air extraction and impurity removal. An inlet main valve is provided on the main inlet pipe. The air outlet of the vacuum pump group is connected with a main outlet pipe, and an outlet main valve is provided on the main outlet pipe. A circulation pipe is provided on one side of the vacuum pump group. Both ends of the circulation pipe are respectively connected to the air inlet and the air outlet of the vacuum pump group, and a circulation valve is provided on the circulation pipe.

[0010] The liquid supply unit includes a cleaning liquid supply device for providing cleaning liquid. The output end of the cleaning liquid supply device is communicated with the main inlet pipe and is located between the inlet main valve and the air inlet of the vacuum pump group.

[0011] The above structure uses the vacuum pump itself as the power source to form a circulating air flow through the circulation pipe. The added cleaning liquid is dispersed into the circulating air flow by the high-speed rotating vacuum pump, and the vacuum pumping device is comprehensively and thoroughly cleaned.

[0012] Preferred technical solution: The liquid supply unit further includes a maintenance liquid supply device for providing maintenance liquid. The output end of the maintenance liquid supply device is communicated with the main inlet pipe and is located between the inlet main valve and the air inlet of the vacuum pump group.

[0013] Preferred technical solution: An external inlet pipe to the air is provided between the inlet main valve and the vacuum pump group, and an air inlet valve to the air is provided on the external inlet pipe.

[0014] Preferred technical solution: The vacuum pumping units in the circulating cleaning and maintenance system can be two or more groups. The vacuum pumping units are arranged in parallel, and a liquid supply unit is connected to each vacuum pumping unit. By switching different vacuum pumping units, the vacuum pump groups in each vacuum pumping unit can be cleaned and maintained without stopping the air extraction and impurity removal operation on the area of the medium to be pumped.

[0015] Preferred technical solution: A branch filter for filtering debris is further provided on the circulation pipe; the number of circulation valves is two, and the two circulation valves are respectively arranged at both ends of the branch filter. The branch filter can prevent impurities from entering the vacuum pumping device again through the circulation channel and causing secondary pollution; the circulation valves at both ends of the branch filter can make its disassembly, installation and maintenance more convenient.

[0016] Preferred technical solution: A main filter is provided on the main inlet pipe on the side far from the vacuum pump group to collect fine impurities in the air flow and reduce the cleaning frequency of the vacuum pumping unit.

[0017] Preferred technical solution: A three-way valve is used to replace the combination of the inlet main valve and the adjacent circulation valve at the end of the main inlet pipe; a three-way valve is used to replace the combination of the outlet main valve and the adjacent circulation valve at the end of the main outlet pipe.

[0018] Preferred technical solution: The on-off valves of the main intake valve, main outlet valve, air intake valve to the atmosphere, circulation valve and liquid supply unit, as well as the vacuum pump group, are all automatically controlled by connecting to the console; the console controls the flow rate and velocity of the above valve switches by adjusting the rotational speed of the vacuum pump group, improving the automation degree of the equipment and reducing the labor cost.

[0019] Due to the application of the above technical solution, the beneficial effects of the circulating cleaning and maintenance system of a vacuum pumping device of the present utility model are as follows:

[0020] (1) Using the vacuum pump itself as the cleaning power source, cooperating with the circulation pipe to form a high-speed flowing circulating air flow, dispersing the cleaning liquid into the air flow, and repeatedly flushing and cleaning the inside of the vacuum pump. The cleaning effect is good and the time used is short;

[0021] (2) Using circulating cleaning and maintenance can reduce the usage amount of the cleaning liquid and maintenance liquid, thereby reducing the cleaning and maintenance cost. At the same time, by controlling the liquid supply unit, the cleaning operation and maintenance operation can be freely switched;

[0022] (3) Multiple vacuum pumping units are arranged in parallel, and a liquid supply unit is connected to each vacuum pumping unit; by switching different vacuum pumping units, the vacuum pump groups in each vacuum pumping unit can be successively cleaned and maintained without stopping the air extraction and impurity removal operation on the area to be evacuated. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of a circulating cleaning and maintenance system of a vacuum pumping device of the present utility model in Embodiment 1;

[0024] Figure 2 It is a schematic structural diagram of a circulating cleaning and maintenance system of a vacuum pumping device of the present utility model in Embodiment 2;

[0025] Figure 3 It is a schematic structural diagram of a circulating cleaning and maintenance system of a vacuum pumping device of the present utility model in Embodiment 3;

[0026] Figure 4 It is a schematic structural diagram of a circulating cleaning and maintenance system of a vacuum pumping device of the present utility model in Embodiment 4.

[0027] In the above drawings, 100, area to be evacuated; 1, vacuum pumping unit; 11, vacuum pump group; 12, main air inlet pipe; 12a, main intake valve; 12b, main filter; 13, main air outlet pipe; 13a, main outlet valve; 14, external air inlet pipe; 14a, air intake valve to the atmosphere; 15, circulation pipe; 15a, circulation valve; 15b, branch filter; 16, three-way valve; 2, liquid supply unit; 21, cleaning liquid supply device; 22, maintenance liquid supply device. Detailed implementation manners

[0028] The following specific embodiments illustrate the implementation manners of the present utility model. Persons familiar with this technology can easily understand other advantages and effects of the present utility model from the content disclosed in this specification.

[0029] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present utility model. In addition, terms such as "horizontal", "vertical", "hanging" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0030] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0031] Embodiment 1:

[0032] As Figure 1 shown, a vacuum pumping device circulating cleaning and maintenance system disclosed by the present utility model is used to ensure that the vacuum pumping device stably evacuates and removes impurities from the medium area 100 to be pumped. The circulating cleaning and maintenance system includes a vacuum pumping unit 1 and a liquid supply unit 2. The following will specifically describe the main components of the above present utility model:

[0033] As Figure 1As shown in the figure, the vacuum pumping unit 1 includes a vacuum pumping device composed of a vacuum pump group 11. The vacuum pump group 11 includes a single vacuum pump. It should be noted that the above structure is only exemplary and not restrictive. In this embodiment, the vacuum pump group 11 is composed of a single vacuum pump, but in other embodiments, the vacuum pump group 11 can also be composed of two or more vacuum pumps connected in series or in parallel; the intake port of the vacuum pump group 11 is connected to the medium area to be pumped 100 through the main intake pipe 12 for air extraction and impurity removal. An intake main valve 12a is provided on the main intake pipe 12. The external exhaust port of the vacuum pump group 11 is connected with a main exhaust pipe 13, and an exhaust main valve 13a is provided on the main exhaust pipe 13; an external intake pipe 14 to the atmosphere is provided between the intake main valve 12a and the vacuum pump group 11, and an intake valve 14a to the atmosphere is provided on the external intake pipe 14; a circulation pipe 15 is provided on one side of the vacuum pump group 11. The two ends of the circulation pipe 15 are respectively connected to the intake port and the exhaust port of the vacuum pump group 11, and a circulation valve 15a is provided on the circulation pipe 15.

[0034] As Figure 1 As shown in the figure, the liquid supply unit 2 includes a cleaning liquid supply device 21 for providing cleaning liquid and a maintenance liquid supply device 22 for providing maintenance liquid. The output end of the cleaning liquid supply device 21 is communicated with the main intake pipe 12 and is located between the intake main valve 12a and the intake port of the vacuum pump group 11; the output end of the maintenance liquid supply device 22 is communicated with the main intake pipe 12 and is located between the intake main valve 12a and the intake port of the vacuum pump group 11. It should be noted that in this embodiment, the liquid supply unit 2 includes the cleaning liquid supply device 21 and the maintenance liquid supply device 22, but in other embodiments, the liquid supply unit 2 can only include the cleaning liquid supply device 21.

[0035] Refer to Figure 1As shown in the figure, the principle and usage method of a circulating cleaning and maintenance system for a vacuum pumping device disclosed by the present utility model are as follows: During use, first turn off the vacuum pump group 11, then open the circulation valve 15a and close other valves except the circulation valve 15a to form a closed circulation gas path between the vacuum pump group 11 and the circulation pipe 15. Turn on the vacuum pump group 11, and at the same time control the liquid supply unit 2 to deliver a certain amount of cleaning liquid to the vacuum pumping unit 1 to start cleaning. After the vacuum pump group 11 is circulated and rinsed with the cleaning liquid for a period of time, turn it off, open the main air inlet valve 12a or the air inlet valve to the atmosphere 14a, and at the same time open the main air outlet valve 13a, then turn on the vacuum pump group 11 to air-dry the inside of the vacuum pumping unit 1. After the air-drying is completed, turn off the vacuum pump group 11, then open the circulation valve 15a and close other valves except the circulation valve 15a to form a closed circulation gas path between the vacuum pump group 11 and the circulation pipe 15 again, and then turn on the vacuum pump group 11 and control the liquid supply unit 2 to deliver a certain amount of maintenance liquid to the vacuum pumping unit 1 to start maintenance. After the above steps are completed, turn off the vacuum pump group 11, keep the main air inlet valve 12a and the main air outlet valve 13a in the open state and close the rest of the valves above, and reconnect the vacuum pumping device composed of the vacuum pump group 11 to the area 100 of the medium to be evacuated.

[0036] Embodiment Two:

[0037] As Figure 1 and Figure 2 shown in the figure, the difference from Embodiment One is that there is an external air inlet pipe 14 to the atmosphere between the main air inlet valve 12a and the vacuum pump group 11, and an air inlet valve to the atmosphere 14a is provided on the external air inlet pipe 14; during use, in the air-drying operation, keep the main air inlet valve 12a closed and open the air inlet valve to the atmosphere 14a to communicate with the outside through the external air inlet pipe 14. At the same time, a branch filter 15b for filtering debris is provided on the circulation pipe 15; the number of circulation valves 15a is two, and the two circulation valves 15a are respectively arranged at both ends of the branch filter 15b to prevent impurities from entering the vacuum pumping device again through the circulation channel and causing secondary pollution; at the same time, it is convenient for the disassembly, installation and maintenance of the branch filter; a main road filter 12b is provided on the main road inlet pipe 12 on the side of the main air inlet valve 12a away from the vacuum pump group 11 to collect fine debris in the air flow and reduce the cleaning frequency of the vacuum pumping unit. And the switches of the main air inlet valve 12a, the main air outlet valve 13a, the air inlet valve to the atmosphere 14a, the circulation valve 15a and the liquid supply unit 2 and the vacuum pump group 11 are all connected to a control console for automatic control; the control console controls the flow rate and flow velocity of the above valve switches by adjusting the rotation speed of the vacuum pump group 11.

[0038] Embodiment Three:

[0039] As Figure 1 and Figure 3As shown in the figure, the difference from the first embodiment is that there are three vacuum pumping units 1 in the circulating cleaning and maintenance system. The vacuum pumping units 1 are arranged in parallel, and a liquid supply unit 2 is connected to each vacuum pumping unit 1. During cleaning, different vacuum pumping units 1 can be switched for cleaning to ensure the continuous operation of the air extraction and impurity removal operation in the medium area to be pumped 100.

[0040] Embodiment 4:

[0041] As Figure 1 and Figure 4 As shown in the figure, the difference from the first embodiment is that at the end of the main air inlet pipe 12, a three-way valve 16 is used to replace the combination of the main air inlet valve 12a and the adjacent circulation valve 15a; at the end of the main air outlet pipe 13, a three-way valve 16 is used to replace the combination of the main air outlet valve 13a and the adjacent circulation valve 15a.

[0042] The above embodiments are only illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A circulating cleaning and maintenance system for a vacuum pumping device, which is used to ensure that the vacuum pumping device stably evacuates and removes impurities from the medium area to be pumped, and is characterized in that: The described circulating cleaning and maintenance system includes a vacuum pumping unit (1) and a liquid supply unit (2), where: The vacuum pumping unit (1) includes a vacuum pumping device composed of a vacuum pump group (11). The vacuum pump group (11) includes at least one vacuum pump. The air inlet of the vacuum pump group (11) is connected to the area of the medium to be pumped through a main inlet pipe (12) for air extraction and impurity removal. An inlet main valve (12a) is provided on the main inlet pipe (12). The air outlet of the vacuum pump group (11) is connected to a main outlet pipe (13), and an outlet main valve (13a) is provided on the main outlet pipe (13). A circulating pipe (15) is provided on one side of the vacuum pump group (11). The two ends of the circulating pipe (15) are respectively connected to the air inlet and the air outlet of the vacuum pump group (11), and a circulating valve (15a) is provided on the circulating pipe (15). The liquid supply unit (2) includes a cleaning liquid supply device (21) for providing cleaning liquid. The output end of the cleaning liquid supply device (21) is communicated with the main inlet pipe (12) and is located between the inlet main valve (12a) and the air inlet of the vacuum pump group (11).

2. The circulating cleaning and maintenance system of a vacuum pumping device according to claim 1, wherein: The liquid supply unit (2) further includes a maintenance liquid supply device (22) for providing maintenance liquid. The output end of the maintenance liquid supply device (22) is communicated with the main inlet pipe (12) and is located between the inlet main valve (12a) and the air inlet of the vacuum pump group (11).

3. The circulating cleaning and maintenance system of a vacuum pumping device according to claim 1, characterized in that: An external inlet pipe (14) open to the air is provided between the inlet main valve (12a) and the vacuum pump group (11), and an air inlet valve (14a) open to the air is provided on the external inlet pipe (14).

4. A vacuum pumping device circulating cleaning and maintenance system according to claim 1, characterized in that: There are two or more groups of the vacuum pumping units (1) in the circulating cleaning and maintenance system. The vacuum pumping units (1) are arranged in parallel, and the liquid supply unit (2) is connected to each vacuum pumping unit (1).

5. A vacuum pumping device circulating cleaning and maintenance system according to claim 1, characterized in that: A branch filter (15b) for filtering debris is further provided on the circulating pipe (15). The number of the circulating valves (15a) is two, and the two circulating valves (15a) are respectively arranged at both ends of the branch filter (15b).

6. A vacuum pumping device circulating cleaning and maintenance system according to claim 1, characterized in that: A main filter (12b) is provided on the main inlet pipe (12) on the side of the inlet main valve (12a) away from the vacuum pump group (11).

7. A vacuum pumping device circulating cleaning and maintenance system according to claim 1, characterized in that: At the end of the main inlet pipe (12), a three-way valve (16) is used to replace the combination of the inlet main valve (12a) and the adjacent circulating valve (15a); at the end of the main outlet pipe (13), a three-way valve (16) is used to replace the combination of the outlet main valve (13a) and the adjacent circulating valve (15a).

8. A vacuum pumping device circulating cleaning and maintenance system according to claim 3, characterized in that: The inlet main valve (12a), the outlet main valve (13a), the air inlet valve (14a) open to the air, the circulating valve (15a), the switch of the liquid supply unit (2), and the vacuum pump group (11) are all connected to a console for automatic control thereof.

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