One-way valve and vacuum eutectic reflow soldering furnace thereof

Abstract

The utility model discloses a one-way valve which comprises a valve body perpendicular to the ground, one end of the valve body is a large end far away from the ground, and the other end of the valve body is a small end facing the ground. A valve ball is arranged in the valve body, a stopping step is arranged on the periphery of the inner wall of the small end of the valve body, a baffle ring is installed on the stopping step, a first sealing ring is further installed on the stopping step, and the first sealing ring is installed on the inner wall of the stopping step through the baffle ring. The valve ball is matched with the first sealing ring to achieve one-way flowing of fluid in the valve body. According to the one-way valve and the vacuum eutectic reflow soldering furnace thereof, the one-way valve effectively isolates the atmosphere from being communicated with the interior of the furnace, and the defects that the price is high, the number of connecting pipelines is large, and the control mode is complex due to the fact that an existing vacuum eutectic reflow soldering furnace generally adopts the mode that two valves are arranged to control vacuum pumping and gas discharging respectively are overcome. And a common one-way valve is used, so that the defects of poor conduction effect and insufficient discharge amount are overcome.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum eutectic reflow soldering furnaces, and particularly relates to a one-way valve and a vacuum eutectic reflow soldering furnace thereof. Background Art

[0002] A vacuum eutectic reflow soldering furnace is a device for performing eutectic soldering process on semiconductor chips in a vacuum environment. This device uses a vacuum environment and a reducing process gas to protect the product and solder from oxidation, thereby improving the welding quality, enhancing the heat transfer performance of the welded device, and further improving the reliability of electronic devices. At the same time, during the use process, the welding temperature is relatively high, and the processing of many chips often requires rapid cooling to meet the processing quality and efficiency. Therefore, the use environment of the vacuum eutectic reflow soldering furnace is in an alternating environment of vacuum and process atmosphere.

[0003] Existing vacuum eutectic reflow soldering furnaces generally adopt a method of setting two valves to separately control vacuum pumping and gas discharge, or use ordinary one-way valves. The former has disadvantages such as high price, many connecting pipes, and complex control methods; the latter has disadvantages such as poor conduction effect and insufficient discharge volume.

[0004] Based on this, there is an urgent need for a new type of high-conduction one-way valve in the current vacuum eutectic reflow soldering furnace to meet the current production requirements. Summary of the Utility Model

[0005] In view of the defects of the existing vacuum eutectic reflow soldering furnace, such as setting two valves to separately control vacuum pumping and gas discharge, or using ordinary one-way valves, which have high price, many connecting pipes, complex control methods, poor conduction effect, insufficient discharge volume, etc., the utility model provides a one-way valve and a vacuum eutectic reflow soldering furnace thereof. The one-way valve effectively isolates the atmosphere from communicating with the furnace interior, ensures the vacuum environment inside the furnace body, and can achieve high-conduction and rapid discharge during the exhaust process.

[0006] To solve the above technical problems, the utility model adopts the following technical solutions:

[0007] A one-way valve includes a valve body vertically arranged with respect to the ground. One end of the valve body is a large end away from the ground, and the other end is a small end facing the ground.

[0008] Wherein, a valve ball is arranged inside the valve body. There is a stop step around the inner wall of the small end of the valve body. A retaining ring is installed at the stop step, and a first sealing ring is also installed at the stop step. The first sealing ring is installed on the inner wall of the stop step through the retaining ring. The valve ball cooperates with the first sealing ring to achieve unidirectional flow of fluid inside the valve body.

[0009] Furthermore, the large end of the valve body is of an ISO-KF chuck structure. A reduced-diameter ISO-KF chuck is connected in a mating manner to the large end of the valve body. The reduced-diameter ISO-KF chuck is in communication with the atmosphere. A second sealing ring is provided between the large end of the valve body and the reduced-diameter ISO-KF chuck. The large end of the valve body is fixedly connected to the reduced-diameter ISO-KF chuck through a clamping member.

[0010] Furthermore, a filter screen is fixed in the middle of the second sealing ring.

[0011] Furthermore, the small end of the valve body is of an ISO-KF chuck structure. An ISO-KF chuck adapter is connected in a mating manner to the small end of the valve body. A third sealing ring is provided between the small end of the valve body and the ISO-KF chuck adapter. The small end of the valve body is fixedly connected to an ISO-KF chuck through a clamping member.

[0012] Furthermore, the third sealing ring is a structure in which a metal bracket is coated with an elastic material.

[0013] Furthermore, the clamping member is a hose clamp or a strap clamp.

[0014] In addition, the present utility model also claims protection for a vacuum eutectic reflow soldering furnace, which includes a furnace body. The above-mentioned any one-way valve is installed on the furnace body, and the ISO-KF chuck adapter is in communication with the furnace body.

[0015] Compared with the prior art, the beneficial effects of this solution are as follows:

[0016] 1. The present utility model provides a one-way valve and its vacuum eutectic reflow soldering furnace. The one-way valve effectively isolates the atmosphere from communicating with the inside of the furnace, ensuring the vacuum environment inside the furnace body. At the same time, high-conductance and rapid discharge can be achieved during the exhaust process. In practical applications, a single connecting pipe can achieve two functions of vacuum sealing and discharge. It solves the defects of the existing vacuum eutectic reflow soldering furnace, which generally uses two valves to separately control vacuum pumping and gas discharge, resulting in high price, many connecting pipes, and complex control methods, as well as the defects of poor conduction effect and insufficient discharge amount when using ordinary one-way valves.

[0017] 2. When the one-way valve of the present utility model evacuates the vacuum inside the furnace, due to the pressure difference formed by the vacuum inside the furnace body and the atmospheric pressure, the valve ball presses the first sealing ring under the downward pressure, causing the first sealing ring to deform and automatically seal, isolating the atmosphere from communicating with the inside of the furnace. When exhausting the gas inside the furnace, the gas pressure inside the furnace is greater than the self-gravity of the valve ball, pushing the valve ball away from the first sealing ring to form an exhaust channel. The valve body of the present utility model is set as a concentric conical structure that is larger at the top and smaller at the bottom. The greater the gas pressure inside the furnace, the larger the exhaust channel and the better the conduction performance. Description of the Drawings

[0018] Figure 1Schematic diagram of the check valve structure of the present utility model;

[0019] Figure 2 Cross-sectional view of this check valve.

[0020] The reference numerals are in sequence: valve body 1, large end 11, second sealing ring 111, filter screen 112, ISO-KF chuck structure 113, small end 12, stop step 121, third sealing ring 122, retaining ring 13, valve ball 2, first sealing ring 3, reduced-diameter ISO-KF chuck 4, ISO-KF chuck adapter 5. Specific embodiments

[0021] The present utility model will be further described in detail below with reference to the accompanying drawings.

[0022] A check valve, as Figure 1 and Figure 2 shown, includes a valve body 1 arranged perpendicular to the ground, one end of the valve body 1 is a large end 11 away from the ground, and the other end is a small end 12 facing the ground;

[0023] Wherein, a valve ball 2 is arranged in the valve body 1, the inner wall of the small end 12 of the valve body 1 has a stop step 121 around it, a retaining ring 13 is installed at the stop step 121, a first sealing ring 3 is also installed at the stop step 121, the first sealing ring 3 is installed on the inner wall of the stop step 121 through the retaining ring 13, and the valve ball 2 cooperates with the first sealing ring 3 to realize the one-way flow of fluid in the valve body 1.

[0024] According to a specific embodiment provided by the present utility model, the metal hard-sealed ball valve has the disadvantages of easy leakage, large torque, and non-corrosion-resistant sealing surface. In this embodiment, the valve ball 2 made of ceramic material is adopted. The ceramic material has a very small deformation amount, much higher bonding strength than metal, and a density much smaller than that of metal material. The ceramic valve ball 2 has good wear resistance, so it has higher reliability and a long service life, which is 2-4 times that of titanium alloy valves and Monel valves.

[0025] The inner diameter of the small end 12 of the valve body 1 is smaller than the outer diameter of the valve ball 2, the inner diameter of the large end 11 of the valve body 1 is larger than the inner diameter of the small end 12 of the valve body 1, and the inner wall of the small end 12 of the valve body 1 has a stop step 121 around it. When the pressure inside the furnace body is less than the atmospheric pressure, the valve ball 2 will be pressed by the atmospheric pressure and be in close contact with the first sealing ring 3. The stop step 121 can be formed by opening a sunk groove on the inner wall of the small end 12 of the valve body 1. The inner diameter of the stop step 121 is larger than the outer diameter of the retaining ring 13, and a vent hole is provided at the center of the retaining ring 13. The retaining ring 13 is made of hard material, so that there is an installation space for the first sealing ring 3 and the retaining ring 13. The stop step 121 and the retaining ring 13 cooperate to fix the first sealing ring 3 in the valve body 1.

[0026] Further, the large end 11 of the valve body 1 is an ISO-KF chuck structure 113. The large end 11 of the valve body 1 is fitted and connected with a reduced-diameter ISO-KF chuck. The reduced-diameter ISO-KF chuck is communicated with the atmosphere. A second sealing ring 111 is arranged between the large end 11 of the valve body 1 and the reduced-diameter ISO-KF chuck. The large end 11 of the valve body 1 is connected and fixed to the reduced-diameter ISO-KF chuck through a clamping member.

[0027] ISO-KF is a quick-release flange applied in a vacuum system. It consists of the following components: two symmetrically distributed KF flanges, an O-Ring, a centering bracket, and a clamp. Without using tools, simply turn the disc nut by hand to loosen or tighten the connection.

[0028] In this embodiment, the large end 11 of the valve body 1 is machined into the form of an ISO-KF chuck and clamped with the reduced-diameter ISO-KF chuck through a clamp. The clamp causes the large end 11 of the valve body 1 and the reduced-diameter ISO-KF chuck to act on the second sealing ring 111 to deform and form a seal. This structure facilitates the disassembly and assembly of the valve ball 2 and is also convenient for cleaning the interior of the valve body 1. At the same time, a filter screen 112 is fixed inside the second sealing ring 111, which functions to prevent sundries from falling into the interior of the valve body 1 and prevent the valve ball 2 from being ejected from the valve body 1 due to excessive furnace pressure during the exhaust process.

[0029] Further, the small end 12 of the valve body 1 is an ISO-KF chuck structure 113. The small end 12 of the valve body 1 is fitted and connected with an ISO-KF chuck adapter 5. A third sealing ring 122 is arranged between the small end 12 of the valve body 1 and the ISO-KF chuck adapter 5. The small end 12 of the valve body 1 is connected and fixed to the ISO-KF chuck through a clamping member. Both the small end 12 and the large end 11 of the valve body 1 are machined into ISO-KF chuck structures 113, but their sizes are different.

[0030] Further, the third sealing ring 122 is a structure with an elastic material covering a metal bracket.

[0031] According to a specific embodiment provided by the present invention, the small end 12 at the lower part of the valve body 1 is also machined into the form of an ISO-KF chuck and clamped with the ISO-KF chuck adapter 5 through a clamp, forcing the third sealing ring 122 to deform and form a seal. And since the third sealing ring 122 has an internal metal bracket, the retaining ring 13 will be fixed by the internal metal bracket of the third sealing ring 122. This structure facilitates the disassembly and assembly of the valve ball 2 and is also convenient for cleaning the interior of the valve body 1.

[0032] Further, the clamping member is a clamp or a hoop.

[0033] In addition, the present utility model also claims protection for a vacuum eutectic reflow soldering furnace, which includes a furnace body. The above-mentioned check valve of any one kind is installed on the furnace body, and the ISO-KF chuck connection pipe 5 is communicated with the furnace body.

[0034] The check valve of the present utility model is installed vertically. Among them, the ISO-KF chuck connection pipe 5 is connected inside the vacuum eutectic reflow soldering furnace body, and the reduced-diameter ISO-KF chuck is the exhaust end, which is connected to the atmosphere. When the furnace body of the present utility model evacuates, due to the pressure difference formed by the vacuum inside the furnace body and the atmospheric pressure, the valve ball 2 is pressed downward to squeeze the first sealing ring 3, causing the first sealing ring 3 to deform and automatically seal, isolating the atmosphere from communicating with the inside of the furnace. When exhausting the gas inside the furnace, the gas pressure inside the furnace is greater than the self-gravity of the valve ball 2, and the valve ball 2 is pushed away from the first sealing ring 3 to form an exhaust channel. In this embodiment, the valve body 1 is set as a concentric conical structure with a larger upper part and a smaller lower part. The greater the gas pressure inside the furnace, the larger the exhaust channel and the better the conduction performance. Finally, it should be noted that: in the description of the present utility model, it should be noted that the terms "vertical", "upper", "lower", "horizontal", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model.

[0035] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0036] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A check valve, characterized in that: It includes a valve body vertically arranged with respect to the ground, one end of the valve body being a large end away from the ground and the other end being a small end facing the ground; Wherein, a valve ball is arranged inside the valve body, the inner wall of the small end of the valve body has a stop step around it, a retaining ring is installed at the stop step, a first sealing ring is also installed at the stop step, the first sealing ring is installed on the inner wall of the stop step through the retaining ring, and the valve ball cooperates with the first sealing ring to achieve the one-way flow of fluid inside the valve body.

2. The one-way valve according to claim 1, characterized in that: The large end of the valve body is an ISO-KF chuck structure, a reduced-diameter ISO-KF chuck is connected in a mating manner to the large end of the valve body, the reduced-diameter ISO-KF chuck is in communication with the atmosphere, a second sealing ring is arranged between the large end of the valve body and the reduced-diameter ISO-KF chuck, and the large end of the valve body is connected and fixed to the reduced-diameter ISO-KF chuck through a clamping member.

3. A one-way valve according to claim 2, characterized in that: A filter screen is fixed in the middle of the second sealing ring.

4. A one-way valve according to claim 1, characterized in that: The small end of the valve body is an ISO-KF chuck structure, an ISO-KF chuck connection pipe is connected in a mating manner to the small end of the valve body, a third sealing ring is arranged between the small end of the valve body and the ISO-KF chuck connection pipe, and the small end of the valve body is connected and fixed to an ISO-KF chuck through a clamping member.

5. The one-way valve according to claim 4, characterized in that: The third sealing ring is a structure of an elastic material covering a metal bracket.

6. The one-way valve according to claim 5, characterized in that: The clamping member is a clamp or a hoop.

7. A vacuum eutectic reflow soldering furnace, comprising a furnace body, characterized in that: The furnace body is equipped with the one-way valve according to any one of claims 1-6, and one end of the ISO-KF chuck connection pipe away from the valve body is in communication with the furnace body.

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