Vacuum exhaust system

Abstract

The utility model provides a vacuum exhaust system, which is applied to the technical field of semiconductor processing, and comprises an air exhaust main pipe, an isolation cavity and an exhaust main pipe which are sequentially connected from top to bottom, the air exhaust main pipe is vertically arranged, the isolation cavity comprises a transversely arranged straight pipe, the air exhaust main pipe is also provided with a plurality of pressure gauges and pressure switches, and the pressure gauges and the pressure switches are connected with the exhaust main pipe. The pressure switch comprises a control module, a first pressure switch and a second pressure switch, and the first pressure switch detects the pressure in the main air exhaust pipe to prevent the main air exhaust pipe from bearing too high air pressure; the second pressure switch is used for detecting the differential pressure between the air exhaust main pipe and the lamp chamber and preventing the control module from crashing due to overlarge differential pressure; compared with the design of an isolation cavity with a plurality of turning angles, the air exhaust efficiency is higher; and more spaces are arranged on the two sides of the air exhaust main pipe, so that more pressure gauges and pressure switches can be mounted, and the vacuum exhaust system can be controlled more accurately.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, and particularly relates to a vacuum exhaust system. Background Art

[0002] In the fields of precision processing such as semiconductor manufacturing, optical coating, and vacuum packaging, it is usually necessary to strictly control the gas in the processing environment; these processes have extremely high requirements for the vacuum environment, especially in terms of gas discharge and vacuum maintenance, and efficient and stable gas management needs to be ensured.

[0003] Traditional vacuum exhaust systems usually adopt an exhaust system with an isolation chamber containing multiple turning angles. When facing complex process requirements, it is difficult to quickly and effectively discharge excess gas. The low-efficiency exhaust method often affects the production rhythm and reduces the overall production efficiency; moreover, in the prior art, the pressure monitoring of the vacuum exhaust system depends on limited pressure gauges and pressure switches, and the installation positions of the pressure gauges and pressure switches in the exhaust system are limited; in addition, many vacuum exhaust systems lack effective safety monitoring mechanisms such as differential pressure detection and leakage detection functions; once gas leakage or overpressure of the vacuum exhaust system occurs, it may cause damage to the equipment and even endanger the safety of the operators; and the current vacuum exhaust system design is usually fixed and lacks expansion interfaces, making it difficult to adapt to the changes in different process requirements and future upgrade requirements. This results in insufficient compatibility and flexibility of the vacuum exhaust system when users face different process conditions.

[0004] Therefore, there is an urgent need for a vacuum exhaust system that can improve the vacuum exhaust efficiency, precisely control the pressure, and enhance the safety performance to meet the growing needs in the fields of precision processing and manufacturing. Summary of the Utility Model

[0005] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a vacuum exhaust system; through multi-level pressure monitoring and control, automated gas valve regulation, and multi-functional safety detection mechanisms, the vacuum exhaust system significantly improves the efficiency and accuracy of vacuum exhaust, and enhances the safety and adaptability of the vacuum exhaust system.

[0006] The purpose of the utility model is achieved by adopting the following technical solutions:

[0007] In a first aspect, the utility model provides a vacuum exhaust system, which includes:

[0008] An air extraction main pipe, the air extraction main pipe is vertically arranged, the air inlet of the air extraction main pipe is connected to the space to be processed, and a pressure switch is provided on the air extraction main pipe;

[0009] The first gas valve and the second gas valve are arranged on the main exhaust pipe. The first gas valve is arranged upstream of the second gas valve, and nitrogen gas is passed through the second gas valve.

[0010] An isolation chamber, the isolation chamber includes a horizontally arranged straight pipe, the air outlet of the main exhaust pipe is connected to the air inlet of the isolation chamber, and the isolation chamber is provided with an isolation valve and a throttle valve.

[0011] An exhaust main pipe, the exhaust main pipe is vertically arranged, and the air inlet of the exhaust main pipe is connected to the air outlet of the isolation chamber.

[0012] Preferably, the vacuum exhaust system further includes a control module. The control module is connected to the first gas valve, the second gas valve, the isolation valve and the throttle valve, and the pressure switch is connected to the control module.

[0013] Preferably, the pressure switch includes a first pressure switch, and the first pressure switch is provided with a first threshold value of 990 Torr. The pressure switch is connected to the control module, and when the pressure switch reaches the first threshold value, the first gas valve is closed.

[0014] Preferably, the pressure switch includes a second pressure switch, and the second pressure switch is provided with a second threshold value of -40 Torr for monitoring the pressure difference between the main exhaust pipe and the lamp chamber. The second pressure switch is connected to the control module, and when the main exhaust pipe reaches the pressure difference threshold value, the control module shuts down.

[0015] Further, a first pressure gauge and a second pressure gauge are also arranged on the main exhaust pipe. The measuring range of the first pressure gauge is 20 Torr, and the measuring range of the second pressure gauge is 1000 Torr.

[0016] Further, the pressure switch further includes a third pressure switch and a fourth pressure switch. The measuring range of the third pressure switch is 5 Torr, and the measuring range of the fourth pressure switch is 20 Torr.

[0017] Further, a leak detection port is also arranged on the main exhaust pipe for checking whether there is a leak in the vacuum exhaust system.

[0018] Preferably, a spare port is arranged on the exhaust main pipe.

[0019] Compared with the prior art, the beneficial effects that can be achieved by at least one of the above technical solutions adopted in the embodiments of this specification at least include:

[0020] First, in the improved vacuum exhaust system of the present utility model, by reducing the volume of the isolation chamber and extending the main pumping pipe, not only the space occupied by the equipment is reduced, but also more installation positions for pressure monitoring are provided, enhancing the flexibility of the system; the design of the horizontally placed isolation chamber simplifies the structure, improves the exhaust efficiency, reduces the complexity of installation and maintenance, and enhances the scalability and overall reliability of the system.

[0021] Second, by arranging multiple pressure gauges and a second pressure switch on the main pumping pipe, as well as a first gas valve, a second gas valve, an isolation valve, and a throttle valve controlled by a control module, this vacuum exhaust system can quickly and effectively adjust and discharge excess gas; compared with traditional vacuum exhaust systems, the exhaust efficiency of this vacuum exhaust system is significantly improved under the same conditions, thus greatly shortening the production cycle and improving the overall production efficiency.

[0022] Third, the present utility model integrates a variety of pressure monitoring devices, covering multiple ranges from low pressure to high pressure (such as pressure switches of 5 Torr, 20 Torr, and 1000 Torr), and precisely sets and real - time monitors the pressure threshold through a control module. When the pressure in the process exceeds a certain threshold, the pressure switch controls the opening or closing of the valve, ensuring that the vacuum exhaust system is always in the best vacuum environment, avoiding process failures caused by excessive or insufficient pressure, and improving the yield and quality of products.

[0023] Fourth, the first pressure switch of 990 Torr and the second pressure switch of - 40 Torr set in the vacuum exhaust system of the present utility model can automatically trigger protection measures when detecting abnormal pressure, such as closing relevant gas valves or shutting down the vacuum exhaust system; through the automated safety function, it effectively prevents the equipment from being damaged due to overpressure or excessive pressure difference, and also protects the safety of operators; in addition, the setting of the leak detection port further ensures the sealing performance of the vacuum exhaust system, avoiding potential hazards caused by gas leakage.

[0024] Fifth, the vacuum exhaust system of the present utility model is designed with spare ports, providing the possibility for future expansion and adaptation to different process requirements; users can flexibly connect other devices or modules according to needs to meet diverse production requirements, thus improving the compatibility and practicality of the vacuum exhaust system. Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0026] Figure 1 It is a schematic structural diagram of an embodiment of the vacuum exhaust system of the present utility model;

[0027] Figure 2 It is a comparison chart of the exhaust efficiency before and after the improvement of the vacuum exhaust system of the present utility model.

[0028] Explanation of reference numerals

[0029] 1. Main air extraction pipe; 11. Second pressure switch; 12. First gas valve; 13. Second gas valve; 14. First pressure gauge; 15. Second pressure gauge; 16. Third pressure switch; 17. Fourth pressure switch; 18. First pressure switch; 19. Leak detection port; 2. Isolation chamber; 21. Isolation valve; 22. Throttle valve; 3. Main exhaust pipe; 31. Spare port. Specific implementation manners

[0030] The embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.

[0031] The following uses specific specific examples to illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts belong to the scope of protection of the present utility model.

[0032] Moreover, in the description of this specification, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations, and it cannot be understood as a limitation to the present utility model.

[0033] The present utility model provides a vacuum exhaust system in the first aspect, which includes:

[0034] Main air extraction pipe 1, isolation chamber 2 and main exhaust pipe 3; the main exhaust pipe 3 is vertically arranged, the air inlet of the main air extraction pipe 1 is connected to the space to be treated, and a second pressure switch 11 is provided on the main air extraction pipe 1; a first gas valve 12 and a second gas valve 13 are provided above the main air extraction pipe 1, the first gas valve 12 is arranged upstream of the second gas valve 13, and nitrogen is passed through the second gas valve 13; the isolation chamber 2 includes a horizontally arranged straight pipe, the air outlet of the main air extraction pipe 1 is connected to the air inlet of the isolation chamber 2, and the isolation chamber 2 is provided with an isolation valve 21 and a throttle valve 22; the main exhaust pipe 3 is vertically arranged, and the air inlet of the main exhaust pipe 3 is connected to the air outlet of the isolation chamber 2.

[0035] In this solution, as Figure 1 shown, in the improved vacuum exhaust system design, the volume of the isolation chamber 2 is smaller, significantly reducing the occupied space of the overall device. It not only optimizes the layout of the equipment, making the space utilization rate inside the equipment higher, but also provides more freedom for the installation and maintenance of other components; due to the relatively longer size of the main air extraction pipe 1, more pressure measurement devices can be installed on both sides. This design enables the system to monitor the pressure conditions at different positions in real time, providing more precise pressure control, thereby improving the stability of the system and the accuracy of operation; the directly horizontal design of the isolation chamber 2 eliminates the turning structure in the traditional system. Such simplification not only reduces the air flow resistance, thereby improving the exhaust efficiency, but also reduces the air flow disorder and potential losses caused by turning, further optimizing the performance of the system.

[0036] In a preferred embodiment, the vacuum exhaust system further includes a control module, and the control module is connected to the first gas valve 12, the second gas valve 13, the isolation valve 21 and the throttle valve 22; the first threshold of the second pressure switch 11 is 990 Torr; the second pressure switch 11 is connected to the control module, and when the second pressure switch 11 reaches the first threshold, the first gas valve 12 closes.

[0037] In this solution, through the integrated management of the control module, the system can automatically respond to pressure changes without manual intervention. When the pressure reaches the set threshold of 990 Torr, the control module will automatically command to close the first gas valve 12 to ensure that the system operates according to the preset program; since the system can automatically prevent the occurrence of excessive pressure, it avoids the fatigue damage of the equipment caused by long-term high pressure.

[0038] In a preferred embodiment, a second pressure switch 11 is further provided on the main air extraction pipe 1, and the second threshold of the second pressure switch 11 is -40 Torr; the second pressure switch 11 is connected to the control module, and when the main air extraction pipe 1 reaches the pressure difference threshold, the control module shuts down; in this solution, through the automated safety function, it effectively prevents the control module from crashing due to excessive pressure difference, resulting in a failure of the vacuum exhaust system and being unable to detect the gas pressure and stop the air extraction process in time.

[0039] In a preferred embodiment, a first pressure gauge 14 and a second pressure gauge 15 are further provided on the main evacuation pipe 1. The measuring range of the first pressure gauge 14 is 20 Torr, and the measuring range of the second pressure gauge 15 is 1000 Torr. A third pressure switch 16 and a fourth pressure switch 17 are also provided on the main evacuation pipe 1. The measuring range of the third pressure switch 16 is 5 Torr, and the measuring range of the fourth pressure switch 17 is 20 Torr. The third pressure switch 16 and the fourth pressure switch 17 are pressure gauge switches used for process conditions.

[0040] In a preferred embodiment, the main evacuation pipe 1 is further provided with a leak detection port 19 for checking whether there is a leak in the vacuum exhaust system. A spare port 31 is provided on the main exhaust pipe 3.

[0041] The following embodiments are the operation methods of the high-efficiency vacuum exhaust system of the present application:

[0042] This embodiment relates to a vacuum exhaust system, which is applicable to the steps that require strict control of gas emissions and vacuum environment in the semiconductor manufacturing process. The main components of the vacuum exhaust system include: a vertically arranged main evacuation pipe 1, a second pressure switch 11, a first gas valve 12, a second gas valve 13, a horizontally arranged isolation chamber 2, an isolation valve 21, a throttle valve 22, and a vertically arranged main exhaust pipe 3.

[0043] First, connect the air inlet of the main evacuation pipe 1 to the space to be processed (such as the reaction chamber in semiconductor production equipment), and connect the outlet of the main exhaust pipe 3 to the waste gas treatment vacuum exhaust system. Start the vacuum exhaust system, and the control module will automatically detect the gas pressure in the main evacuation pipe 1 and the main exhaust pipe 3, and monitor the pressure condition in the pipeline through multiple pressure gauges (with measuring ranges of 5 Torr, 20 Torr, and 1000 Torr respectively).

[0044] When the pressure in the space to be processed reaches the preset low-pressure condition (for example, below 20 Torr), the control module starts evacuation by opening the first gas valve 12. At this time, the gas in the main evacuation pipe 1 will be introduced into the isolation chamber 2.

[0045] During the evacuation process, the throttle valve 22 adjusts the gas flow rate to ensure the smooth and efficient exhaust process. According to the real-time monitored pressure data, the control module automatically adjusts the opening degree of the throttle valve 22 to maintain the optimal pressure in the vacuum exhaust system.

[0046] When the pressure of the vacuum exhaust system gradually approaches the set vacuum degree (such as below 5 Torr), the second gas valve 13 will introduce an appropriate amount of nitrogen to balance or flush the gas composition in the vacuum exhaust system.

[0047] During the operation of the vacuum exhaust system, the second pressure switch 11 continuously monitors the pressure in the pipeline. If the pressure in the main pumping pipe 1 reaches 990 Torr (the first threshold), the control module will automatically close the first gas valve 12 to prevent overpressure.

[0048] In addition, the second pressure switch 11 is set to -40 Torr (the second threshold) to monitor the pressure difference between the main pumping pipe 1 and the lamp chamber; when the pressure difference reaches the set value, the control module will automatically shut down to ensure the safety of the equipment.

[0049] After the vacuum exhaust system has been operating for some time, leak detection can be carried out through the leak detection port 19; the operator connects a dedicated leak detection device to the leak detection port 19 to check whether there is gas leakage in the entire vacuum exhaust system, thereby ensuring the tightness and safety of the vacuum exhaust system.

[0050] If it is necessary to expand the functions of the vacuum exhaust system, the user can connect additional gas valves, pressure sensors or other control devices through the spare port 31 to meet different process requirements; the control module can automatically identify and manage these newly added devices to achieve flexible upgrading of the functions of the vacuum exhaust system.

[0051] After the exhaust process is completed, close all valves and the second pressure switch 11, and evacuate the residual gas in the vacuum exhaust system; after ensuring that the pressure in the vacuum exhaust system has risen to a safe level, gradually turn off the control module and the power supply.

[0052] In a possible implementation environment, for example, the throttle valve is set to 100% fully open condition, and nitrogen gas flow is given, and the results obtained by testing the pressure of the main pumping pipe 1 are verified. The results are shown in Table 1, Table 2 and Figure 2 As shown, the vacuum exhaust system of the present application has achieved better pumping efficiency.

[0053]

[0054] Table 1

[0055]

[0056] Table 2

[0057] Under the same flow rate, the lower the pressure detected by the main exhaust pipe 1, the better the exhaust efficiency. By comparing the pressures at the same flow rate, it can be found that the exhaust speed of the improved system is higher than that of the original system under each nitrogen flow rate condition. The pressure of the standard system is 9.52 torr, while the pressure after improvement is only 9.13 torr. For example, at 15000 sccm, the pressure of the standard system is 5.84 torr, while the pressure after improvement is 4.55 torr. At low flow rates (10000 sccm - 5000 sccm), the exhaust speed of the improved system is also higher than that of the standard system. For example, at 5000 sccm, the pressure of the standard system is 3.21 torr, while the pressure after improvement is 2.42 torr.

[0058] This embodiment demonstrates the specific operation method of a high-efficiency vacuum exhaust system in semiconductor manufacturing. Precise pressure control is achieved through multiple pressure switches and multiple safety protection measures are implemented, ensuring the efficient and safe operation of the vacuum exhaust system. In addition, the utility model can also adapt to different process requirements, with high practicability and expandability.

[0059] The above is only the specific implementation manner of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed by the utility model should be covered within the protection scope of the utility model. Therefore, the protection scope of the utility model should be subject to the protection scope of the claims.

Claims

1. A vacuum exhaust system, characterized in that, Comprising: An extraction main pipe, which is vertically arranged, the air inlet of the extraction main pipe is connected to the space to be treated, and a pressure switch is provided on the extraction main pipe; A first gas valve and a second gas valve provided above the extraction main pipe, the first gas valve is arranged upstream of the second gas valve, and nitrogen gas is passed through the second gas valve; An isolation chamber, the isolation chamber includes a horizontally arranged straight pipe, the air outlet of the extraction main pipe is connected to the air inlet of the isolation chamber, and an isolation valve and a throttle valve are provided in the isolation chamber; An exhaust main pipe, which is vertically arranged, and the air inlet of the exhaust main pipe is connected to the air outlet of the isolation chamber.

2. The vacuum exhaust system according to claim 1, wherein The vacuum exhaust system further includes a control module, the control module is connected to the first gas valve, the second gas valve, the isolation valve and the throttle valve, and the pressure switch is connected to the control module.

3. The vacuum exhaust system according to claim 2, wherein The pressure switch includes a first pressure switch, and the first pressure switch is provided with a first threshold value of 990 Torr; the pressure switch is connected to the control module, and when the pressure switch reaches the first threshold value, the first gas valve is closed.

4. The vacuum exhaust system according to claim 2, wherein The pressure switch includes a second pressure switch, the second pressure switch is provided with a second threshold value of -40 Torr for monitoring the pressure difference between the extraction main pipe and the lamp chamber; the second pressure switch is connected to the control module, and when the extraction main pipe reaches the pressure difference threshold value, the control module shuts down.

5. The vacuum exhaust system according to claim 1, characterized in that, A first pressure gauge and a second pressure gauge are further provided on the extraction main pipe, the range of the first pressure gauge is 20 Torr, and the range of the second pressure gauge is 1000 Torr.

6. The vacuum exhaust system according to claim 5, characterized in that, The pressure switch further includes a third pressure switch and a fourth pressure switch, the range of the third pressure switch is 5 Torr, and the range of the fourth pressure switch is 20 Torr.

7. The vacuum exhaust system according to claim 1, characterized in that, The extraction main pipe is further provided with a leak detection port for checking whether there is a leak in the vacuum exhaust system.

8. The vacuum exhaust system according to claim 1, characterized in that, A spare port is provided on the exhaust main pipe.

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