Graphite boat and coil induction zone melting furnace

Abstract

The utility model provides a graphite boat and a coil induction zone melting furnace. The graphite boat comprises a containing cavity defined by a front wall, a rear wall, a left wall, a right wall and a bottom wall. The graphite boat further comprises a groove part, the groove part comprises a left protruding part, a right protruding part and a groove, the left protruding part extends downwards in the front-back direction, the left protruding part is provided with a left contact face, and the left contact face is an arc face attached to the cylindrical inner wall of the quartz tube. The right protruding part extends downwards in the front-back direction and is provided with a right contact face, and the right contact face is an arc face attached to the cylindrical inner wall. The groove is opened upwards in the front-back direction and is opened downwards; the groove is used for inserting a fork arm of the forklift device into the groove when the graphite boat is placed into the quartz tube, and conveying the graphite boat into the quartz tube; when the graphite boat is taken out of the quartz tube, the fork arm of the forklift device is inserted into the groove of the graphite boat, and the graphite boat is moved out of the quartz tube. The coil induction zone melting furnace comprises a quartz tube, an induction coil zone melting mechanism and the graphite boat.

Description

Technical Field

[0001] The present disclosure relates to the technical field of zone melting, and more particularly to a graphite boat and a coil induction zone furnace. Background Art

[0002] Zone melting, also known as zone refining or zone melting, is mainly used for the purification of metals and semiconductor materials. In the operation of an induction coil zone furnace, the material is first loaded into a graphite boat, and then the operator uses a tool to push the graphite boat into a quartz tube. An induction coil zone melting mechanism is sleeved on the quartz tube. Finally, flanges are installed at both ends of the quartz tube, and an air inlet pipe and an air outlet pipe are provided on the flanges at both ends. After purging the air inside the quartz tube through the air inlet pipe and the air outlet pipe on the flanges at both ends, the gas required for zone melting purification is introduced to form a flow pressure, and then the induction coil zone melting mechanism moves from one end of the graphite boat to the other end and performs induction coil heating. Through local induction heating of the induction coil, a small section of the solid material in the graphite boat is melted into a liquid state (i.e., a molten zone is formed). As the induction coil moves, the molten zone slowly moves from one end of the material to the other end along with the movement of the induction coil. During the zone melting process, impurity elements are respectively enriched at the head and tail of the material due to the difference in solubility in the solid phase and the liquid phase.

[0003] After the zone melting is completed, one end of the flange is opened, and the operator then uses a tool to pull the graphite boat out of the quartz tube. Then, the zone melting purified material in the graphite boat is poured out, and a part of the head and a part of the tail of the zone melting purified material are cut off. The middle part is the material with higher purity.

[0004] Figure 1 is a perspective view of an existing graphite boat. Figure 2 is an assembled perspective view of the graphite boat and the quartz tube of an existing coil induction zone furnace 100', where the graphite boat is shown in perspective. Figure 3 is along Figure 2 a magnified cross-sectional view taken along line A-A.

[0005] As Figures 1 to 3 shown, the graphite boat 3' includes a front wall 31', a rear wall 32', a left wall 33', a right wall 34' and a bottom wall 35'. The front wall 31', the rear wall 32', the left wall 33', the right wall 34' and the bottom wall 35' enclose a receiving cavity S' that is closed at the bottom and open at the top. The receiving cavity S' is used to hold the material to be zone melting purified (not shown), and the receiving cavity S' is in a shape that expands in the front, rear, left and right four sides from the bottom to the top.

[0006] Referring to Figure 3, when pushing the graphite boat 3' into the quartz tube 1', the graphite boat 3' is in line contact and slides with the cylindrical inner wall 11' of the quartz tube 1' at the left edge line L1' and the right edge line L2' where the outer surface of the bottom wall 35' intersects the outer surface of the left wall 33' and the outer surface of the right wall 34' respectively until the graphite boat 3' completely enters the predetermined position inside the quartz tube 1'. When pulling the graphite boat 3' out of the quartz tube 1', similarly, the graphite boat 3' is in line contact and slides with the cylindrical inner wall 11' of the quartz tube 1' at the left edge line L1' and the right edge line L2' where the outer surface of the bottom wall 35' intersects the outer surface of the left wall 33' and the outer surface of the right wall 34' respectively until the graphite boat 3' completely exits the quartz tube 1'.

[0007] Whether pushing the graphite boat 3' into the quartz tube 1' or pulling the graphite boat 3' out of the quartz tube 1', the line contact and sliding between the graphite boat 3' and the quartz tube 1' will cause scratches on both the graphite boat 3' and the quartz tube 1', reducing the service life of the graphite boat 3' and the quartz tube 1'.

[0008] In addition, after the graphite boat 3' is pushed into the quartz tube 1', the graphite boat 3' and the quartz tube 1' still maintain line contact. The frictional force formed by this line contact is limited, and during the induction coil zone melting process, it is easy to often cause the graphite boat to slip (i.e., the graphite boat 3' slides relative to the cylindrical inner wall 11' of the quartz tube 1'). Summary of the Invention

[0009] In view of the problems in the background art, one object of the present disclosure is to provide a graphite boat and a coil induction zone melting furnace, which can ensure the service life of the graphite boat and the quartz tube.

[0010] Another object of the present disclosure is to provide a graphite boat and a coil induction zone melting furnace, which can avoid the graphite boat from slipping relative to the quartz tube during the induction coil zone melting process.

[0011] Accordingly, a graphite boat for a coil induction zone melting furnace includes a front wall, a rear wall, a left wall, a right wall, and a bottom wall. The front wall, rear wall, left wall, right wall, and bottom wall enclose a receiving cavity that is closed at the bottom and open at the top. The receiving cavity is used to hold the material to be zone melted and purified. The receiving cavity is shaped to open outwards on both left and right sides from the bottom to the top. The graphite boat further includes a groove portion formed below the front wall, rear wall, left wall, and right wall. The groove portion includes a left protrusion, a right protrusion, and a groove. The left protrusion extends downwards and in the front-rear direction, and has a left contact surface that is an arc surface conforming to the cylindrical inner wall of the quartz tube housing the graphite boat. The right protrusion extends downwards and in the front-rear direction, and has a right contact surface that is an arc surface conforming to the cylindrical inner wall of the quartz tube housing the graphite boat. The left protrusion and the right protrusion are spaced apart in the left-right direction. The groove is open in the front-rear direction and open downwards, and is formed by the left protrusion, the right protrusion, and the lower surface of the bottom wall. The groove is used for: when the graphite boat is placed into the quartz tube, the fork arms of the forklift device are inserted into the groove, the fork arms support the graphite boat from the lower surface of the bottom wall, transfer the graphite boat into the quartz tube and land it in the quartz tube, so that the left contact surface of the left protrusion and the right contact surface of the right protrusion are in contact with the cylindrical inner wall of the quartz tube; when removing the graphite boat from the quartz tube, the fork arms of the forklift device are inserted into the groove of the graphite boat, the fork arms support the graphite boat from the lower surface of the bottom wall and lift the graphite boat, and then remove the graphite boat from the quartz tube.

[0012] A coil induction zone melting furnace includes a quartz tube and an induction coil zone melting mechanism. The inner diameter of the quartz tube is constant in the front-rear direction. The induction coil zone melting mechanism is sleeved outside the quartz tube. The coil induction zone melting furnace further includes the aforementioned graphite boat, which is used for: when the graphite boat is placed into the quartz tube, the fork arms of the forklift device are inserted into the groove, the fork arms support the graphite boat from the lower surface of the bottom wall, transfer the graphite boat into the quartz tube and land it in the quartz tube, so that the left contact surface of the left protrusion and the right contact surface of the right protrusion are in contact with the cylindrical inner wall of the quartz tube; when removing the graphite boat from the quartz tube, the fork arms of the forklift device are inserted into the groove of the graphite boat, the fork arms support the graphite boat from the lower surface of the bottom wall and lift the graphite boat, and then remove the graphite boat from the quartz tube; the induction coil zone melting mechanism is used to perform induction coil heating zone melting on the material in the graphite boat inside the quartz tube in the front-rear direction.

[0013] The beneficial effects of the present disclosure are as follows

[0014] In the graphite boat of the present disclosure, due to the provision of the groove portion, the fork arms of the forklift device can be inserted. When the graphite boat is placed into the quartz tube, the fork arms support the graphite boat from the lower surface of the bottom wall, transfer the graphite boat into the quartz tube and land it in the quartz tube; when the graphite boat is taken out from the quartz tube, the fork arms of the forklift device are inserted into the grooves of the graphite boat, the fork arms support the graphite boat from the lower surface of the bottom wall and lift the graphite boat, and then move the graphite boat out of the quartz tube. Thus, whether the graphite boat is placed into the quartz tube or taken out from the quartz tube, there is no sliding friction between the graphite boat and the cylindrical inner wall of the quartz tube as mentioned in the background art, and there is no problem of scratches on the graphite boat and the quartz tube as in the background art, ensuring the service life of the graphite boat and the quartz tube.

[0015] In addition, since the left contact surface is an arc surface that fits the cylindrical inner wall of the quartz tube accommodating the graphite boat and the right contact surface is an arc surface that fits the cylindrical inner wall of the quartz tube accommodating the graphite boat, after the graphite boat is placed into the quartz tube, the left contact surface is in surface contact with the cylindrical inner wall of the quartz tube, and the right contact surface is in surface contact with the cylindrical inner wall of the quartz tube. Compared with the line contact in the background art, the frictional force formed by the surface contact is increased. In this way, during the zone melting process of the induction coil, the problem of the graphite boat slipping relative to the cylindrical inner wall of the quartz tube is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a perspective view of an existing graphite boat.

[0017] Figure 2 is an assembled perspective view of the graphite boat and the quartz tube of an existing coil induction zone furnace, wherein the graphite boat is shown in perspective.

[0018] Figure 3 is along Figure 2 the A-A line of which is an enlarged cross-sectional view.

[0019] Figure 4 is a perspective view of the graphite boat according to the present disclosure.

[0020] Figure 5 is an assembled perspective view of the graphite boat and the quartz tube of the coil induction zone furnace according to the present disclosure, wherein the graphite boat is shown in perspective.

[0021] Figure 6 is along Figure 5 the B-B line of which is an enlarged cross-sectional view.

[0022] Figure 7 is a schematic diagram of the coil induction zone furnace according to the present disclosure.

[0023] Among them, the reference numerals are explained as follows:

[0024] 100' coil induction zone furnace 34 right wall

[0025] 1' quartz tube 35 bottom wall

[0026] 11' cylindrical inner wall 351 lower surface

[0027] 3' graphite boat S receiving cavity

[0028] 31' front wall 36 groove portion

[0029] 32' rear wall 361 left protruding portion

[0030] 33' left wall 361a left contact surface

[0031] 34' right wall 362 right protruding portion

[0032] 35' bottom wall 362a right contact surface

[0033] S' receiving cavity 363 groove

[0034] Left ridge line L1' P1 First central plane

[0035] Right ridge line L2' P2 Second central plane

[0036] 100 Coil induction zone melting furnace 4 front flange

[0037] 1 quartz tube 5 rear flange

[0038] 11 cylindrical inner wall 6 intake pipe

[0039] 2 Induction coil zone melting mechanism 7 exhaust pipe

[0040] 21 induction coil 200 material

[0041] 3 graphite boat D1 front - rear direction

[0042] 31 front wall D2 left - right direction

[0043] 32 rear wall D3 up - down direction

[0044] 33 left wall Detailed implementation manners

[0045] The accompanying drawings illustrate embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, which can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but only as a basis for the claims and as a representative basis for teaching those of ordinary skill in the art to implement the present disclosure in various ways.

[0046] [Graphite boat]

[0047] Refer to Figures 4 to 6, the graphite boat 3 according to the present disclosure is used for the coil induction zone melting furnace 100, and includes a front wall 31, a rear wall 32, a left wall 33, a right wall 34 and a bottom wall 35. The front wall 31, the rear wall 32, the left wall 33, the right wall 34 and the bottom wall 35 enclose a receiving cavity S that is closed at the bottom and open at the top. The receiving cavity S is used to hold the material 200 to be zone melted and purified, and the receiving cavity S is shaped to expand on both left and right sides from the bottom to the top.

[0048] The graphite boat 3 further includes a groove portion 36, and the groove portion 36 is formed below the front wall 31, the rear wall 32, the left wall 33 and the right wall 34. The groove portion 36 includes a left protrusion 361, a right protrusion 362 and a groove 363.

[0049] The left protrusion 361 extends downward and extends in the front-rear direction D1. The left protrusion 361 has a left contact surface 361a, and the left contact surface 361a is an arc surface that fits the cylindrical inner wall 11 of the quartz tube 1 housing the graphite boat 3. The right protrusion 362 extends downward and extends in the front-rear direction D1. The right protrusion 362 has a right contact surface 362a, and the right contact surface 362a is an arc surface that fits the cylindrical inner wall 11 of the quartz tube 1 housing the graphite boat 3. The left protrusion 361 and the right protrusion 362 are spaced apart in the left-right direction D2. The groove 363 is open in the front-rear direction D1 and open downward, and the groove 363 is surrounded by the left protrusion 361, the right protrusion 362 and the lower surface 351 of the bottom wall 35. The groove 363 is used for: when the graphite boat 3 is placed into the quartz tube 1, the fork arms of a forklift device (not shown) are inserted into the groove 363, the fork arms support the graphite boat 3 from the lower surface 351 of the bottom wall 35, transfer the graphite boat 3 into the quartz tube 1 and land it in the quartz tube 1, so that the left contact surface 361a of the left protrusion 361 and the right contact surface 362a of the right protrusion 362 are in contact with the cylindrical inner wall 11 of the quartz tube 1; when the graphite boat 3 is taken out of the quartz tube 1, the fork arms of the forklift device are inserted into the groove 363 of the graphite boat 3, the fork arms support the graphite boat 3 from the lower surface 351 of the bottom wall 35 and lift the graphite boat 3, and then move the graphite boat 3 out of the quartz tube 1.

[0050] In the susceptor 3 of the present disclosure, through the provision of the groove portion 36, the fork arms of the forklift device can be inserted. When the susceptor 3 is placed in the quartz tube 1, the fork arms support the susceptor 3 from the lower surface 351 of the bottom wall 35, transfer the susceptor 3 into the quartz tube 1 and land it in the quartz tube 1; when removing the susceptor 3 from the quartz tube 1, the fork arms of the forklift device are inserted into the groove 363 of the susceptor 3, the fork arms support the susceptor 3 from the lower surface 351 of the bottom wall 35 and lift the susceptor 3, and then remove the susceptor 3 from the quartz tube 1. Thus, whether the susceptor 3 is placed in the quartz tube 1 or removed from the quartz tube 1, there is no sliding friction between the susceptor 3 and the cylindrical inner wall 11 of the quartz tube 1 as mentioned in the background art, and there is no problem of scratches on the susceptor 3 and the quartz tube 1 as in the background art, ensuring the service life of the susceptor 3 and the quartz tube 1.

[0051] In addition, since the left contact surface 361a is an arc surface that fits the cylindrical inner wall 11 of the quartz tube 1 accommodating the susceptor 3 and the right contact surface 362a is an arc surface that fits the cylindrical inner wall 11 of the quartz tube 1 accommodating the susceptor 3, after the susceptor 3 is placed in the quartz tube 1, there is a surface contact between the left contact surface 361a and the cylindrical inner wall 11 of the quartz tube 1, and there is a surface contact between the right contact surface 362a and the cylindrical inner wall 11 of the quartz tube 1. Compared with the line contact in the background art, the frictional force formed by the surface contact is increased. In this way, during the induction coil zone melting process, the problem of the susceptor 3 slipping relative to the cylindrical inner wall 11 of the quartz tube 1 is avoided.

[0052] As Figures 4 to 6 shown, in one example, the left protrusion 361 extends downward from the left wall 33. Thus, the size of the groove 363 in the left-right direction D2 can be maximized, facilitating sufficient space utilization for the fork arms of the forklift. Further, a part of the outer surface of the left protrusion 361 is coplanar with the outer surface of the left wall 33, which facilitates the fabrication of the arc surface of the left contact surface 361a.

[0053] Similarly, as Figures 4 to 6 shown, in one example, the right protrusion 362 extends downward from the right wall 34. Thus, the size of the groove 363 in the left-right direction D2 can be maximized, facilitating sufficient space utilization for the fork arms of the forklift. Further, a part of the outer surface of the right protrusion 362 is coplanar with the outer surface of the right wall 34, which facilitates the fabrication of the arc surface of the right contact surface 362a.

[0054] As Figure 4 and Figure 5 shown, in one example, the receiving cavity S is shaped to expand in the front, rear, left, and right directions from the bottom to the top. By the expansion of the receiving cavity S in the front and rear sides, it is convenient for the enrichment of impurities at the front wall 31 and the rear wall 32 during zone melting purification.

[0055] AsFigure 5 As shown, in one example, the graphite boat 3 is symmetric about a first central plane P1 formed by the left - right direction D2 and the up - down direction D3. Thus, the stability of the graphite boat 3 in the quartz tube 1 can be improved.

[0056] As Figure 5 shown, in one example, the graphite boat 3 is symmetric about a second central plane P2 formed by the front - back direction D1 and the up - down direction D3. Thus, the stability of the graphite boat 3 in the quartz tube 1 can be improved.

[0057] The material 200 is any suitable zone - melted and purified material, such as, but not limited to, germanium.

[0058] [Coil - Induction Zone Furnace]

[0059] Referring Figure 7 and combining Figures 4 to 6 , according to the coil - induction zone furnace 100 of the present disclosure, it includes a quartz tube 1 and an induction - coil zone - melting mechanism 2. The inner diameter of the quartz tube 1 is constant along the front - back direction D1. The induction - coil zone - melting mechanism 2 is sleeved outside the quartz tube 1. The coil - induction zone furnace 100 further includes the aforementioned graphite boat 3.

[0060] The graphite boat 3 is used for: when the graphite boat 3 is placed into the quartz tube 1, the fork arms of the forklift device are inserted into the grooves 363, the fork arms support the graphite boat 3 from the lower surface 351 of the bottom wall 35, convey the graphite boat 3 into the quartz tube 1 and land it in the quartz tube 1, so that the left contact surface 361a of the left protrusion 361 and the right contact surface 362a of the right protrusion 362 are in contact with the cylindrical inner wall 11 of the quartz tube 1; when the graphite boat 3 is taken out from the quartz tube 1, the fork arms of the forklift device are inserted into the grooves 363 of the graphite boat 3, the fork arms support the graphite boat 3 from the lower surface 351 of the bottom wall 35, lift the graphite boat 3, and then remove the graphite boat 3 from the quartz tube 1. The induction - coil zone - melting mechanism 2 is used for inductively heating and zone - melting the material 200 in the graphite boat 3 in the quartz tube 1 in the front - back direction D1.

[0061] The features, effects and operations related to the graphite boat 3 are as described above, and will not be repeated here.

[0062] As Figure 7 shown, in one example, the coil - induction zone furnace 100 further includes a front flange 4 and a rear flange 5. The front flange 4 is used to detachably close the front end of the quartz tube 1; the rear flange 5 is used to detachably close the rear end of the quartz tube 1.

[0063] As Figure 7As shown, in one example, the coil induction zone furnace 100 further includes an intake pipe 6 and an exhaust pipe 7. The intake pipe 6 is installed on the front flange 4 and is controllably connected to the interior of the quartz tube 1. The intake pipe 6 is used to introduce the gas required for zone melting purification. The exhaust pipe 7 is installed on the rear flange 5 and is controllably connected to the interior of the quartz tube 1. The exhaust pipe 7 is used to cooperate with the intake pipe 6 to form a flowing pressure inside the quartz tube 1.

[0064] Multiple exemplary embodiments are described with the above detailed description, but the present disclosure is not intended to be limited to the explicitly disclosed combinations. Thus, unless otherwise stated, the various features disclosed herein may be combined together to form multiple additional combinations not shown for the sake of brevity.

Claims

1. A graphite boat for a coil induction zone furnace (100), comprising a front wall (31), a rear wall (32), a left wall (33), a right wall (34) and a bottom wall (35). The front wall (31), the rear wall (32), the left wall (33), the right wall (34) and the bottom wall (35) enclose a receiving cavity (S) that is closed at the bottom and open at the top. The receiving cavity (S) is used to hold the material (200) to be zone melted and purified, and the receiving cavity (S) is shaped to open outwards on both left and right sides from the bottom to the top. It is characterized in that the graphite boat (3) further includes a groove portion (36), and the groove portion (36) is formed below the front wall (31), the rear wall (32), the left wall (33) and the right wall (34). The groove portion (36) includes a left protruding portion (361), a right protruding portion (362) and a groove (363). The left protruding portion (361) extends downwards and extends in the front-rear direction (D1). The left protruding portion (361) has a left contact surface (361a), and the left contact surface (361a) is an arc surface that fits the cylindrical inner wall (11) of the quartz tube (1) housing the graphite boat (3). The right protruding portion (362) extends downwards and extends in the front-rear direction (D1). The right protruding portion (362) has a right contact surface (362a), and the right contact surface (362a) is an arc surface that fits the cylindrical inner wall (11) of the quartz tube (1) housing the graphite boat (3). The left protruding portion (361) and the right protruding portion (362) are spaced apart in the left-right direction (D2). The groove (363) is open in the front-rear direction (D1) and open downwards. The groove (363) is surrounded by the left protruding portion (361), the right protruding portion (362) and the lower surface (351) of the bottom wall (35). The groove (363) is used for: when the graphite boat (3) is placed into the quartz tube (1), the fork arms of the forklift device are inserted into the groove (363), the fork arms support the graphite boat (3) from the lower surface (351) of the bottom wall (35), transfer the graphite boat (3) into the quartz tube (1) and lower it in the quartz tube (1) so that the left contact surface (361a) of the left protruding portion (361) and the right contact surface (362a) of the right protruding portion (362) are in contact with the cylindrical inner wall (11) of the quartz tube (1); when removing the graphite boat (3) from the quartz tube (1), the fork arms of the forklift device are inserted into the groove (363) of the graphite boat (3), the fork arms support the graphite boat (3) from the lower surface (351) of the bottom wall (35) and lift the graphite boat (3), and then remove the graphite boat (3) from the quartz tube (1).

2. The graphite boat according to claim 1, characterized in that the left protruding portion (361) extends downwards from the left wall (33).

3. The graphite boat according to claim 2, characterized in that a part of the outer surface of the left protruding portion (361) is coplanar with the outer surface of the left wall (33).

4. The graphite boat according to claim 1, characterized in that the right protruding portion (362) extends downwards from the right wall (34).

5. The graphite boat according to claim 4, characterized in that a part of the outer surface of the right protruding portion (362) is coplanar with the outer surface of the right wall (34).

6. The graphite boat according to claim 1, wherein the accommodation cavity (S) is shaped to open on the front, rear, left, and right sides from the bottom to the top.

7. The graphite boat according to claim 1, wherein the graphite boat (3) is symmetric about a first central plane (P1) formed by the left-right direction (D2) and the up-down direction (D3).

8. The graphite boat according to claim 1, wherein the graphite boat (3) is symmetric about a second central plane (P2) formed by the front-rear direction (D1) and the up-down direction (D3).

9. A coil induction zone melting furnace, comprising a quartz tube (1) and an induction coil zone melting mechanism (2). The inner diameter of the quartz tube (1) is constant along the front-rear direction (D1), and the induction coil zone melting mechanism (2) is sleeved outside the quartz tube (1). It is characterized in that the coil induction zone melting furnace (100) further comprises the graphite boat (3) according to any one of claims 1-8, the graphite boat (3) is used for: when the graphite boat (3) is placed into the quartz tube (1), the fork arms of the forklift device are inserted into the groove (363), the fork arms support the graphite boat (3) from the lower surface (351) of the bottom wall (35) and convey the graphite boat (3) into the quartz tube (1) and lower it into the quartz tube (1) so that the left contact surface (361a) of the left protrusion (361) and the right contact surface (362a) of the right protrusion (362) are in contact with the cylindrical inner wall (11) of the quartz tube (1); when the graphite boat (3) is taken out from the quartz tube (1), the fork arms of the forklift device are inserted into the groove (363) of the graphite boat (3), the fork arms support the graphite boat (3) from the lower surface (351) of the bottom wall (35) and lift the graphite boat (3), and then move the graphite boat (3) out of the quartz tube (1); the induction coil zone melting mechanism (2) is used for performing induction coil (21) heating zone melting on the material (200) in the graphite boat (3) in the quartz tube (1) in the front-rear direction (D1).

10. The coil induction zone melting furnace according to claim 9, wherein the coil induction zone melting furnace (100) further comprises a front flange (4) and a rear flange (5), the front flange (4) is used for detachably closing the front end of the quartz tube (1); the rear flange (5) is used for detachably closing the rear end of the quartz tube (1); the coil induction zone melting furnace (100) further comprises an inlet pipe (6) and an outlet pipe (7), the inlet pipe (6) is installed on the front flange (4) and is controllably connected to the inside of the quartz tube (1). The inlet pipe (6) is used for introducing the gas required during zone melting purification, the outlet pipe (7) is installed on the rear flange (5) and is controllably connected to the inside of the quartz tube (1). The outlet pipe (7) is used to cooperate with the inlet pipe (6) to form a flowing pressure inside the quartz tube (1).

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