Internal circulation tubular furnace device

Abstract

The utility model discloses an internal circulation tube furnace device, and belongs to the technical field of tube furnaces. The internal circulation tube furnace device comprises a heating box body, a sample tube, a first pipeline, a second pipeline, an air blower and a gas adjusting mechanism. The heating box body is provided with a containing cavity penetrating through the two opposite ends. The sample tube is detachably arranged in the accommodating cavity, and the sample tube is provided with an air inlet and an air outlet; the first pipeline is connected with the air inlet; the second pipeline is connected with the air outlet; the air blower is connected with the first pipeline and the second pipeline and can drive air of the air outlet to flow back to the air inlet. The gas adjusting mechanism is arranged between the gas inlet and the gas outlet, and the gas adjusting mechanism can extract gas in the sample tube and can also convey the gas to the sample tube. According to the internal circulation tubular furnace device disclosed by the utility model, gas is driven to circulate in the device, so that the use of gas-producing materials and inert gas can be greatly reduced, and the material preparation cost can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of tube furnaces, in particular to an internally circulating tube furnace device. Background Art

[0002] A tube furnace is a commonly used heat treatment device. The tube furnace can provide a vacuum environment or a special gas atmosphere, and then perform programmed heating to prepare fine structural materials. Basically, chemical vapor deposition methods need to be completed in a tube furnace. The gas-producing raw materials are placed at the upper air inlet of the heating zone, and the material to be processed is placed at the lower air outlet of the heating zone. After the heating chamber is heated to a certain temperature, the gas-producing raw materials will volatilize / sublime into specific gases, such as gaseous sulfur, gaseous phosphorus, ammonia, etc. At this time, through the introduction of external inert gas, the specific gas is pushed to the material to be processed and reacts with it, and the unreacted gas is taken out of the quartz tube and enters the tail gas absorption device.

[0003] Reference atta Figure 1 As shown in the attached figure, the traditional tube furnace device has two major problems: one is that the gas-producing raw materials and inert gas cannot be reused, which is very wasteful. Generally, in order to make the material to be processed react evenly with the sublimated gas during the whole reaction process, the addition amount of the gas-producing raw materials will be dozens to hundreds of times the actual amount reacting with the material. Most of them are taken out and enter the tail gas absorption device without reacting with the material. Similarly, the consumption of inert gas is also extremely large. The second is that it is easy to be uneven when preparing large-area samples. Because the density of the specific gas volatilized / sublimated is generally larger than that of the inert gas, it is easy to sink to the bottom of the quartz tube. The relatively small flow rate of the inert gas is difficult to make the sublimated gas evenly distributed in the whole cavity. If the flow rate of the inert gas is increased, it will cause further waste of the inert gas and sublimated gas.

[0004] With the rapid development of scientific research, the research content in the field of fine materials by major scientific research institutions is increasing day by day, the area of samples to be prepared is getting larger and larger, and the quantity is also increasing. At present, it is easy to be uneven when using the tube furnace to prepare large-area samples, and the gas-producing raw materials and inert gas required in the whole heat treatment process are too much, resulting in an increase in the material preparation cost. Content of the Utility Model

[0005] The purpose of the utility model is to provide an internally circulating tube furnace device. By driving the gas to circulate inside the device, the use of gas-producing materials and inert gas can be greatly reduced, which helps to reduce the material preparation cost.

[0006] In the first aspect, the utility model provides an internally circulating tube furnace device, including:

[0007] A heating chamber, provided with an accommodation cavity penetrating through opposite ends;

[0008] A sample tube, detachably arranged in the accommodation cavity, and the sample tube is provided with an air inlet and an air outlet;

[0009] The first pipeline, connecting the air inlet;

[0010] The second pipeline, connecting the air outlet;

[0011] A blower, respectively connecting the first pipeline and the second pipeline, and the blower can drive the gas at the air outlet to flow back to the air inlet;

[0012] A gas regulating mechanism, arranged between the air inlet and the air outlet, the gas regulating mechanism can extract the gas in the sample tube, and the gas regulating mechanism can also transport gas to the sample tube.

[0013] The internally circulated tube furnace device provided by the present utility model places the gas-producing raw material at one end of the sample tube close to the air inlet and the material to be processed at one end of the sample tube close to the air outlet during preparation. Then, the air in the sample tube is evacuated through the gas regulating mechanism, and the gas regulating mechanism can also transport inert gas to the sample tube to adjust the air pressure. Finally, the sample tube is heated by the heating box body, and the blower drives the gas at the air outlet to flow back to the air inlet to realize the internal circulation reaction of the tube furnace device. This device can fully process the sample with only a small amount of gas-producing raw material. In addition, by using the blower to push the gas, it is no longer necessary to use inert gas to push the reaction gas during the reaction process, which can greatly reduce the use of gas-producing materials and inert gas and help reduce the material preparation cost. In addition, the blower can also improve the gas uniformity in the sample tube by increasing the flow rate, which helps to improve the uniformity of the sample.

[0014] Further, the gas regulating mechanism includes an air extraction pump, an inert gas cylinder and a first valve body. The first valve body is connected to the first pipeline through a third pipeline, the first valve body is connected to the air extraction pump through a fourth pipeline, and the first valve body is connected to the inert gas cylinder through a fifth pipeline.

[0015] Further, the first pipeline includes a first branch pipe and a second branch pipe. The gas regulating mechanism further includes a second valve body. The second valve body is connected to the first valve body through the third pipeline, the second valve body is connected to the air inlet through the first branch pipe, and the second valve body is connected to the blower through the second branch pipe.

[0016] Further, it further includes a tail gas absorption device and a third valve body. The second pipeline includes a third branch pipe and a fourth branch pipe. The third valve body is connected to the air outlet through the third branch pipe, the third valve body is connected to the blower through the fourth branch pipe, and the third valve body is connected to the tail gas absorption device through a sixth pipeline.

[0017] With the above technical solution, after the reaction is completed, the third valve body disconnects the connection between the fourth branch pipe and the blower, and then conveys inert gas through the gas regulating mechanism to discharge the waste gas in the sample tube to the tail gas absorption device, thereby realizing the recovery of tail gas.

[0018] Further, the heating box body includes a first box body and a second box body. The first box body and the second box body are rotatably connected. The first box body is provided with a first semi-circular groove penetrating through opposite ends, and the second box body is provided with a second semi-circular groove penetrating through opposite ends. The first box body can rotate to abut against the second box body so that the first semi-circular groove and the second semi-circular groove are spliced to form the accommodating cavity.

[0019] With the above technical solution, the first box body and the second box body are rotatably connected, which can quickly realize the disassembly and assembly of the sample tube and the heating box body. Moreover, during the preparation process, the internal situation of the sample tube can also be observed by lifting the first box body and the second box body.

[0020] Further, the length of the heating box body is 1m - 3m, the width of the heating box body is 0.5m - 2m, and the height of the heating box body is 0.5m - 2m.

[0021] Further, the sample tube includes a quartz tube body, a first sealing joint, and a second sealing joint. The first sealing joint and the second sealing joint are respectively arranged at opposite ends of the quartz tube body. The first sealing joint is connected to the first pipeline, and the second sealing joint is connected to the second pipeline.

[0022] With the above technical solution, by disassembling the first sealing joint or the second sealing joint, the material to be processed and the gas-producing raw material can be replaced, and the operation is simple and time-saving.

[0023] Further, a pressure gauge is provided on the second sealing joint.

[0024] Further, a first stop valve and a second stop valve are further included. The first stop valve is arranged on the first sealing joint, and the second stop valve is arranged on the second sealing joint.

[0025] Further, the length of the quartz tube body is 1m - 3m, the inner diameter of the quartz tube body is 50mm - 150mm, and the outer diameter of the quartz tube body is 55mm - 155mm.

[0026] As can be seen from the above, for the internally circulated tubular furnace device provided by the present utility model, during preparation, the gas-producing raw material is placed at one end of the sample tube near the air inlet, and the material to be processed is placed at one end of the sample tube near the air outlet. Then, the air in the sample tube is evacuated through the gas regulating mechanism, and the gas regulating mechanism can also transport inert gas to the sample tube to regulate the air pressure. Finally, the sample tube is heated by the heating box body, and the blower drives the gas at the air outlet to flow back to the air inlet, realizing the internal circulation reaction of the tubular furnace device. This device can fully process the sample with only a small amount of gas-producing raw material. In addition, by using the blower to push the gas, the use of inert gas to push the reaction gas during the reaction process is eliminated, which can greatly reduce the use of gas-producing materials and inert gas, and help reduce the material preparation cost. In addition, the blower can also improve the gas uniformity in the sample tube by increasing the flow rate, which helps to improve the uniformity of the sample.

[0027] Other features and advantages of the present application will be described in the subsequent specification. Moreover, some of them will become obvious from the specification, or can be understood by implementing the embodiments of the present application. The objectives and other advantages of the present application can be achieved and obtained through the structures specifically pointed out in the written specification and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic structural diagram of a conventional tubular furnace device.

[0029] Figure 2 It is a schematic structural diagram of an internally circulated tubular furnace device proposed by the present utility model.

[0030] Figure 3 It is a schematic structural diagram of an internally circulated tubular furnace device proposed by the present utility model.

[0031] Figure 4 For Figure 3 It is a schematic diagram of the pipeline connection for evacuating the internally circulated tubular furnace device in

[0032] Figure 5 For Figure 3 It is a schematic diagram of the pipeline connection for gas backfilling of the internally circulated tubular furnace device in

[0033] Figure 6 For Figure 3 It is a schematic diagram of the pipeline connection for heat treatment of the internally circulated tubular furnace device in

[0034] Figure 7 For Figure 3 It is a schematic diagram of the pipeline connection for tail gas recovery of the internally circulated tubular furnace device in

[0035] In the attached drawings: 100, heating cabinet; 110, first cabinet; 120, second cabinet; 130, accommodation cavity; 200, sample tube; 210, air inlet; 220, air outlet; 230, quartz tube body; 240, first sealing joint; 250, second sealing joint; 251, pressure gauge; 261, first stop valve; 262, second stop valve; 310, first pipeline; 311, first branch pipe; 312, second branch pipe; 320, second pipeline; 321, third branch pipe; 322, fourth branch pipe; 330, third pipeline; 340, fourth pipeline; 350, fifth pipeline; 360, sixth pipeline; 400, blower; 500, gas regulating mechanism; 510, air extraction pump; 520, inert gas cylinder; 530, first valve body; 540, second valve body; 610, tail gas absorption device; 620, third valve body. Detailed implementation manners

[0036] The following details the implementation manners of the present utility model. Examples of the implementation manners are shown in the attached drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The implementation manners described below with reference to the attached drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0037] The following disclosure provides many different implementation manners or examples for implementing different structures of the present utility model. To simplify the disclosure of the present utility model, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present utility model. In addition, the present utility model may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity and does not itself indicate the relationship between the various implementation manners and / or settings discussed.

[0038] A tube furnace device with an internal circulation disclosed by the present utility model is mainly applied to chemical vapor deposition. The tube furnace device with an internal circulation solves the problems of excessive raw material consumption and uneven atmosphere inside the cavity in the existing tube furnace device.

[0039] Refer to the attached Figure 2 and the attached Figure 3, in one embodiment, the internal circulation tube furnace device includes a heating box 100, a sample tube 200, a first pipeline 310, a second pipeline 320, a blower 400 and a gas regulating mechanism 500. The heating box 100 is provided with a receiving cavity 130 penetrating through opposite ends; the sample tube 200 is detachably disposed in the receiving cavity 130, and the sample tube 200 is provided with an air inlet 210 and an air outlet 220; the first pipeline 310 is connected to the air inlet 210; the second pipeline 320 is connected to the air outlet 220; the blower 400 is respectively connected to the first pipeline 310 and the second pipeline 320, and the blower 400 can drive the gas at the air outlet 220 to flow back to the air inlet 210; the gas regulating mechanism 500 is disposed between the air inlet 210 and the air outlet 220, and the gas regulating mechanism 500 can extract the gas in the sample tube 200, and the gas regulating mechanism 500 can also convey gas to the sample tube 200.

[0040] As can be seen from the above, for the internal circulation tube furnace device provided by the present utility model, during preparation, the gas-producing raw material is placed at one end of the sample tube 200 close to the air inlet 210, and the material to be processed is placed at one end of the sample tube 200 close to the air outlet 220. Then, the air in the sample tube 200 is evacuated by the gas regulating mechanism 500. The gas regulating mechanism 500 can also convey inert gas to the sample tube 200 to adjust the air pressure. Finally, the sample tube 200 is heated by the heating box 100, and the blower 400 drives the gas at the air outlet 220 to flow back to the air inlet 210 to realize the internal circulation reaction of the tube furnace device. This device can fully process the sample with only a small amount of gas-producing raw material. In addition, by using the blower 400 to push the gas, the use of inert gas to push the reaction gas during the reaction process is eliminated, which can greatly reduce the use of gas-producing materials and inert gas and help reduce the material preparation cost. In addition, the blower 400 can also improve the gas uniformity in the sample tube 200 by increasing the flow rate, which helps to improve the uniformity of the sample.

[0041] In one embodiment, the gas regulating mechanism 500 includes a suction pump 510, an inert gas cylinder 520 and a first valve body 530. The first valve body 530 is connected to the first pipeline 310 through a third pipeline 330, the first valve body 530 is connected to the suction pump 510 through a fourth pipeline 340, and the first valve body 530 is connected to the inert gas cylinder 520 through a fifth pipeline 350.

[0042] Specifically, the gas stored in the inert gas cylinder 520 can be nitrogen and argon. The suction pump 510 can adjust the flow rate, and its internal structure is resistant to high temperature and corrosion.

[0043] In one embodiment, the first pipeline 310 includes a first branch pipe 311 and a second branch pipe 312. The gas regulating mechanism 500 further includes a second valve body 540. The second valve body 540 is connected to the first valve body 530 through a third pipeline 330. The second valve body 540 is connected to the air inlet 210 through the first branch pipe 311, and the second valve body 540 is connected to the blower 400 through the second branch pipe 312.

[0044] In one embodiment, it further includes an exhaust gas absorption device 610 and a third valve body 620. The second pipeline 320 includes a third branch pipe 321 and a fourth branch pipe 322. The third valve body 620 is connected to the air outlet 220 through the third branch pipe 321, the third valve body 620 is connected to the blower 400 through the fourth branch pipe 322, and the third valve body 620 is connected to the exhaust gas absorption device 610 through a sixth pipeline 360.

[0045] With the above technical solution, after the reaction ends, the third valve body 620 disconnects the connection between the fourth branch pipe 322 and the blower 400, and then inert gas is conveyed through the gas regulating mechanism 500 to discharge the waste gas in the sample tube 200 to the exhaust gas absorption device 610, thereby realizing the recovery of exhaust gas.

[0046] Specifically, the first valve body 530, the second valve body 540, and the third valve body 620 are all three-way valves.

[0047] The exhaust gas absorption device 610 can be composed of a washing bottle and the alkali solution / acid solution filled inside. After the waste gas enters the washing bottle, it can react with the alkali solution / acid solution filled inside. The end of the washing bottle is connected to the atmosphere, which can not only play a role in liquid sealing to prevent air from entering, but also discharge excess gas when the pressure inside the tube furnace is higher than the atmospheric pressure, so that the internal pressure of the system is maintained at normal pressure. It should be noted that the exhaust gas absorption device 610 can add appropriate exhaust gas absorption liquid or absorption powder according to the acidity, alkalinity or corrosiveness of the gas generated by the gas-producing raw materials, and be replaced regularly according to the actual situation; the first pipeline 310, the second pipeline 320, the third pipeline 330, the fourth pipeline 340, the fifth pipeline 350, and the sixth pipeline 360 are all insulated with heat-insulating materials to prevent the reaction gas from sublimating during the circulation process.

[0048] In one embodiment, the heating box 100 includes a first box body 110 and a second box body 120. The first box body 110 and the second box body 120 are rotatably connected. The first box body 110 is provided with a first semi-circular groove penetrating through opposite ends, and the second box body 120 is provided with a second semi-circular groove penetrating through opposite ends. The first box body 110 can rotate to abut against the second box body 120 so that the first semi-circular groove and the second semi-circular groove are spliced to form an accommodation cavity 130.

[0049] With the above technical solution, the first box body 110 and the second box body 120 are rotatably connected, which can quickly realize the disassembly and assembly of the sample tube 200 and the heating box body 100. Moreover, during the preparation process, the internal situation of the sample tube 200 can also be observed by lifting the first box body 110 and the second box body 120.

[0050] In one embodiment, the length of the heating box body 100 is 1m - 3m, the width of the heating box body 100 is 0.5m - 2m, and the height of the heating box body 100 is 0.5m - 2m.

[0051] In one embodiment, the sample tube 200 includes a quartz tube body 230, a first sealing joint 240, and a second sealing joint 250. The first sealing joint 240 and the second sealing joint 250 are respectively arranged at opposite two ports of the quartz tube body 230. The first sealing joint 240 is connected to the first pipeline 310, and the second sealing joint 250 is connected to the second pipeline 320.

[0052] Specifically, the quartz tube body 230 has a certain mechanical strength and is resistant to acids, alkalis, and high temperatures. The first sealing joint 240 and the second sealing joint 250 are stainless steel joints.

[0053] With the above technical solution, by disassembling the first sealing joint 240 or the second sealing joint 250, the material to be processed and the gas-producing raw material can be replaced, and the operation is simple and time-saving.

[0054] In one embodiment, a pressure gauge 251 is provided on the second sealing joint 250. The pressure of the whole device can be detected through the pressure gauge 251.

[0055] In one embodiment, a first stop valve 261 and a second stop valve 262 are further included. The first stop valve 261 is arranged on the first sealing joint 240, and the second stop valve 262 is arranged on the second sealing joint 250. The gas circuit switch of the quartz tube body 230 can be controlled through the first stop valve 261 and the second stop valve 262.

[0056] In one embodiment, the length of the quartz tube body 230 is 1m - 3m, the inner diameter of the quartz tube body 230 is 50mm - 150mm, and the outer diameter of the quartz tube body 230 is 55mm - 155mm.

[0057] The inner circulation tubular furnace device needs to complete the entire heat treatment reaction process, which is mainly divided into the following four steps:

[0058] Step S1: Refer to the appendix Figure 4, Disassemble the sealing joint at one end, place a porcelain boat containing the gas-producing raw material in the quartz tube body 230 and place it at one end near the air inlet 210 (i.e., the upwind side), place a porcelain boat containing the material to be treated and place it at one end near the air outlet 220 (i.e., the downwind side). Both porcelain boats are placed in the heating zone. Install the sealing joint, close the first shut-off valve 261 and the second shut-off valve 262, rotate the first valve body 530 to disconnect the connection of the fifth pipeline 350, rotate the third valve body 620 to disconnect the connection of the sixth pipeline 360, turn on the air pump 510, and then slowly open the first shut-off valve 261 and the second shut-off valve 262 (to avoid the displacement of the porcelain boat due to instantaneous air pressure). The air pump 510 evacuates the gas in the device.

[0059] Step S2: Refer to the appendix Figure 5 , After the air pump 510 operates for a period of time, turn off the air pump 510, rotate the first valve body 530 to disconnect the connection of the fourth pipeline 340, and the third valve body 620 remains disconnected from the sixth pipeline 360. Open the inert gas cylinder 520, and the inert gas enters the device. After observing that the pressure gauge 251 returns to normal pressure, close the inert gas cylinder 520.

[0060] Step S3: Refer to the appendix Figure 6 , Rotate the second valve body 540 to disconnect it from the third pipeline 330, turn on the blower 400 and adjust it to a smaller flow rate, start the heating program of the heating box 100. When the temperature reaches the gas-producing temperature of the gas-producing raw material, increase the flow rate of the blower 400 so that the generated gas is evenly distributed in the whole device, and rotate the third valve body 620 to connect the tail gas absorption device 610 to let the excess gas discharge from the system to keep the system at normal pressure. Until the program ends and the heating box 100 returns to room temperature, turn off the blower 400.

[0061] Step S4: Refer to the appendix Figure 7 , Rotate the first valve body 530 to disconnect it from the fourth pipeline 340, rotate the second valve body 540 to disconnect it from the second branch pipe 312, rotate the third valve body 620 to disconnect it from the fourth branch pipe 322, open the valve of the inert gas cylinder 520, adjust the appropriate flow rate to push the remaining waste gas inside the device into the tail gas absorption device 610. After the tail gas is fully absorbed, stop introducing the inert gas, and open the sealing joint at one end of the quartz tube body 230 to take out the sample.

[0062] In the description of this specification, the descriptions referring to terms such as "one embodiment", "certain embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in connection with the said embodiments or examples are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiments or examples. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0063] The above are only some embodiments of the present utility model. For those of ordinary skill in the art, without departing from the creative concept of the present utility model, several modifications and improvements can still be made, and these all fall within the protection scope of the present utility model.

Claims

1. A tube furnace device with an internal circulation, characterized in that, Comprising: A heating box body (100) provided with an accommodation cavity (130) penetrating through opposite ends; A sample tube (200) detachably disposed in the accommodation cavity (130), the sample tube (200) being provided with an air inlet (210) and an air outlet (220); A first pipeline (310) connecting the air inlet (210); A second pipeline (320) connecting the air outlet (220); A blower (400) respectively connected to the first pipeline (310) and the second pipeline (320), the blower (400) being capable of driving the gas at the air outlet (220) to flow back to the air inlet (210); A gas regulating mechanism (500) disposed between the air inlet (210) and the air outlet (220), the gas regulating mechanism (500) being capable of extracting the gas in the sample tube (200), and the gas regulating mechanism (500) being further capable of conveying gas to the sample tube (200).

2. The tubular furnace device with an internal circulation according to claim 1, characterized in that, The gas regulating mechanism (500) includes an air extraction pump (510), an inert gas gas cylinder (520) and a first valve body (530), the first valve body (530) being connected to the first pipeline (310) through a third pipeline (330), the first valve body (530) being connected to the air extraction pump (510) through a fourth pipeline (340), and the first valve body (530) being connected to the inert gas gas cylinder (520) through a fifth pipeline (350).

3. The tubular furnace device with an internal circulation according to claim 2, characterized in that, The first pipeline (310) includes a first branch pipe (311) and a second branch pipe (312), the gas regulating mechanism (500) further includes a second valve body (540), the second valve body (540) being connected to the first valve body (530) through the third pipeline (330), the second valve body (540) being connected to the air inlet (210) through the first branch pipe (311), and the second valve body (540) being connected to the blower (400) through the second branch pipe (312).

4. A tubular furnace device with an internal circulation according to claim 1, characterized in that, It further includes a tail gas absorption device (610) and a third valve body (620), the second pipeline (320) includes a third branch pipe (321) and a fourth branch pipe (322), the third valve body (620) is connected to the air outlet (220) through the third branch pipe (321), the third valve body (620) is connected to the blower (400) through the fourth branch pipe (322), and the third valve body (620) is connected to the tail gas absorption device (610) through a sixth pipeline (360).

5. A tubular furnace device with an internal circulation according to claim 1, characterized in that, The heating box body (100) includes a first box body (110) and a second box body (120), the first box body (110) and the second box body (120) are rotatably connected, the first box body (110) is provided with a first semi-circular groove penetrating through opposite ends, the second box body (120) is provided with a second semi-circular groove penetrating through opposite ends, and the first box body (110) can rotate to abut against the second box body (120) so that the first semi-circular groove and the second semi-circular groove are spliced to form the accommodation cavity (130).

6. A tube furnace device with an internal circulation according to claim 1 or 5, characterized in that The length of the heating box body (100) is 1 m - 3 m, the width of the heating box body (100) is 0.5 m - 2 m, and the height of the heating box body (100) is 0.5 m - 2 m.

7. The tubular furnace device with an internal circulation according to claim 1, characterized in that, The sample tube (200) includes a quartz tube body (230), a first sealing joint (240) and a second sealing joint (250). The first sealing joint (240) and the second sealing joint (250) are respectively arranged at opposite two ports of the quartz tube body (230). The first sealing joint (240) is connected to the first pipeline (310), and the second sealing joint (250) is connected to the second pipeline (320).

8. A tube furnace device with an internal circulation according to claim 7, characterized in that, A pressure gauge (251) is arranged on the second sealing joint (250).

9. A tube furnace device with an internal circulation according to claim 7, characterized in that, It further includes a first stop valve (261) and a second stop valve (262). The first stop valve (261) is arranged on the first sealing joint (240), and the second stop valve (262) is arranged on the second sealing joint (250).

10. A tube furnace device with an internal circulation according to claim 7, characterized in that, The length of the quartz tube body (230) is 1 m - 3 m, the inner diameter of the quartz tube body (230) is 50 mm - 150 mm, and the outer diameter of the quartz tube body (230) is 55 mm - 155 mm.

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