Heat insulation ring, furnace tube and tubular atmosphere furnace

Abstract

The utility model discloses a heat insulation ring, a furnace tube and a tubular atmosphere furnace. The heat insulation ring comprises a heat insulation ring body. A vent hole penetrating through the heat insulation ring body is formed in the center position of the heat insulation ring body in the axial direction; an annular groove surrounding the vent hole is formed in one side face of the heat insulation ring body. The designed heat insulation ring can serve as a heat insulation element in the furnace tube, heat loss from the furnace tube is effectively reduced, heat efficiency is improved, and energy is saved. The temperature borne by the air outlet end sealing piece is greatly reduced, the requirement for the temperature resistance of the sealing piece is lowered, and the production cost is saved. And the annular groove is matched with the central vent hole, so that gas and heat can be uniformly distributed, and the quality and the consistency of heat treatment are improved.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor processing equipment, and particularly relates to a heat insulation ring, a furnace tube, and a tube-type atmosphere furnace. Background Art

[0002] Tube-type atmosphere furnaces are widely used in the preparation, purification, and heat treatment of infrared optical semiconductor materials, such as reduction, melting, annealing, sintering, etc. These processes need to be carried out under controlled atmosphere conditions to achieve an ideal chemical reaction environment.

[0003] As a key component of the tube-type atmosphere furnace, the quartz tube is widely used due to its excellent high-temperature resistance and chemical stability. However, the heat insulation effect of the quartz tube is not good, and the heating temperature range of the tube-type atmosphere furnace is limited. During use, heat loss is likely to occur, affecting the thermal efficiency and the uniformity and stability of the temperature inside the furnace, thus increasing the production cycle. At the same time, it will cause the temperature at the gas outlet end of the quartz tube to be too high, and the temperature resistance requirements for the seals are more stringent. Therefore, there is an urgent need to propose a solution to solve the above problems. Summary of the Utility Model

[0004] In view of this, the purpose of this application is to provide a heat insulation ring, a furnace tube, and a tube-type atmosphere furnace, which can effectively reduce the heat loss of the furnace tube, improve the thermal efficiency, and at the same time ensure that gas and heat can pass through smoothly during the heat treatment process, maintaining the uniformity of the temperature inside the furnace.

[0005] To achieve the above technical purpose, this application provides a heat insulation ring, including a heat insulation ring body;

[0006] A ventilation hole penetrating the heat insulation ring body is provided at the central position of the heat insulation ring body along its own axis;

[0007] A circular groove surrounding the ventilation hole is provided on one side surface of the heat insulation ring body.

[0008] Further, the heat insulation ring body is prepared from graphite material.

[0009] Further, the heat insulation ring body is prepared from graphite material with a carbon content of 99.999%.

[0010] Further, the cross-sectional profile of the circular groove is U-shaped.

[0011] Further, a flow guiding inclined surface is provided at the edge of the ventilation hole facing away from the circular groove.

[0012] Further, the heat insulation ring body is cylindrical.

[0013] Further, a transition chamfer is provided at the edge of the heat insulation ring body.

[0014] The present application also discloses a furnace tube, including a furnace tube body and the heat insulation ring described above;

[0015] One end of the furnace tube body is provided with an air inlet structure, and the other end is provided with an air outlet structure;

[0016] The heat insulation ring is arranged in the furnace tube body, and a gap is formed between the heat insulation ring and the inner wall of the furnace tube body in the circumferential direction.

[0017] Further, the furnace tube body is a quartz tube.

[0018] The present application also discloses a tube-type atmosphere furnace, including a heating furnace body and the furnace tube described above;

[0019] A heating cavity is arranged in the heating furnace body;

[0020] The furnace tube penetrates through the heating cavity;

[0021] The heat insulation ring in the furnace tube body of the furnace tube is arranged at the edge position of the heating cavity close to the air outlet structure of the furnace tube body.

[0022] It can be seen from the above technical solutions that the heat insulation ring designed in the present application is applied inside the furnace tube. A ventilation hole with a certain size is opened at the central position of the heat insulation ring body along its own axis, so that air flow and heat can pass through. While achieving the heat insulation effect, the smooth air flow is ensured; a circular groove surrounding the ventilation hole is also arranged on one side surface of the heat insulation ring body (when in use, the circular groove is arranged facing away from the air outlet end of the furnace tube). The setting of the circular groove can achieve a better effect of blocking and collecting heat (blocking heat flow), and at the same time keep the heat insulation ring balanced inside the furnace tube and not easily be knocked down by the air flow. The designed heat insulation ring can be used as a heat insulation and heat preservation element inside the furnace tube, effectively reducing the heat loss from the furnace tube, improving the thermal efficiency, and saving energy; greatly reducing the temperature borne by the seal at the air outlet end, reducing the requirement for the temperature resistance performance of the seal, and saving production costs. The combined design of the circular groove and the central ventilation hole ensures that the gas and heat can be evenly distributed, thereby improving the quality and consistency of heat treatment. Description of the Drawings

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0024] Figure 1 It is a cross-sectional view of a heat insulation ring provided in the present application;

[0025] Figure 2A side view of a heat insulation ring provided in this application;

[0026] Figure 3 A schematic structural diagram of a furnace tube provided in this application;

[0027] Figure 4 A schematic structural diagram of a tubular atmosphere furnace provided in this application;

[0028] In the figure: 1, heat insulation ring body; 2, annular groove; 3, ventilation hole; 4, diversion inclined plane; 5, furnace tube body; 51, intake structure; 52, outlet structure; 6, heating furnace; 61, heating cavity. Detailed implementation manners

[0029] Next, the technical solutions of the embodiments of this application will be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this application without creative efforts shall fall within the scope of protection of the embodiments of this application.

[0030] In the description of the embodiments of this application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the embodiments of this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of this application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0031] In the description of the embodiments of this application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of this application can be understood according to specific situations.

[0032] The embodiments of this application disclose a heat insulation ring, a furnace tube, and a tubular atmosphere furnace.

[0033] Please refer to Figure 1 , an embodiment of a heat insulation ring provided in the embodiments of this application includes:

[0034] Heat insulation ring body 1.

[0035] A ventilation hole 3 running through it is provided at the central position of the heat insulation ring body 1 along its own axial direction; an annular groove 2 surrounding the ventilation hole 3 is provided on one side surface of the heat insulation ring body 1.

[0036] The heat insulation ring designed in this application is applied inside a furnace tube. A ventilation hole 3 with a certain size / shape (circular hole design in this application) is opened at the central position of the heat insulation ring body 1 along its own axial direction, so that air flow and heat can pass through. While achieving the heat insulation effect, it ensures smooth air flow; an annular groove 2 surrounding the ventilation hole 3 is also provided on one side surface of the heat insulation ring body 1 (when in use, the annular groove 2 is arranged facing away from the air outlet end of the furnace tube). The setting of the annular groove 2 can achieve a better effect of blocking and gathering heat (blocking heat flow), and at the same time keep the heat insulation ring balanced inside the furnace tube and not easily knocked down by the air flow. The heat insulation ring designed in this way can be used as a heat insulation and heat preservation element inside the furnace tube, effectively reducing the heat loss from the furnace tube, improving the thermal efficiency, and saving energy; it greatly reduces the temperature borne by the air outlet end seal, reduces the requirement for the temperature resistance performance of the seal, and saves production costs. The cooperative design of the annular groove 2 and the central ventilation hole 3 ensures that the gas and heat can be evenly distributed, thereby improving the quality and consistency of heat treatment.

[0037] The outer diameter of the heat insulation ring body 1 is designed to be smaller than the inner diameter of the furnace tube to be applied, so that it can be easily placed into the furnace tube.

[0038] The above is Embodiment 1 of a heat insulation ring provided by this application. The following is Embodiment 2 of a heat insulation ring provided by this application. For details, please refer to Figures 1 to 2 .

[0039] Based on the solution of the above Embodiment 1

[0040] Furthermore, the heat insulation ring body 1 is prepared from graphite material. The graphite material has a low coefficient of thermal expansion, excellent heat insulation performance and high temperature resistance characteristics, and is suitable for long-term use under high temperature conditions without failure.

[0041] Furthermore, the heat insulation ring body 1 is preferably prepared from high-purity graphite material. The high-purity graphite material refers to graphite material with a carbon content of 99.999% and an ash content less than 20 ppb, and it has more excellent performance.

[0042] Furthermore, the cross-sectional profile of the annular groove 2 is U-shaped. Under the U-shaped design, the wall thickness of the heat insulation ring body 1 at the position of the annular groove 2 is relatively uniform, and it is more convenient to process; it can also be designed as an arc shape according to actual needs.

[0043] Furthermore, a flow guiding inclined surface 4 is provided at the edge of the vent hole 3 facing away from the annular groove 2 (a flow guiding inclined surface 4 is provided at the edge of the vent hole 3 on the other side of the heat insulation ring body 1); the flow guiding inclined surface 4 can play a diffusing role, and the airflow coming out of the vent hole 3 diffuses outward through the flow guiding inclined surface 4, reducing the speed of heat dissipation inside the furnace tube, so as to better maintain the temperature inside the tube.

[0044] Furthermore, the heat insulation ring body 1 is cylindrical to fit the cylindrical furnace tube, and can be specifically designed according to the internal shape of the furnace tube without limitation. The wall thickness and height of the heat insulation ring body 1 can be optimized according to the required heat insulation effect and the size of the furnace tube, and there is no limitation either.

[0045] Furthermore, a transition chamfer is provided at the edge of the heat insulation ring body 1.

[0046] In terms of actual application design, the overall structure of the heat insulation ring body 1 is cylindrical, with a height designed to be 65 mm and an outer diameter designed to be 140 mm (the inner diameter of the furnace tube is greater than 140 mm), and the diameter of the vent hole 3 in the center is designed to be 25 mm. According to the length of the furnace tube and the range of the heating area, the heat insulation ring body 1 is selected to be placed near the edge of the heating area inside the furnace tube. A clean stainless steel rod is passed through the vent hole 3 in the center, the heat insulation ring body 1 is placed into the furnace tube, and then it is pushed to the designated position by the stainless steel rod.

[0047] As Figure 3 shown, the present application also discloses a furnace tube, including a furnace tube body 5 and the heat insulation ring designed as above; an air inlet structure 51 is provided at one end of the furnace tube body 5, and an air outlet structure 52 is provided at the other end; the heat insulation ring is arranged in the furnace tube body 5, and a gap is formed between the heat insulation ring and the inner wall of the furnace tube body 5 in the circumferential direction (the outer diameter of the heat insulation ring body 1 is smaller than the inner diameter of the furnace tube body 5).

[0048] Furthermore, the furnace tube body 5 is a quartz tube or a corundum tube; in the present application, a quartz tube is preferably used, which has excellent characteristics such as good high-temperature resistance and high chemical stability.

[0049] As Figure 4 shown, the present application also discloses a tube-type atmosphere furnace, including a heating furnace 6 body and a furnace tube.

[0050] A heating cavity 61 is provided inside the heating furnace 6 body, and the furnace tube penetrates through the heating cavity 61; the heat insulation ring in the furnace tube body 5 of the furnace tube is arranged at the edge position of the heating cavity 61 close to the air outlet structure 52 of the furnace tube body 5.

[0051] The heat insulation ring body 1 is installed inside the furnace tube body 5, at the edge of the heating cavity 61 (heating area) close to the gas outlet structure 52. Gas enters from the gas inlet structure 51 of the furnace tube body 5, passes through the heating area and carries heat towards the direction of the heat insulation ring body 1. Among them, a part of the air flow enters the annular groove 2, a part of the air flow returns to the heating area of the furnace tube body 5, and a part of the air flow flows out through the ventilation holes 3 of the heat insulation ring and diffuses outward through the guide inclined plane 4.

[0052] As shown in Table 1 and Table 2 below, through the comparative experiment before and after installation, the tube-type atmosphere furnace equipped with the heat insulation ring prepared from high-purity graphite material, compared with the tube-type atmosphere furnace without the heat insulation ring, under the same working conditions, takes less time to reach the target temperature, and can reach a higher temperature in the same time. From this, it can be calculated that the energy consumption of the former is reduced by about 33%, and the temperature uniformity in the furnace tube body 5 is improved by about 8.5%; in addition, when reaching a certain temperature, the seal at the gas outlet end of the furnace tube body 5 equipped with the heat insulation ring bears a lower temperature, which is about 58% lower than that without the heat insulation ring. Therefore, it can be concluded that less heat is dissipated in the furnace tube body 5, which plays a good protective role for the seal and greatly reduces the requirement for the heat resistance performance of the seal.

[0053] Table 1 Comparison of time and temperature before and after installing the heat insulation ring

[0054]

[0055] Table 2 Comparison of the temperature of the seal at the gas outlet end before and after installing the heat insulation ring

[0056]

[0057] In summary, the heat insulation ring designed in this application can effectively improve the thermal efficiency and temperature uniformity of the tube-type atmosphere furnace, reduce heat energy loss, and reduce the requirement for the heat resistance performance of the seal. It is of great significance for the heat treatment process that requires precise temperature and atmosphere control, is suitable for large-scale production applications, can effectively improve production efficiency, and reduce production costs.

[0058] The above has introduced in detail an insulation ring, a furnace tube and a tube-type atmosphere furnace provided by this application. For those of ordinary skill in the art, according to the idea of the embodiments of this application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to this application.

Claims

1. A heat insulation ring, characterized in that, Comprising a heat insulation ring body (1); A ventilation hole (3) penetrating through the heat insulation ring body (1) is provided at the central position of the heat insulation ring body (1) along its own axis; An annular groove (2) surrounding the ventilation hole (3) is provided on one side surface of the heat insulation ring body (1).

2. The heat insulation ring according to claim 1, characterized in that The heat insulation ring body (1) is prepared from graphite material.

3. The heat insulation ring according to claim 2, characterized in that, The heat insulation ring body (1) is prepared from graphite material with a carbon content of 99.999%.

4. The heat insulation ring according to claim 1, characterized in that, The cross-sectional profile of the annular groove (2) is U-shaped.

5. The heat insulation ring according to claim 1, characterized in that, A flow guiding inclined surface (4) is provided at the edge of the ventilation hole (3) facing away from the annular groove (2).

6. The heat insulation ring according to claim 1, wherein, The heat insulation ring body (1) is cylindrical.

7. The heat insulation ring according to claim 1, characterized in that, A transition chamfer is provided at the edge of the heat insulation ring body (1).

8. A furnace tube, characterized in that, Comprising a furnace tube body (5) and a heat insulation ring as described in any one of claims 1 to 7; An air inlet structure (51) is provided at one end of the furnace tube body (5), and an air outlet structure (52) is provided at the other end; The heat insulation ring is arranged in the furnace tube body (5), and a gap is formed between the heat insulation ring and the inner wall of the furnace tube body (5) in the circumferential direction.

9. The furnace tube according to claim 8, characterized in that, The furnace tube body (5) is a quartz tube.

10. Tube-type atmosphere furnace, characterized in that, Comprising a heating furnace (6) body and a furnace tube as described in any one of claims 8 to 9; A heating cavity (61) is provided inside the heating furnace (6) body; The furnace tube penetrates through the heating cavity (61); The heat insulation ring in the furnace tube body (5) of the furnace tube is arranged at the edge position of the heating cavity (61) close to the air outlet structure (52) of the furnace tube body (5).

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