Electronic-grade packaging bag surface metal impurity collecting device

Abstract

The utility model discloses a device for collecting metal impurities on the surface of an electronic-grade packaging bag, which belongs to the technical field of detection and is characterized in that a box body and a box cover are connected to form a closed space inside for placing a packaging bag sample and a leaching solution; a part of the box body is removed from the top of the box body to form an empty groove for bearing a leaching solution, and a boss for sealing the empty groove is arranged at the bottom of the box cover; when the box body and the box cover are connected in a sealed mode, the boss stably holds a packaging bag sample covering the opening of the empty groove so that the to-be-sampled face of the packaging bag sample can make contact with the leaching solution in a fixed area. According to the device, impurities on the surface of the packaging bag can be leached by leaching liquid under the sealed and clean conditions, so that the accuracy of subsequent metal impurity detection and analysis results is improved.

Description

Technical Field

[0001] The utility model relates to an experimental instrument, in particular to a device for collecting surface metal impurities of an electronic-grade packaging bag. Background Art

[0002] Polysilicon, as a basic material for integrated circuits, discrete devices, solar cell wafers, and photovoltaic power generation, has a relatively mature production process. Polysilicon can be classified by purity into metallurgical grade (metallic silicon), solar grade, and electronic grade. For electronic-grade silicon, generally, the silicon content is required to be > 99.9999% or more, and the ultra-high purity reaches 99.9999999% - 99.999999999%. At present, there are already electronic-grade rectification towers producing refined trichlorosilane. With the production of electronic-grade raw materials, for electronic-grade polysilicon products, higher internal quality requirements are imposed. To avoid problems such as contamination during transportation, stricter requirements are also placed on the outer packaging bags of silicon materials.

[0003] At present, the quality of electronic-grade polysilicon produced is gradually improving, and electronic-grade products have entered the large-scale production stage. The internal quality of electronic-grade polysilicon is crucial, but the contamination introduced by packaging bags and the like in contact with it cannot be ignored. By comparing with national standards and peers, it is known that the requirements for packaging bags of electronic-grade polysilicon are more stringent. There are requirements not only for B, P, and metal impurities on the surface layer of the packaging bag but also for matrix metal impurities of the packaging bag. At present, there are neither impurity control standards nor relevant inspection standards for electronic-grade polysilicon packaging bags, and the quality control of electronic-grade packaging bags is urgent.

[0004] Based on the above problems, it is necessary to carry out research on the detection method of surface impurity content of electronic-grade packaging bags to achieve the independent detection of surface metal impurities of electronic-grade packaging bags. According to the industry's electronic-grade packaging bag detection standard, polyethylene packaging materials for polysilicon are used to determine impurities such as B, Na, Mg, Al, P, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, As, Pb, etc. on the surface. The simultaneous analysis of the above-mentioned multiple elements can be achieved by using modern instrumental analysis methods (such as ICP-MSMS). However, the traditional method of leaching impurities on the inner surface of the packaging bag is to directly add a certain amount of leaching solution into the packaging bag, and through a certain period of time, the metal impurities on the inner surface of the packaging bag are dissolved in the leaching solution, and the soaked liquid is extracted cleanly. However, the inner surface of the packaging bag in contact with the added leaching solution cannot be accurately calculated, and the metal impurities on the inner surface of the packaging bag will be excessively dissolved in the leaching solution due to liquid shaking, resulting in deviation of the detection results. At the same time, the extraction and transfer of the leaching solution are prone to contamination.

[0005] In view of this, this solution proposes a device for collecting surface metal impurities of an electronic-grade packaging bag. Summary of the Utility Model

[0006] The present utility model aims to solve the problem that there is no suitable tool for leaching impurities on the surface of electronic-grade packaging bags in the existing technology when detecting the surface impurity content of electronic-grade packaging bags, and proposes a device for collecting metal impurities on the surface of electronic-grade packaging bags. This device can leach the impurities on the surface of the packaging bag under sealed and clean conditions, and can also fix the sample leaching area, thereby improving the accuracy of the subsequent metal impurity detection and analysis results.

[0007] In order to achieve the above-mentioned utility model purpose, the technical solution of the present utility model is as follows:

[0008] A device for collecting metal impurities on the surface of an electronic-grade packaging bag, comprising a box body and a box cover. After the box body and the box cover are connected, a closed space is formed inside for placing the packaging bag sample and the leaching solution; a part of the top body of the box body is removed to form an empty groove for carrying the leaching solution, and a convex platform for sealing the empty groove is provided at the bottom of the box cover; when the box body and the box cover are hermetically connected, the convex platform stably holds the packaging bag sample covering the opening of the empty groove, so that the surface to be sampled contacts the leaching solution with a fixed area.

[0009] Furthermore, the connection between the box body and the box cover is a detachable fixed connection.

[0010] Furthermore, an external thread is provided on the outer wall of the upper end of the box body, and an internal thread is provided on the inner wall of the lower end of the box cover. The box body and the box cover are fixedly connected by screwing with the matching of the internal and external threads.

[0011] Furthermore, the convex platform is located at the center position of the bottom of the box cover, and a ring groove is formed around the convex platform.

[0012] Furthermore, a peripheral edge platform is formed around the empty groove at the top of the box body, and the size and shape of the peripheral edge platform match the groove around the convex platform.

[0013] Furthermore, the materials of the box body and the box cover are both polytetrafluoroethylene materials.

[0014] The operation process of using the present utility model is as follows:

[0015] Step 1: Transfer a certain amount of leaching solution into the box body;

[0016] Step 2: Divide and sample the impurity area of the packaging bag to be detected to form a sample analysis surface larger than the area of the convex platform of the box cover;

[0017] Step 3: Place the sample analysis surface face down on the peripheral edge platform of the box body, cover the box cover and tighten the threads of the box body so that the convex platform of the box cover is closely attached to the peripheral edge platform of the box body. Invert the box body, and the leaching liquid can leach impurities in a fixed-area region, and the area is the inner diameter size of the opening of the empty groove of the box body. After leaching for a certain time, the box body can be used as an analysis container, and the lid can be opened directly for detection.

[0018] In summary, the utility model has the following advantages:

[0019] 1. By using the device proposed by the utility model, the leaching liquid can leach the impurities on the surface of the packaging bag under sealed and clean conditions, and at the same time, the leaching area of the sample can be fixed, thereby improving the accuracy of the subsequent detection and analysis results of metal impurities.

[0020] 2. Through the impurity collection device in this solution, it is convenient to subsequently determine multiple impurities in the electronic-grade packaging bag. The method of using this device to leach the surface impurities of the packaging bag is simple in operation and short in inspection period. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the lid of the metal impurity collection device of the utility model;

[0022] Figure 2 It is a schematic diagram of the box body of the metal impurity collection device of the utility model;

[0023] In the figure:

[0024] 1. Lid, 2. Boss, 3. Internal thread, 4. Box body, 5. Edge platform, 6. External thread. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] In order to more clearly illustrate the utility model, the utility model will be further described below in conjunction with the preferred embodiments and the drawings. Those skilled in the art should understand that the specific content described below is illustrative rather than restrictive, and should not be used to limit the protection scope of the utility model.

[0026] Embodiment 1

[0027] This embodiment proposes a device for collecting metal impurities on the surface of an electronic-grade packaging bag, including a box body 4 and a lid 1. After the box body 4 and the lid 1 are connected, a closed space for placing the packaging bag sample and the leaching liquid is formed inside, so as to facilitate the leaching liquid to leach the impurities on the surface of the packaging bag under sealed and clean conditions.

[0028] As Figure 1 and Figure 2 shown, a part of the body at the center of the top of the box body 4 is removed to form an empty groove for carrying the leaching liquid, and a boss 2 for sealing the empty groove at the top of the box body 4 when the lid 1 is covered with the box body 4 is provided at the bottom of the lid 1. When the box body 4 and the lid 1 are hermetically connected, the boss 2 on the lid 1 will stably hold the packaging bag sample covering the opening of the empty groove so that the surface to be sampled contacts the leaching liquid with a fixed area.

[0029] By using the device proposed by the present utility model, the leaching solution can leach the impurities on the surface of the packaging bag under sealed and clean conditions, and at the same time, the leaching area of the sample can be fixed, thereby improving the accuracy of the subsequent detection and analysis results of metal impurities.

[0030] Embodiment 2

[0031] This embodiment proposes an electronic-grade packaging bag surface metal impurity collection device, including a box body 4 and a box cover 1. After the box body 4 and the box cover 1 are connected, a closed space for placing the packaging bag sample and the leaching solution is formed inside, so as to facilitate the leaching solution to leach the impurities on the surface of the packaging bag under sealed and clean conditions.

[0032] As Figure 1 and Figure 2 shown, a part of the center of the top of the box body 4 is removed to form an empty groove for carrying the leaching solution, and a convex platform 2 is provided at the bottom of the box cover 1 for sealing the empty groove at the top of the box body 4 when the box cover 1 is closed with the box body 4. When the box body 4 and the box cover 1 are sealed and connected, the convex platform 2 on the box cover 1 will stably hold the packaging bag sample covering the opening of the empty groove so that its sampling surface contacts the leaching solution with a fixed area.

[0033] In this embodiment, the part of the sample surface that is bitten by the convexity of the box cover 1 and the edge platform 5 of the box body 4 towards the box body 4 surface is the leaching area, and this area can be calculated according to the size of the box body 4. Due to the difference in sample thickness, there will be a certain margin, which can be accurately measured according to different thicknesses of plasticizable items.

[0034] In this embodiment, the convex platform 2 is located at the center position of the bottom of the box cover 1, and a ring groove is formed around the convex platform 2. A ring of edge platform 5 is formed around the empty groove at the top of the box body 4, and the size and shape of the edge platform 5 match the groove around the convex platform 2.

[0035] Furthermore, the connection between the box body 4 and the box cover 1 is a detachable fixed connection. In this embodiment, an external thread 6 is provided on the outer wall of the upper end of the box body 4, and an internal thread 3 is provided on the inner wall of the lower end of the box cover 1. The box body 4 and the box cover 1 are fixedly connected by screwing and matching the internal and external threads 6.

[0036] It should be noted that the core element of this device is to press the edge platform 5 of the box body 4 and the convexity of the box cover 1 tightly to fix the leaching area of the leaching solution and prevent the liquid from leaking. Therefore, the thread can be rotated appropriately according to the thickness of the packaging bag to increase the force to ensure that the internal leaching space is dense and does not leak, or other connection methods such as card slots or buckles can be used according to the purpose of this device.

[0037] In addition, the size and shape of this device can also be optimized according to the thickness, stiffness, etc. of the electronic-grade packaging bag.

[0038] The operation process of using the present utility model is as follows:

[0039] Step 1: Pipette a certain amount of leaching solution into the box body 4;

[0040] Step 2: Divide and sample the impurity area of the packaging bag to be detected to form a sample analysis surface larger than the boss 2 area of the box cover 1;

[0041] Step 3: Place the sample analysis surface face down on the edge platform 5 of the box body 4, cover the box cover 1 and screw the box body 4 tightly so that the boss 2 of the box cover 1 fits tightly with the edge platform 5 of the box body 4. Invert the box body 4, and the leaching liquid can leach impurities in a fixed area, and the area is the inner diameter size of the empty slot opening of the box body 4. After leaching for a certain time, the box body 4 can be used as an analysis container, and it can be directly detected after opening the cover.

[0042] Example 3

[0043] On the basis of Example 1 or Example 2, further, in order to prevent pollution, in this example, both the box body 4 and the box cover 1 are made of polytetrafluoroethylene material.

[0044] This device is made of high-purity polytetrafluoroethylene material, corrosion-resistant, and not easy to precipitate metal impurities at high temperatures. It is suitable for the detection of surface metal impurities of electronic-grade packaging bags.

[0045] It should be noted that this patent is not limited to the above materials, and PFA, PP or other materials that meet the conditions can be selected according to the impurity content of the sample to be analyzed and whether the leaching solution is corrosive.

[0046] In this example, the specific operation process of using this device to collect surface metal impurities of the packaging bag is as follows:

[0047] S1: Put the box body 4 and the box cover 1 into a 20% nitric acid solution and cook and soak for more than 2 hours. After cooking, wash with ultrapure water (resistivity greater than 18.2 MΩ*cm), cook repeatedly for more than 3 times, and dry for later use; the ceramic scissors, PFA tweezers, and pipette tips (1-10 ml) are rinsed with a 5% nitric acid solution, rinsed with ultrapure water, and dried for later use.

[0048] S2: Prepare the leaching solution, nitric acid (G3) solution (VHNO3:VH2O = 1:19), and turn on the heating plate to raise the temperature to 70°C.

[0049] S3: Open the box cover 1, and use a pipette to pipette 10.00 mL of the leaching solution into the box.

[0050] S4: Use clean ceramic scissors to cut the sample to be analyzed into a circular area with a diameter of 70 mm (varying according to the device size), and use PFA tweezers to hold and place it (with the area to be analyzed facing down) on the edge platform 5 of the box body 4.

[0051] S5: Thread the lid 1 and the box body 4 tightly and place them upside down on the heating plate. Heat at 70 °C for 60 min.

[0052] S6: After heating, remove the sample box and place it upright. After cooling to room temperature, open the lid. Use PFA forceps to remove the sample, tighten the lid 1, invert and shake well. The liquid is ready for testing.

[0053] S7. Use modern instruments (such as ICP-MSMS) to detect impurities such as boron, chromium, iron, nickel, copper, zinc, iron, zinc, calcium, magnesium, and lead in the surface impurities of the electronic-grade packaging bag.

[0054] The above are only the preferred embodiments of the present invention, and do not impose any form of limitation on the present invention. Any simple modification or equivalent change made to the above embodiments based on the technical essence of the present invention shall fall within the protection scope of the present invention.

Claims

1. An electronic-grade packaging bag surface metal impurity collection device, including a box body (4) and a box cover (1), characterized in that, After the box body (4) is connected to the box cover (1), a closed space for placing the packaging bag sample and the extraction liquid is formed inside; a part of the body at the top of the box body (4) is removed to form an empty groove for carrying the extraction liquid, and a boss (2) for sealing the empty groove is provided at the bottom of the box cover (1); when the box body (4) is hermetically connected to the box cover (1), the boss (2) stably holds the packaging bag sample covering the opening of the empty groove, so that the sampling surface thereof contacts the extraction liquid with a fixed area.

2. The surface metal impurity collection device for an electronic-grade packaging bag according to claim 1, characterized in that, The box body (4) and the box cover (1) are detachably and fixedly connected.

3. An electronic-grade packaging bag surface metal impurity collection device according to claim 2, characterized in that, An external thread (6) is provided on the outer wall of the upper end of the box body (4), and an internal thread (3) is provided on the inner wall of the lower end of the box cover (1). The box body (4) and the box cover (1) are fixedly connected by matching and screwing of the external and internal threads (6).

4. An electronic-grade packaging bag surface metal impurity collection device according to claim 1, characterized in that, The boss (2) is located at the center of the bottom of the box cover (1), and a ring groove is formed around the boss (2).

5. An electronic-grade packaging bag surface metal impurity collection device according to claim 4, characterized in that, An edge platform (5) is formed around the empty groove at the top of the box body (4), and the size and shape of the edge platform (5) match the groove around the boss (2).

6. An electronic-grade packaging bag surface metal impurity collection device according to any one of claims 1 to 5, characterized in that, The box body (4) and the box cover (1) are both made of polytetrafluoroethylene material.

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