Lens angle adjusting mechanism
Through the coordination of the limit block and the correction block, the problem of inconvenient lens angle adjustment in the laser direct write lithography system is solved, and fast and accurate lens position adjustment is achieved, improving the accuracy of imaging light and the imaging quality of the lens.
Patent Information
- Application Number
- CN202422014470.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-20
- Publication Date
- 2025-07-08
- Estimated Expiration
- 2034-08-20
AI Technical Summary
In existing laser direct write lithography systems, lens angle adjustment requires multiple calibrations, and it is difficult to ensure consistent angles, which wastes time and lacks accuracy.
A lens angle adjustment mechanism is designed to achieve accurate adjustment of lens position through the coordination between the limit block and the correction block, and the fixed hole of the limit block is connected to the correction block to ensure the stable position of the lens through cylinder. Combined with the adapter frame and threaded connection, fast and accurate angle adjustment is achieved.
It realizes fast and precise adjustment of lens angle, reduces calibration time, improves the accuracy and consistency of lens position adjustment, and enhances the accuracy of imaging light.
Smart Images
Figure CN223078523U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of processing of lighting lenses, and particularly relates to a lens angle adjusting mechanism. Background Art
[0002] In a laser direct writing lithography system, the most core part is the DMD chip. In optics, the DMD chip refers to a digital micromirror device that controls and adjusts light through a tiny mirror array and is used for projection imaging and optical processing. When the DMD chip is in the on state, the imaging light passes through the lens and then forms an image.
[0003] When the imaging light of the laser direct writing lithography system irradiates the imaging device on the workbench, the lens usually needs to be adjusted at different angles. In the existing design, every time the lens is adjusted in angle, the position of the lens needs to be recalibrated, which wastes time and it is difficult to ensure that when several lenses with the same angle are required, the operator can calibrate the position of the lens. Summary of the Utility Model
[0004] The purpose of the utility model is to provide a lens angle adjusting mechanism to solve the problems raised in the above background art.
[0005] To achieve the above purpose, the utility model provides the following technical solutions:
[0006] A lens angle adjusting mechanism includes a lens and a light passing cylinder. The lens is provided with an exit port. The lens is fixedly connected to the light passing cylinder, and the exit port of the lens communicates with the light passing cylinder. The mechanism further includes a support frame which is provided with a first accommodation hole. The light passing cylinder passes through the first accommodation hole, and the area of the first accommodation hole is larger than the bottom area of the light passing cylinder;
[0007] The support frame is further provided with a calibration block which is provided with a fixing hole. The light passing cylinder passes through the fixing hole and is fixedly connected to the hole wall of the fixing hole. The calibration block is movably connected to the upper surface of the support frame. The support frame is further provided with a limiting block which is detachably connected to the support frame through an adapter frame. The limiting block abuts against the calibration block, and the limiting block is used for restricting the position of the calibration block.
[0008] As a further technical solution, the adapter frame includes a side plate and two straight plates. The side plate is vertically placed and is fixedly connected to the side surface of the support frame. The two straight plates are horizontally placed, and the two straight plates are respectively detachably and fixedly connected to the side surface of the side plate facing the lens. A gap is left between the two straight plates for placing the limiting block, and the limiting block is detachably connected to the side surface of the side plate.
[0009] Further technical solution: The support frame and the correction block are movably connected by a connecting block. The connecting block is located between the support frame and the correction block. The connecting block is provided with a second accommodation hole, and the light passing cylinder sequentially passes through the fixing hole, the second accommodation hole and the first accommodation hole.
[0010] Further technical solution: The connecting block is provided with a plurality of first threaded holes, the support frame is provided with four second threaded holes, the connecting block and the support frame are threadedly connected by a bolt, the correction block is provided with a plurality of third threaded holes, and the connecting block and the correction block are threadedly connected by a bolt for passing light.
[0011] Further technical solution: The lower surface of the straight plate abuts against the upper surface of the connecting block, and the side surfaces of the two straight plates abut against the side surfaces of the limiting block.
[0012] Further technical solution: The lens is further provided with a light incident part. The lens is provided with an incident port. The light incident part is fixedly connected to the lens, and the light incident part is communicated with the incident port.
[0013] Further technical solution: A stray light elimination cavity is arranged inside the lens body, and the entrance of the stray light elimination cavity corresponds to the stray light directional reflection path of the DMD chip inside the lens.
[0014] Further technical solution: The bottom of the stray light elimination cavity is provided with light extinction lines.
[0015] Further technical solution: The light extinction lines are perpendicular to the direction of the incident light.
[0016] Further technical solution: The inner wall of the stray light elimination cavity is provided with a black coating.
[0017] Advantages of the present utility model: The limiting block abuts against the side surface of the correction block. Therefore, each limiting block corresponds to the position of the correction block once. The operator needs to clarify the position of the correction block corresponding to different limiting blocks. Since the hole wall of the fixing hole of the correction block is fixedly connected to the light passing cylinder, different positions of the correction block correspond to different positions of the light passing cylinder, so that the light passing cylinder faces different positions. Therefore, the position of the light passing cylinder can be adjusted by placing different limiting blocks.
[0018] Other features and advantages of the present utility model will be described in detail in the subsequent specific implementation part. Description of the Drawings
[0019] Figure 1 : Three-dimensional structure diagram of the lens of the present utility model.
[0020] Figure 2 : Optical path diagram of the lens of the present utility model.
[0021] Figure 3 : The first three-dimensional structure diagram of the present utility model.
[0022] Figure 4 : The second three-dimensional structure diagram of the present utility model.
[0023] Figure 5 : The exploded view of the present utility model.
[0024] Figure 6 : The sectional structure diagram of the lens of the present utility model.
[0025] Reference numerals in the drawings: 1, lens; 2, lens housing; 3, incident port; 4, exit port; 5, DMD chip; 6, light passing cylinder; 7, support frame; 8, support rod; 9, workbench; 10, support table; 11, first accommodation hole; 12, connection block; 13, first threaded hole; 14, second threaded hole; 15, calibration block; 16, third threaded hole; 17, fixing hole; 18, second accommodation hole; 19, limiting block; 20, adapter frame; 21, side plate; 22, straight plate; 23, light incident part; 24, stray light elimination cavity Detailed implementation manners
[0026] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model.
[0027] Please refer to Figures 1-6 ;
[0028] For the convenience of describing the lens angle adjustment mechanism of the present application, the lens 1 in the present application will be described first here:
[0029] Refer to Figures 1-2 , the lens 1 includes a lens 1 housing, the lens 1 housing includes an incident part and a reflection part, the incident part of the lens 1 housing is provided with an incident port 3, the reflection part of the lens 1 housing is provided with a reflection port and an exit port 4, and a DMD chip 5 is provided at a position corresponding to the reflection port on the outer side of the lens 1 housing; the incident part and the reflection part are obliquely connected on one side, a reflecting mirror is arranged in the incident part, a conversion member is arranged in the reflection part, and the surface of the conversion member faces the DMD chip 5; the optical path from the incident port 3 passing through the conversion member to the DMD chip 5 forms a first optical path, the optical path from the DMD chip 5 to the exit port 4 forms a second optical path, and the first optical path and the second optical path are eccentrically arranged; the imaging light formed in the DMD chip 5 needs to be projected from the exit port 4 into the imaging device for imaging.
[0030] It should be noted that in this embodiment, the above lens 1 is taken as an example, and in other embodiments, it may be other types of lenses 1.
[0031] Refer to Figures 3-5, a lens angle adjustment mechanism, comprising a lens 1 and a light passing cylinder 6. The lens 1 is provided with an exit port 4, and the exit port 4 is located below the lens 1. The lens 1 is fixedly connected to the light passing cylinder 6, and the exit port 4 of the lens 1 communicates with the light passing cylinder 6. The diameter of the exit port 4 is smaller than the diameter of the light passing cylinder 6. In this embodiment, the connection manner between the lens 1 and the light passing cylinder 6 is not limited. The lens 1 and the light passing cylinder 6 can be connected by welding or threaded connection, so that the imaging light formed in the lens 1 can be transmitted through the light passing cylinder 6. On the one hand, using the light passing cylinder 6 is relatively easy to control the optical path, so as to control the imaging point to reach the specified position. On the other hand, using the light passing cylinder 6 can protect the imaging light from being contaminated by stray light. The lens angle adjustment structure further includes a support frame 7. The support frame 7 includes two vertically placed support rods 8, a horizontally placed workbench 9 and a horizontally placed support platform 10. The two vertically placed support rods 8 are located on the workbench 9 and the two vertically placed support rods 8 are fixedly connected to the workbench 9. The support platform 10 is located at the upper ends of the two support rods 8, and the support platform 10 is fixedly connected to the upper ends of the two support rods 8. A first accommodation hole 11 is opened on the support platform 10. A connection block 12 is further provided on the support platform 10. The connection block 12 is provided with a plurality of first threaded holes 13. Among them, there are four first threaded holes 13 around the connection block 12 with larger diameters than the other first threaded holes 13. Four second threaded holes 14 are opened at corresponding positions on the support platform 10, so that the connection block 12 and the support platform 10 can be threadedly connected by a bolt. A calibration block 15 is further provided on the connection block 12. The calibration block 15 is provided with a plurality of third threaded holes 16. The connection block 12 and the calibration block 15 are threadedly connected by a bolt. In this embodiment, there are four third threaded holes 16 around the calibration block 15 as adjustment threaded holes. The calibration block 15 can be threadedly connected to the connection block 12 through the adjustment threaded holes, which is more convenient to adjust the position of the calibration block 15;
[0032] The calibration block 15 is provided with a fixing hole 17, and the connection block 12 is provided with a second accommodation hole 18. The light passing cylinder 6 passes through the fixing hole 17, the second accommodation hole 18 and the first accommodation hole 11 from top to bottom. When the light passing cylinder 6 passes through the fixing hole 17, it is fixedly connected to the hole wall of the fixing hole 17. The area of the first accommodation hole 11 is larger than the bottom area of the light passing cylinder 6, and the area of the second accommodation hole 18 is larger than the area of the light passing cylinder 6, so that the light passing cylinder 6 can move on the first accommodation hole 11 and the second accommodation hole 18. A limiting block 19 is further provided on the support platform 10. The limiting block 19 is detachably connected to the support platform 10 through an adapter frame 20, so that the support platform 10 can replace the limiting block 19 relatively simply. At the same time, the limiting block 19 abuts against the calibration block 15, and the limiting block 19 can be used to limit the position of the calibration block 15.
[0033] Specifically, when the operator places each limit block 19 at a specified position on the support table 10, since the limit block 19 abuts against the side surface of the calibration block 15, each limit block 19 will correspond to the position of the calibration block 15 once. The operator needs to clarify the positions of the calibration blocks 15 corresponding to different limit blocks 19. Since the hole wall of the fixing hole 17 of the calibration block 15 is fixedly connected to the light passing cylinder 6, different positions of the calibration block 15 correspond to different positions of the light passing cylinder 6, making the light passing cylinder 6 face different positions. Therefore, the position of the light passing cylinder 6 can be adjusted by placing different limit blocks 19;
[0034] During use, assume that the operator inserts the No. 1 limit block 19, and the corresponding light passing cylinder 6 irradiates at the first position on the workbench 9. After that, if the operator needs to irradiate the corresponding light passing cylinder 6 at the second position on the workbench 9, the operator can loosen the adjustment screw of the calibration block 15 and the connecting block 12, so as to separate the calibration block 15 from the limit block 19. Since the limit block 19 is detachably connected to the adapter frame 20, the limit block 19 can be separated from the adapter frame 20. Remove the No. 1 limit block 19, keep the No. 2 limit block 19 and the adapter frame 20 relatively fixed, and then adjust the position of the calibration block 15 so that the calibration block 15 abuts against the limit block 19, thereby determining the position of the calibration block 15, and further determining that the light passing cylinder 6 irradiates at the second position on the workbench 9. Then thread-connect the calibration block 15 and the connecting block 12 to fix the position of the calibration block 15. At this time, the imaging light emitted from the DMD chip 5 of the lens 1 can reach the specified second position on the workbench 9. If the lens 1 needs to be adjusted back to the first position after irradiating at the second position, the operator only needs to replace the No. 2 limit block 19 with the No. 1 limit block 19 according to the above steps. It should be noted that only two limit blocks 19 are used in this embodiment. In other embodiments, the shape and number of the limit blocks 19 are not limited.
[0035] In order to further improve the accuracy of the imaging light reflected by the light pipe 6 when irradiating the imaging position of the workbench 9, in this embodiment, the adapter frame 20 further includes a side plate 21 and two straight plates 22. The side plate 21 is vertically placed on the side of the support table 10, and the side plate 21 is fixedly connected to the side of the support table 10. The two straight plates 22 are horizontally placed, and the two straight plates 22 are respectively detachably fixedly connected to the side of the side plate 21 facing the lens 1. In this embodiment, it is preferably a threaded connection. A gap is left between the two straight plates 22 for placing the limit block 19. At the same time, the two straight plates 22 can limit the position of the limit block 19. The limit block 19 is detachably fixedly connected to the side of the side plate 21, that is, a plurality of threaded holes are provided on the side plate 21, a plurality of threaded holes are provided on the side of the straight plate 22 facing the side plate 21, and a plurality of threaded holes are also provided on the side of the limit block 19 facing the side plate 21, so that the limit block 19 can be threadedly connected to the side plate 21 through bolts, and the straight plate 22 can be threadedly connected to the side plate 21. Preferably, the apertures of the threaded holes of the side plate 21, the straight plate 22, and the limit block 19 are the same, so that the distance between the two straight plates 22 in the length direction of the support table 10 can be adjusted, so that a limit block 19 within a certain width range can be accommodated between the two straight plates 22; the lower surface of the straight plate 22 abuts against the upper surface of the connecting block 12 to further fix the connecting block 12 and improve the stability of the connecting block 12 on the support table 10.
[0036] Specifically, when the operator uses the limit block 19, since the angle of the lens 1 needs to be changed more, the shapes of the limit blocks 19 to be used are more. Increasing the contact area at the contact between the limit block 19 and the calibration block 15 can further fix the position of the calibration block 15, and then fix the position of the light pipe 6, so as to improve the position when the light reflected from the light pipe 6 irradiates on the workbench 9.
[0037] Furthermore, in order to improve the position accuracy of the light reflected from the light pipe 6 when irradiating on the workbench 9, in this embodiment, the lens 1 is further provided with a light incident part 23 to increase the intensity of the light entering the lens 1. The light incident part 23 is fixedly connected to the lens 1, and the light incident part 23 is communicated with the incident port 3 of the lens 1, so that light can enter from the incident port 3 of the light incident part 23. In this embodiment, the light incident part 23 can reflect the surrounding light from the incident port 3 into the lens 1. In other embodiments, the light incident part 23 can directly emit light. This embodiment does not make any limitations in this regard.
[0038] Furthermore, referring to Figure 6, when the DMD chip 5 is in the off state, it will generate directional reflected light, and the reflected light will enter the lens 1 and become unwanted stray light, which is an unavoidable phenomenon. The current solution is to blacken the inner wall surface of the lens 1 to eliminate the stray light. However, through long-term use, it is found that this solution can only eliminate a very weak part of the light, while the reflected light of the DMD chip 5 is very strong. With the passage of time and the irradiation of light, the blackened layer on the inner wall of the lens 1 will turn white, eventually forming reflection, generating a large amount of stray light and entering the effective area of the lens 1, reducing the contrast of the lens 1. With the irradiation of light, the lens 1 will generate a relatively high temperature. As the heat accumulates, the size of the lens 1 will deform, reducing the imaging quality of the lens 1. In order to effectively remove the stray light from the lens 1, a stray light elimination cavity 24 is provided inside the lens 1 housing. The entrance of the stray light elimination cavity 24 corresponds to the stray light directional reflection path of the DMD chip 5. The DMD chip 5 injects the stray light into the stray light elimination cavity 24, and the stray light elimination cavity 24 absorbs and eliminates these stray light rays, thereby achieving the effect of eliminating the stray light, enabling the required imaging light to exit from the exit port 4, and achieving the purpose of improving the contrast of the imaging of the lens 1 and the imaging quality. In this embodiment, extinction lines are provided at the bottom of the stray light elimination cavity 24. The extinction lines are perpendicular to the first optical path direction. The extinction lines can scatter the stray light reflected in the stray light elimination cavity 24 to achieve extinction. The reflection direction of the stray light always faces the closed area and will not be reflected back to the lens 1, so that the stray light will not be projected together with the light imaging the DMD chip 5, improving the contrast of the imaging of the lens 1; a black coating is provided on the inner wall of the stray light elimination cavity 24, and the black coating can strongly absorb the light effect to eliminate the stray light or reduce the light effect scattering.
[0039] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to embrace all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention. Any reference signs in the claims should not be regarded as limiting the claims involved.
[0040] In addition, it should be understood that although this specification is described according to the embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A lens angle adjustment mechanism, comprising a lens (1) and a light transmission cylinder (6), the lens (1) is provided with an exit port (4), the lens (1) is fixedly connected to the light transmission cylinder (6), and the exit port (4) of the lens (1) communicates with the light transmission cylinder (6), characterized in that: It further includes a support frame (7), the support frame (7) is provided with a first accommodation hole (11), the light passing cylinder (6) passes through the first accommodation hole (11), and the area of the first accommodation hole (11) is larger than the bottom area of the light passing cylinder (6); A correction block (15) is further provided on the support frame (7), the correction block (15) is provided with a fixing hole (17), the light passing cylinder (6) passes through the fixing hole (17) and is fixedly connected to the hole wall of the fixing hole (17), the correction block (15) is movably connected to the upper surface of the support frame (7), a limiting block (19) is further provided on the support frame (7), the limiting block (19) is detachably connected to the support frame (7) through an adapter frame (20), the limiting block (19) abuts against the correction block (15), and the limiting block (19) is used to limit the position of the correction block (15).
2. The lens angle adjustment mechanism according to claim 1, characterized in that, The adapter frame (20) includes a side plate (21) and two straight plates (22), the side plate (21) is vertically placed and fixedly connected to the side surface of the support frame (7), the two straight plates (22) are horizontally placed, and the two straight plates (22) are respectively detachably and fixedly connected to the side surface of the side plate (21) facing the lens (1). A gap is left between the two straight plates (22) for placing the limiting block (19), and the limiting block (19) is detachably and fixedly connected to the side surface of the side plate (21).
3. A lens angle adjustment mechanism according to claim 2, wherein The support frame (7) is movably connected to the correction block (15) through a connecting block (12), the connecting block (12) is located between the support frame (7) and the correction block (15), the connecting block (12) is provided with a second accommodation hole (18), and the light passing cylinder (6) sequentially passes through the fixing hole (17), the second accommodation hole (18) and the first accommodation hole (11).
4. A lens angle adjustment mechanism according to claim 3, characterized in that, The connecting block (12) is provided with a plurality of first threaded holes (13), the support frame (7) is provided with four second threaded holes (14), the connecting block (12) and the support frame (7) are threadedly connected by a bolt, the correction block (15) is provided with a plurality of third threaded holes (16), and the connecting block (12) and the correction block (15) are threadedly connected by a bolt.
5. The lens angle adjustment mechanism according to claim 3, characterized in that The lower surface of the straight plate (22) abuts against the upper surface of the connecting block (12), and the side surfaces of the two straight plates (22) abut against the side surfaces of the limiting block (19).
6. The lens angle adjustment mechanism according to claim 1, wherein The lens (1) is further provided with a light incident part (23), the lens (1) is provided with an incident port (3), the light incident part (23) is fixedly connected to the lens (1), and the light incident part (23) is communicated with the incident port (3).
7. A lens angle adjustment mechanism according to claim 1, characterized in that, A stray light elimination cavity (24) is arranged in the lens (1) body, and the entrance of the stray light elimination cavity (24) corresponds to the stray light directional reflection path of the DMD chip (5) in the lens (1).
8. A lens angle adjustment mechanism according to claim 7, characterized in that, The bottom of the stray light elimination cavity (24) is provided with light extinction lines.
9. The lens angle adjustment mechanism according to claim 8, characterized in that, The light extinction lines are perpendicular to the incident light direction.
10. A lens angle adjustment mechanism according to claim 7, characterized in that, The inner wall of the stray light elimination cavity (24) is provided with a black coating.