Small-size lens field lens switching structure

Abstract

The utility model discloses a small-volume lens field lens switching structure, which comprises a lens shell, the lens shell comprises an incident part and a reflecting part, the incident part of the lens shell is provided with an incident port, the reflecting part of the lens shell is provided with a reflecting port and an emergent port, a DMD chip is arranged at the position, corresponding to the reflecting port, of the outer side of the lens shell, and the DMD chip is connected with the emergent port. The incident part and the DMD chip are eccentrically arranged, a reflecting mirror assembly and a conversion piece are arranged in the lens shell, the reflecting mirror assembly and the conversion piece are fixedly connected with the lens shell, the surface of the conversion piece faces the DMD chip, a first light path is formed by a light path from the incident port to the DMD chip through the conversion piece, and a second light path is formed by a light path from the incident port to the DMD chip through the conversion piece. A light path from the DMD chip to the exit port forms a second light path, and the first light path and the second light path are eccentrically arranged.

Description

Technical Field

[0001] The utility model belongs to the processing field of lens imaging, and specifically relates to a small-volume lens field lens adapter structure. Background Technique

[0002] In a laser direct writing lithography system, the most core part is the DMD chip. When the DMD chip is in the on state, the imaging light passes through the lens and then forms an image.

[0003] The prior art usually adopts an imaging structure in the form of a cube, that is, the incident light enters the imaging structure through reflection from the incident direction, is reflected by the reflecting mirror in the imaging structure to the DMD chip, forms imaging light after being processed by the DMD chip, and then reflects the imaging light to the imaging device to finally form an image; and the finally formed incident light and imaging light are on the same plane and the imaging light will contact the incident light when it exits, which not only makes the imaging structure occupy a large space, but also causes the imaging light to be contaminated. Content of the Utility Model

[0004] The purpose of the utility model is to provide a small-volume lens field lens adapter structure to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solutions:

[0006] A small-volume lens field lens adapter structure includes a lens housing, the lens housing includes an incident part and a reflection part, the incident part of the lens housing is provided with an incident port, the reflection part of the lens housing is provided with a reflection port and an exit port, and a DMD chip is arranged outside the lens housing corresponding to the position of the reflection port;

[0007] The incident part and the DMD chip are eccentrically arranged. A reflecting mirror assembly and a conversion member are arranged inside the lens housing. The reflecting mirror assembly, the conversion member and the lens housing are fixedly connected, and the surface of the conversion member faces the DMD chip;

[0008] The optical path from the incident port through the conversion member to the DMD chip forms a first optical path, and the optical path from the DMD chip to the exit port forms a second optical path. The first optical path and the second optical path are eccentrically arranged.

[0009] As a further technical solution, the reflecting mirror assembly includes a reflecting mirror, and the reflecting mirror is installed in the incident part and is used for reflecting the incident light to the first optical path.

[0010] As a further technical solution, a first lens is fixedly arranged on the lens housing, and the first lens is installed between the reflecting mirror and the conversion member.

[0011] Further technical solution: The first lens is a plano-convex lens, and the convex surface is on the side where the first optical path exits.

[0012] Further technical solution: A layer of dielectric film is coated on the surface of the mirror.

[0013] Further technical solution: It further includes a stray light elimination cavity, and the entrance of the stray light elimination cavity corresponds to the stray light directional reflection path of the DMD chip.

[0014] Further technical solution: Extinction lines are provided at the bottom of the stray light elimination cavity.

[0015] Further technical solution: The extinction lines are perpendicular to the direction of the first optical path.

[0016] Further technical solution: The inner wall of the stray light elimination cavity is provided with a black coating.

[0017] Advantages of the present utility model: The incident part of the lens housing and the DMD chip are eccentrically arranged, reducing the space occupied by this structure. By eccentrically arranging the first optical path and the DMD chip, the space utilization rate is further improved; by making the conversion part face the DMD chip, when the incident angle of the light from the conversion part to the DMD chip is constant, the distance between the DMD chip and the conversion part can be reduced, realizing a dense arrangement of lenses in a smaller space.

[0018] Other features and advantages of the present utility model will be described in detail in the subsequent specific implementation part. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 : Schematic diagram of the overall structure of the present utility model.

[0020] Figure 2 : Front view of the overall structure of the present utility model.

[0021] Figure 3 : Bottom view of the overall structure of the present utility model.

[0022] Figure 4 : First cross-sectional view of the present utility model.

[0023] Figure 5 : Second cross-sectional view of the present utility model.

[0024] Figure 6 : Light ray diagram when the DMD chip of the present utility model is working.

[0025] Figure 7 : Light ray diagram when the DMD chip of the present utility model stops working.

[0026] Figure 8 : Side view of the overall structure of the present utility model.

[0027] Figure 9 : Structural diagram when the present utility model is arranged.

[0028] Reference numerals in the drawings: 1, lens housing; 11, incident part; 12, reflection part; 2, incident port; 3, reflection port; 4, exit port; 5, support device; 6, DMD chip; 7, mirror; 8, conversion part; 9, first lens; 13, stray light elimination cavity; 14, protrusion; 15, avoidance position. Specific embodiments

[0029] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model.

[0030] Please refer to Figures 1-9 ; This embodiment discloses a small-volume lens field lens adapter structure:

[0031] A small-volume lens field lens adapter structure includes a lens housing 1. The lens housing 1 is used to protect and fix the optical elements inside the lens, which not only plays a role in protecting the internal precision optical elements, but also undertakes the functions of supporting, positioning, and adjusting the optical elements; the lens housing 1 includes an incident part 11 and a reflection part 12. The reflection part 12 is in the shape of a cuboid, the incident part 11 is installed on the side surface of the cuboid, and the incident part 11 is eccentrically arranged with the central axis of this side surface of the reflection part 12. The incident part 11 is provided with an incident port 2, and the reflection part 12 is provided with a reflection port 3 and an exit port 4. The reflection port 3 and the exit port 4 are respectively located on the upper surface and the lower surface of the cuboid reflection part 12, and the central axes of the reflection port 3 and the exit port 4 are collinear. A mirror assembly and a lens assembly are also arranged inside the reflection part 12 of the lens housing 1. The mirror assembly can adjust the path of light and reduce space usage. The mirror assembly and the lens assembly are respectively fixedly connected to the lens housing 1. The fixed connection between the mirror assembly and the lens assembly requires determining the precise positions of the mirror assembly and the lens assembly; a DMD chip 6 is arranged at the position corresponding to the reflection port 3 on the outside of the lens housing 1. In order to support the gravity of the DMD chip 6 and limit the position of the DMD chip 6, in this embodiment, the lens housing 1 is also provided with a support device 5. The support device 5 and the lens housing 1 can have various connection relationships. In this embodiment, the support device 5 and the lens housing 1 are detachably connected by bolts, and the DMD chip 6 is installed on the support device 5; the mirror assembly includes a mirror 7, and a layer of dielectric film is coated on the surface of the mirror 7 to improve the high reflectivity of the mirror 7; the lens assembly includes a first lens 9. The first lens 9 is a plano-convex lens, and the convex surface is on the side where the incident light exits, that is, the side away from the mirror 7 is the convex surface, so as to concentrate the light reflected from the mirror 7.

[0032] A conversion component 8 is further provided inside the lens housing 1. The surface of the conversion component 8 faces the DMD chip 6. The optical path from the incident port 2 to the conversion component 8 forms a first optical path, and the optical path from the DMD chip 6 to the exit port 4 forms a second optical path. The first optical path sequentially passes through the mirror 7, the first lens 9, and the conversion component 8 from the incident port 2 and reaches the DMD chip 6. The second optical path transmitted from the DMD chip 6 passes through the exit port 4 to form an image; the first optical path and the second optical path are eccentrically arranged.

[0033] The conversion component 8 and the DMD chip 6 are eccentrically arranged. Assuming that the incident angle into the DMD chip 6 is 24 degrees, when the angle is constant, the closer the distance between the conversion component 8 and the DMD chip 6, the smaller the occupied space. Therefore, on the one hand, the eccentrically arranged DMD chip 6 and the conversion component 8 further reduce the space occupation ratio and improve the space utilization rate. On the other hand, the first optical path and the second optical path are misaligned, so that when the imaging light enters the exit port 4, it maintains a relative distance from the incident light, that is, the first optical path and the second optical path are misaligned.

[0034] Specifically, referring to Figures 1-6 , the first optical path enters from the incident port 2, is reflected by the mirror 7 to change the direction of the first optical path and reaches the first lens 9. Since the first lens 9 is a plano-convex lens, the first optical path is converged for the first time and reaches the conversion component 8. The conversion component 8 changes the direction of the first optical path again and reaches the DMD chip 6. After the imaging light is formed on the DMD chip 6, it is reflected out from the reflection port 3 along the second optical path. The surface of the conversion component 8 faces the DMD chip 6, and the first optical path and the second optical path are eccentrically arranged.

[0035] Furthermore, when the DMD chip 6 is in the off state, it will generate directed reflected light, which will enter the lens and become unwanted stray light. This is an inevitable phenomenon. The current solution is to blacken the inner wall surface of the lens to eliminate the stray light. However, through long-term use, it is found that this solution can only eliminate a very weak part of the light. The reflected light of the DMD chip 6 is very strong. With the passage of time and the irradiation of light, the blackened layer on the inner wall of the lens will turn white, eventually forming reflection, generating a large amount of stray light and entering the effective area of the lens, reducing the lens contrast. With the irradiation of light, the lens will generate relatively high heat. As the heat accumulates, the size of the lens will deform, reducing the imaging quality of the lens. In order to effectively remove the stray light from the lens, a stray light elimination cavity 13 is provided in the lens housing 1. The entrance of the stray light elimination cavity 13 corresponds to the stray light directional reflection path of the DMD chip 6. The DMD chip 6 injects the stray light into the stray light elimination cavity 13, and the stray light elimination cavity 13 absorbs and eliminates these stray light rays, thereby achieving the effect of eliminating the stray light, enabling the required imaging light to exit from the exit 4, and achieving the purpose of improving the contrast of the lens imaging and the imaging quality. In this embodiment, extinction lines are provided at the bottom of the stray light elimination cavity 13. The extinction lines are perpendicular to the first optical path direction. The extinction lines can scatter the stray light reflected in the stray light elimination cavity 13 to achieve extinction. The reflection direction of the stray light always faces the enclosed area and will not be reflected back to the lens, so that the stray light will not be projected together with the light imaging the DMD chip 6, improving the contrast of the lens imaging; a black coating is provided on the inner wall of the stray light elimination cavity 13, and the black coating can strongly absorb the light effect to eliminate the stray light or reduce the light effect scattering.

[0036] In another embodiment, referring to Figures 8-9 , to achieve the effect of lens close packing and further reduce the space occupied by the lens, a protrusion 14 is provided at one end of the reflection part 12, and an avoidance position 15 is provided at the other end of the reflection part 12. The protrusions 14 of two juxtaposed reflection parts 12 are adapted to the avoidance positions 15, which can further reduce the space occupied by the juxtaposed reflection parts 12.

[0037] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to embrace all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0038] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims

1. A small-volume lens field lens adapter structure, comprising a lens housing (1), the lens housing (1) includes an incident portion (11) and a reflection portion (12), an incident port (2) is provided at the incident portion (11) of the lens housing (1), a reflection port (3) and an exit port (4) are provided at the reflection portion (12) of the lens housing (1), and a DMD chip (6) is provided at a position on the outer side of the lens housing (1) corresponding to the reflection port (3), characterized in that ； The incident part (11) is eccentrically arranged with respect to the DMD chip (6). A mirror assembly and a conversion member (8) are arranged in the lens housing (1). The mirror assembly, the conversion member (8) and the lens housing (1) are fixedly connected. The surface of the conversion member (8) faces the DMD chip (6). The optical path from the incident port (2), passing through the conversion member (8) and reaching the DMD chip (6) forms a first optical path, and the optical path from the DMD chip (6) to the exit port (4) forms a second optical path. The first optical path and the second optical path are eccentrically arranged.

2. The small-volume lens field lens adapter structure according to claim 1, wherein The mirror assembly includes a mirror (7). The mirror (7) is installed in the incident part (11), and the mirror (7) is used to reflect incident light onto the first optical path.

3. A small-volume lens field lens adapter structure according to claim 2, characterized in that, The lens housing (1) is fixedly provided with a first lens (9). The first lens (9) is installed between the mirror (7) and the conversion member (8).

4. A small-volume lens field lens adapter structure according to claim 3, characterized in that The first lens (9) is a plano-convex lens, and the convex surface is on the side where the first optical path exits.

5. The small-volume lens field lens adapter structure according to claim 2, characterized in that, A layer of dielectric film is coated on the surface of the mirror (7).

6. The small-volume lens field lens adapter structure according to claim 1, characterized in that It further includes a stray light elimination cavity (13). The entrance of the stray light elimination cavity (13) corresponds to the stray light directional reflection path of the DMD chip (6).

7. A small-volume lens field lens adapter structure according to claim 6, characterized in that, The bottom of the stray light elimination cavity (13) is provided with extinction lines.

8. A small-volume lens field lens adapter structure according to claim 7, characterized in that, The extinction lines are perpendicular to the direction of the first optical path.

9. A small-volume lens field lens adapter structure according to claim 6, wherein, The inner wall of the stray light elimination cavity (13) is provided with a black coating.

Images