Wafer box carrying structure and manual opening and crown block opening comprising wafer box carrying structure

Abstract

The utility model provides a wafer box carrying structure and a manual opening and a crown block opening comprising the same, which solve the problems of complex structure, large volume, unstable operation and inconvenience in maintenance of the existing transportation mechanism, and adopt the scheme that the wafer box carrying structure comprises a horizontal base, a multi-axis driving structure arranged in the base and a bearing platform, the height direction of the base serves as the Z axis, a guide groove distributed along the X axis is formed in the top of the base, the driving structure comprises a first driving piece distributed along the X axis and a second driving piece distributed along the Z axis, and the first driving piece comprises a first guide rail with the X axis as the track direction, a sliding block conducting servo motion through the guide rail and a mounting plate fixed to the sliding block. The second driving part is arranged on the mounting plate and comprises a second guide rail with the Z axis as the track direction, a rack connected to the second guide rail in a sliding mode and a gear rotating in a servo mode and meshed with the rack, and the bearing table is fixedly connected with the top of the rack and exposed out of the guide groove.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer cassette handling, in particular to a wafer cassette handling structure and a manual port and an overhead crane port including the same. Background Art

[0002] In semiconductor production, a wafer cassette mainly functions to place and convey wafers. To simplify transportation and minimize the risk of contamination as much as possible, chip manufacturers use wafer cassettes to handle and store wafers.

[0003] For the automated transportation of wafer cassettes, generally, servo-type handling equipment is used for operation to achieve the interaction between production equipment and OHT. However, the existing transportation mechanisms are currently complex in structure, large in volume, unstable in operation, and inconvenient to maintain. Summary of the Utility Model

[0004] The technical problem to be solved by the utility model is to overcome the defects existing in the prior art. The utility model provides a wafer cassette handling structure and a manual port and an overhead crane port including the same. The utility model uses a structure combined with a servo motor and a standard speed reducer for driving, and uses a guide rail for motion guidance to achieve the handling and rotation of the wafer cassette. The use of a rotary plunger can quickly install or replace the handling equipment onto other equipment.

[0005] To solve the above technical problem, the technical solution adopted by the utility model is: a wafer cassette handling structure, including: a horizontal base, a multi-axis drive structure disposed in the base, and a carrier. Taking the horizontal direction of the base as the X-axis and the height direction of the base as the Z-axis, a guide groove distributed along the X-axis is opened at the top of the base. The drive structure includes a first drive member distributed along the X-axis and a second drive member distributed along the Z-axis. The first drive member includes a first guide rail in the X-axis direction, a slider moving servo along the guide rail, and a mounting plate fixed on the slider. The second drive member is disposed on the mounting plate and includes a second guide rail in the Z-axis direction, a rack slidably connected to the second guide rail, and a gear servo-rotating and meshing with the rack. The back of the rack passes through the second guide rail and is fixedly connected to a rotary hollow platform. A rotary motor is fixedly connected to the bottom of the rotary hollow platform. The output end of the rotary motor passes through the rotary hollow platform and is fixedly connected to the center of the bottom of the carrier. The carrier is exposed outside the guide groove.

[0006] Further, the first drive member further includes a first servo motor, a first speed reducer, a chain, and a sprocket. The first servo motor is fixedly connected to the slider through a side plate. One end of the speed reducer is connected and driven with the first servo motor, and the other end is driven with the chain through a sprocket fixed coaxially. The chain is distributed along the X-axis and both ends are fixedly tensioned and fixed to the two ends of the inner bottom of the base.

[0007] Furthermore, the second driving member further includes a second servo motor and a second speed reducer both fixed on the mounting plate. A fixing plate is vertically fixed on the mounting plate corresponding to the output end of the second servo motor. The output end of the second servo motor passes through the fixing plate and is coaxially fixed with the gear.

[0008] Furthermore, the carrying platform is triangular and positioning pins are vertically fixed at each corner. A seat sensor is embedded outside the positioning pins. The base is also provided with a seat sensor and a photoelectric sensor corresponding to the carrying platform.

[0009] Furthermore, a mechanical limit is fixed at the end of the first guide rail inside the base.

[0010] An artificial mouth includes: the wafer cassette handling structure as described above.

[0011] A crane mouth includes: the wafer cassette handling structure as described above. Furthermore, an anti-tipping fence is vertically fixed around the base corresponding to the wafer cassette handling structure.

[0012] Compared with the prior art, the beneficial effects of the present utility model include: the driving members in the two bases can use the carrying platform to carry and rotate the wafer cassette back and forth between the OHT docking port and the production equipment docking port. At the same time, seat sensors and photoelectric sensors are installed at the docking ports of the bases to confirm the wafer cassette, and an anti-tipping device is installed at the front end of the base for protection. The overall handling device can quickly realize the installation and replacement with the production equipment. After the handling equipment fails or reaches the service life, the entire handling module can be replaced and iterated. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The disclosure of the present utility model will be described with reference to the accompanying drawings. It should be understood that the drawings are only for illustrative purposes and are not intended to limit the protection scope of the present utility model. In the drawings, the same reference numerals are used to refer to the same components. Among them:

[0014] Figure 1 Schematically shows a schematic diagram of the wafer cassette handling structure in a crane mouth according to an embodiment of the present utility model;

[0015] Figure 2 Schematically shows a schematic diagram of the first driving member in a crane mouth according to an embodiment of the present utility model;

[0016] Figure 3 Schematically shows a schematic diagram of the second driving member in a crane mouth according to an embodiment of the present utility model;

[0017] Figure 4Schematically shows a schematic diagram of a wafer cassette handling structure in a manual mouth according to an embodiment of the present invention;

[0018] Figure 5 Schematically shows a schematic diagram of a first driving member in a manual mouth according to an embodiment of the present invention;

[0019] Figure 6 Schematically shows a schematic diagram of a second driving member in a manual mouth according to an embodiment of the present invention.

[0020] Reference numerals in the figure: 1, base; 2, carrier table; 3, first guide rail; 4, slider; 5, mounting plate; 6, second guide rail; 7, rack; 8, gear; 9, guide groove; 10, first servo motor; 11, first reducer; 12, chain; 13, sprocket; 14, second servo motor; 15, second reducer; 16, fixing plate; 17, anti-tipping fence; 18, driving structure; 19, side plate; 20, rotating hollow platform; 21, rotating motor; 23, positioning pin; 24, seating sensor; 25, photoelectric sensor; 26, first driving member; 27, second driving member; 28, mechanical limit. Detailed implementation manners

[0021] It is easy to understand that according to the technical solution of the present invention, without changing the essential spirit of the present invention, those of ordinary skill in the art can propose various interchangeable structural ways and implementation manners. Therefore, the following detailed implementation manners and the accompanying drawings are only exemplary descriptions of the technical solution of the present invention, and should not be regarded as the whole of the present invention or as a limitation or restriction on the technical solution of the present invention.

[0022] According to an embodiment of the present invention in combination with Figures 1-6 shown.

[0023] Example 1

[0024] As Figures 1-3As shown, for the wafer cassette handling structure in this application, taking the overhead crane opening as an example, the specific structure includes: a horizontal base 1, a multi-axis drive structure 18 placed inside the base 1, and a carrier 2. Taking the horizontal direction of the base 1 as the X-axis and the height direction of the base 1 as the Z-axis, a guide groove 9 distributed along the X-axis is opened at the top of the base 1. The drive structure 18 includes a first drive member 26 distributed along the X-axis and a second drive member 27 distributed along the Z-axis. The first drive member 26 includes a first guide rail 3 in the X-axis direction, a slider 4 servo-moving along the guide rail, and a mounting plate 5 fixed on the slider 4. The second drive member 27 is arranged on the mounting plate 5, and it includes a second guide rail 6 in the Z-axis direction, a rack 7 slidably connected to the second guide rail 6, and a gear 8 servo-rotating and meshing with the rack 7. The back of the rack 7 passes through the second guide rail 6 and is fixedly connected to a rotating hollow platform 20. A rotating motor 21 is fixedly connected to the bottom of the rotating hollow platform 20. The output end of the rotating motor 21 passes through the rotating hollow platform 20 and is fixedly connected to the center of the bottom of the carrier 2. The carrier 2 is exposed outside the guide groove 9.

[0025] For the further structural refinement of the two drive members, the first drive member 26 further includes a first servo motor 10, a first reducer 11, a chain 12, and a sprocket 13. The first servo motor 10 is fixedly connected to the slider 4 through a side plate 19. One end of the reducer is connected and driven to the first servo motor 10, and the other end is driven by the sprocket 13 fixed coaxially to the chain 12. The chain 12 is distributed along the X-axis and the two ends are fixedly tensioned and fixed to the two ends of the inner bottom of the base 1. A mechanical limit 28 is also fixed at the end of the first guide rail 3 inside the base 1. The second drive member 27 further includes a second servo motor 14 and a second reducer 15 both fixed on the mounting plate 5. A fixing plate 16 is also vertically fixed on the mounting plate 5 at the corresponding position of the output end of the second servo motor 14. The output end of the second servo motor 14 passes through the fixing plate 16 and is coaxially fixed to the gear 8.

[0026] For the carrier 2, the carrier 2 is triangular and a positioning pin 23 is vertically fixed at each corner. A seat sensor 24 is also embedded outside the positioning pin 23. A seat sensor 24 and a photoelectric sensor 25 corresponding to the carrier 2 are also provided on the base 1.

[0027] Through the above structural description, for the first drive member 26 on the X-axis, after the output of the first servo motor 10 is decelerated and rotated by the first reducer 11, it drives the sprocket 13 to drive on the tensioned chain 12, thereby indirectly realizing the sliding of the slider 4 on the first guide rail 3, that is, realizing the servo movement of the wafer cassette on the carrier 2 in the X-axis direction.

[0028] For the second driving member 27, it is arranged on the mounting plate 5 fixed to the slider 4. It rotates after being output by the second servo motor 14 and decelerated by the second speed reducer 15, and then drives the gear 8 to rotate in a positioned manner on the fixed plate 16. Subsequently, the rack 7 meshing with the gear 8 can drive the entire carrier table 2 to slide on the second guide rail 6, that is, to achieve the servo motion of the carrier table 2 on the Z-axis.

[0029] Similarly, for the convenience of docking the wafer cassette on the carrier table 2, a rotating motor 21 is additionally provided at the bottom of the carrier table 2 of this application. By cooperating with the rotating hollow platform 20, the carrier table 2 can achieve servo steering with the Z-axis as the axis. The positioning of the wafer cassette depends on the triangular positioning pins 23, which is stable and reliable. The docking process is realized by the seating sensors 24 and photoelectric sensors 25 on the carrier table 2 and the base 1.

[0030] The maximum running speed of this handling device is 0.8 m / s, and the vibration value during the transportation of the wafer cassette is below 0.5 G. Through the handling and transportation of the handling device, the intersection of the production equipment and the OHT is realized, improving the production efficiency and the yield rate of the equipment. The handling device uses a rotating plunger to achieve rapid installation and replacement with the production equipment. After the handling equipment fails or reaches its service life, the entire handling module can be quickly replaced and iterated.

[0031] Embodiment 2

[0032] In this embodiment, the specific application scenario is the manual port. Similarly, this manual port also includes the wafer cassette handling structure that is the same as the structure of the overhead crane port described above.

[0033] The technical scope of the present utility model is not limited to the content described above. Those skilled in the art can make various deformations and modifications to the above embodiments without departing from the technical idea of the present utility model, and these deformations and modifications should all fall within the protection scope of the present utility model.

Claims

1. A wafer cassette handling structure, characterized in that, Comprising: A horizontal base, a multi-axis drive structure disposed within the base, and a carrier table. Taking the horizontal direction of the base as the X-axis and the height direction of the base as the Z-axis, a guide groove distributed along the X-axis is provided at the top of the base. The drive structure includes a first drive member distributed along the X-axis and a second drive member distributed along the Z-axis. The first drive member includes a first guide rail in the X-axis direction, a slider servo-moving along the guide rail, and a mounting plate fixed on the slider. The second drive member is disposed on the mounting plate and includes a second guide rail in the Z-axis direction, a rack slidably connected to the second guide rail, and a gear servo-rotating and meshing with the rack. The back of the rack passes through the second guide rail and is fixedly connected to a rotating hollow platform. A rotating motor is fixedly connected to the bottom of the rotating hollow platform. The output end of the rotating motor passes through the rotating hollow platform and is fixedly connected to the center of the bottom of the carrier table. The carrier table is exposed outside the guide groove.

2. The wafer cassette handling structure according to claim 1, wherein: The first drive member further includes a first servo motor, a first speed reducer, a chain, and a sprocket. The first servo motor is fixedly connected to the slider through a side plate. One end of the speed reducer is connected to the first servo motor for transmission, and the other end is transmitted through a sprocket coaxially fixed to the chain. The chain is distributed along the X-axis and is fixedly tensioned at both ends corresponding to the inner bottom ends of the base.

3. The wafer cassette handling structure according to claim 1, wherein: The second drive member further includes a second servo motor and a second speed reducer both fixedly mounted on the mounting plate. A fixing plate is vertically fixed on the mounting plate at the corresponding position of the output end of the second servo motor. The output end of the second servo motor passes through the fixing plate and is coaxially fixed to the gear.

4. The wafer cassette handling structure according to claim 1, wherein: The carrier table is triangular and a positioning pin is vertically fixed at each corner. A seating sensor is embedded outside the positioning pin. A seating sensor corresponding to the carrier table and a photoelectric sensor are also provided on the base.

5. A wafer cassette handling structure according to claim 1, characterized in that: A mechanical limit is also fixed at the end of the first guide rail inside the base.

6. An artificial mouth, characterized in that, Comprising: The wafer cassette handling structure according to any one of claims 1-5.

7. A crane opening, characterized in that, Comprising: The wafer cassette handling structure according to any one of claims 1-5.

8. The overhead crane inlet according to claim 7, characterized in that: An anti-tipping fence is vertically fixed around the base.

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