Wet processing system

Abstract

The utility model provides a wet processing system which comprises wet processing equipment, a separating mechanism, a heating mechanism, a first water inlet pipe, an exhaust main pipe and a first exhaust branch pipe, the exhaust main pipe is connected between the wet processing equipment and the separating mechanism and used for outputting waste gas generated by a wet process to the separating mechanism, and the separating mechanism is used for separating hydrogen in the waste gas and heating the hydrogen to the first water inlet pipe. The first exhaust branch pipe is connected between the separation mechanism and the heating mechanism and used for conveying hydrogen to the heating mechanism, the heating mechanism can burn hydrogen to heat water, and the first water inlet pipe is connected between the heating mechanism and the wet processing equipment and used for conveying heated water to the wet processing equipment. According to the wet processing system disclosed by the utility model, the separation mechanism is connected to the exhaust manifold communicated with the wet processing equipment, the exhaust gas is separated to obtain the hydrogen, and the hydrogen is used for heating the water required by the reaction, so that the recovery treatment and reutilization of the exhaust gas are realized, and the reduction of energy consumption and the reduction of environmental pollution are facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell production equipment, and more specifically, to a wet processing system. Background Art

[0002] In the related art, the production process of photovoltaic cells includes a wet process. There are usually two treatment means for the waste gas generated by the wet process in the prior art. One is to collect and centrally treat it after unified collection, and the other is to directly discharge it without treatment. Summary of the Utility Model

[0003] The utility model provides a new technical solution for a wet processing system, which can at least solve the problem that the waste gas is difficult to treat in the wet process of the prior art.

[0004] The utility model provides a wet processing system, including: a wet processing device, a separation mechanism, a heating mechanism, a first water inlet pipe, an exhaust main pipe, and a first exhaust branch pipe. The exhaust main pipe is connected between the wet processing device and the separation mechanism for outputting the waste gas generated by the wet process to the separation mechanism. The separation mechanism is used to separate hydrogen in the waste gas. The first exhaust branch pipe is connected between the separation mechanism and the heating mechanism for conveying hydrogen to the heating mechanism. The heating mechanism can burn hydrogen to heat water. The first water inlet pipe is connected between the heating mechanism and the wet processing device for conveying the heated water to the wet processing device.

[0005] Optionally, the wet processing system further includes: a second exhaust branch pipe, which communicates with the separation mechanism for centrally recovering the waste gas after separating hydrogen.

[0006] Optionally, the separation mechanism includes: a gas tank, which has a first exhaust port and a second exhaust port. The first exhaust port is higher than the second exhaust port. The first exhaust port communicates with the first exhaust branch pipe, and the second exhaust port communicates with the second exhaust branch pipe.

[0007] Optionally, the separation mechanism includes; a plurality of gas tanks arranged in sequence. Each gas tank has a first inlet port, a first exhaust port, and a second exhaust port. The first exhaust port is higher than the second exhaust port. Among adjacent two gas tanks, the first exhaust port of the upstream gas tank communicates with the first inlet port of the downstream gas tank. The first inlet port of the uppermost upstream gas tank communicates with the exhaust main pipe. The first exhaust port of the lowermost downstream gas tank communicates with the first exhaust branch pipe. The second exhaust port of each gas tank communicates with the second exhaust branch pipe.

[0008] Optionally, the number of the gas tanks ≥ 3.

[0009] Optionally, between two adjacent gas cylinders, a hydrogen concentration detection mechanism is provided between the first exhaust port of the upstream gas cylinder and the first intake port of the downstream gas cylinder.

[0010] Optionally, the gas cylinder has a receiving cavity extending in the vertical direction, and the exhaust main pipe, the first exhaust branch pipe, and the second exhaust branch pipe are respectively communicated with the receiving cavity.

[0011] Optionally, a hydrogen concentration detection mechanism is provided on the first exhaust branch pipe.

[0012] Optionally, the heating mechanism has a water inlet, a water outlet, and a second intake port. The water inlet is communicated with a water source through a second water inlet pipe. The second intake port is communicated with the first exhaust branch pipe, and the water outlet is communicated with the first water inlet pipe.

[0013] Optionally, the heating mechanism includes: a first heater, which is communicated with the first exhaust branch pipe and is used for burning the separated hydrogen to heat water; a second heater, which is communicated with the first heater and is used for secondarily heating the water heated by the first heater.

[0014] According to the wet processing system of the present invention, a separation mechanism is connected to the exhaust main pipe communicated with the wet processing equipment to separate the waste gas generated during the processing to obtain hydrogen, and then the separated hydrogen is used to heat the water required during the processing of the wet processing equipment, realizing the recovery treatment and reuse of the waste gas, which is not only beneficial to reducing the energy consumption required for heating, but also beneficial to reducing environmental pollution.

[0015] Through the following detailed description of the exemplary embodiments of the present invention with reference to the accompanying drawings, other features and advantages of the present invention will become clear. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings incorporated in the specification and constituting a part of the specification illustrate embodiments of the present invention and, together with the description, are used to explain the principles of the present invention.

[0017] Figure 1 is a schematic diagram of a wet processing system according to an embodiment provided by the present invention;

[0018] Figure 2 is a schematic diagram of a wet processing system according to another embodiment provided by the present invention.

[0019] REFERENCE NUMERALS

[0020] 1. Wet processing equipment; 2. Separation mechanism; 21. Gas tank; 22. First air inlet; 23. First exhaust port; 24. Second exhaust port; 3. Heating mechanism; 31. Water inlet; 32. Drain port; 33. Second air inlet; 4. First water inlet pipe; 5. Exhaust main pipe; 6. First exhaust branch pipe; 7. Second exhaust branch pipe; 8. Second water inlet pipe; 9. Hydrogen concentration detection mechanism. Detailed implementation mode

[0021] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0022] The following description of at least one exemplary embodiment is merely illustrative and in no way restricts the present invention and its application or use.

[0023] Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be regarded as part of the specification.

[0024] In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values.

[0025] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0026] The wet processing system according to an embodiment of the present invention will be specifically described below with reference to the accompanying drawings.

[0027] As Figures 1 to 2 shown, the wet processing system according to an embodiment of the present invention includes: wet processing equipment 1, separation mechanism 2, heating mechanism 3, first water inlet pipe 4, exhaust main pipe 5, and first exhaust branch pipe 6.

[0028] Specifically, the exhaust main pipe 5 is connected between the wet processing equipment 1 and the separation mechanism 2 and is used to output the waste gas generated by the wet process to the separation mechanism 2. The separation mechanism 2 is used to separate hydrogen in the waste gas. The first exhaust branch pipe 6 is connected between the separation mechanism 2 and the heating mechanism 3 and is used to transport hydrogen to the heating mechanism 3. The heating mechanism 3 can burn hydrogen to heat water. The first water inlet pipe 4 is connected between the heating mechanism 3 and the wet processing equipment 1 and is used to transport the heated water to the wet processing equipment 1.

[0029] In other words, the wet processing system according to the embodiment of the utility model is mainly composed of wet processing equipment 1, a separation mechanism 2, a heating mechanism 3, a first water inlet pipe 4, an exhaust main pipe 5, and a first exhaust branch pipe 6.

[0030] The wet processing equipment 1 can be used in the manufacturing process of silicon wafers, and the processing technology of the wet processing equipment 1 can include but is not limited to wet texturing technology, LPCVD (low pressure chemical vapor deposition) and front and back film technology. The reaction principle of the wet texturing technology is: 2NaOH+Si+H2O=Na2SiO3+2H2↑, and the reaction principle of LPCVD is SiH4(gas)=Si+H2↑, that is, the wet processing equipment 1 will produce waste gas during the processing, and the waste gas contains hydrogen.

[0031] The wet processing equipment 1 needs to be fed with hot water and exhaust gas during processing. The wet processing equipment 1 and the heating mechanism 3 can be connected through the first water inlet pipe 4. The heating mechanism 3 can heat water and then transport the heated water to the wet processing equipment 1 through the first water inlet pipe 4.

[0032] The wet processing equipment 1 and the separation mechanism 2 can be connected through the exhaust main pipe 5, so the exhaust gas discharged from the wet processing equipment 1 can enter the separation mechanism 2 through the exhaust main pipe 5. The separation mechanism 2 can separate hydrogen and other exhaust gases from the exhaust gas. The separation mechanism 2 and the heating mechanism 3 can be connected through the first exhaust branch pipe 6, so the hydrogen separated by the separation mechanism 2 can be transported to the heating mechanism 3 through the first exhaust branch pipe 6, so as to heat the water as the fuel of the heating mechanism 3.

[0033] It should be noted that, in addition to the hydrogen obtained by combustion separation, the heating mechanism 3 can also heat the water simultaneously or twice by other heating methods to ensure that the temperature of the water delivered to the wet processing equipment 1 is within a suitable range.

[0034] Therefore, according to the wet processing system of the embodiment of the utility model, the separation mechanism 2 is connected to the exhaust main pipe 5 connected to the wet processing equipment 1, the exhaust gas generated in the processing process is separated to obtain hydrogen, and the separated hydrogen is used to heat the water required in the processing of the wet processing equipment 1, thereby realizing the recovery and reuse of the exhaust gas, which is not only beneficial to reduce the energy consumption required for heating, but also beneficial to reduce environmental pollution.

[0035] According to an embodiment of the present invention, the wet processing system further comprises a second exhaust branch pipe 7, and the second exhaust branch pipe 7 is connected to the separation mechanism 2, and is used for centralized recovery of the waste gas after hydrogen separation.

[0036] That is to say, after the waste gas discharged from the wet processing device 1 is separated to obtain hydrogen, the remaining waste gas can be discharged into the centralized recovery device through the second exhaust branch pipe 7. For example, it can be discharged into the gas storage tank 21, and then these waste gases can be harmlessly treated to avoid pollution caused by directly discharging the waste gas into the atmosphere.

[0037] In some specific embodiments, the wet processing system may include a plurality of wet processing devices 1 and a plurality of separation mechanisms 2. Each wet processing device 1 can be connected to a separation mechanism 2, and the waste gas remaining after the plurality of separation mechanisms 2 separate hydrogen can be discharged into a centralized recovery device through the second exhaust branch pipe 7.

[0038] According to some other embodiments of the present invention, the separation mechanism 2 includes a gas tank 21. The gas tank 21 has a first exhaust port 23 and a second exhaust port 24. The first exhaust port 23 is higher than the second exhaust port 24. The first exhaust port 23 is connected to the first exhaust branch pipe 6, and the second exhaust port 24 is connected to the second exhaust branch pipe 7.

[0039] Specifically, as Figure 1 shown, the wet processing system can be provided with at least one gas tank 21 at least. The intake end of the gas tank 21 can be connected to the wet processing device 1 through the exhaust main pipe 5 to receive the waste gas generated by the processing.

[0040] The first exhaust port 23 and the second exhaust port 24 on the gas tank 21 can be spaced apart in the vertical direction, and the height of the first exhaust port 23 can be higher than the height of the second exhaust port 24. The waste gas generated by the processing is usually a mixed gas of hydrogen and air. Using the relative molecular mass of air as 29 and the relative molecular mass of hydrogen as 2, the downward air displacement method can be used to purify hydrogen. Hydrogen is light in mass and can be discharged from the higher first exhaust port 23, and air is heavy in mass and can be discharged from the lower second exhaust port 24.

[0041] In this embodiment, by providing the first exhaust port 23 and the second exhaust port 24 with a height difference on the gas tank 21, the separation and purification of hydrogen can be achieved by using the mass difference between hydrogen and air, which has the advantages of simple structure, easy operation and low cost.

[0042] In some specific embodiments of the present invention, the separation mechanism 2 includes a plurality of gas tanks 21 arranged in sequence. Each gas tank 21 has a first intake port 22, a first exhaust port 23 and a second exhaust port 24. The first exhaust port 23 is higher than the second exhaust port 24. Among adjacent two gas tanks 21, the first exhaust port 23 of the upstream gas tank 21 is connected to the first intake port 22 of the downstream gas tank 21. The first intake port 22 of the uppermost upstream gas tank 21 is connected to the exhaust main pipe 5. The first exhaust port 23 of the lowermost downstream gas tank 21 is connected to the first exhaust branch pipe 6, and the second exhaust port 24 of each gas tank 21 is connected to the second exhaust branch pipe 7.

[0043] Specifically, as Figure 2 shown, the separation mechanism 2 mainly consists of a plurality of gas cylinders 21. The plurality of gas cylinders 21 can be arranged in sequence along the flow direction of the waste gas. The first air inlet 22 of the most upstream gas cylinder 21 is directly connected to the wet processing equipment 1 through the exhaust main pipe 5, and the first exhaust port 23 of the most downstream gas cylinder 21 is directly connected to the heating mechanism 3 through the first exhaust branch pipe 6.

[0044] In addition, between two adjacent gas cylinders 21, the first exhaust port 23 of the upstream gas cylinder 21 and the first air inlet 22 of the downstream gas cylinder 21 can be connected through a pipeline, so as to re-purify the gas purified by the upstream gas cylinder 21, thereby increasing the hydrogen concentration in the gas output from the first exhaust port 23 of the downstream gas cylinder 21.

[0045] The second exhaust port 24 of each gas cylinder 21 is connected to the second exhaust branch pipe 7 through a pipeline, so that the waste gas generated each time of purification is uniformly recovered and processed through the second exhaust branch pipe 7.

[0046] In this embodiment, by arranging a plurality of gas cylinders 21 to purify the waste gas multiple times, hydrogen with a higher concentration can be obtained. Since hydrogen is prone to explosion when burning in a low concentration range, increasing the hydrogen concentration can make the hydrogen combustion more stable and reliable.

[0047] According to some alternative embodiments of the present utility model, the number of gas cylinders 21 ≥ 3. Arranging three or more gas cylinders 21 in series can make the hydrogen concentration in the purified gas within the most suitable combustion range, which is beneficial to further improving the stability and reliability of hydrogen combustion.

[0048] As Figure 2 shown, the separation mechanism 2 includes three gas cylinders 21, and the three gas cylinders 21 can perform three times of hydrogen purification.

[0049] According to some other embodiments of the present utility model, between two adjacent gas cylinders 21, a hydrogen concentration detection mechanism 9 is provided between the first exhaust port 23 of the upstream gas cylinder 21 and the first air inlet 22 of the downstream gas cylinder 21. Therefore, the hydrogen concentration detection mechanism 9 between two adjacent gas cylinders 21 can be used to monitor in real time the hydrogen concentration in the gas purified by the corresponding gas cylinder 21, which is beneficial to improving the safety of the system.

[0050] In some specific embodiments of the present utility model, the gas cylinder 21 has a receiving cavity extending in the vertical direction, and the exhaust main pipe 5, the first exhaust branch pipe 6 and the second exhaust branch pipe 7 are respectively connected to the receiving cavity.

[0051] Specifically, since the gas tank 21 needs to purify hydrogen by utilizing the mass difference between hydrogen and air, arranging an accommodation cavity extending in the vertical direction can enable better separation of hydrogen and air, with a simple structure and high separation efficiency.

[0052] According to some alternative embodiments of the present utility model, a hydrogen concentration detection mechanism 9 is provided on the first exhaust branch pipe 6, whereby the concentration of hydrogen in the gas input into the heating mechanism 3 can be detected in real time, which is beneficial for risk control.

[0053] In some specific embodiments of the present utility model, the heating mechanism 3 has a water inlet 31, a water outlet, and a second air inlet 33. The water inlet 31 is connected to a water source through a second water pipe 8, the second air inlet 33 is connected to the first exhaust branch pipe 6, and the water outlet is connected to the first water pipe 4.

[0054] Specifically, the water source can supply normal temperature water, and the temperature of normal temperature water is usually relatively low and cannot meet the processing requirements. The water temperature required for the wet processing equipment 1 is 60°C to 85°C.

[0055] The water provided by the water source can be transported to the heating mechanism 3 through the second water pipe 8 via the water inlet 31, and then after being heated to a suitable temperature in the heating mechanism 3, it is output through the drain port 32. Since the drain port 32 is connected to the wet processing equipment 1 through the first water pipe 4, the heated water can be transported into the wet processing equipment 1.

[0056] According to some alternative embodiments of the present utility model, the heating mechanism 3 includes a first heater and a second heater (not shown in the figure).

[0057] The first heater is connected to the first exhaust branch pipe 6 and is used to heat water by burning the separated hydrogen. The second heater is connected to the first heater and is used to perform secondary heating on the water heated by the first heater.

[0058] In other words, the heating mechanism 3 can mainly be composed of a first heater and a second heater. Among them, the first heater uses the separated and purified hydrogen as fuel to heat the water provided by the water source, and the second heater can perform secondary heating on the water heated by the first heater, so that the water temperature rises to a suitable range.

[0059] It should be noted that since it is difficult to control the concentration of the purified hydrogen, it is difficult to raise the water temperature to a suitable range only by heating water with the hydrogen after waste gas purification. Therefore, setting a second heater can better control the water temperature. In addition, compared with directly using the second heater to heat the cold water provided by the water source, setting the second heater in cooperation with the first heater is beneficial for reducing the energy consumption of the second heater.

[0060] For example, the water source can supply water at 25°C. The first heater can roughly heat the water to 50°C, and then it can be secondarily heated by the second heater to heat the water to 80°C. Finally, the hot water enters the wet processing device 1 through the first water inlet pipe 4 as a reaction solvent, and the battery chips can be immersed in the hot water.

[0061] Optionally, the first heater can be a burner, and the burner can burn hydrogen to generate heat energy. The second heater can be a water heater, and the water heater can convert electrical energy into heat energy.

[0062] Preferably, the burner can be a low-temperature catalytic burner, which has the advantages of low ignition temperature, low energy consumption, easy combustion stability, high purification efficiency, and low pollutant emission levels.

[0063] All in all, for the wet processing system of the embodiment of the present invention, a separation mechanism 2 is connected at the exhaust main pipe 5 communicated with the wet processing device 1 to separate the waste gas generated during the processing to obtain hydrogen, and then the separated hydrogen is used to heat the water required during the processing of the wet processing device 1, realizing the recovery treatment and reuse of the waste gas, which is not only beneficial to reducing the energy consumption required for heating, but also beneficial to reducing environmental pollution.

[0064] Although some specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for illustration purposes and not for limiting the scope of the present invention. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A wet processing system, characterized in that, Including: A wet processing device, a separation mechanism, a heating mechanism, a first water inlet pipe, an exhaust main pipe, and a first exhaust branch pipe. The exhaust main pipe is connected between the wet processing device and the separation mechanism and is used to output the exhaust gas generated by the wet process to the separation mechanism. The separation mechanism is used to separate hydrogen in the exhaust gas. The first exhaust branch pipe is connected between the separation mechanism and the heating mechanism and is used to transport hydrogen to the heating mechanism. The heating mechanism can burn hydrogen to heat water. The first water inlet pipe is connected between the heating mechanism and the wet processing device and is used to transport the heated water to the wet processing device.

2. The wet processing system according to claim 1, wherein, Also including: A second exhaust branch pipe that communicates with the separation mechanism and is used to centrally recover the exhaust gas after hydrogen separation.

3. The wet processing system according to claim 2, wherein The separation mechanism includes: An air tank having a first exhaust port and a second exhaust port. The first exhaust port is higher than the second exhaust port. The first exhaust port communicates with the first exhaust branch pipe, and the second exhaust port communicates with the second exhaust branch pipe.

4. The wet processing system according to claim 2, wherein The separation mechanism includes; Multiple air tanks arranged in sequence. Each air tank has a first inlet, a first exhaust port, and a second exhaust port. The first exhaust port is higher than the second exhaust port. Among two adjacent air tanks, the first exhaust port of the upstream air tank communicates with the first inlet of the downstream air tank. The first inlet of the uppermost upstream air tank communicates with the exhaust main pipe. The first exhaust port of the lowermost downstream air tank communicates with the first exhaust branch pipe. The second exhaust port of each air tank communicates with the second exhaust branch pipe.

5. The wet processing system according to claim 4, wherein The number of the air tanks ≥ 3.

6. The wet processing system according to claim 4, characterized in that Among two adjacent air tanks, a hydrogen concentration detection mechanism is provided between the first exhaust port of the upstream air tank and the first inlet of the downstream air tank.

7. The wet processing system according to any one of claims 3 to 6, characterized in that, The air tank has a receiving cavity extending in the vertical direction. The exhaust main pipe, the first exhaust branch pipe, and the second exhaust branch pipe communicate with the receiving cavity respectively.

8. The wet processing system according to claim 1, wherein A hydrogen concentration detection mechanism is provided on the first exhaust branch pipe.

9. The wet processing system according to claim 1, characterized in that The heating mechanism has a water inlet, a water outlet, and a second inlet. The water inlet is connected to a water source through a second water inlet pipe. The second inlet communicates with the first exhaust branch pipe. The water outlet communicates with the first water inlet pipe.

10. The wet processing system according to claim 1, wherein, The heating mechanism includes: A first heater that communicates with the first exhaust branch pipe and is used to burn the separated hydrogen to heat water; A second heater that communicates with the first heater and is used to perform secondary heating on the water heated by the first heater.

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