Slit coating device

Abstract

The utility model discloses a slit coating device and belongs to the technical field of coating. The slit coating device comprises a carrying table, a coating assembly and an air knife assembly. Wherein the carrying table is used for placing a to-be-coated part; the coating assembly is arranged above the carrying table in a sliding mode along the X axis, and the coating assembly is used for moving along the front side of the X axis so as to coat a part to be coated; the air knife assembly is connected to the front side of the coating assembly, and the air knife assembly is used for moving on the front side of the X axis before coating and releasing inert gas so as to blow and sweep the to-be-coated part and is used for releasing the inert gas so as to blow and dry a coating film coated on the to-be-coated part when resetting along the rear side of the X axis after coating. According to the slit coating device, the air knife assembly is arranged on the front side of the coating assembly, it can be guaranteed that the cleanliness of the part to be coated is high, time and labor are saved, and the coating efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, in particular to a slot coating device. Background Art

[0002] In the slot coating process, the surface cleanliness of the substrate to be coated is required to be relatively high. Even tiny contaminants on the substrate surface can easily cause holes and wire drawing phenomena in the coating film coated on the substrate surface after the coating process, thereby affecting the coating film quality and failing to ensure the coating effect.

[0003] Currently, the substrate is usually cleaned separately before coating to ensure the cleanliness of the substrate. However, the separate cleaning method is troublesome to operate, time-consuming and laborious, and reduces the coating efficiency of the substrate.

[0004] In view of the above problems, there is an urgent need for a slot coating device to solve the above problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a slot coating device, which can ensure a relatively high cleanliness of the workpiece to be coated, save time and effort, and improve the coating efficiency.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] The slot coating device includes:

[0008] A stage for placing the workpiece to be coated thereon;

[0009] A coating assembly slidably disposed above the stage along the X-axis, and the coating assembly is used to move forward along the X-axis to coat the workpiece to be coated;

[0010] An air knife assembly connected to the front side of the coating assembly, and the air knife assembly is used to move forward along the X-axis and release inert gas to purge the workpiece to be coated during coating, and is used to release inert gas to dry the coating film coated on the workpiece to be coated when resetting along the rear side of the X-axis after coating.

[0011] As an optional solution, the coating assembly includes:

[0012] A gantry, the stage is located inside the gantry, and the gantry can move along the X-axis relative to the stage;

[0013] A coating head slidably connected to the gantry along the Z-axis, and the coating head is used to move forward along the X-axis to coat the workpiece to be coated.

[0014] As an optional solution, the air knife assembly includes:

[0015] The air knife is located on the front side of the coating head, and the air knife is slidably arranged on the gantry along the Z axis. The air knife is used to release inert gas along the X axis to purge the workpiece to be coated and dry the coating film coated on the workpiece to be coated.

[0016] As an alternative, the distance between the air outlet of the air knife and the liquid outlet of the coating head in the X axis is 5 cm - 6 cm.

[0017] As an alternative, the air knife assembly further includes:

[0018] An adjustment module, one end of which is slidably connected to the gantry along the Z axis, and the other end is connected to the air knife. The adjustment module is used to adjust the angle of the air outlet of the air knife relative to the workpiece to be coated.

[0019] As an alternative, the slit coating device further includes a gas supply assembly, and the gas supply assembly includes:

[0020] An inlet pipe, one end of which is connected to a gas source, and the other end is connected to the air inlet of the air knife. The inlet pipe is used to supply inert gas into the air knife;

[0021] A heating module, which is connected to the inlet pipe and used to heat the inert gas in the inlet pipe.

[0022] As an alternative, the heating module includes:

[0023] An electric heating element, which is wound around the outer periphery of the inlet pipe. The electric heating element is used to heat the inlet pipe to heat the inert gas to a preset temperature.

[0024] As an alternative, the heating module further includes:

[0025] A heat insulation and heat preservation member, and the outer periphery of the electric heating element is provided with the heat insulation and heat preservation member.

[0026] As an alternative, the gas supply assembly further includes:

[0027] A flow controller, which is arranged at the air inlet of the inlet pipe. The flow controller is used to adjust the flow rate of the inert gas entering the air inlet.

[0028] As an alternative, the gas supply assembly further includes:

[0029] A switching valve, which is arranged at the air outlet of the inlet pipe. The switching valve is used to control the connection or blockage between the inlet pipe and the air knife.

[0030] The beneficial effects of the present utility model are:

[0031] In the slit coating device of the present utility model, by arranging the air knife assembly on the front side of the coating assembly, the air knife assembly can release inert gas before the coating assembly, so as to first purge the surface of the workpiece to be coated with the inert gas, thereby removing the minute contaminants on the surface of the workpiece to be coated, and then enabling the coating assembly to coat the workpiece to be coated, so as to ensure a relatively high cleanliness of the workpiece to be coated, and thus ensure a relatively good coating quality for the workpiece to be coated; the above process integrates the purging operation and the coating operation, and there is no need to separately clean the workpiece to be coated, the operation is simple and convenient, time-saving and labor-saving, so as to improve the coating efficiency; and, when resetting along the rear side on the X-axis after coating, at this time, the air knife assembly can release inert gas to dry the coating on the workpiece to be coated, accelerating the drying rate of the coating and achieving the purpose of rapid drying, thereby being able to further improve the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic structural view of the slit coating device (before coating) provided by the present utility model Figure 1 ;

[0033] Figure 2 is a schematic structural view of the slit coating device (at the end of coating) provided by the present utility model Figure 2 ;

[0034] Figure 3 is a schematic structural view of the slit coating device provided by the present utility model Figure 3 ;

[0035] Figure 4 is a schematic structural view of the purging process of the inert gas on the workpiece to be coated provided by the present utility model.

[0036] DESCRIPTION OF REFERENCE NUMERALS:

[0037] 10 - inert gas; 20 - coating.

[0038] 1 - base; 2 - carrier; 3 - workpiece to be coated; 31 - first end; 32 - second end;

[0039] 4 - coating assembly; 41 - coating head; 411 - liquid outlet;

[0040] 5 - air knife assembly; 51 - air knife; 512 - air outlet; 52 - adjustment module;

[0041] 6 - gas supply assembly; 61 - heating module; 611 - electric heating element; 612 - heat insulation and heat preservation member; 62 - inlet pipe; 621 - air inlet; 622 - air outlet; 63 - flow controller; 64 - switch valve. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0042] All features disclosed in this specification, or steps in all methods or processes disclosed, may be combined in any way, except for mutually exclusive features and / or steps.

[0043] Any feature disclosed in this specification, unless specifically described, may be replaced by other equivalent or similar-purpose alternative features. That is, unless specifically described, each feature is only an example of a series of equivalent or similar features. Throughout the specification, the same reference numerals indicate the same elements.

[0044] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present utility model clearer, the technical solutions of the present utility model will be further described below with reference to the accompanying drawings and through specific embodiments.

[0045] In this embodiment, a slit coating device is proposed. The slit coating device can perform slit coating on the workpiece to be coated, can ensure a relatively high cleanliness of the workpiece to be coated, thereby ensuring relatively good coating quality, and can improve the coating efficiency. Among them, the workpiece to be coated can specifically be a glass substrate, and a perovskite film can be coated on the glass substrate.

[0046] Specifically, as Figures 1 to 4 shown, the slit coating device includes a base 1, a stage 2, a coating assembly 4, and an air knife assembly 5; among them, the stage 2 is fixedly arranged on the base 1, the stage 2 is used to place the workpiece to be coated 3, and the length of the stage 2 extends along the X-axis; the coating assembly 4 is slidably arranged above the stage 2 along the X-axis, and the coating assembly 4 is used to move forward along the X-axis to coat the workpiece to be coated 3; the air knife assembly 5 is connected to the front side of the coating assembly 4, and the air knife assembly 5 is used to move forward along the X-axis at the front of the coating to release an inert gas 10 to purge the workpiece to be coated 3, and is used to release the inert gas 10 to dry the coating film 20 coated on the workpiece to be coated 3 when resetting along the rear side of the X-axis after coating. In this embodiment, the base 1 is specifically a marble base to ensure relatively high structural strength of the base 1; the inert gas 10 can specifically be nitrogen.

[0047] Compared with the prior art, the slot coating device in this embodiment is provided with an air knife assembly 5 on the front side of the coating assembly 4; the air knife assembly 5 releases an inert gas 10 before the coating assembly 4, so as to be able to blow the surface of the workpiece 3 to be coated with the inert gas 10 first, thereby removing the minute contaminants on the surface of the workpiece 3 to be coated, and then enabling the coating assembly 4 to apply a coating film 20 to the workpiece 3 to be coated, so as to ensure that the cleanliness of the workpiece 3 to be coated is relatively high, and thus ensure that the coating film 20 quality of the workpiece 3 to be coated is better; the above process integrates the blowing operation and the coating operation, and there is no need to separately clean the workpiece 3 to be coated, the operation is simple and convenient, time-saving and labor-saving, so as to be able to improve the coating efficiency; and, when resetting along the rear side on the X-axis after coating, at this time, the air knife assembly 5 can release the inert gas 10 to dry the coating film 20 coated on the workpiece 3 to be coated, accelerating the drying rate of the coating film 20 and achieving the purpose of rapid drying, so as to be able to further improve the coating efficiency.

[0048] It should be noted that when blowing before coating, the moving directions of the air knife assembly 5 and the coating assembly 4 on the X-axis are specifically as Figure 1 shown by the arrow A in; during the blowing process, the blowing process of the air knife assembly 5 on the workpiece 3 to be coated is as Figure 4 shown by the arrow C in; when drying the coating film 20 after coating, the moving directions of the air knife assembly 5 and the coating assembly 4 on the X-axis are specifically as Figure 2 shown by the arrow B in.

[0049] Specifically, as Figures 1 to 3 shown, the coating assembly 4 includes a gantry and a coating head 41; wherein, the stage 2 is located inside the gantry, and the gantry is slidably arranged on the opposite sides of the base 1 along the X-axis, so that the gantry can move relative to the stage 2 along the front side and the rear side on the X-axis; the coating head 41 is slidably connected to the gantry along the Z-axis, and the coating head 41 is used to move along the front side on the X-axis to apply a coating to the workpiece 3 to be coated. Among them, the coating head 41 is a common slot coating head 41 structure in the prior art, and here, the coating process of the coating head 41 will not be described in detail.

[0050] By making the coating head 41 slidably connected to the gantry along the Z-axis, the coating head 41 can reciprocally move relative to the gantry along the Z-axis to adjust the distance between the coating head 41 and the workpiece 3 to be coated along the Z-axis, ensuring that the distance between the coating head 41 and the workpiece 3 to be coated along the Z-axis is relatively appropriate, so as to be able to ensure that the coating film 20 effect of the coating head 41 on the workpiece 3 to be coated is better.

[0051] It should be noted that the movement of the gantry along the X-axis on the base 1 can be achieved through the motor + guide rail / guide block structure; and the sliding of the coating head 41 along the Z-axis on the gantry can be achieved through the motor + lead screw / nut structure; here, the specific structure for realizing the movement on the X-axis and Z-axis is not limited.

[0052] Furthermore, as Figures 1 to 3 shown, the air knife assembly 5 includes an air knife 51. The air knife 51 is located on the front side of the coating head 41, and the air knife 51 is slidably arranged along the Z-axis on the gantry. The air knife 51 is used to release the inert gas 10 along the X-axis to blow the workpiece to be coated 3 and dry the coating film 20 coated on the workpiece to be coated 3. Among them, the structure of the air knife 51 is basically the same as that of the coating head 41.

[0053] By connecting both the air knife 51 and the coating head 41 to the gantry, the movement of the gantry can drive the air knife 51 and the coating head 41 to move synchronously along the X-axis; on the one hand, during the movement, it can ensure that the distance between the air knife 51 and the coating head 41 on the X-axis remains unchanged, so that after the air knife 51 blows the workpiece to be coated 3, the coating head 41 can immediately coat the workpiece to be coated 3 in a timely manner, saving time and further ensuring higher coating efficiency; on the other hand, the movement of one gantry can drive the air knife 51 and the coating head 41 to move synchronously along the X-axis, saving the number of components and being beneficial to the structural compactness of the slot coating device.

[0054] By slidingly connecting the air knife 51 along the Z-axis to the gantry, the air knife 51 can reciprocally move relative to the gantry along the Z-axis to adjust the distance between the air knife 51 and the workpiece to be coated 3 on the Z-axis, ensuring that the distance between the air knife 51 and the workpiece to be coated 3 on the Z-axis is more appropriate, so as to ensure better blowing effect of the air knife 51 on the workpiece to be coated 3. Among them, the sliding of the air knife 51 along the Z-axis on the gantry can be achieved through the motor + lead screw / nut structure; here, the specific structure for realizing the movement of the air knife 51 relative to the gantry along the Z-axis is not limited.

[0055] It should be noted that the movement of the coating head 41 along the Z-axis on the gantry is independent of the movement of the air knife 51 along the Z-axis on the gantry, without interference with each other, ensuring the independence of the movement of the coating head 41 and the air knife 51 on the Z-axis, so that the moving distance of the coating head 41 on the Z-axis and the moving distance of the air knife 51 on the Z-axis can be the same or different, thereby enabling the coating head 41 and the air knife 51 to be applicable to more different working conditions, making the applicability of the entire slot coating device higher and the use more flexible and convenient.

[0056] Further, the distance between the air outlet 512 of the air knife 51 and the liquid outlet 411 of the coating head 41 in the X-axis direction is 5 cm - 6 cm. On the one hand, it can avoid the situation that the distance between the air knife 51 and the coating head 41 is too small, resulting in the coating head 41 starting to coat before the air knife 51 has finished purging the workpiece to be coated 3, so as to ensure that the workpiece to be coated 3 is coated when it is relatively clean. On the other hand, it can avoid the situation that the distance between the air knife 51 and the coating head 41 is too large, resulting in the air knife 51 having finished purging the workpiece to be coated 3 but the coating head 41 not starting to coat the purged position in a timely manner, so as to ensure that the coating head 41 can coat in a timely manner when the air knife 51 has purged the workpiece to be coated 3, saving time and making the coating efficiency higher. In this embodiment, the distance between the air outlet 512 of the air knife 51 and the liquid outlet 411 of the coating head 41 in the X-axis direction is 5 cm.

[0057] Further, as Figure 1 and Figure 2 shown, the air knife assembly 5 further includes an adjustment module 52. One end of the adjustment module 52 is slidably connected to the gantry along the Z-axis, and the other end of the adjustment module 52 is connected to the air knife 51 to move the air knife 51 relative to the gantry along the Z-axis through the adjustment module 52. The adjustment module 52 is used to adjust the angle of the air outlet 512 of the air knife 51 relative to the workpiece to be coated 3 to ensure that the purging angle of the air knife 51 with respect to the workpiece to be coated 3 is appropriate, thereby ensuring the purging effect on the workpiece to be coated 3. Among them, the adjustment module 52 may include a rotary motor or a ball head bearing to be able to rotate the air knife 51 through the rotary motor or the ball head bearing, thereby adjusting the angle of the air outlet 512 of the air knife 51 relative to the workpiece to be coated 3. Here, the specific structure of the adjustment module 52 is not limited as long as the angle of the air outlet 512 of the air knife 51 relative to the workpiece to be coated 3 can be adjusted through the adjustment module 52.

[0058] Further, as Figures 1 to 3 shown, the slot coating device further includes a gas supply assembly 6. The gas supply assembly 6 includes an inlet pipe 62 and a heating module 61. One end of the inlet pipe 62 is connected to a gas source, and the other end of the inlet pipe 62 is connected to the air inlet of the air knife 51. The inlet pipe 62 is used to supply inert gas 10 into the air knife 51. The heating module 61 is connected to the inlet pipe 62 to heat the inert gas 10 in the inlet pipe 62 so that the inert gas 10 in the inlet pipe 62 is heated to a preset temperature, that is, the inert gas 10 entering the air knife 51 is hot inert gas 10 with a certain temperature. In this embodiment, the inlet pipe 62 is specifically a stainless steel pipe.

[0059] By providing a heating module 61 capable of heating the inert gas 10, on the one hand, during purging before coating, the heated inert gas 10 at a certain temperature can be used to purge the surface of the workpiece 3 to be coated, thereby being able to dry the water molecules adsorbed on the surface of the workpiece 3 to be coated, avoiding the problem of perovskite decomposition caused by the reaction between the water molecules adsorbed on the surface of the workpiece 3 to be coated and the perovskite film coated on the workpiece 3 by the rear coating head 41 later, ensuring that the workpiece 3 to be coated is relatively dry, and thus ensuring better film coating 20 effect; on the other hand, when resetting along the rear side on the X-axis after coating, the hot inert gas 10 is used to quickly dry the film coating 20 coated on the workpiece 3, further accelerating the drying rate of the film coating 20, achieving the purpose of quickly drying the workpiece 3 to be coated, and making the coating efficiency higher.

[0060] Specifically, as Figure 2 and Figure 3 shown, the heating module 61 includes an electric heating element 611. The electric heating element 611 is wound around the outer periphery of the intake pipe 62. The electric heating element 611 is used to heat the intake pipe 62, thereby heating the inert gas 10 in the intake pipe 62 to a preset temperature. That is, the heating temperature of the intake pipe 62 can be controlled by adjusting the current magnitude in the electric heating element 611. Among them, the heating temperature of the intake pipe 62 is specifically 25°C - 100°C, and the electric heating element 611 is specifically an electric heating tape.

[0061] Furthermore, as Figure 3 shown, the heating module 61 further includes a heat insulation and heat preservation member 612. The heat insulation and heat preservation member 612 is wrapped around the outer periphery of the electric heating element 611. On the one hand, the heat insulation and heat preservation member 612 can provide a heat preservation effect for the electric heating element 611, avoiding the problem of too fast cooling of the inert gas 10 and ensuring that the inert gas 10 can maintain the preset temperature; on the other hand, the heat insulation and heat preservation member 612 can provide a heat insulation effect for the electric heating element 611, avoiding the risk of being scalded by directly contacting the electric heating element 611 and ensuring the use safety. In this embodiment, the heat insulation and heat preservation member 612 can specifically be heat insulation and heat preservation cotton.

[0062] Specifically, as Figure 3 shown, the gas supply assembly 6 further includes a flow controller 63. The flow controller 63 is arranged at the air inlet 621 of the intake pipe 62. The flow controller 63 is used to adjust the flow rate of the inert gas 10 entering the air inlet 621, so that the flow rate of the inert gas 10 entering the air knife 51 is more appropriate. Among them, the flow controller 63 can adopt a common flow control structure in the prior art, and the working principle of the flow controller 63 will not be described in detail here.

[0063] Furthermore, as Figure 3As shown, the air supply assembly 6 further includes a switching valve 64. The switching valve 64 is provided at the air outlet 622 of the intake pipe 62. The switching valve 64 is used to control the connection or disconnection between the intake pipe 62 and the air knife 51. That is, when the switching valve 64 is opened, the air outlet 622 of the intake pipe 62 is communicated with the air inlet of the air knife 51; when the switching valve 64 is closed, the air outlet 622 of the intake pipe 62 is blocked from the air inlet of the air knife 51. Among them, the switching valve 64 can adopt a common switching air valve in the prior art, and the working principle of the switching valve 64 will not be described in detail here.

[0064] The specific working process of the slit coating device in this embodiment is as follows:

[0065] During the coating process: As Figure 1 shown, the gantry drives the coating head 41 and the air knife 51 to move synchronously along the arrow A on the X-axis towards the front side, Figure 1 so that the coating head 41 and the air knife 51 move from the first end 31 to the second end 32 of the workpiece to be coated 3 on the X-axis. During this movement, before coating the workpiece to be coated 3 with the coating film 20, the workpiece to be coated 3 will be first purged by the hot inert gas 10 released by the air knife 51 located on the front side to remove the minute contaminants and adsorbed water molecules on the surface of the workpiece to be coated 3, ensuring that the workpiece to be coated 3 is relatively clean and dry; since the coating head 41 is arranged behind the air knife 51, therefore, during the movement, the coating head 41 coats the surface of the workpiece to be coated 3 that has been purged and dried by the hot inert gas 10 with the coating film 20 to achieve the purpose of coating the coating film 20 on the workpiece to be coated 3.

[0066] When the coating is completed: As Figure 2 shown, the air knife 51 and the coating head 41 are respectively moved away from the workpiece to be coated 3 along the Z-axis relative to the gantry, and the gantry drives the coating head 41 and the air knife 51 to move synchronously along the arrow B on the X-axis towards the rear side, Figure 2 so that the coating head 41 and the air knife 51 move from the second end 32 to the first end 31 of the workpiece to be coated 3 on the X-axis. During this movement, the hot inert gas 10 released by the air knife 51 is blown from the second end 32 to the first end 31 of the workpiece to be coated 3, so as to accelerate the volatilization of the solvent in the coating film 20 on the surface of the workpiece to be coated 3 through the hot inert gas 10, thereby accelerating the drying rate of the coating film 20.

[0067] Among them, during the process that the hot inert gas 10 is blown from the second end 32 to the first end 31 of the workpiece to be coated 3, the drying effect and drying rate of the coating film 20 can be ensured to be good by adjusting the moving speed of the gantry on the X-axis, the angle of the air outlet 512 of the air knife 51, and the flow rate of the inert gas 10 entering the air inlet 621 by the flow controller 63.

[0068] In the slit coating device of this embodiment, first, the hot inert gas 10 released by the air knife 51 is used to purge the surface of the workpiece to be coated 3, so as to remove the tiny contaminants and water molecules on the surface of the workpiece to be coated 3. Then, the coating assembly 4 is used to coat the workpiece to be coated 3 with the coating film 20, which can ensure better quality of the coating film 20 on the workpiece to be coated 3. Moreover, the above process integrates the purging operation and the coating operation, which is simple and convenient to operate, time-saving and labor-saving, and can improve the coating efficiency.

[0069] Furthermore, during the process of moving and resetting after the coating is completed, the hot inert gas 10 released by the air knife 51 is used to dry the coating film 20 on the surface of the workpiece to be coated 3, realizing the rapid drying of the coating film 20 and further improving the coating efficiency.

[0070] The above content is only the preferred embodiment of the present invention. For those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. The content of this specification should not be construed as a limitation to the present invention.

Claims

1. A slit coating device, characterized in that, Comprising: A stage (2) for placing a workpiece to be coated (3) thereon; A coating assembly (4) slidably disposed above the stage (2) along the X-axis, the coating assembly (4) being adapted to move forward along the X-axis to coat the workpiece to be coated (3); An air knife assembly (5) connected to the front side of the coating assembly (4), the air knife assembly (5) being adapted to move forward along the X-axis at the leading edge of coating and release an inert gas (10) to purge the workpiece to be coated (3), and being adapted to release an inert gas (10) when resetting along the rear side of the X-axis after coating to dry the coating film (20) coated on the workpiece to be coated (3).

2. The slit coating device according to claim 1, wherein The coating assembly (4) includes: A gantry, the stage (2) being located inside the gantry, and the gantry being capable of moving along the X-axis relative to the stage (2); A coating head (41) slidably connected to the gantry along the Z-axis, the coating head (41) being adapted to move forward along the X-axis to coat the workpiece to be coated (3).

3. The slot coating device according to claim 2, wherein The air knife assembly (5) includes: An air knife (51) located in front of the coating head (41), and the air knife (51) being slidably disposed on the gantry along the Z-axis, the air knife (51) being adapted to release an inert gas (10) along the X-axis to purge the workpiece to be coated (3) and to dry the coating film (20) coated on the workpiece to be coated (3).

4. The slot coating device according to claim 3, characterized in that, The distance between the air outlet (512) of the air knife (51) and the liquid outlet (411) of the coating head (41) along the X-axis is 5 cm - 6 cm.

5. The slot coating device according to claim 3, characterized in that, The air knife assembly (5) further includes: An adjustment module (52) having one end slidably connected to the gantry along the Z-axis and the other end connected to the air knife (51), the adjustment module (52) being adapted to adjust the angle of the air outlet (512) of the air knife (51) relative to the workpiece to be coated (3).

6. The slot coating device according to any one of claims 3-5, characterized in that, The slot coating device further includes a gas supply assembly (6), and the gas supply assembly (6) includes: An inlet pipe (62) having one end connected to a gas source and the other end connected to the air inlet of the air knife (51), the inlet pipe (62) being adapted to supply an inert gas (10) into the air knife (51); A heating module (61) connected to the inlet pipe (62) for heating the inert gas (10) in the inlet pipe (62).

7. The slot coating device according to claim 6, characterized in that, The heating module (61) includes: An electric heating element (611) wound around the outer periphery of the inlet pipe (62), the electric heating element (611) being adapted to heat the inlet pipe (62) to heat the inert gas (10) to a preset temperature.

8. The slot coating device according to claim 7, wherein, The heating module (61) further includes: A heat insulation member (612) with the electric heating element (611) peripherally wrapped therewith.

9. The slot coating device according to claim 6, wherein The gas supply assembly (6) further includes: A flow controller (63) disposed at the air inlet (621) of the inlet pipe (62), the flow controller (63) being adapted to adjust the flow rate of the inert gas (10) entering the air inlet (621).

10. The slit coating device according to claim 6, characterized in that, The gas supply assembly (6) further includes: A switching valve (64) is provided at the air outlet (622) of the intake pipe (62), and the switching valve (64) is used to control the connection or disconnection between the intake pipe (62) and the air knife (51).

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