Dust collection cleaning device for auxiliary chamber of single crystal furnace

Abstract

The utility model discloses a dust collection cleaning device for an auxiliary chamber of a single crystal furnace, which comprises a cleaning rod, an annular rotating wheel shaft is arranged at the top of the cleaning rod, a telescopic component is arranged on the periphery of the rotating wheel shaft, the end part, far away from the rotating wheel shaft, of the telescopic component is connected with an arc-shaped cleaning brush, and a micro dust collector is arranged at the top end of the cleaning rod. The cleaning brush is variable in diameter, short in cleaning time consumption, high in efficiency and suitable for cleaning auxiliary chambers of various sizes, floating ash / silicon slag / oxide is prevented from scattering on site to cause pollution, and the quality of single crystals is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single-crystal silicon production equipment, and particularly relates to a dust suction and cleaning device for the auxiliary chamber of a single-crystal furnace. Background Art

[0002] During the process of single-crystal pulling, the cleanliness of the inner wall of the single-crystal furnace is one of the key factors affecting crystal nucleation. The main chamber in the single-crystal furnace is mainly used for the heating reaction of silicon materials, and the crystal formed in the main chamber is lifted upward by a lifting device placed in the auxiliary chamber. During the pulling process, argon gas passes through the auxiliary chamber and flows into the main chamber. The argon gas carries the volatile substances of the reaction and moves downward along the auxiliary chamber. The residues of the volatile substances are deposited along the inner wall of the furnace chamber. If these residues of slag and dust are not cleaned in time, they will fall into the silicon materials in the main chamber during the crystal pulling process, contaminating the purity of the silicon liquid and seriously affecting the crystal nucleation quality.

[0003] The auxiliary chamber of the single-crystal furnace is a cylindrical structure, which is tall and narrow, and it is difficult to clean. Currently, the auxiliary chamber cleaning rod used to clean the auxiliary chamber in the market relies on manual up-and-down scraping to clean the auxiliary chamber. The friction force is small and it cannot clean the auxiliary chamber thoroughly and cleanly. It is easy to miss brushing and the cleaning effect is inconsistent. During the cleaning process, the residues of the volatile substances are scraped to the upper edge of the auxiliary chamber and scattered into the furnace along with the next argon gas blowing, and silicon slag / oxides are scattered on the site, and floating dust falls into the furnace, causing pollution and affecting the nucleation quality. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a dust suction and cleaning device for the auxiliary chamber of a single-crystal furnace. By setting a bearing at the top of the cleaning rod, a runner shaft, a telescopic component and a micro dust suction machine are arranged outside the bearing, realizing the rotation and telescoping of the cleaning brush, dust suction at the top of the auxiliary chamber and collection of silicon slag, and solving the above problems existing in the prior art.

[0005] To solve the above technical problems, the utility model adopts the following solutions:

[0006] A dust suction and cleaning device for the auxiliary chamber of a single-crystal furnace includes a cleaning rod. A ring-shaped runner shaft is arranged at the top of the cleaning rod. A telescopic component is arranged on the outer periphery of the runner shaft. The end of the telescopic component far away from the runner shaft is connected with an arc-shaped cleaning brush. A micro dust suction machine is arranged at the top end of the cleaning rod.

[0007] Preferably, a bearing is sleeved on the top of the cleaning rod, and the bottom end of the runner shaft is located inside the bearing and rotates inside it.

[0008] Preferably, a plurality of sliding rods are arranged at the top inner wall of the runner shaft, and a ring-shaped sliding groove is arranged at the top of the cleaning rod. The end of the sliding rod far away from the runner shaft is located in the sliding groove.

[0009] Preferably, a motor is provided at the top of the rotating wheel shaft, the mini vacuum cleaner is located at the top of the motor, and the output end of the motor is connected to the top end of the rotating wheel shaft in an inverted U shape.

[0010] Preferably, the telescopic assembly includes a receiving groove and a telescopic rod. The telescopic rod is located in the receiving groove. The telescopic end of the telescopic rod is fixedly connected to the cleaning brush, and the end of the telescopic rod away from the cleaning brush is connected to the receiving groove.

[0011] Preferably, a plurality of dust suction ports are provided on the outer periphery of the mini vacuum cleaner.

[0012] Preferably, the cleaning rod is hollow, a switch is provided at the bottom of the cleaning rod, and the mini vacuum cleaner and the motor are electrically connected to the switch through the inside of the cleaning rod.

[0013] Preferably, a slag receiving tray is provided in the middle of the cleaning rod, and the outer diameter of the slag receiving tray is larger than the inner diameter of the bottom of the secondary chamber.

[0014] The beneficial effects of the present utility model are as follows:

[0015] In the present utility model, by providing a bearing, a rotating wheel shaft, a motor and a mini vacuum cleaner at the top of the cleaning rod, the motor drives the rotating wheel shaft to rotate on the outer periphery of the bearing. At the same time, the rotating wheel shaft drives the receiving groove to rotate, and the telescopic rod assembled inside the telescopic groove drives the cleaning brush to fit against the inner wall of the secondary chamber and rotate for cleaning, realizing variable diameter of the cleaning brush. The cleaning time is short and the efficiency is high, and it is suitable for cleaning secondary chambers of multiple sizes.

[0016] The mini vacuum cleaner provided at the top of the cleaning rod reduces the floating of floating dust to the top during cleaning; the slag receiving tray provided at the bottom of the cleaning rod fits against the bottom of the secondary chamber during cleaning, forming a closed environment to prevent floating dust / silicon slag / oxide from scattering on the site and causing pollution, and improving the quality of single crystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural diagram of the present utility model;

[0018] Figure 2 is a schematic structural diagram of the present utility model from another perspective;

[0019] Figure 3 is a schematic cross-sectional view of the top of the cleaning rod of the present utility model.

[0020] Reference numerals: 1 - cleaning rod, 10 - bearing, 11 - sliding groove, 2 - rotating wheel shaft, 20 - sliding rod, 3 - receiving groove, 4 - telescopic rod, 5 - cleaning brush, 6 - slag receiving tray, 7 - mini vacuum cleaner, 70 - dust suction port, 8 - motor, 9 - switch. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] The present invention will be further described in detail below in conjunction with embodiments and the accompanying drawings. However, the implementation manners of the present invention are not limited thereto.

[0022] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0023] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, terms such as "set", "provided with", "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0024] Embodiment 1

[0025] Embodiment 1 of the present invention is a dust suction and cleaning device for the auxiliary chamber of a single crystal furnace, including a cleaning rod 1. A ring-shaped runner shaft 2 is provided at the top of the cleaning rod 1. An expansion and contraction assembly is provided on the outer periphery of the runner shaft 2. The end of the expansion and contraction assembly away from the runner shaft 2 is connected to an arc-shaped cleaning brush 5. A micro dust suction machine 7 is provided at the top end of the cleaning rod 1.

[0026] Referring to Figure 1 and Figure 2 , in this application, the runner shaft 2 provided at the top of the cleaning rod 1 enables the expansion and contraction assembly and the cleaning brush 5 to rotate electrically to clean the inner wall of the auxiliary chamber, improving the cleaning efficiency. At the same time, the expansion and contraction assembly provided on the outer periphery of the runner shaft 2 enables the cleaning brush 5 to meet the cleaning requirements of auxiliary chambers of various sizes, and enables the cleaning brush 5 to be closely attached to the inner wall of the auxiliary chamber, making the cleaning thorough; the micro dust suction machine 7 at the top of the cleaning rod 1 will adsorb the generated floating dust during the cleaning process of the cleaning brush 5, preventing the floating dust from floating towards the top of the auxiliary chamber and affecting the subsequent crystal formation quality.

[0027] In some preferred embodiments, a bearing 10 is sleeved on the top of the cleaning rod 1, and the bottom end of the runner shaft 2 is located inside the bearing 10 and rotates therein. A plurality of sliding rods 20 are provided at the top of the inner wall of the runner shaft 2, and an annular sliding groove 11 is provided at the top of the cleaning rod 1. The end of the sliding rod 20 away from the runner shaft 2 is located in the sliding groove 11.

[0028] Referring Figure 3 , the rotation of the runner shaft 2 is mainly achieved through the bearing 10. The bearing 10 provides a rotating space for the bottom end of the runner shaft 2. The sliding rods 20 connected to the inner wall of the runner shaft 2 are located in the sliding groove 11 of the cleaning rod 1, providing conditions for the rotation of the top of the runner shaft 2, enabling the effective rotation of both the bottom and top of the runner shaft 2, thereby driving the cleaning brush 5 to perform the cleaning operation. At the same time, when the runner shaft 2 rotates, it provides support for its top, ensuring its stable rotation.

[0029] In some preferred embodiments, a motor 8 is provided at the top of the runner shaft 2, the micro-vacuum cleaner 7 is located on the top of the motor 8, and the output end of the motor 8 is connected to the top end of the runner shaft 2 in an inverted U shape.

[0030] Specifically, the motor 8 provides a driving force for the rotation of the runner shaft 2, and the inverted U-shaped output end drives by bypassing the top end of the cleaning rod 1.

[0031] In some preferred embodiments, the telescopic assembly includes a receiving groove 3 and a telescopic rod 4. The telescopic rod 4 is located in the receiving groove 3. The telescopic end of the telescopic rod 4 is fixedly connected to the cleaning brush 5, and the end of the telescopic rod 4 away from the cleaning brush 5 is connected to the receiving groove 3.

[0032] Specifically, the receiving groove 3 provides an installation space for the telescopic rod 4. One end of the telescopic rod 4 is fixedly connected to the receiving groove 3, and the other end is fixedly connected to the cleaning brush 5. Thus, under the condition that the runner shaft 2 rotates, the receiving groove 3 is driven to rotate, and the receiving groove 3 then causes the telescopic rod 4 to rotate to drive the cleaning brush 5 to perform the cleaning operation.

[0033] In some preferred embodiments, a plurality of dust suction ports 70 are provided on the outer periphery of the micro-vacuum cleaner 7. The floating dust generated during the cleaning process enters the interior of the micro-vacuum cleaner 7 through the dust suction ports 70 for collection. After the cleaning is completed, only the floating dust inside the micro-vacuum cleaner 7 needs to be taken out for the next use, avoiding the floating of the floating dust to the top and affecting the subsequent crystal formation quality.

[0034] In some preferred embodiments, the cleaning rod 1 is hollow, and a switch 9 is provided at the bottom of the cleaning rod 1. The micro-vacuum cleaner 7 and the motor 8 are electrically connected to the switch 9 through the interior of the cleaning rod 1.

[0035] The cleaning rod 1 is provided with electric wires inside to connect the motor 8 and the micro vacuum cleaner 7 with the switch 9. When an external power source is connected, the micro vacuum cleaner 7 and the motor 8 are driven by the switch 9.

[0036] Example 2

[0037] This embodiment 2 is implemented on the basis of embodiment 1, and a slag receiving pan 6 is provided in the middle of the cleaning rod 1, and the outer diameter of the slag receiving pan 6 is larger than the inner diameter of the bottom of the auxiliary chamber.

[0038] The main purpose of setting the slag receiving plate 6 is to receive the silicon slag or oxide generated by the cleaning brush 5 during the cleaning process. At the same time, the slag receiving plate 6 can move up and down on the outer periphery of the cleaning rod 1, so that the slag receiving plate 6 can always be close to the bottom of the auxiliary chamber, so that the auxiliary chamber forms a closed bottom environment, and the auxiliary chamber is cleaned from top to bottom to ensure that no silicon slag is scattered outside the auxiliary chamber to cause pollution.

[0039] The working principle of the utility model is as follows: when in use, the telescopic rod 4 is kept in a retracted state, the top of the cleaning rod 1 is inserted into the top of the auxiliary chamber from the bottom thereof, and at the same time, the slag receiving plate 6 is close to the bottom end of the auxiliary chamber. When the cleaning brush 5 reaches the top of the auxiliary chamber, the telescopic rod 4 is started to work through an external controller, and the cleaning brush 5 connected to the telescopic end thereof contacts the inner wall of the auxiliary chamber. The switch 9 is manually turned on, and the switch 9 drives the micro vacuum cleaner 7 and the motor 8 to work. Under the connection between the rotating wheel shaft 2 and the bearing 10, the motor 8 drives the rotating wheel shaft 2 to rotate on the outer periphery of the bearing 10, thereby driving the storage groove 3, the telescopic rod 4 and the cleaning brush 5 to rotate. During the rotation of the cleaning brush 5, the inner wall of the auxiliary chamber is cleaned, and the cleaning efficiency is improved; at the same time, the dust suction device on the top of the motor 8 can absorb the floating dust generated during the cleaning process to reduce the floating dust from floating to the top of the auxiliary chamber; the silicon slag and oxide generated during the cleaning process fall into the slag receiving plate 6 below the bottom end of the auxiliary chamber, so as to avoid the silicon slag and oxide from falling to the crystal pulling site and causing pollution.

[0040] The above is only a preferred embodiment of the utility model and does not limit the utility model in any form. According to the technical essence of the utility model, within the spirit and principles of the utility model, any simple modification, equivalent replacement and improvement made to the above embodiment still falls within the protection scope of the technical solution of the utility model.

Claims

1. A dust suction and cleaning device for the auxiliary chamber of a single crystal furnace, characterized in that It includes a cleaning rod (1). A ring-shaped rotating wheel shaft (2) is provided at the top of the cleaning rod (1). An expansion and contraction component is provided on the outer periphery of the rotating wheel shaft (2). The end of the expansion and contraction component away from the rotating wheel shaft (2) is connected to an arc-shaped cleaning brush (5). A micro-vacuum cleaner (7) is provided at the top end of the cleaning rod (1).

2. The dust suction and cleaning device for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that, A bearing (10) is sleeved on the top of the cleaning rod (1). The bottom end of the rotating wheel shaft (2) is located inside the bearing (10) and rotates inside it.

3. The dust suction and cleaning device for the auxiliary chamber of a single crystal furnace according to claim 2, characterized in that, A plurality of sliding rods (20) are provided at the top inner wall of the rotating wheel shaft (2). A ring-shaped sliding groove (11) is provided at the top of the cleaning rod (1). The end of the sliding rod (20) away from the rotating wheel shaft (2) is located inside the sliding groove (11).

4. A dust suction and cleaning device for the auxiliary chamber of a single crystal furnace according to claim 2, characterized in that, A motor (8) is provided at the top of the rotating wheel shaft (2). The micro-vacuum cleaner (7) is located on the top of the motor (8). The output end of the motor (8) is connected to the top end of the rotating wheel shaft (2) in an inverted U shape.

5. The dust suction and cleaning device for the auxiliary chamber of a single crystal furnace according to claim 2, characterized in that, The expansion and contraction component includes a storage groove (3) and a telescopic rod (4). The telescopic rod (4) is located inside the storage groove (3). The telescopic end of the telescopic rod (4) is fixedly connected to the cleaning brush (5). The end of the telescopic rod (4) away from the cleaning brush (5) is connected to the storage groove (3).

6. The dust suction and cleaning device for the auxiliary chamber of a single crystal furnace according to claim 5, wherein, A plurality of dust suction ports (70) are provided on the outer periphery of the micro-vacuum cleaner (7).

7. A dust suction and cleaning device for the auxiliary chamber of a single crystal furnace according to claim 5, characterized in that, The cleaning rod (1) is hollow. A switch (9) is provided at the bottom of the cleaning rod (1). The micro-vacuum cleaner (7) and the motor (8) are electrically connected to the switch (9) through the inside of the cleaning rod (1).

8. A dust suction and cleaning device for the auxiliary chamber of a single crystal furnace according to claim 5, characterized in that A slag receiving tray (6) is provided in the middle of the cleaning rod (1). The outer diameter of the slag receiving tray (6) is larger than the inner diameter of the bottom of the secondary chamber.

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