Preparation machine for producing small-grain gold-germanium alloy target material

Abstract

The utility model belongs to the technical field of gold-germanium alloy target material preparation machines, and particularly relates to a preparation machine for producing small-grain gold-germanium alloy target materials, which comprises a casting mould body, four uniformly distributed supporting legs are fixedly connected to the lower end of the casting mould body, and a vacuum medium-frequency induction furnace is arranged at the lower end of the casting mould body. The vacuum medium-frequency induction furnace is in contact with the supporting legs, the upper end of the casting mold body is in contact with a cover plate, the left end and the right end of the casting mold body are jointly and fixedly connected with a supporting frame, and the vertical portion of the supporting frame is in contact with the cover plate. Through the arrangement of the servo motor, the driven shaft, the winding roller and the like, the traction rope can be wound, then the cover plate is automatically disassembled, the problem that in the prior art, manual disassembly and assembly are inconvenient to use is solved, under the structures of the rotating column, the limiting rod, the annular groove and the like, the driven shaft can be rotationally limited, and the cover plate can be conveniently disassembled and assembled. Therefore, stable rotation of the wind-up roller is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of the preparation of gold-germanium alloy targets, in particular to a preparation machine for producing small-grain gold-germanium alloy targets. Background Technique

[0002] As is well known, a preparation machine for producing small-grain gold-germanium alloy targets is a device for preparing gold-germanium alloy targets. As a gold-based eutectic solder, the melting point of the gold-germanium alloy is 361°C. The gold-germanium eutectic solder has the advantages of low vapor pressure, low contact resistance, good adhesion to the substrate, high electrical conductivity and thermal conductivity, and is considered an ideal sputtering and evaporation source.

[0003] The invention patent with the publication number of CN117070901A discloses a gold-germanium alloy target and a preparation method thereof, which is composed of 88% Au and 12% Ge by weight percentage; a process for preparing a brittle AuGe12 alloy target by pre-melting + melting and directional crystallization forming + machining is adopted. Circular or square targets are prepared by this method. The thickness of the circular target is 3-6 mm, the diameter is 50.8 mm (2 inches) to 152.4 mm (6 inches), the thickness of the square target is 3-6 mm, the length is 100-200 mm, the width is 50-120 mm, the purity of the target reaches 99.999%, and the impurity content ≤ 0.001%.

[0004] However, the existing preparation machines for producing small-grain gold-germanium alloy targets still have certain deficiencies: when the existing preparation machines for producing small-grain gold-germanium alloy targets are used for the production treatment of small-grain gold-germanium alloy targets, it is necessary to manually disassemble and assemble the cover plate to facilitate the subsequent taking of the small-grain gold-germanium alloy targets for use. Manually disassembling and assembling the cover plate is very inconvenient for the operators. Therefore, improvements are needed. Content of the Utility Model

[0005] The purpose of the utility model is to provide a preparation machine for producing small-grain gold-germanium alloy targets, which solves the problem that when the existing preparation machines for producing small-grain gold-germanium alloy targets are used for the production treatment of small-grain gold-germanium alloy targets, it is necessary to manually disassemble and assemble the cover plate to facilitate the subsequent taking of the small-grain gold-germanium alloy targets for use, and manually disassembling and assembling the cover plate is inconvenient for the operators.

[0006] To achieve the above object, the present utility model provides the following technical solutions: A preparation machine for producing small-grain gold-germanium alloy targets, including a casting mold body. Four uniformly distributed support legs are fixedly connected to the lower end of the casting mold body. A vacuum intermediate frequency induction furnace is arranged at the lower end of the casting mold body, and the vacuum intermediate frequency induction furnace is in contact with the support legs. A cover plate is in contact with the upper end of the casting mold body. A support frame is fixedly connected to the left and right ends of the casting mold body. The vertical part of the support frame is in contact with the cover plate. A fixing frame is fixedly connected to the horizontal part of the support frame. A driven shaft is installed on the left vertical part of the fixing frame through a bearing, and the driven shaft is rotatably connected to the right vertical part of the fixing frame. A guiding and traction mechanism is jointly arranged on the cover plate, the driven shaft, the fixing frame and the support frame. A servo motor is in contact with the right vertical part of the fixing frame. A plug is fixedly connected to the left end of the servo motor, and the plug is slidably connected to the right vertical part of the fixing frame. The output shaft of the servo motor is movably connected to the right vertical part of the fixing frame. The output shaft of the servo motor is in contact with the driven shaft. A square plate is fixedly connected to the output shaft of the servo motor, and the square plate is slidably connected to the driven shaft.

[0007] Preferably, an installation plate is fixedly connected to the upper side of the servo motor. The installation plate is in contact with the right vertical part of the fixing frame. A bolt is movably connected inside the installation plate, and the bolt is threadedly connected to the right vertical part of the fixing frame. A limiting ring groove is formed on the surface of the bolt. An insertion plate is slidably connected to the right vertical part of the fixing frame, and the insertion plate is slidably connected to the limiting ring groove. An end plate is fixedly connected to the upper end of the insertion plate, and the end plate is in contact with the right vertical part of the fixing frame. Through the setting of the bolt, the installation plate can be locked, and then the servo motor can be fixed. And under the structures such as the limiting ring groove and the insertion plate, the bolt can be inserted to avoid the problem of loosening due to vibration of the bolt.

[0008] Preferably, a spring is welded to the lower end of the end plate, and the other end of the spring is welded to the right vertical part of the fixing frame. Through the setting of the spring, the end plate can be connected and used.

[0009] Preferably, a head is fixedly connected to the left end of the bolt, and the head is in contact with the right vertical part of the fixing frame. Through the setting of the head, the insertion plate can be extruded and used.

[0010] Preferably, the guiding and traction mechanism includes a winding roller, the winding roller is fixedly sleeved on the outer side of the driven shaft, a traction rope is arranged on the surface of the winding roller, the other end of the traction rope is fixedly connected with the cover plate, two symmetrically distributed sliders are fixedly connected to the upper end of the cover plate, each slider is slidably connected with the vertical part of the support frame, rotating columns are fixedly sleeved on the outer side of the driven shaft and on the left and right sides of the winding roller, an annular groove is formed in the end face of the rotating column, a fixing plate is fixedly connected to the horizontal part of the fixing frame, a limiting rod is fixedly connected inside the fixing plate, and the limiting rod is slidably connected with the annular groove. Through the arrangement of the driven shaft and the winding roller, the traction rope can be wound, thereby driving the cover plate to move, realizing automatic disassembly and assembly of the cover plate, and under the structures such as the annular groove and the limiting rod, the rotating column can be limited to ensure the stable rotation of the winding roller.

[0011] Preferably, an avoidance hole one is formed in the horizontal part of the support frame, an avoidance hole two is formed in the horizontal part of the fixing frame, and the traction rope passes through the avoidance hole one and the avoidance hole two. Under the structures such as the avoidance hole one and the avoidance hole two, not only can the forward movement of the traction rope be ensured, but also the problem of hard abrasion of the traction rope can be avoided.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] 1. By pushing the servo motor into contact with the fixing frame, the square plate is inserted into the driven shaft, quickly connecting the driven shaft, avoiding the problem that welding fixation in the prior art is not convenient for operation. And under the action of the bolt, the servo motor can be locked, and under the structures such as the limiting ring groove and the insertion plate, the bolt can be limited to avoid the problem of loosening due to vibration of the bolt.

[0014] 2. Through the arrangement of structures such as the servo motor, the driven shaft, and the winding roller, the traction rope can be wound, thereby automatically removing the cover plate, avoiding the problem that manual disassembly and assembly in the prior art are not convenient for use. And under the structures such as the rotating column, the limiting rod, and the annular groove, the rotation of the driven shaft can be limited to ensure the stable rotation of the winding roller. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional view of the overall structure of the present utility model;

[0016] Figure 2 is the Figure 1 bottom three-dimensional view of the present utility model;

[0017] Figure 3 is the Figure 1 front elevation sectional view of the present utility model;

[0018] Figure 4 is the Figure 3Enlarged view of the servo motor;

[0019] Figure 5 For the present invention Figure 1 Enlarged view of the rotating column.

[0020] In the figure: 1, mold body; 2, support leg; 3, vacuum medium frequency induction furnace; 4, cover plate; 5, support frame; 6, fixing frame; 7, driven shaft; 8, guiding and traction mechanism; 9, servo motor; 10, insertion block; 11, square plate; 12, mounting plate; 13, bolt; 14, end head; 15, limit ring groove; 16, insertion plate; 17, end plate; 18, spring; 81, winding roller; 82, traction rope; 83, avoidance hole one; 84, avoidance hole two; 85, slider; 86, rotating column; 87, annular groove; 88, fixing plate; 89, limit rod. Specific embodiments

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0022] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , a preparation machine for producing small-grained gold-germanium alloy targets, including a mold body 1. Four uniformly distributed support legs 2 are fixedly connected to the lower end of the mold body 1. A vacuum medium frequency induction furnace 3 is arranged at the lower end of the mold body 1. The vacuum medium frequency induction furnace 3 is in contact with the support legs 2. A cover plate 4 is in contact with the upper end of the mold body 1. A support frame 5 is fixedly connected to the left and right ends of the mold body 1. The vertical part of the support frame 5 is in contact with the cover plate 4. The horizontal part of the support frame 5 is fixedly connected to a fixing frame 6. The left vertical part of the fixing frame 6 is installed with a driven shaft 7 through a bearing. The driven shaft 7 is rotationally connected to the right vertical part of the fixing frame 6. The right vertical part of the fixing frame 6 is in contact with a servo motor 9. The left end of the servo motor 9 is fixedly connected to an insertion block 10. The insertion block 10 is slidably connected to the right vertical part of the fixing frame 6. The output shaft of the servo motor 9 is movably connected to the right vertical part of the fixing frame 6. The output shaft of the servo motor 9 is in contact with the driven shaft 7. The output shaft of the servo motor 9 is fixedly connected to a square plate 11. The square plate 11 is slidably connected to the driven shaft 7.

[0023] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4, an installation plate 12 is fixedly connected to the upper side of the servo motor 9. The installation plate 12 contacts the right vertical part of the fixing frame 6. A bolt 13 is movably connected inside the installation plate 12. The bolt 13 is threadedly connected to the right vertical part of the fixing frame 6. A limiting ring groove 15 is provided on the surface of the bolt 13. A plug plate 16 is slidably connected to the right vertical part of the fixing frame 6. The plug plate 16 is slidably connected to the limiting ring groove 15. The upper end of the plug plate 16 is fixedly connected to an end plate 17. The end plate 17 contacts the right vertical part of the fixing frame 6. Through the setting of the bolt 13, the installation plate 12 can be locked, and then the servo motor 9 can be fixed. And under the structures such as the limiting ring groove 15 and the plug plate 16, the bolt 13 can be inserted to avoid the problem of loosening due to vibration of the bolt 13.

[0024] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , a spring 18 is welded to the lower end of the end plate 17. The other end of the spring 18 is welded to the right vertical part of the fixing frame 6. Through the setting of the spring 18, the end plate 17 can be connected and used. The left end of the bolt 13 is fixedly connected to a head 14. The head 14 contacts the right vertical part of the fixing frame 6. Through the setting of the head 14, the plug plate 16 can be extruded and used.

[0025] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 5 , a guiding and traction mechanism 8 is jointly provided on the cover plate 4, the driven shaft 7, the fixing frame 6 and the support frame 5. The guiding and traction mechanism 8 includes a winding roller 81. A winding roller 81 is fixedly sleeved on the outer side of the driven shaft 7. A traction rope 82 is provided on the surface of the winding roller 81. The other end of the traction rope 82 is fixedly connected to the cover plate 4. Two symmetrically distributed sliders 85 are fixedly connected to the upper end of the cover plate 4. Each slider 85 is slidably connected to the vertical part of the support frame 5. Rotating columns 86 are fixedly sleeved on the outer side of the driven shaft 7 and on the left and right sides of the winding roller 81. An annular groove 87 is provided on the end face of the rotating column 86. A fixing plate 88 is fixedly connected to the horizontal part of the fixing frame 6. A limiting rod 89 is fixedly connected inside the fixing plate 88. The limiting rod 89 is slidably connected to the annular groove 87. Through the setting of the driven shaft 7 and the winding roller 81, the traction rope 82 can be wound, and then the cover plate 4 can be driven to move for automatic disassembly and assembly of the cover plate 4. And under the structures such as the annular groove 87 and the limiting rod 89, the rotating column 86 can be limited to ensure the stable rotation of the winding roller 81.

[0026] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 5, an avoidance hole 83 is provided in the horizontal part of the support frame 5, and an avoidance hole 84 is provided in the horizontal part of the fixed frame 6. The traction rope 82 passes through the avoidance hole 83 and the avoidance hole 84. With structures such as the avoidance hole 83 and the avoidance hole 84, not only can the forward movement of the traction rope 82 be ensured, but also the problem of hard wear of the traction rope 82 can be avoided.

[0027] The specific implementation process of the present utility model is as follows: During use, for the production process of small-grain gold-germanium alloy targets, for details, please refer to a sputtering target for manufacturing semiconductor chips and its manufacturing method disclosed in the invention patent with the publication number CN117070901A, which will not be elaborated here;

[0028] By pushing the servo motor 9 to contact the right vertical part of the fixed frame 6, the output end of the servo motor 9 is inserted into the right vertical part of the fixed frame 6, and the output end of the servo motor 9 is made to contact the end face of the driven shaft 7. Furthermore, the square plate 11 is inserted into the driven shaft 7, and the insertion block 10 is inserted into the right vertical part of the fixed frame 6, and the mounting plate 12 is driven to contact the right vertical part of the fixed frame 6;

[0029] Then push the bolt 13 through the mounting plate 12 to make the bolt 13 contact the right vertical part of the fixed frame 6. Rotate the bolt 13 to make the bolt 13 perform a threaded movement to install the bolt 13. When the bolt 13 rotates forward, it can drive the end head 14 to rotate forward. When the end head 14 contacts the insertion plate 16, under the extrusion of the end head 14, the insertion plate 16 can be pushed to move upward, and the end plate 17 is driven to move, and the spring 18 deforms. Finally, the insertion plate 16 moves along the surface of the bolt 13. Under the action of force, the insertion plate 16 moves along the surface of the bolt 13. When the insertion plate 16 slides into the limit ring groove 15, the spring 18 recovers its deformation to push the insertion plate 16 into the limit ring groove 15 to limit the bolt 13 and avoid the problem of loosening due to vibration of the bolt 13;

[0030] Start the servo motor 9 to drive the output shaft to rotate, so as to drive the square plate 11 to rotate, and then drive the driven shaft 7 to rotate, so as to drive the winding roller 81 to rotate, perform winding treatment on the traction rope 82, pull the cover plate 4 to move, and then drive the slider 85 to move along the vertical part of the support frame 5 to ensure the stable movement of the cover plate 4, and perform automatic disassembly and assembly of the cover plate 4. When the driven shaft 7 rotates, it can drive the rotating column 86 to rotate, so that the limit rod 89 slides along the inner wall of the annular groove 87 to guide the rotation of the driven shaft 7 and ensure the stable rotation of the winding roller 81.

[0031] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A preparation machine for producing a small-grained gold-germanium alloy target, comprising a casting mold body (1), characterized in that: The lower end of the mold body (1) is fixedly connected with four uniformly distributed support legs (2). A vacuum intermediate frequency induction furnace (3) is arranged at the lower end of the mold body (1), and the vacuum intermediate frequency induction furnace (3) is in contact with the support legs (2). The upper end of the mold body (1) is in contact with a cover plate (4). The left and right ends of the mold body (1) are jointly fixedly connected with a support frame (5). The vertical part of the support frame (5) is in contact with the cover plate (4). The horizontal part of the support frame (5) is fixedly connected with a fixing frame (6). A driven shaft (7) is installed on the left vertical part of the fixing frame (6) through a bearing, and the driven shaft (7) is rotationally connected with the right vertical part of the fixing frame (6). A guiding and traction mechanism (8) is jointly arranged on the cover plate (4), the driven shaft (7), the fixing frame (6) and the support frame (5). The right vertical part of the fixing frame (6) is in contact with a servo motor (9). The left end of the servo motor (9) is fixedly connected with an insertion block (10), and the insertion block (10) is slidably connected with the right vertical part of the fixing frame (6). The output shaft of the servo motor (9) is movably connected with the right vertical part of the fixing frame (6). The output shaft of the servo motor (9) is in contact with the driven shaft (7). The output shaft of the servo motor (9) is fixedly connected with a square plate (11), and the square plate (11) is slidably connected with the driven shaft (7).

2. The preparation machine for producing small-grained gold-germanium alloy targets according to claim 1, characterized in that: An installation plate (12) is fixedly connected to the upper side of the servo motor (9). The installation plate (12) is in contact with the right vertical part of the fixing frame (6). A bolt (13) is movably connected inside the installation plate (12), and the bolt (13) is threadedly connected with the right vertical part of the fixing frame (6). A limiting ring groove (15) is formed on the surface of the bolt (13). An insertion plate (16) is slidably connected with the right vertical part of the fixing frame (6), and the insertion plate (16) is slidably connected with the limiting ring groove (15). The upper end of the insertion plate (16) is fixedly connected with an end plate (17), and the end plate (17) is in contact with the right vertical part of the fixing frame (6).

3. The preparation machine for producing small-grained gold-germanium alloy targets according to claim 2, wherein: A spring (18) is welded to the lower end of the end plate (17), and the other end of the spring (18) is welded to the right vertical part of the fixing frame (6).

4. The preparation machine for producing small-grained gold germanium alloy targets according to claim 2, wherein: The left end of the bolt (13) is fixedly connected with an end head (14), and the end head (14) is in contact with the right vertical part of the fixing frame (6).

5. The preparation machine for producing small-grained gold-germanium alloy targets according to claim 1, characterized in that: The guiding and traction mechanism (8) includes a winding roller (81). The winding roller (81) is fixedly sleeved on the outer side of the driven shaft (7). A traction rope (82) is arranged on the surface of the winding roller (81). The other end of the traction rope (82) is fixedly connected to the cover plate (4). Two symmetrically distributed sliders (85) are fixedly connected to the upper end of the cover plate (4). Each slider (85) is slidably connected to the vertical part of the support frame (5). Rotating columns (86) are fixedly sleeved on the outer side of the driven shaft (7) and on the left and right sides of the winding roller (81). An annular groove (87) is formed in the end face of the rotating column (86). A fixing plate (88) is fixedly connected to the horizontal part of the fixing frame (6). A limiting rod (89) is fixedly connected to the inside of the fixing plate (88). The limiting rod (89) is slidably connected to the annular groove (87).

6. The preparation machine for producing small-grained gold-germanium alloy targets according to claim 5, characterized in that: An avoidance hole one (83) is formed in the horizontal part of the support frame (5), and an avoidance hole two (84) is formed in the horizontal part of the fixing frame (6). The traction rope (82) passes through the avoidance hole one (83) and the avoidance hole two (84).

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