LCoS super-purification multilayer solid film batch production equipment

Abstract

The utility model relates to LCoS super-purification multi-layer solid film batch production equipment, which comprises a heating box, a liquid crystal display screen, a liquid crystal display screen and a liquid crystal display screen, the heating box comprises a plurality of heating cavities, a heating plate and a temperature control module are arranged in each heating cavity, the heating plates are electrically connected with the temperature control modules, each heating cavity is correspondingly provided with a cavity door, and the cavity doors are rotatably connected to the inner wall of a box body of the heating box; the cooling box comprises a plurality of cooling cavities; the carrying assembly is arranged on one side of the heating box and one side of the cooling box and comprises an X-axis sliding table, a Y-axis sliding table, a Z-axis sliding table and a carrying mechanical arm used for carrying a substrate, the driving end of the X-axis sliding table is connected with the Y-axis sliding table, the driving end of the Y-axis sliding table is connected with the Z-axis sliding table, and the carrying mechanical arm is fixedly arranged on the Z-axis sliding table; the X-axis sliding table, the Y-axis sliding table and the Z-axis sliding table are used for driving the carrying mechanical arm to do reciprocating rectilinear motion in the X-axis direction, the Y-axis direction and the Z-axis direction. According to the LCoS film fixing device, automation and intelligentization of LCoS film fixing are achieved, the film fixing quality is remarkably improved, and the large-scale, high-efficiency and high-stability production requirements are met.

Description

Technical Field

[0001] The utility model relates to the technical field of LCoS solid film technology, and particularly relates to an LCoS ultra-purifying multi-layer solid film mass production equipment. Background Art

[0002] In the field of LCOS technology, LCOS solid film plays a decisive role in product performance and is indispensable. At present, the LCoS solid film process in the industry mainly relies on a high-temperature curing oven, using a finned radiator and a stainless steel heating tube as heat sources, heating the air by means of convective air change of the heating assembly by a blower, and transferring the heat of the hot air to the material. The air is continuously supplemented through the air inlet, and the wet air is discharged outside the box, so that the temperature in the furnace is continuously increased, and the mold is gradually preheated for solid film. However, its heating efficiency and temperature uniformity are difficult to meet the high-precision requirements. In addition, the convective heat transfer method results in uneven heat distribution, further affecting the consistency of the solid film effect, and the degree of automation is low, with a lot of manual intervention, increasing the uncertainty and defective rate in the product manufacturing process, and it is difficult to meet the production requirements of large scale, high efficiency and high stability.

[0003] Therefore, there is an urgent need to provide an LCoS ultra-purifying multi-layer solid film mass production equipment to solve the above problems. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies and defects of the prior art, and provide an LCoS ultra-purifying multi-layer solid film mass production equipment, which realizes the automation and intelligence of LCoS solid film, and improves the quality and performance of the solid film.

[0005] The purpose of the utility model is achieved by the following technical solutions:

[0006] An LCoS ultra-purifying multi-layer solid film mass production equipment, comprising:

[0007] A heating box, including a plurality of heating chambers, each heating chamber is provided with a heating plate and a temperature control module, the heating plate is electrically connected to the temperature control module, and each heating chamber is correspondingly provided with a chamber door, and the chamber door is rotatably connected to the inner wall of the heating box body;

[0008] A cooling box, including a plurality of cooling chambers;

[0009] A handling component, arranged on one side of the heating box and the cooling box, including an X-axis slide, a Y-axis slide, a Z-axis slide and a handling manipulator for handling a substrate, the driving end of the X-axis slide is connected to the Y-axis slide, the driving end of the Y-axis slide is connected to the Z-axis slide, the handling manipulator is fixedly arranged on the Z-axis slide, and the X-axis slide, the Y-axis slide and the Z-axis slide are used to drive the handling manipulator to make reciprocating linear motion along the X-axis direction, the Y-axis direction and the Z-axis direction.

[0010] As a preferred technical solution of the present utility model, a substrate support seat is provided in each of the heating chambers and the cooling chambers, and the handling robot grips the substrate and places it on the substrate support seat.

[0011] As a preferred technical solution of the present utility model, a temperature control electronic valve is further provided in each of the heating chambers, and the temperature control electronic valve is electrically connected to the temperature control module.

[0012] As a preferred technical solution of the present utility model, the production equipment further includes a clean conveyor belt for transporting the substrate to the handling assembly station, and a photoelectric sensor is provided on the clean conveyor belt.

[0013] As a preferred technical solution of the present utility model, an overtemperature control valve is further provided in each of the heating chambers, and the overtemperature control valve is electrically connected to the temperature control module.

[0014] As a preferred technical solution of the present utility model, the production equipment is further provided with an exhaust system.

[0015] Compared with the prior art, the present utility model has the following beneficial effects:

[0016] By providing a plurality of heating chambers in the heating box and a plurality of cooling chambers in the cooling box, the present utility model can perform solid film treatment on a plurality of substrates at the same time, improving production efficiency; by providing a heating plate and a temperature control module in each heating chamber, the temperature of each heating chamber can be independently controlled to ensure the uniformity and consistency of the solid film process. At the same time, the entire solid film process is completed in a Class 100 ultra-clean space, effectively isolating external pollutants and ensuring a high cleanliness of the solid film process, significantly improving the quality and performance of LCOS solid film. Through the coordinated operation of the X-axis slide, Y-axis slide, and Z-axis slide, the handling robot is driven to perform reciprocating linear motion along its respective axis in three-dimensional space, realizing automatic loading and unloading of the substrate, effectively reducing manual intervention and lowering production costs. This application meets the production requirements of large scale, high efficiency, and high stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the present utility model.

[0018] Figure 2 It is a front view of the present utility model.

[0019] Among them, the above-mentioned drawings include the following reference numerals:

[0020] 1. Heating box, 11. Heating chamber, 2. Cooling box, 21. Cooling chamber, 3. Chamber door, 4. X-axis slide, 5. Y-axis slide, 6. Z-axis slide, 7. Handling robot, 8. Substrate support seat, 9. Clean conveyor belt. 10. Substrate, Detailed Implementation Manner

[0021] The present utility model will be further described in detail below in conjunction with embodiments and the accompanying drawings, but the implementation manners of the present utility model are not limited thereto.

[0022] The specific implementation process of the present utility model is as follows:

[0023] As Figures 1 to 2 shown, a batch production equipment for LCoS ultra-purified multi-layer solid films includes:

[0024] A heating box 1, including a plurality of heating chambers 11. The box body is provided with a plurality of heating chambers 11, which can perform solid film treatment on a plurality of substrates 10 at the same time, improving production efficiency. Each heating chamber 11 is provided with a heating plate and a temperature control module. The heating plate is electrically connected to the temperature control module. Each heating chamber 11 is independently provided with a heating plate and a temperature control module, and the temperature during the solid film process of each heating chamber 11 can be independently controlled to ensure the uniformity and consistency of the solid film process. At the same time, the temperature control accuracy can reach ±5°C. The temperature control modules of each heating chamber 11 operate independently without interference, and each temperature control module is then uniformly controlled by a temperature control system, which is convenient for management and operation. The heating plate is the heat source of the heating box 1, which is used to convert electrical energy or other forms of energy into heat energy, so as to enable the heating box 1 to achieve the heating function; the temperature control module is used to adjust the temperature of the heating plate; a temperature control electronic valve is also provided in the heating chamber 11, and the temperature control electronic valve is electrically connected to the temperature control module, which can accurately control the heating power and time of the heating plate in the heating chamber 11. The temperature control electronic valve receives the control signal from the temperature control module and controls the flow of the medium according to the opening and closing state of the signal, thereby adjusting the heating temperature. When the heating temperature is lower than the preset value, the temperature control module will send a heating signal to make the heating plate start to work; at the same time, the temperature control electronic valve will also adjust its opening to increase the flow rate of the medium, thereby accelerating the heating process. When the heating temperature reaches the preset value, the temperature control module will send a stop heating signal to make the heating plate stop working; at the same time, the temperature control electronic valve will also adjust its opening to maintain the stable temperature in the heating box 1. Each heating chamber 11 of the heating box 1 is correspondingly provided with a chamber door 3. The chamber door 3 is rotatably connected to the inner wall of the box body of the heating box 1, ensuring the sealing of the heater through the chamber door 3, preventing a large amount of heat loss, and improving the heating efficiency. At the same time, it plays a certain heat insulation role to avoid operators from being injured by high temperatures.

[0025] A cooling box 2, including a plurality of cooling chambers 21; the cooling chambers 21 are used to place the substrates 10 after heating and curing, and wait for them to cool naturally before being transported to the next station. In other embodiments, other cooling methods can also be used to reduce the temperature of the cooling box 2 to achieve rapid cooling and improve production efficiency. The cooling chambers 21 can be provided with chamber doors 3 to avoid interfering with the substrates 10 during the cooling process.

[0026] The handling component is arranged on one side of the heating chamber 1 and the cooling chamber 2, and includes an X-axis slide 4, a Y-axis slide 5, a Z-axis slide 6 and a handling robot 7 for handling the substrate 10. The driving end of the X-axis slide 4 is connected to the Y-axis slide 5, the driving end of the Y-axis slide 5 is connected to the Z-axis slide 6, and the handling robot 7 is stably installed on the Z-axis slide 6. The X-axis slide 4, the Y-axis slide 5 and the Z-axis slide 6 work together to drive the handling robot 7 to perform reciprocating linear motion along their respective axes in three-dimensional space, so as to place the substrate 10 into the heating chamber 1, take it out after curing is completed and put it into the cooling chamber 2, take it out from the cooling chamber 2 after cooling, and place it at a designated position for conveying to the next working station. Through the automated handling component, the damage to the substrate 10 caused by manual material taking is effectively avoided.

[0027] The production equipment of the present application is also provided with a purifier system, which filters the air through a high-efficiency filter to achieve deep filtration of the air, and the filtration efficiency reaches 99.99%, providing a continuous supply of clean air for the hundred-class ultra-clean space. The entire solid film process is completed in the hundred-class ultra-clean space, effectively isolating external pollutants and ensuring the high cleanliness of the solid film process.

[0028] In the embodiment of the present utility model, the production equipment of the present application further includes a clean conveyor belt 9 for conveying the substrate 10 to the handling component station, and the use of the clean conveyor belt 9 ensures the cleanliness during the conveying process of the substrate 10. The clean conveyor belt 9 is provided with a photoelectric sensor, which has a function of reminding of the incoming material, so that the handling robot 7 can accurately handle when the material arrives.

[0029] In the embodiment of the present utility model, a substrate support 8 is provided in each heating chamber 11 and cooling chamber 21, and the substrate support 8 is used to support the substrate 10. Through the substrate support 8, there is a gap between the substrate 10 and the bottom plate of the cavity, which is convenient for the handling robot 7 to handle the substrate 10, and the handling robot 7 transports the substrate 10 from the clean conveyor belt 9 and places it on the substrate support 8.

[0030] In the embodiment of the present utility model, each heating chamber 11 is further provided with an over-temperature control valve, which is electrically connected to the temperature control module and is used to monitor the temperature condition in the heating chamber 11. Once it detects that the temperature in the heating chamber 11 rises abnormally, it immediately cuts off the heating source to protect the equipment and the substrate 10 from damage.

[0031] In the embodiment of the present utility model, the production equipment of the present application is also provided with an exhaust system to ensure the air circulation inside the equipment and timely discharge the harmful gases or vapors generated during the heating and curing process.

[0032] The working principle of the present utility model is:

[0033] The substrate 10 to be cured is transported from the clean conveyor belt 9 to the handling component station. The handling robot 7, through the coordinated cooperation of the X-axis slide 4, Y-axis slide 5, and Z-axis slide 6, lifts the substrate 10 to be cured from the clean conveyor belt 9 and places it in each heating chamber 11 of the heating box 1 according to the system-set sequence. Then, the chamber door 3 is closed. The heating temperature, heating time, and other relevant parameters of each heating chamber 11 are set through the temperature control system. The heating plate in the heating chamber 11 precisely heats the placed substrate 10 according to the set parameters. At the same time, the temperature control system monitors and adjusts the temperature in real time to maintain the optimal curing conditions. The exhaust system operates continuously to ensure the air circulation inside the equipment and timely discharge harmful gases and vapors. After the preset curing time, the film layer is cured, and the equipment automatically stops heating. The handling robot 7 takes out the substrate 10 from the heating box 1 and places it in the cooling chamber 21 for cooling. After cooling, the handling robot 7 takes out the substrate 10 from the cooling box 2 again and places it at the designated position, and then transports it to the next station.

[0034] The production equipment of the present utility model is an integrated type for feeding, storing, and curing. There is no contact during the entire film curing process, effectively avoiding the uncertainties and increased defective product rates caused by manual intervention during the product manufacturing process. It is applicable to the film curing treatment of products such as VR-LCOS chips, AR-LCOS chips, micro-LCOS chip projection, 3D scanning LCOS chips, and phase modulation LCOS chips, and can meet the production requirements of large scale, high efficiency, and high stability.

[0035] The above embodiments only represent the implementation modes of the present utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the patent of the present utility model shall be subject to the appended claims.

Claims

1. An LCoS ultra-purification multi-layer solid film batch production equipment, characterized in that Comprising: A heating box, including a plurality of heating chambers, each of the heating chambers is provided with a heating plate and a temperature control module, the heating plate is electrically connected to the temperature control module, and each heating chamber is correspondingly provided with a chamber door, and the chamber door is rotatably connected to the inner wall of the heating box body; A cooling box, including a plurality of cooling chambers; A handling assembly, arranged on one side of the heating box and the cooling box, including an X-axis slide, a Y-axis slide, a Z-axis slide and a handling robot for handling substrates, the driving end of the X-axis slide is connected to the Y-axis slide, the driving end of the Y-axis slide is connected to the Z-axis slide, the handling robot is fixedly arranged on the Z-axis slide, and the X-axis slide, the Y-axis slide and the Z-axis slide are used to drive the handling robot to make reciprocating linear motions along the X-axis direction, the Y-axis direction and the Z-axis direction.

2. The mass production equipment for an LCoS ultra-purified multi-layer solid film according to claim 1, characterized in that, A substrate support seat is arranged in each of the heating chambers and the cooling chambers, and the handling robot clamps the substrate and places it on the substrate support seat.

3. The mass production equipment for LCoS ultra-purified multi-layer solid film according to claim 1, characterized in that, Each of the heating chambers is further provided with a temperature control solenoid valve, and the temperature control solenoid valve is electrically connected to the temperature control module.

4. A mass production equipment for LCoS ultra-purified multi-layer solid films according to claim 1, characterized in that, The production equipment further includes a clean conveyor belt for conveying the substrate to the handling assembly station, and a photoelectric sensor is arranged on the clean conveyor belt.

5. The mass production equipment for LCoS ultra-purified multi-layer solid film according to claim 1, characterized in that, Each of the heating chambers is further provided with an over-temperature control valve, and the over-temperature control valve is electrically connected to the temperature control module.

6. The mass production equipment for LCoS ultra-purified multi-layer solid film according to claim 1, wherein The production equipment is further provided with an exhaust system.

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