Vacuum pump with circulating cooling water monitoring assembly

By introducing circulating cooling water monitoring components into the vacuum pump, the flow rate, temperature and pressure of the cooling water are monitored in real time, the temperature rise caused by cooling device failure is solved, the performance and life of the vacuum pump is ensured, and intelligent management and fault diagnosis are realized.

CN223089496UActive Publication Date: 2025-07-11SUZHOU MAIZHUANG SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202422530854.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2025-07-11
Estimated Expiration
2034-10-21

AI Technical Summary

Technical Problem

When the cooling device of the existing vacuum pump fails, it cannot effectively cool down, resulting in an increase in temperature and affecting performance and life.

Method used

A vacuum pump with a circulating cooling water monitoring component is designed, including a flow temperature detection unit and a pressure detection unit, which is used to monitor the cooling water flow, temperature and pressure at the water outlet in real time, optimize the cooling effect in combination with the controller, and ensure effective cooling through the circulating cooling water system.

Benefits of technology

It realizes the safe, effective and long-term operation of the vacuum pump, avoids damage caused by insufficient cooling, and provides intelligent management and fault diagnosis capabilities.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model discloses a vacuum pump with a circulating cooling water monitoring assembly. The vacuum pump comprises a pump body and the monitoring assembly. A water inlet and a water outlet are formed in the pump body, cooling water enters the pump body through the water inlet, the cooling water leaves the pump body through the water outlet, and the cooling water is used for taking away heat of the pump body. The monitoring assembly comprises a flow temperature detection part and a pressure detection part, the flow temperature detection part and the pressure detection part are arranged close to the water outlet, the flow temperature detection part is used for detecting the flow and the temperature of the cooling water at the water outlet, and the pressure detection part is used for detecting the pressure at the water outlet. Cooling water flows in and out of the pump body, the cooling water can take away heat of the pump body so as to reduce the temperature of the pump body, the cooling water at the water outlet is detected through the monitoring assembly so that abnormal conditions of the cooling water can be found in time, and damage to the vacuum pump and even safety accidents caused by insufficient cooling are avoided; therefore, the vacuum pump can operate safely and effectively for a long time.
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Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pumps, in particular to a vacuum pump with a circulating cooling water monitoring component. Background Art

[0002] A vacuum pump is a device used to extract gas from an enclosed space to achieve a certain degree of vacuum. Vacuum pumps are widely used in industrial production, electronic manufacturing, scientific research, the medical industry, vacuum packaging and other fields. During the operation of the vacuum pump, the vacuum pump will generate heat, which will not only reduce the vacuum pumping effect, but also cause damage to the vacuum pump. In order to ensure the safe, effective and long-term operation of the vacuum pump, it is necessary to cool down the vacuum pump.

[0003] In the prior art, a cooling device is provided for the vacuum pump to cool down the vacuum pump, so as to avoid the overheating of the vacuum pump. However, if the cooling device fails and cannot effectively cool down the vacuum pump, the temperature of the vacuum pump will continue to rise, which will have an adverse impact on the performance and life of the vacuum pump.

[0004] Therefore, the existing vacuum pumps need to be further improved. Summary of the Invention

[0005] The purpose of the utility model is to provide a vacuum pump with a circulating cooling water monitoring component, which can not only cool down the vacuum pump to ensure the performance and life of the vacuum pump, but also ensure that the cooling water effectively cools down the vacuum pump.

[0006] The purpose of the utility model is realized by the following technical solutions:

[0007] A vacuum pump with a circulating cooling water monitoring component, comprising:

[0008] A pump body, an inlet and an outlet are arranged on the pump body. The inlet is used for cooling water to enter the pump body, and the outlet is used for the cooling water to leave the pump body. The cooling water is used to take away the heat of the pump body;

[0009] A monitoring component, the monitoring component includes a flow and temperature detection part and a pressure detection part. The flow and temperature detection part and the pressure detection part are arranged close to the outlet. The flow and temperature detection part is used to detect the flow and temperature of the cooling water at the outlet, and the pressure detection part is used to detect the pressure at the outlet.

[0010] Preferably, it further includes an inlet pipe and an outlet pipe. The inlet pipe injects the cooling water into the pump body through the inlet, and the cooling water flows out of the pump body through the outlet pipe. Both the flow and temperature detection part and the pressure detection part are communicated with the outlet pipe.

[0011] Preferably, it further includes an adapter and a tee joint. One end of the adapter is connected to the water outlet, the other end of the adapter is connected to the flow and temperature detection part, the first end of the tee joint is connected to the flow and temperature detection part, the second end of the tee joint is connected to the pressure detection part, and the third end of the tee joint is connected to the water outlet pipe.

[0012] Preferably, it further includes a water tank. The water inlet pipe and the water outlet pipe are respectively connected to the water tank, and the cooling water in the water tank circulates in the pump body through the water inlet pipe and the water outlet pipe.

[0013] Preferably, the monitoring assembly further includes a first temperature detection part, and the first temperature detection part is arranged in the water tank and / or the water inlet pipe.

[0014] Preferably, a circulation device is arranged in the water tank, and the circulation device is used to make the cooling water in the tank circulate.

[0015] Preferably, a cooling assembly is further arranged in the water tank, and the cooling assembly is used to reduce the temperature of the cooling water in the water tank.

[0016] Preferably, it further includes a water pump. The water pump is arranged in the water inlet pipe and / or the water outlet pipe, and the water pump is used to drive the cooling water to flow.

[0017] Preferably, it further includes a controller. The controller is connected to the monitoring assembly, and the controller can control the operation of the pump body and / or the water pump according to the detection data of the monitoring assembly.

[0018] Preferably, the water inlet is arranged near the top of the pump body, and the water outlet is arranged near the bottom of the pump body.

[0019] Compared with the prior art, the beneficial effects of the present utility model at least include:

[0020] For the vacuum pump with a circulating cooling water monitoring assembly of the present utility model, through the cooling water flowing in and out of the pump body, the cooling water can take away the heat of the pump body to reduce the temperature of the pump body, ensuring the performance and service life of the vacuum pump. By detecting the cooling water at the water outlet through the monitoring assembly, the flow rate, temperature and pressure of the cooling water at the water outlet can be obtained simultaneously, so as to timely detect the abnormal situation of the cooling water, ensuring that the cooling water effectively cools the vacuum pump, avoiding damage to the vacuum pump or even safety accidents caused by insufficient cooling. At the same time, the cooling effect can also be optimized through the data of the flow rate, temperature and pressure of the cooling water, which is also convenient for fault diagnosis and maintenance, and realizes intelligent management, so that the vacuum pump can operate safely, effectively and for a long time. Description of the Drawings

[0021] Figure 1 It is a partial structural schematic diagram of a vacuum pump with a circulating cooling water monitoring component according to an embodiment of the present utility model.

[0022] Figure 2 is Figure 1 a partial enlarged view of the position A in

[0023] Figure 3 It is a structural schematic diagram of a vacuum pump with a circulating cooling water monitoring component according to an embodiment of the present utility model.

[0024] Figure 4 It is a schematic diagram of the control relationship among a controller, a monitoring component, a water pump, a pump body, and a cooling component according to an embodiment of the present utility model.

[0025] In the figure: 100, vacuum pump; 1, pump body; 11, water inlet; 12, water outlet; 13, flow path; 2, monitoring component; 21, flow rate and temperature detection part; 22, pressure detection part; 23, first temperature detection part; 3, water inlet pipe; 4, water outlet pipe; 5, adapter; 6, three-way joint; 61, first end; 62, second end; 63, third end; 7, water tank; 71, cooling pipe; 72, cooling component; 8, water pump; 9, controller. Specific Embodiments

[0026] Now, the exemplary embodiments will be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be implemented in various forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that the present utility model will be more complete and comprehensive, and the concept of the exemplary embodiments will be fully conveyed to those skilled in the art. The same reference numerals in the figures denote the same or similar structures, and thus their repeated description will be omitted.

[0027] The words expressing positions and directions described in the present utility model are all illustrated by taking the accompanying drawings as examples, but can be changed according to needs, and all the changes made are included in the protection scope of the present utility model.

[0028] Referring to Figures 1 to 4 , the present utility model provides a vacuum pump 100 with a circulating cooling water monitoring component 2, including: a pump body 1 and a monitoring component 2, and the monitoring component 2 is used to detect the cooling water flowing out of the pump body 1.

[0029] Specifically, referring to Figure 1 , Figure 2, an inlet 11 and an outlet 12 can be provided on the pump body 1. The inlet 11 is used for cooling water to enter the pump body 1, and the outlet 12 is used for cooling water to leave the pump body 1. The cooling water is used to take away the heat of the pump body 1. The temperature of the cooling water entering the pump body 1 from the inlet 11 is lower than the temperature of the vacuum pump 100. When the cooling water flows into the pump body 1, the cooling water can exchange heat with the pump body 1, and the cooling water can take away the heat of the pump body 1, thereby reducing the temperature of the pump body 1 and ensuring the performance and service life of the vacuum pump 100. The cooling water that exchanges heat with the pump body 1 then flows out of the pump body 1 from the outlet 12. The cooling water flowing out of the pump body 1 from the outlet 12 can be cooled down, and the cooled cooling water can also enter the pump body 1 again through the inlet 11 to participate in the cycle. In this way, the recycling of the cooling water can be realized, thereby improving the use efficiency of the cooling water, further reducing the use cost of the cooling water and saving water resources.

[0030] As a preferred embodiment, the inlet 11 can be arranged near the top of the pump body 1, and the outlet 12 can be arranged near the bottom of the pump body 1. In this way, the flow rate of the cooling water can be increased, the temperature of the pump body 1 can be quickly taken away, and the pump body 1 can be quickly cooled down. In particular, for some vacuum pumps 100 that generate a large amount of heat, by increasing the flow rate of the cooling water, the temperature of the pump body 1 can be ensured to be maintained within a preset range, thereby ensuring the performance and service life of the vacuum pump 100. Of course, the inlet 11 and the outlet 12 can also be arranged at other positions of the pump body 1 as long as the cooling requirement of the pump body 1 is met.

[0031] In some embodiments, referring to Figure 3 , the flow path 13 of the cooling water in the pump body 1 is preferably curved, and the curved shape can be one or more of a spiral shape, an S shape, and a vortex shape. In this way, not only can the length of the flow path 13 of the cooling water in the pump body 1 be extended, the heat exchange time between the cooling water and the pump body 1 can be increased, the use efficiency of the cooling water can be improved, thereby reducing the amount of cooling water used, but also the contact area between the cooling water and the pump body 1 can be increased, the cooling effect of the cooling water can be improved, the temperature of the pump body 1 can be further reduced, and the performance and service life of the vacuum pump 100 can be further improved.

[0032] Referring to Figure 1 , Figure 2, the monitoring component 2 may include a flow rate and temperature detection unit 21 and a pressure detection unit 22. The flow rate and temperature detection unit 21 and the pressure detection unit 22 are preferably arranged close to the water outlet 12. The flow rate and temperature detection unit 21 is used to detect the flow rate and temperature of the cooling water at the water outlet 12, and the pressure detection unit 22 is used to detect the pressure at the water outlet 12. The flow rate and temperature detection unit 21 can accurately measure the flow rate and temperature of the cooling water. For the vacuum pump 100, an appropriate flow rate of the cooling water is the key to ensuring its normal operation and effective cooling. By means of the flow rate and temperature detection unit 21, the flow rate and temperature of the cooling water can be grasped in real time, ensuring that the vacuum pump 100 will not overheat or have other problems due to insufficient cooling water volume or too high cooling water temperature during operation. For example, when the vacuum pump 100 operates for a long time or works under a high load condition, sufficient cooling water volume is required to carry away heat. If the flow rate of the cooling water is too low, it may cause the temperature of the vacuum pump 100 to rise, affecting the performance and service life of the vacuum pump 100. The pressure detection unit 22 can measure the pressure of the cooling water, and the change in the pressure of the cooling water can reflect the operating condition of the pipeline system, such as whether there is blockage, leakage, or abnormal operation of the water pump 8. For example, if the pressure of the cooling water suddenly increases, it may be due to pipeline blockage or improper valve closure. If the pressure of the cooling water is too low, it may be due to a malfunction of the water pump 8 or pipeline leakage.

[0033] In this application, by allowing the cooling water to enter and exit the pump body 1, the cooling water can take away the heat of the pump body 1 to reduce the temperature of the pump body 1, ensuring the performance and service life of the vacuum pump 100. By detecting the cooling water at the water outlet 12 through the monitoring component 2, the flow rate, temperature, and pressure of the cooling water at the water outlet 12 can be obtained simultaneously, so as to promptly detect abnormal conditions of the cooling water, ensuring that the cooling water effectively cools the vacuum pump 100, avoiding damage to the vacuum pump 100 or even occurrence of safety accidents due to insufficient cooling. At the same time, the cooling effect can also be optimized through the data of the flow rate, temperature, and pressure of the cooling water, that is, by adjusting the flow rate, temperature, and pressure of the cooling water to regulate the operating parameters of the cooling water to optimize the cooling effect. The data of the flow rate, temperature, and pressure of the cooling water can also provide important clues for fault diagnosis. By analyzing the change trends of the flow rate, temperature, and pressure, the location and cause of the fault can be quickly determined, shortening the repair time and reducing production losses. It is also convenient for fault diagnosis and maintenance. The flow rate and temperature detection unit 21 and the pressure detection unit 22 can also be combined with an automated control system to achieve intelligent management, so that the vacuum pump 100 can operate safely, effectively, and for a long time.

[0034] In a specific embodiment, refer to Figure 3, the vacuum pump 100 may further include a water inlet pipe 3 and a water outlet pipe 4. The water inlet pipe 3 is communicated with the water inlet 11. The water inlet pipe 3 can inject cooling water into the pump body 1 through the water inlet 11. The water outlet pipe 4 is communicated with the water outlet 12. The cooling water can flow out of the pump body 1 through the water outlet pipe 4. Both the flow rate and temperature detection unit 21 and the pressure detection unit 22 are communicated with the water outlet pipe 4. That is, the flow rate and temperature detection unit 21 and the pressure detection unit 22 can respectively detect the flow rate and pressure in the water outlet pipe 4. The ends of the water inlet pipe 3 and the water outlet pipe 4 away from the pump body 1 are preferably communicated with each other. In this way, the cooling water can circulate to realize the recycling of the cooling water, thereby improving the utilization efficiency of the cooling water, reducing the usage cost of the cooling water, and saving water resources.

[0035] As a preferred embodiment, referring to Figure 1 , Figure 2 , the vacuum pump 100 may further include an adapter 5 and a tee joint 6. One end of the adapter 5 can be connected to the water outlet 12, and the other end of the adapter 5 can be connected to the flow rate and temperature detection unit 21. The first end 61 of the tee joint 6 can be connected to the flow rate and temperature detection unit 21, the second end 62 of the tee joint 6 can be connected to the pressure detection unit 22, and the third end 63 of the tee joint 6 can be connected to the water outlet pipe 4. That is to say, the flow rate and temperature detection unit 21 and the pressure detection unit 22 are arranged between the water outlet pipe 4 and the pump body 1. In this way, the flow rate and temperature detection unit 21 and the pressure detection unit 22 can respectively directly detect the flow rate, temperature and pressure of the cooling water flowing out of the pump body 1, preventing the detection accuracy of the flow rate and temperature detection unit 21 and the pressure detection unit 22 from being reduced due to the too far distance between the flow rate and temperature detection unit 21 and the pressure detection unit 22 and the pump body 1, thus ensuring the detection accuracy of the flow rate and temperature detection unit 21 and the pressure detection unit 22.

[0036] Referring to Figure 3 , the vacuum pump 100 may further include a water tank 7. The water inlet pipe 3 and the water outlet pipe 4 can be respectively connected to the water tank 7. The cooling water in the water tank 7 circulates in the pump body 1 through the water inlet pipe 3 and the water outlet pipe 4. Specifically, the cooling water in the water tank 7 enters the pump body 1 through the water inlet pipe 3, and the cooling water flowing out of the pump body 1 enters the water tank 7 through the water outlet pipe 4. The cooling water is cooled down and then continues to participate in the circulation.

[0037] A cooling component 72 may also be provided in the water tank 7. The cooling component 72 is used to lower the temperature of the cooling water in the water tank 7, so as to ensure that the cooling water entering the pump body 1 remains at a low temperature, thereby improving the cooling effect of the cooling water. The monitoring component 2 may also include a first temperature detection unit 23, and the first temperature detection unit 23 is arranged in the water tank 7 and / or the water inlet pipe 3. When the first temperature detection unit 23 detects that the temperature of the cooling water in the water tank 7 and / or the water inlet pipe 3 exceeds a preset value, the cooling component 72 can cool down the cooling water in the water tank 7 so that the temperature of the cooling water in the water tank 7 and / or the water inlet pipe 3 conforms to the preset value. A circulation device (not shown) may also be provided in the water tank 7, and the circulation device is used to make the cooling water in the tank circulate. This can ensure that the temperature of the cooling water in the water tank 7 is more uniform, ensuring the accuracy of the detection data of the first temperature detection unit 23, so that the cooling component 72 can better control the temperature of the cooling water in the water tank 7, and further ensure the cooling effect of the cooling water on the pump body 1.

[0038] In some embodiments, referring to Figure 3 , one end of the water inlet pipe 3 and the water outlet pipe 4 far from the pump body 1 are respectively connected through a cooling pipe 71. The cooling pipe 71 can be arranged in the water tank 7, and the cooling water circulates in the water inlet pipe 3, the water outlet pipe 4, the cooling pipe 71 and the pump body 1. The cooling water in the cooling pipe 71 can exchange heat with the cooling water in the water tank 7, and the shape of the cooling pipe 71 can be one or more of a spiral shape, an S shape and a vortex shape. This can extend the length of the cooling pipe 71, so that the cooling water in the cooling pipe 71 can exchange heat with the cooling water in the water tank 7 for a longer time, the temperature of the cooling water in the cooling pipe 71 is further reduced, and the cooling effect of the cooling water on the pump body 1 is further improved.

[0039] As a preferred method, referring to Figure 3 , the vacuum pump 100 may also include a water pump 8. The water pump 8 can be arranged in the water inlet pipe 3, and the water pump 8 can also be arranged in the water outlet pipe 4. In this embodiment, the water pump 8 is arranged in the water inlet pipe 3, and the water pump 8 is used to drive the flow of the cooling water, that is, the water pump 8 can accelerate the circulating speed of the cooling water in the pump body 1, and can quickly take away the temperature of the pump body 1, realizing the rapid cooling of the pump body 1. The pumping power of the water pump 8 is preferably adjustable. In this way, not only the flow speed of the cooling water can be adjusted, but also the flow rate of the cooling water can be adjusted. According to the temperature of the pump body 1, if the temperature of the pump body 1 is too high, the pumping power of the water pump 8 can be increased to improve the cooling effect of the cooling water.

[0040] Referring to Figure 4, the vacuum pump 100 may further include a controller 9. The controller 9 can be connected to the monitoring component 2, and the controller 9 is capable of controlling the operation of the pump body 1 and / or the water pump 8 according to the detection data of the monitoring component 2. That is to say, the controller 9 can control the operating power of the pump body 1 and the pumping power of the water pump 8 according to the flow rate, temperature and pressure data of the cooling water detected by the flow rate and temperature detection unit 21 and the pressure detection unit 22. When the flow rate and temperature detection unit 21 detects that the temperature of the pump body 1 exceeds the preset value, the controller 9 can control the pump body 1 to reduce the operating power to reduce the heat generation of the pump body 1. The controller 9 can also control the pumping power of the water pump 8 to increase the flow rate and flow of the cooling water to improve the cooling effect of the cooling water, so as to quickly reduce the temperature of the pump body 1. When the first temperature detection unit 23 detects that the cooling water temperature in the water tank 7 and / or the water inlet pipe 3 exceeds the preset value, the cooling component 72 can cool down the cooling water in the water tank 7 to make the cooling water temperature in the water tank 7 and / or the water inlet pipe 3 meet the preset value.

[0041] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Without departing from the principle and purpose of the present invention, those of ordinary skill in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention, and all these changes should fall within the protection scope of the claims of the present invention.

Claims

1. A vacuum pump with a circulating cooling water monitoring component, characterized in that, Comprising: A pump body, on which an inlet and an outlet are provided. The inlet is used for cooling water to enter the pump body, and the outlet is used for the cooling water to leave the pump body. The cooling water is used to take away the heat of the pump body. A monitoring assembly, which includes a flow and temperature detection part and a pressure detection part. The flow and temperature detection part and the pressure detection part are arranged close to the outlet. The flow and temperature detection part is used to detect the flow and temperature of the cooling water at the outlet, and the pressure detection part is used to detect the pressure at the outlet.

2. The vacuum pump with a circulating cooling water monitoring component according to claim 1, characterized in that, It further includes an inlet pipe and an outlet pipe. The inlet pipe injects the cooling water into the pump body through the inlet, and the cooling water flows out of the pump body through the outlet pipe. Both the flow and temperature detection part and the pressure detection part are communicated with the outlet pipe.

3. The vacuum pump with a circulating cooling water monitoring component according to claim 2, characterized in that, It further includes an adapter and a tee joint. One end of the adapter is connected to the outlet, and the other end of the adapter is connected to the flow and temperature detection part. The first end of the tee joint is connected to the flow and temperature detection part, the second end of the tee joint is connected to the pressure detection part, and the third end of the tee joint is connected to the outlet pipe.

4. The vacuum pump with a circulating cooling water monitoring component according to claim 2, characterized in that, It further includes a water tank. The inlet pipe and the outlet pipe are respectively connected to the water tank. The cooling water in the water tank circulates in the pump body through the inlet pipe and the outlet pipe.

5. The vacuum pump with a circulating cooling water monitoring component according to claim 4, characterized in that, The monitoring assembly further includes a first temperature detection part, which is arranged on the water tank and / or the inlet pipe.

6. The vacuum pump with a circulating cooling water monitoring component according to claim 4, characterized in that, A circulation device is arranged in the water tank, and the circulation device is used to make the cooling water in the tank circulate.

7. The vacuum pump with a circulating cooling water monitoring component according to claim 4, characterized in that A cooling assembly is further arranged in the water tank, and the cooling assembly is used to reduce the temperature of the cooling water in the water tank.

8. The vacuum pump with a circulating cooling water monitoring component according to claim 2, characterized in that, It further includes a water pump, which is arranged on the inlet pipe and / or the outlet pipe, and the water pump is used to drive the cooling water to flow.

9. The vacuum pump with a circulating cooling water monitoring component according to claim 8, characterized in that, It further includes a controller, which is connected to the monitoring assembly, and the controller can control the operation of the pump body and / or the water pump according to the detection data of the monitoring assembly.

10. The vacuum pump with a circulating cooling water monitoring component according to claim 1, characterized in that, The inlet is arranged close to the top of the pump body, and the outlet is arranged close to the bottom of the pump body.