Dustproof device for drag chain

Abstract

The utility model relates to the technical field of semiconductor equipment, in particular to a drag chain dust prevention device which comprises a sealing bin, a movable opening formed in the sealing bin, a movable piece connected to the opening end of the movable opening in a sliding mode, a dust prevention piece connected with the movable piece and a driving mechanism, the movable piece is used for being connected with a drag chain body, and the inner end and the outer end of the movable piece are through. The driving mechanism is in driving connection with the moving part, and the driving mechanism drives the moving part to move, so that the dustproof part shields the movable opening; dust can be prevented from entering the sealing bin, dust splashing is avoided, the dustproof effect is improved, and the cleanliness is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a drag chain dust-proof device. Background Art

[0002] A drag chain, also known as a cable protection drag chain, is a device that binds cables, wires, pneumatic hoses, or hydraulic hoses to facilitate their rotation and movement. Drag chains are applied to occasions with reciprocating motion and can play a role in towing and protecting the built-in cables, oil pipes, air pipes, water pipes, etc.

[0003] In semiconductor processing, the drag chain and semiconductor processing equipment are in the same environment. Since it is difficult to prevent dust from splashing during the movement of the drag chain, the dust-proof effect is poor, and the dust-proof effect of the drag chain affects the cleanliness of the semiconductor and the processing accuracy. Summary of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the utility model provides a drag chain dust-proof device, which can prevent dust from entering the sealed chamber, avoid dust splashing, improve the dust-proof effect, and enhance the cleanliness.

[0005] To solve the above technical problems, the utility model adopts the following technical solutions:

[0006] The utility model provides a drag chain dust-proof device, which includes a sealed chamber, a movable opening arranged on the sealed chamber, a moving part slidably connected to the opening end of the movable opening, a dust-proof part connected to the moving part, and a driving mechanism. The moving part is used to connect the drag chain body, both the inner and outer ends of the moving part penetrate through, the driving mechanism is drivingly connected to the moving part, and the driving mechanism drives the moving part to move so that the dust-proof part blocks the movable opening.

[0007] Wherein, an installation cavity communicating with the movable opening is arranged inside the sealed chamber. An air inlet screen is installed at one end of the installation cavity, and a dust exhaust pipe is communicated with the other end of the installation cavity. The air inlet screen is communicated with the installation cavity.

[0008] Wherein, a blower is installed in the installation cavity, and the blower extracts the air at the air inlet screen under negative pressure to push the air in the sealed chamber to be discharged through the dust exhaust pipe.

[0009] Wherein, a plurality of rotating shafts are installed in the sealed chamber. The dust-proof part is sleeved on the rotating shafts. One side of the dust-proof part is attached to the inner end opening side of the movable opening. A gap is left between the dust-proof part and the inner wall of the sealed chamber. A space for accommodating the drag chain body is formed inside the dust-proof part.

[0010] Among them, the moving member is provided with at least two mounting portions, both ends of the dust-proof member are connected with support members, the mounting portion is provided with an adjustment groove, the support member is provided with a support hole, the adjustment groove is penetrated by a locking member, the dust-proof member is provided with a dust-proof mounting hole, the inner end of the locking member passes through the adjustment groove and the dust-proof mounting hole and is locked in the support hole, and the end face of the mounting portion fits against the inner side wall of the movable port.

[0011] Among them, one end of the installation cavity is detachably connected with an air inlet mounting plate, the air inlet mounting plate is provided with an air inlet channel, the air inlet net is installed on the air inlet mounting plate, and the air inlet net is communicated with the air inlet channel.

[0012] The beneficial effects of the present utility model:

[0013] During actual application, the outer end of the drag chain body passes through the moving member and is drivingly connected with the driving mechanism. The outer end of the drag chain body moves synchronously with the driving mechanism, so that the rest of the drag chain body moves in the sealed chamber, effectively hiding the drag chain body and meeting the normal use of the drag chain body; the driving mechanism drives the moving member to move, so that the dust-proof member shields the movable port, preventing dust from entering the sealed chamber, avoiding dust splashing, improving the dust-proof effect and enhancing the cleanliness. Description of the drawings

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the present drag chain dust-proof device.

[0015] Figure 2 It is an exploded structural schematic diagram of the present drag chain dust-proof device lacking a driving mechanism.

[0016] Figure 3 It is an exploded structural schematic diagram of a sealed chamber, a fan and a moving member.

[0017] Figure 4 It is a fracture structural schematic diagram of the present drag chain dust-proof device.

[0018] Figure 5 It is an exploded structural schematic diagram of the connection part between the moving member and the dust-proof member.

[0019] Figure 6 It is an exploded structural schematic diagram of a sealed chamber, an air inlet mounting plate and an air inlet net.

[0020] 01. Drag chain body;

[0021] 1. Sealed chamber; 101. Movable port; 100. Installation cavity; 102. Rotating shaft;

[0022] 2. Moving member; 21. Mounting portion; 211. Adjustment groove; 212. Locking member;

[0023] 3. Dust-proof component; 31. Support member; 311. Support hole; 301. Dust-proof mounting hole;

[0024] 4. Driving mechanism;

[0025] 5. Air inlet net; 501. Air inlet mounting plate; 5011. Air inlet channel;

[0026] 6. Dust exhaust pipe; 7. Fan. Specific embodiments

[0027] For the convenience of understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. The following will describe the specific embodiments of the present invention. It should be noted that in the process of the specific description of these embodiments, for the sake of concise description, it is impossible for this specification to describe all features of the actual embodiments in detail.

[0028] Refer to Figures 1 to 6 As shown, the present utility model provides a drag chain dust-proof device, including a sealed chamber 1, an activity port 101 provided on the sealed chamber 1, a moving member 2 slidably connected to the opening end of the activity port 101, a dust-proof component 3 connected to the moving member 2, and a driving mechanism 4. The moving member 2 is used to connect the drag chain body 01. The inner and outer ends of the moving member 2 penetrate through. The driving mechanism 4 is drivingly connected to the moving member 2. The driving mechanism 4 drives the moving member 2 to move, so that the dust-proof component 3 shields the activity port 101.

[0029] Refer to Figure 1 , 2 As shown, in actual application, the driving mechanism 4 adopts a motor screw module. The outer end of the drag chain body 01 passes through the moving member 2 and is drivingly connected to the driving mechanism 4. The outer end of the drag chain body 01 moves synchronously with the driving mechanism 4, so that the rest of the drag chain body 01 moves in the sealed chamber 1, effectively hiding the drag chain body 01 and meeting the normal use of the drag chain body 01; by driving the moving member 2 to move through the driving mechanism 4, the dust-proof component 3 shields the activity port 101, preventing dust from entering the sealed chamber 1, avoiding dust splashing, improving the dust-proof effect, and enhancing the cleanliness.

[0030] Refer to Figure 2 As shown, in this embodiment, an installation cavity 100 communicating with the activity port 101 is provided inside the sealed chamber 1. An air inlet net 5 is installed at one end of the installation cavity 100, and a dust exhaust pipe 6 is communicated with the other end of the installation cavity 100. The air inlet net 5 is communicated with the installation cavity 100; in actual application, a negative pressure device can be externally connected, so that the air flow is introduced from the air inlet net 5, passes through the sealed chamber 1, and is discharged from the dust exhaust pipe 6, uniformly discharging the dust in the sealed chamber 1 and facilitating the cleaning of the sealed chamber 1.

[0031] Refer to Figure 3As shown in the figure, in this embodiment, a fan 7 is installed in the installation cavity 100. The fan 7 sucks air at the air inlet net 5 under negative pressure to drive the air in the sealed bin 1 to be discharged through the dust exhaust pipe 6. During actual application, the fan 7 blows from the air inlet net 5 to the dust exhaust pipe 6, generating negative pressure at the air inlet net 5 to introduce the outside air flow along the air inlet net 5, and discharging the dust in the sealed bin 1 along the dust exhaust pipe 6 through the air flow, ensuring the normal flow of air in the sealed bin 1 and smoothly discharging the dust in the sealed bin 1.

[0032] Reference Figure 4 As shown in the figure, in this embodiment, a plurality of rotating shafts 102 are installed in the sealed bin 1. The dust-proof member 3 is sleeved on the rotating shafts 102. One side of the dust-proof member 3 is attached to the inner end opening side of the movable port 101. A gap is left between the dust-proof member 3 and the inner wall of the sealed bin 1. A space for accommodating the drag chain body 01 is formed inside the dust-proof member 3. During actual application, specifically, the dust-proof member 3 is a dust-proof belt. The driving mechanism 4 drives the moving member 2 to move, driving the dust-proof member 3 to reciprocate between the rotating shafts 102. The dust-proof member 3 stably supports the moving member 2, and the dust in the sealed bin 1 flows along the gap between the dust-proof member 3 and the sealed bin 1 to the dust exhaust pipe 6, facilitating the discharge of dust. Since one side of the dust-proof member 3 is attached to the inner end opening side of the movable port 101, the dust-proof member 3 effectively blocks the movable port 101, preventing dust from entering the sealed bin 1.

[0033] Reference Figure 5 As shown in the figure, in this embodiment, the moving member 2 is provided with at least two mounting parts 21. Both ends of the dust-proof member 3 are connected with support members 31. The mounting part 21 is provided with an adjustment slot 211, the support member 31 is provided with a support hole 311, a locking member 212 passes through the adjustment slot 211, and the dust-proof member 3 is provided with a dust-proof mounting hole 301. The inner end of the locking member 212 passes through the adjustment slot 211 and the dust-proof mounting hole 301 and is locked in the support hole 311. The end face of the mounting part 21 is attached to the inner side wall of the movable port 101. During actual application, the locking member 212 is a screw and a nut. The screw passes through the adjustment slot 211, the dust-proof mounting hole 301 and the support hole 311. By changing the position of the screw in the adjustment slot 211, the tightness of the dust-proof member 3 can be adjusted, and then the nut is rotated to lock the moving member 2 and the dust-proof member 3.

[0034] Reference Figure 6 As shown in the figure, in this embodiment, one end of the installation cavity 100 is detachably connected with an air inlet mounting plate 501. The air inlet mounting plate 501 is provided with an air inlet channel 5011. The air inlet net 5 is installed on the air inlet mounting plate 501, and the air inlet net 5 is communicated with the air inlet channel 5011. During actual application, the air in the sealed bin 1 is introduced along the air inlet net 5 and the air inlet channel 5011, facilitating the smooth inflow of air. By disassembling and installing the air inlet mounting plate 501, the air inlet net 5 can be removed together, which is beneficial to replacing or cleaning the air inlet net 5 and is convenient for cleaning.

[0035] As described above, it is only a preferred embodiment of the present utility model, and there is no limitation in any form to the present utility model. Although the present utility model is disclosed above with the preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art, without departing from the scope of the technical solution of the present utility model, when making some changes or modifications using the above-disclosed technical content as equivalent embodiments of equivalent changes, but as long as it does not depart from the content of the technical solution of the present utility model, any simple modification, equivalent change and modification made to the above embodiments according to the technology of the present utility model all fall within the scope of the technical solution of the present utility model.

Claims

1. A drag chain dust-proof device, characterized in that, It includes a sealed chamber (1), an activity port (101) provided in the sealed chamber (1), a moving member (2) slidably connected to the opening end of the activity port (101), a dust-proof member (3) connected to the moving member (2), and a driving mechanism (4). The moving member (2) is used to connect the drag chain body (01). The inner and outer ends of the moving member (2) penetrate. The driving mechanism (4) is drivingly connected to the moving member (2), and the driving mechanism (4) drives the moving member (2) to move so that the dust-proof member (3) blocks the activity port (101).

2. The drag chain dust-proof device according to claim 1, characterized in that, An installation cavity (100) communicating with the activity port (101) is provided inside the sealed chamber (1). An air inlet net (5) is installed at one end of the installation cavity (100), and a dust discharge pipe (6) is communicated with the other end of the installation cavity (100). The air inlet net (5) is communicated with the installation cavity (100).

3. The drag chain dust-proof device according to claim 2, characterized in that, A fan (7) is installed in the installation cavity (100). The fan (7) extracts the air at the air inlet net (5) under negative pressure to push the air in the sealed chamber (1) to be discharged through the dust discharge pipe (6).

4. The drag chain dust-proof device according to claim 2, characterized in that, A plurality of rotating shafts (102) are installed in the sealed chamber (1). The dust-proof member (3) is sleeved on the rotating shafts (102). One side of the dust-proof member (3) fits the inner end opening side of the activity port (101). A gap is left between the dust-proof member (3) and the inner wall of the sealed chamber (1). A space for accommodating the drag chain body (01) is formed inside the dust-proof member (3).

5. The drag chain dust-proof device according to claim 4, characterized in that, The moving member (2) is provided with at least two installation parts (21). Both ends of the dust-proof member (3) are connected with support members (31). The installation part (21) is provided with an adjustment slot (211), and the support member (31) is provided with a support hole (311). A locking member (212) passes through the adjustment slot (211). The dust-proof member (3) is provided with a dust-proof installation hole (301). The inner end of the locking member (212) passes through the adjustment slot (211) and the dust-proof installation hole (301) and is locked in the support hole (311). The end face of the installation part (21) fits the inner side wall of the activity port (101).

6. The drag chain dust-proof device according to claim 2, characterized in that An air inlet installation plate (501) is detachably connected to one end of the installation cavity (100). The air inlet installation plate (501) is provided with an air inlet channel (5011). The air inlet net (5) is installed on the air inlet installation plate (501). The air inlet net (5) is communicated with the air inlet channel (5011).

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