SECS / GEM protocol-based semiconductor device communication system and method

Abstract

The invention discloses a semiconductor device communication system and method based on an SECS / GEM protocol. The system comprises an SECS / GEM protocol processing module, a PLC communication module and a service logic processing module. The protocol processing module realizes message coding and decoding and state management through an HSMS / GEM layered architecture, and supports equipment capability dynamic negotiation; the PLC communication module adopts a factory mode to adapt to a multi-manufacturer controller to realize online mapping of a physical register and a logic address; and the business logic module dynamically loads the command processor based on a reflection mechanism, and realizes multi-condition event triggering through a rule engine. The method comprises the processes of system initialization, message priority scheduling, composite alarm processing and exception recovery, and the equipment integration efficiency and the communication reliability are remarkably improved. The method solves the problems of rigid parameter mapping, single event processing and poor equipment compatibility of a traditional scheme, and can be widely applied to equipment automation control of scenes such as semiconductor wafer manufacturing and packaging testing.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment communication, and in particular to a semiconductor equipment communication system and method based on the SECS / GEM protocol. Background Art

[0002] With the advancement of semiconductor manufacturing process technology nodes, the number of control parameters required for production equipment has increased exponentially. A single piece of equipment must monitor thousands of physical quantities, including temperature, pressure, gas flow, and RF power. This significantly increases the frequency of data acquisition and the speed of command responses. For example, in extreme ultraviolet lithography, the optical system requires real-time adjustment of mirror positions to compensate for thermal deformation. The transmission latency of these control commands must be kept within milliseconds. While the widely adopted SECS / GEM protocols provide a standardized framework for device communication, traditional implementations suffer from significant technical bottlenecks. First, the parameter mapping mechanism relies on a static configuration approach, making it incapable of adapting to dynamic process adjustments. Adding new sensors or control nodes to a device requires recompilation of the communication module, resulting in increased production line downtime. Second, the event triggering mechanism is limited to a single threshold, making it difficult to identify complex, multi-parameter anomalies. For example, a combined failure caused by an imbalance in gas ratios and RF power fluctuations within an etching chamber results in a high false alarm rate. Third, compatibility with heterogeneous PLC devices is limited, requiring customized communication drivers for controllers from different vendors, resulting in extended system integration cycles and increased maintenance costs. Therefore, there is an urgent need for a communication system that has dynamic adaptation capabilities, supports multi-dimensional event analysis, and is compatible with multiple types of controllers to meet the stringent requirements of high-end semiconductor manufacturing for equipment integration efficiency and operational reliability. Summary of the Invention

[0003] In order to solve the above technical problems, the present application provides a semiconductor equipment communication system based on the SECS / GEM protocol, including: a SECS / GEM protocol processing module, which is used to implement the encoding and decoding, transmission and communication status control of the SECS / GEM protocol, including: a communication manager, which establishes a TCP / IP long connection with the factory host based on the HSMS protocol and maintains the session life cycle; a state manager, which manages the device communication status through a finite state machine, including offline (OFFLINE), connection ready (CONNECTED) and protocol enabled (ENABLED) states; an HSMS command processor, which parses the Session ID and Transaction ID in the HSMS layer message header and performs message fragmentation and reassembly; a GEM command processor, which implements the device control, data collection and event reporting functions defined in the SEMI E30 standard; a PLC communication module, which is used to interact with the semiconductor equipment controller in real time, including: a PLC manager, which dynamically adapts the communication protocol of Mitsubishi Q series and Siemens S7-1200 series PLCs based on the factory mode;

[0004] The data point mapping unit maps the device's physical I / O points to GEM protocol logical addresses according to the SEMI E5 standard. The business logic processing module is used to execute the event response and control logic defined by the protocol, including: an event triggering engine that generates compound events based on the device data change rate, threshold conditions, and multi-parameter association rules; an alarm classifier that classifies the severity of device alarms according to the SEMIE10 standard and binds them to preset processing strategies; and a reflective command dispatcher that executes control instructions by dynamically loading a processor class that matches the SECS command code (SxFy).

[0005] In one embodiment, the SECS / GEM protocol processing module further includes: a cache manager, which uses a time-sensitive LRU cache queue to store messages to be processed and is configured with an automatic retransmission mechanism based on message TTL; a protocol parser, which parses the Collection and List data structures of the SECS-II message through a recursive descent algorithm to generate an intermediate representation in the Extensible Markup Language (XML) format.

[0006] In one embodiment, the PLC communication module achieves device compatibility by: defining an abstract PLC interface class to encapsulate differentiated read / write operation primitives for the devices; configuring a device type fingerprint library to identify the PLC manufacturer and model based on handshake message features; and loading an adapter plug-in to convert the GEM logical address into the physical register address of the target PLC.

[0007] In one embodiment, the event trigger engine includes: a condition evaluation unit that supports three-level trigger rules of threshold comparison conditions, timing association conditions, and logical combination conditions; an event tracker that records the entire life cycle status of events from triggering, reporting to confirmation, and associates retry strategies and timeout rollback operations.

[0008] In one embodiment, the reflective command dispatcher implements dynamic loading in the following manner: precompiling a mapping table between SxFy command codes and Java annotations; instantiating the corresponding command processor through the class loader according to the Stream and Function values ​​of the received command at runtime; and using the chain of responsibility model to connect multiple processors in series to support pipeline operations of pre-command execution verification, main processing, and post-command logging.

[0009] In one embodiment, it also includes an exception handling subsystem, including: a communication exception recovery unit, which starts an exponential backoff reconnection algorithm after detecting a network interruption and caches unconfirmed messages; an instruction conflict arbiter, which handles resource competition problems of concurrent control instructions based on a priority queue; and a safety degradation controller, which switches to read-only mode and suspends the execution of non-core instructions when the device status is abnormal.

[0010] The present invention also provides an embodiment, including a semiconductor device communication method based on the SECS / GEM protocol, the working steps of which include: initialization phase: loading the device capability description file, negotiating communication parameters including the T3 timeout period and the number of message retries; verifying the integrity of the data point mapping table of the device controller through the PLC handshake protocol; protocol message processing phase: receiving the SECS-II message from the factory host, parsing the DeviceID and System Bytes fields in the message header; routing the message to the corresponding GEM business processor according to the Stream value, and forwarding it to the HSMS layer for processing if Stream=1; device interaction phase: for read operation instructions, reading the original data from the PLC register and converting it to engineering units according to the E5 standard; for write operation instructions, converting the GEM protocol parameter value into the physical quantity of the target PLC and writing it into the control register. Business logic execution phase: when it is detected that the device parameter crosses the dynamic threshold, generating a CEID event message containing a timestamp, parameter ID, and deviation value;

[0011] A recommended action field is added to the EALARM alarm message, and a level 0-3 response strategy is configured according to the severity level; the control logic is executed by calling the method that matches the received command SxFy through the Java reflection API.

[0012] In one embodiment, the event triggering rules include: setting a dead-band filter for analog parameters, triggering an event when the change exceeds 1% of the full scale; configuring a combinational logic condition for discrete parameters, triggering a compound alarm when three associated IO states are abnormal at the same time.

[0013] In one embodiment, message processing adopts a priority scheduling mechanism: a real-time processing queue is allocated to control instructions such as S1F1 / S1F2, with a response delay of ≤50ms; a batch processing queue is allocated to data acquisition instructions such as S6F11 / S6F12, allowing a maximum delay of 500ms.

[0014] In one of the embodiments, during the abnormal recovery phase, the following is performed: event messages during the communication interruption are reissued in the order of CEID numbers and marked as delayed reports; when the number of retries exceeds the maximum value defined by ECD, the unconfirmed messages are transferred to the local database and an SNMP alarm is generated.

[0015] Beneficial effects

[0016] The present invention provides a semiconductor equipment communication system and method based on the SECS / GEM protocol, which realizes systematic innovation in the field of semiconductor equipment communication through modular architecture design and dynamic logic loading mechanism: dynamically expands the protocol instruction processing capability based on reflection technology, enables the system to flexibly adapt to the functions of new equipment without interrupting operation, and significantly improves the efficiency of production line upgrades; adopts the factory model to build a unified device driver adaptation layer, combines the device fingerprint recognition technology to quickly match heterogeneous controllers, and breaks through the compatibility bottleneck of multi-vendor PLC equipment integration in traditional solutions; innovatively introduces a multi-dimensional composite event trigger engine, upgrades the single threshold judgment to a comprehensive The three-dimensional analysis model covering numerical mutations, timing correlations and logical combinations can accurately capture the complex abnormal patterns hidden in equipment operation and significantly reduce the risks of false alarms and missed alarms. Through layered caching strategies and time-sensitive hierarchical transmission mechanisms, the efficiency of massive data processing is optimized while ensuring the real-time performance of key control instructions. Combined with redundant link design and intelligent retransmission strategies, it effectively responds to industrial network fluctuations and ensures communication continuity in complex environments. The modular architecture and open interface design further enhance the maintainability of the system, supporting users to dynamically adjust event rules or expand device drivers according to production line needs, providing sustainable technical support for the continuous optimization and intelligent upgrading of semiconductor manufacturing processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0018] Figure 1 A system block diagram provided for an embodiment of the present invention;

[0019] Figure 2 A diagram of working steps provided for another embodiment of the present invention. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0021] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0022] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0023] Example 1

[0024] In order to solve the above technical problems, the present application provides a semiconductor equipment communication system based on the SECS / GEM protocol, including: a SECS / GEM protocol processing module, which is used to implement the encoding and decoding, transmission and communication status control of the SECS / GEM protocol, including: a communication manager, which establishes a TCP / IP long connection with the factory host based on the HSMS protocol and maintains the session life cycle; a state manager, which manages the device communication status through a finite state machine, including offline (OFFLINE), connection ready (CONNECTED) and protocol enabled (ENABLED) states; an HSMS command processor, which parses the Session ID and Transaction ID in the HSMS layer message header and performs message fragmentation and reassembly; a GEM command processor, which implements the device control, data collection and event reporting functions defined in the SEMI E30 standard; a PLC communication module, which is used to interact with the semiconductor equipment controller in real time, including: a PLC manager, which dynamically adapts the communication protocol of Mitsubishi Q series and Siemens S7-1200 series PLCs based on the factory mode;

[0025] The data point mapping unit maps the device's physical I / O points to GEM protocol logical addresses according to the SEMIE5 standard. The business logic processing module is used to execute the event response and control logic defined by the protocol, including: an event triggering engine that generates compound events based on the device data change rate, threshold conditions, and multi-parameter association rules; an alarm classifier that classifies the severity of device alarms according to the SEMIE10 standard and binds them to preset processing strategies; and a reflective command dispatcher that executes control instructions by dynamically loading a processor class that matches the SECS command code (SxFy).

[0026] The semiconductor device communication system of this invention adopts a layered architecture design. Through the coordinated operation of the protocol processing layer, the device interaction layer, and the business logic layer, it builds an industrial communication platform with high compatibility, dynamic scalability, and intelligent event processing. The system's core implementation logic is centered around three technical dimensions: SECS / GEM protocol stack parsing, heterogeneous device adaptation, and multi-dimensional event triggering. This provides a full-link communication solution from physical device access to factory-level applications.

[0027] During the system initialization phase, the device capability description (ECD) file is loaded to complete basic configuration. This file, in XML format, defines the SECS message types supported by the device, data collection point mapping rules, and communication parameter thresholds. The system establishes an HSMS connection with the factory host via a TCP three-way handshake and configures session parameters based on the T3 timeout (default 15 seconds) and maximum retry count (typically three) negotiated in the ECD. Simultaneously, the PLC handshake protocol is initiated, sending a signature detection message to the device controller. The vendor identifier in the response message (such as the ASCII code "MELSEC" for Mitsubishi Electric) is matched against the device type fingerprint library and the corresponding communication adapter plug-in is dynamically loaded. During this process, the system verifies the integrity of the mapping between PLC register addresses and SEMI E5 standard logical addresses. If undefined data points are found, an alarm is triggered and the initialization process is suspended to ensure the reliability of subsequent communications.

[0028] The protocol message processing stage adopts an asynchronous event-driven model. Upon receiving a SECS-II message from the factory host, the HSMS command processor first parses the DeviceID field in the message header to authenticate the device and verifies the continuity of the SystemBytes field to prevent message duplication or loss. For HSMS control messages with a Stream value of 1 (such as the S1F13 session establishment request), the communication manager directly handles link layer state transitions. Other business messages are routed to the corresponding GEM processor based on the Stream and Function codes. The protocol parser uses a recursive descent algorithm to decompose nested data structures within the message body layer by layer. For example, it converts a List structure containing wafer processing parameters into an intermediate XML format, facilitating the extraction of key fields by subsequent business modules. During this process, the cache manager assigns different LRU queues based on the message's timeliness (e.g., high priority for control instructions, normal priority for data acquisition) and starts a TTL timer to monitor unacknowledged messages. Upon timeout, a retransmission mechanism with a backoff strategy is automatically triggered.

[0029] The core of the device interaction layer is to achieve bidirectional data conversion between GEM logical addresses and physical devices. For read operation instructions (such as S2F23 to read device variables), the PLC communication module locates the physical address of the target register (such as the D1000 register of the Mitsubishi Q series) according to the mapping table. After reading the original binary data, it performs linear conversion according to the engineering units defined by the SEMIE5 standard. For example, a 16-bit integer 0-65535 is mapped to a floating-point percentage value of 0-100.0%. Write operation instructions (such as S2F41 to set process parameters) perform the reverse conversion, converting the parameter value issued by the protocol layer (such as a temperature setpoint of 250.0°C) into a physical quantity representation supported by the PLC (such as the digital value 2048 of a 12-bit analog output), and ensuring the integrity of register updates through atomic write operations. To achieve compatibility with PLCs from multiple manufacturers, the abstract interface layer encapsulates differentiated communication primitives. For example, the ISO-on-TCP protocol is used to encapsulate data block read and write requests for the Siemens S7-1200, while the FINS / TCP protocol conversion is used for the Omron NJ series.

[0030] During the business logic execution phase, an event triggering engine enables intelligent response. This engine incorporates a three-level condition evaluation mechanism: the base layer monitors threshold violations of individual data points (e.g., chamber pressure exceeding 5kPa) and employs a deadband filtering algorithm to prevent false triggering caused by signal jitter. The middle layer analyzes temporal correlations (e.g., failure to reach the set vacuum level within 10 seconds after the vacuum pump is started) and matches pre-set patterns using a sliding time window. The upper layer supports multi-parameter logical combinations (e.g., temperature anomalies and insufficient cooling water flow), employing the Rete algorithm to optimize rule matching efficiency. When complex conditions are met, the engine generates a CEID event message with a timestamp, device ID, and a snapshot of detailed parameters. It also invokes an alarm classifier to assign severity levels according to the SEMIE10 standard: Level 0 alerts are logged, Level 1 triggers audible and visual notifications, Level 2 automatically executes pre-configured emergency procedures (e.g., shutting down the RF power supply), and Level 3 severe faults initiate a shutdown request to the MES system. All event statuses are maintained in real time by a tracker, ensuring traceability throughout the entire lifecycle from triggering, reporting, and confirmation. Rollback actions are initiated if a timeout is missed.

[0031] The reflective command dispatcher uses metaprogramming technology to achieve dynamic expansion of protocol functionality. The system predefines SECS command codes, such as the mapping relationship between remote control instructions and Java annotations corresponding to S7F19, and builds a processor instance pool during the class loading phase. When an unknown Stream / Function combination is received, a temporary processor is created through dynamic bytecode generation technology and registered with the responsibility chain. Command execution adopts a pipeline mode: the pre-verifier verifies the message format compliance, and the main processor executes the business logic. For example, when modifying the device operating mode, the post-logger generates an audit log and updates the communication state machine. This mechanism makes it possible to implement protocol expansion by simply adding annotation-driven processor classes when adding new device functions, without restarting the system.

[0032] The exception handling subsystem builds a multi-layer defense mechanism to ensure the robustness of the system. The communication anomaly recovery unit monitors the TCP link status in real time. When a network interruption is detected, it starts the exponential backoff reconnection algorithm (the first retry interval is 1 second, and the subsequent intervals increase by 2^n). At the same time, the local cache queue is enabled to temporarily store pending messages. The command conflict arbitrator uses a priority queue to manage concurrent requests. For example, device calibration commands take precedence over status query commands to ensure the real-time nature of critical operations. When the safety degradation controller detects persistent anomalies, it automatically switches to read-only mode and suspends non-core operations to prevent erroneous commands from causing damage to the equipment. All abnormal events generate SNMP trap messages with error codes for centralized monitoring by the upper-level management system.

[0033] In terms of performance optimization, the system employs a timeliness-based hierarchical strategy to improve processing efficiency. High-priority control instructions are assigned to a separate thread pool, ensuring response latency below 50ms. Data collection messages are transmitted using batch compression, allowing for latency of less than 500ms to reduce network load. The cache manager implements differentiated retention strategies based on message type: transactional messages are released immediately after successful processing, while historical data is retained in memory until the entire packet is transmitted and then persisted to the database. This layered design effectively addresses the challenges of massive data transmission in semiconductor factories while ensuring real-time performance.

[0034] The system supports customized production line requirements through open interfaces. Users can expand device capability descriptions by modifying ECD files, such as adding data collection points for new sensors or adjusting event trigger thresholds. The device driver layer provides a plug-in development framework, allowing manufacturers to implement adapters for specific PLCs according to abstract interface specifications and integrate them into the system through a fingerprint registration mechanism. The event rule engine supports a graphical configuration interface, allowing process engineers to define multi-level trigger conditions and adjust business logic without modifying code.

[0035] The deployment and implementation of this communication system significantly enhances the interoperability of semiconductor manufacturing equipment. Through standardized protocol conversion and intelligent event processing, it enables real-time visualization of equipment status, remote control of process parameters, and rapid response to anomalies. A dynamic expansion mechanism adapts to the needs of iterative upgrades of production line equipment, while a highly reliable communication design ensures stable operation in complex industrial environments, providing the underlying technical support for the transformation to intelligent manufacturing.

[0036] Example 2

[0037] The present invention also provides an embodiment, including a semiconductor device communication method based on the SECS / GEM protocol, the working steps of which include: initialization phase: loading the device capability description file, negotiating communication parameters including the T3 timeout period and the number of message retries; verifying the integrity of the data point mapping table of the device controller through the PLC handshake protocol; protocol message processing phase: receiving the SECS-II message from the factory host, parsing the DeviceID and System Bytes fields in the message header; routing the message to the corresponding GEM business processor according to the Stream value, and forwarding it to the HSMS layer for processing if Stream=1; device interaction phase: for read operation instructions, reading the original data from the PLC register and converting it to engineering units according to the E5 standard; for write operation instructions, converting the GEM protocol parameter value into the physical quantity of the target PLC and writing it into the control register. Business logic execution phase: when it is detected that the device parameter crosses the dynamic threshold, generating a CEID event message containing a timestamp, parameter ID, and deviation value;

[0038] A recommended action field is added to EALARM alarm messages, and a response strategy with severity levels of 0-3 is configured. The control logic is executed by calling the execut method matching the received command SxFy via the Java Reflection API. Event triggering rules include: setting deadband filtering for analog parameters to trigger an event when the change exceeds 1% of the full scale; configuring combinational logic conditions for discrete parameters to trigger a compound alarm when three associated I / O states are simultaneously abnormal. Message processing utilizes a priority scheduling mechanism: control instructions such as S1F1 / S1F2 are assigned a real-time processing queue with a response latency of ≤50ms; data acquisition instructions such as S6F11 / S6F12 are assigned a batch processing queue with a maximum latency of 500ms.

[0039] During the abnormal recovery phase, the following steps are executed: event messages during the communication interruption are resent in CEID number order and marked as delayed reports; when the number of retries exceeds the maximum value defined by ECD, unconfirmed messages are transferred to the local database and an SNMP alarm is generated.

[0040] The present invention provides a semiconductor equipment communication system and method based on the SECS / GEM protocol, which realizes systematic innovation in the field of semiconductor equipment communication through modular architecture design and dynamic logic loading mechanism: dynamically expands the protocol instruction processing capability based on reflection technology, enables the system to flexibly adapt to the functions of new equipment without interrupting operation, and significantly improves the efficiency of production line upgrades; adopts the factory model to build a unified device driver adaptation layer, combines the device fingerprint recognition technology to quickly match heterogeneous controllers, and breaks through the compatibility bottleneck of multi-vendor PLC equipment integration in traditional solutions; innovatively introduces a multi-dimensional composite event trigger engine, upgrades the single threshold judgment to a comprehensive The three-dimensional analysis model covering numerical mutations, timing correlations and logical combinations can accurately capture the complex abnormal patterns hidden in equipment operation and significantly reduce the risks of false alarms and missed alarms. Through layered caching strategies and time-sensitive hierarchical transmission mechanisms, the efficiency of massive data processing is optimized while ensuring the real-time performance of key control instructions. Combined with redundant link design and intelligent retransmission strategies, it effectively responds to industrial network fluctuations and ensures communication continuity in complex environments. The modular architecture and open interface design further enhance the maintainability of the system, supporting users to dynamically adjust event rules or expand device drivers according to production line needs, providing sustainable technical support for the continuous optimization and intelligent upgrading of semiconductor manufacturing processes.

[0041] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention description and drawings under the inventive concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A semiconductor equipment communication system based on SECS / GEM protocol, characterized in that: include: The SECS / GEM protocol processing module implements SECS / GEM protocol encoding and decoding, transmission, and communication status control. It includes: a communication manager, which establishes a TCP / IP persistent connection with the factory host based on the HSMS protocol and maintains the session lifecycle; a state manager, which manages device communication status, including offline, connection-ready, and protocol-enabled states, through a finite state machine; and an HSMS command processor, which parses the Session ID and Transaction ID in the HSMS layer message header and performs message fragmentation and reassembly. GEM command processor for equipment control, data collection, and event reporting functions defined in the SEMI E30 standard; The PLC communication module is used for real-time data interaction with semiconductor equipment controllers. It includes: a PLC manager that dynamically adapts the PLC's communication protocol based on factory mode; Data point mapping unit maps the physical I / O points of the device to GEM protocol logical addresses according to the SEMIE5 standard; The business logic processing module is used to execute the event response and control logic defined by the protocol, including: an event triggering engine that generates compound events based on the device data change rate, threshold conditions, and multi-parameter association rules; The event alarm processing module classifies the severity of equipment alarms according to the SEMI E10 standard and binds preset processing strategies; the reflective command distributor executes control instructions by dynamically loading the processor class that matches the SECS command code.

2. The semiconductor equipment communication system based on the SECS / GEM protocol according to claim 1, characterized in that: The SECS / GEM protocol processing module also includes: Cache manager, the LRU cache queue of the branch office stores the pending messages and configures the automatic retransmission mechanism based on the message; The protocol parser parses the message data structure through a recursive descent algorithm and generates an intermediate representation in the extensible markup language format.

3. The semiconductor equipment communication system based on SECS / GEM protocol according to claim 1, characterized in that: The PLC communication module achieves device compatibility through the following methods: Define an abstract PLC interface class to encapsulate differentiated read and write operation primitives of the device; Configure the device type fingerprint library to identify PLC manufacturers and models based on handshake message features; Load the adapter plug-in to convert the GEM logical address to the physical register address of the target PLC.

4. The semiconductor equipment communication system based on SECS / GEM protocol according to claim 1, characterized in that: The event triggering engine includes: Condition evaluation unit, supporting three-level trigger rules of threshold comparison conditions, timing association conditions and logical combination conditions; The event tracker records the entire life cycle of events from triggering, reporting to confirmation, and associates retry strategies and timeout rollback operations.

5. The semiconductor equipment communication system based on SECS / GEM protocol according to claim 1, characterized in that: The reflective command dispatcher implements dynamic loading in the following ways: Mapping table between precompiled command codes and Java; At runtime, the corresponding command processor is instantiated through the class loader according to the Stream and Function values ​​of the received command; The responsibility chain model is used to connect multiple processors in series, supporting pipeline operations such as pre-command verification, main processing, and post-command logging.

6. The semiconductor equipment communication system based on SECS / GEM protocol according to claim 1, characterized in that: It also includes an exception handling subsystem, including: The communication anomaly recovery unit starts the exponential backoff reconnection algorithm after detecting a network interruption and caches unconfirmed messages; Instruction conflict arbiter, which handles resource competition issues of concurrent control instructions based on priority queues; A safe degradation controller switches to read-only mode and suspends non-core instruction execution when the device status is abnormal.

7. A semiconductor device communication method based on the SECS / GEM protocol, applied to the semiconductor device communication system based on the SECS / GEM protocol according to claims 1-6, characterized in that: include: Load the device capability description file and negotiate communication parameters including T3 timeout and message retry count; Verify the integrity of the data point mapping table of the device controller through the PLC handshake protocol; Receive SECS-II messages from the factory host and parse the fields in the message header; route the message to the corresponding GEM service processor based on the Stream value; if Stream = 1, forward it to the HSMS layer for processing; For read operation instructions, read the original data from the PLC register and convert it into engineering units according to the E5 standard; For write operation instructions, the GEM protocol parameter values ​​are converted into physical quantities of the target PLC and written into the control register. When it is detected that the device parameters cross the dynamic threshold, a CEID event message containing a timestamp, parameter ID, and deviation value is generated. A recommended handling action field is attached to the alarm message, and a level 0-3 response strategy is configured according to the severity level. The control logic is executed by calling the method that matches the received command through the Java reflection API.

8. The communication method according to claim 7, wherein: Event triggering rules include: Set dead zone filtering for analog parameters, and trigger an event when the change exceeds the full scale; Configure combinational logic conditions for discrete quantity parameters to trigger a compound alarm when the three associated IO states are abnormal at the same time.

9. The communication method according to claim 7, wherein: Message processing adopts a priority scheduling mechanism: Allocate real-time processing queues for control instructions such as S1F1 / S1F2, with response delay ≤ 50ms; Assign batch processing queues to data acquisition instructions such as S6F11 / S6F12, allowing a maximum delay of 500ms.

10. The communication method according to claim 7, wherein: During the abnormal recovery phase, execute: For event messages during communication interruption, they are resent in CEID number order and marked as delayed reports. When the number of retries exceeds the maximum value defined by ECD, the unconfirmed messages are transferred to the local database and an alarm is generated.

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