Solar cell film thickness acquisition device

Abstract

The utility model relates to a solar cell film thickness acquisition device which comprises a spectrum detection module, a light source module and at least one integrating sphere. Wherein each integrating sphere is respectively connected with the spectrum detection module and the light source module, and each integrating sphere is respectively arranged above different preset to-be-detected point positions of a to-be-detected battery. Therefore, the effect of collecting the scattered light beams by the integrating sphere is good, and more reflected light beams can be collected and dodging can be carried out by utilizing the integrating sphere to collect the reflected light beams, so that more reflected light beams can be transmitted to the spectrum detection module. And then the spectrum detection module is used for collecting the reflected light beam after dodging, so that the detection accuracy of the poly-s i film thickness of the solar cell can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of battery film thickness acquisition, and particularly relates to a device for acquiring the film thickness of a solar cell. Background Technique

[0002] Crystalline silicon solar cells have become the first choice for low-cost solar cells due to their low price, but the room for improving their photoelectric conversion efficiency is limited. Back contact solar cell (PERC) technology, tunnel oxide passivated contact solar cell (Top-con) technology, and interdigitated back contact cell (IBC) technology are the main technologies for improving the efficiency of silicon solar cells. Among them, the Top-con structure has attracted much attention in the development of high-performance solar cells, and introducing a tunnel oxide layer between the substrate and polysilicon is the best method to achieve interface passivation. Among them, the thickness and doping level of the polysilicon (poly-si) thin film have a great influence on the power generation efficiency of solar cells. Therefore, it is very necessary to detect the poly-si film thickness of solar cells.

[0003] At present, most domestic photovoltaic enterprises use single-point online non-contact measurement technology to accurately measure the thickness of polysilicon thin films. However, single-point measurement cannot monitor the poly-si thickness of the entire cell, and obviously cannot meet the process evaluation of poly-si doping levels. Multi-point measurement generally uses off-line testing or directly uses the single-point superposition method for detection. On the one hand, off-line testing takes a long time and requires a lot of manpower. On the other hand, the single-point superposition method has a high cost and is relatively complex for customers to operate during use. Therefore, the prior art provides a POLY-SI film thickness test device based on solar cells, which irradiates different detection positions of the solar cell with a light beam and obtains the corresponding reflected light beam, and calculates using the information carried by the reflected light beam to obtain the poly-si film thickness at different detection positions of the solar cell. However, due to the poor flatness of the sample surface, more light is scattered, and the direct monitoring probe has poor ability to collect scattered light, resulting in low detection accuracy of the poly-si film thickness of solar cells. Content of the Utility Model

[0004] Aiming at the deficiencies in the prior art, the utility model provides a device for acquiring the film thickness of a solar cell, which solves the problem of low detection accuracy of the poly-si film thickness of solar cells in the prior art.

[0005] To solve the above technical problems, the utility model provides a device for acquiring the film thickness of a solar cell, including: a spectral detection module, a light source module, and at least one integrating sphere; wherein, each of the integrating spheres is respectively connected to the spectral detection module and the light source module, and each of the integrating spheres is respectively arranged above different preset measurement points of the battery to be measured;

[0006] The light source module is configured to form a detection beam and transmit the detection beam to each of the integrating spheres;

[0007] For each of the integrating spheres, it is configured to irradiate the detection beam to the corresponding preset point to be measured, obtain the reflected beam formed after the detection beam is reflected by the corresponding preset point to be measured, and transmit the homogenized reflected beam to the spectral detection module through the receiving end of the integrating sphere.

[0008] The beneficial effects of the present utility model are as follows: The detection beam is formed by the light source module, and each integrating sphere is used to irradiate the detection beam on the preset points to be measured respectively. The detection beam will be reflected on the preset points to be measured of the battery to be measured, and the formed reflected beam returns to the integrating sphere and undergoes diffuse reflection in the integrating sphere to achieve light homogenization. Then, the integrating sphere transmits the homogenized reflected beam to the spectral detection module. The integrating sphere has a good effect of collecting scattered light beams. Using the integrating sphere to collect the reflected beam can collect more reflected beams and homogenize them, so that more reflected beams can be transmitted to the spectral detection module. Then, the spectral detection module is used to collect the homogenized reflected beam, thereby improving the detection accuracy of the poly-si film thickness of the solar cell.

[0009] On the basis of the above technical solution, the present utility model can be further improved as follows:

[0010] Further, the light source module includes a light source unit and at least one first optical fiber; wherein, the number of the first optical fibers is the same as the number of the integrating spheres, and one of the first optical fibers is connected to one of the integrating spheres;

[0011] The light source unit is configured to form the detection beam;

[0012] For each of the first optical fibers, it is configured to transmit the detection beam to the corresponding integrating sphere.

[0013] The beneficial effect of adopting the above further solution is that since the loss of the beam during conduction in the optical fiber is small, using the light source unit and the first optical fiber to form the light source module can transmit the detection beam to the integrating sphere with low loss, reduce the beam loss, and achieve energy saving.

[0014] Further, the light source unit includes an LED light source.

[0015] The beneficial effect of adopting the above further solution is that selecting the LED light source as the light source unit can meet the requirements of the poly-si film thickness of the solar cell for the detection beam.

[0016] Further, the light source unit includes a halogen light source.

[0017] The beneficial effects of adopting the above further solution are as follows: Selecting a halogen light source as the light source unit can meet the requirements of the poly-si film thickness of the solar cell for the detection beam.

[0018] Further, the light source unit includes a xenon light source.

[0019] The beneficial effects of adopting the above further solution are as follows: Selecting a xenon light source as the light source unit can meet the requirements of the poly-si film thickness of the solar cell for the detection beam.

[0020] Further, a device for collecting the film thickness of a solar cell further includes at least one second optical fiber. The number of the second optical fibers is the same as the number of the integrating spheres. One end of one second optical fiber is connected to the corresponding integrating sphere through one receiving end, and the other end is connected to the spectral detection module;

[0021] For each of the second optical fibers, it is used to transmit the homogenized reflected beam to the spectral detection module.

[0022] The beneficial effects of adopting the above further solution are as follows: Since the loss of the beam is small when it is conducted in the optical fiber, using the second optical fiber to transmit the homogenized reflected beam to the spectral detection module can reduce the loss of the beam during transmission in the optical fiber, which can not only save energy but also ensure that the spectral detection module receives the homogenized reflected beam with sufficient luminous flux.

[0023] Further, a device for collecting the film thickness of a solar cell further includes: a grasping mechanism and an industrial control computer; the industrial control computer is respectively connected to the grasping mechanism and the spectral detection module;

[0024] The spectral detection module is used to convert each of the homogenized reflected beams into corresponding wavelength information and transmit each of the wavelength information to the industrial control computer;

[0025] The grasping mechanism is used to grasp the battery to be measured when the industrial control computer determines that the film thickness at any preset measurement point of the battery to be measured is abnormal based on each of the wavelength information.

[0026] The beneficial effects of adopting the above further solution are as follows: When the grasping mechanism determines that any preset measurement point of the battery to be measured is abnormal according to the industrial control computer, it grasps the battery to be measured, so that the batteries to be measured with abnormalities and those without abnormalities can be separated, which is convenient for sorting all the batteries to be measured.

[0027] Further, a device for collecting the film thickness of a solar cell further includes: an alarm module; the alarm module is connected to the industrial control computer;

[0028] The alarm module is used to issue an alarm prompt when the industrial control computer determines that the film thickness of any preset measurement point of the battery under test is abnormal based on each wavelength information.

[0029] The beneficial effect of adopting the above further solution is that when the alarm module determines that there is an abnormality in any preset measurement point of the battery under test according to the industrial control computer, it issues an alarm prompt so that the staff can know in time that the film thickness of the battery under test is abnormal.

[0030] Further, a device for collecting the film thickness of a solar cell further includes: a display, and the display is connected to the industrial control computer;

[0031] The display is used to display the film thickness of each preset measurement point of the battery under test when receiving the film thickness of all preset measurement points of the battery under test determined by the industrial control computer based on each wavelength information.

[0032] The beneficial effect of adopting the above further solution is that the display shows the film thickness of each preset measurement point of the battery under test, which is convenient for the staff to timely understand the detection situation of the battery under test.

[0033] Further, a device for collecting the film thickness of a solar cell further includes: a transmission mechanism; wherein, the transmission mechanism is arranged below each integrating sphere;

[0034] The transmission mechanism is used to respectively transmit each preset measurement point of the battery under test to below each integrating sphere.

[0035] The beneficial effect of adopting the above further solution is that the transmission mechanism outputs each preset measurement point of the battery under test to below each integrating sphere, which is convenient for detecting the battery under test, can save the time for the staff to place the battery under test below each integrating sphere, and improves the collection efficiency. Description of the Drawings

[0036] Figure 1 It is a schematic structural diagram of a device for collecting the film thickness of a solar cell provided by the present invention;

[0037] Figure 2 It is a schematic structural diagram of an integrating sphere provided by the present invention;

[0038] Figure 3 It is a schematic structural diagram of another device for collecting the film thickness of a solar cell provided by the present invention. Detailed Embodiment

[0039] The principles and features of the present invention are described below with reference to the drawings. The examples given are only used to explain the present invention and are not intended to limit the scope of the present invention.

[0040] The spectral detection module converts the collected reflected light beam into corresponding wavelength information, which can be used to characterize the film thickness of a preset measurement point. If the collected light beam is uneven, it will affect the corresponding wavelength information, resulting in a large error in the detection data expressed by the wavelength information.

[0041] Combined with Figure 1 as shown Figure 1 There is provided a collecting device 100 for the film thickness of a solar cell. For the sake of easy understanding, Figure 1 only one integrating sphere and one preset measurement point are shown. A collecting device 100 for the film thickness of a solar cell includes a spectral detection module 101, a light source module 102, and at least one integrating sphere 103. Among them, each integrating sphere 103 is respectively connected to the spectral detection module 101 and the light source module 102, and each integrating sphere 103 is respectively disposed above different preset measurement points 105 of the battery under test 104. The light source module 102 is used to form a detection light beam 106 and transmit the detection light beam to each integrating sphere. For each integrating sphere 103, it is used to irradiate the detection light beam onto the corresponding preset measurement point 105, obtain the reflected light beam (not shown) formed after the detection light beam is reflected by the corresponding preset measurement point, and transmit the homogenized reflected light beam to the spectral detection module 101 through the receiving end of the integrating sphere.

[0042] Using the above-mentioned collecting device for the film thickness of a solar cell, a detection light beam is formed by the light source module, and each integrating sphere is used to irradiate the detection light beam on the preset measurement points respectively. The detection light beam will be reflected on the preset measurement points of the battery under test, and the formed reflected light beam returns to the integrating sphere and undergoes diffuse reflection in the integrating sphere to achieve light homogenization. Then the integrating sphere transmits the homogenized reflected light beam to the spectral detection module. The integrating sphere has a good effect on collecting scattered light beams. Using the integrating sphere to collect the reflected light beam can collect more reflected light beams and perform light homogenization, so that more reflected light beams can be transmitted to the spectral detection module. Then the spectral detection module is used to collect the homogenized reflected light beam, thereby improving the detection accuracy of the poly-si film thickness of the solar cell.

[0043] The battery under test in this embodiment is a solar cell. The solar cell has multiple layers of films, including poly-si film, SiO2 film, etc. The light wave of the detection beam will be refracted and reflected back and forth multiple times between the 1st to nth layers at the preset measurement point of the solar cell (when the film layers at the preset measurement point are multiple layers), thereby forming multiple coherent polarized beams. After these coherent polarized beams are coherently superimposed, they carry the coherent signals of the multiple thin films and return along the original path to form a reflected beam. Therefore, the coherent signals in the reflected beam carry the film thickness information of each layer of film at the preset measurement point. That is, the reflected beam carries the film thickness information of the poly-si film, SiO2 film, etc. at the preset measurement point. Therefore, in this embodiment, in addition to being able to collect the poly-si film thickness, the thicknesses of other film layers can also be collected. Among them, the coherent signal of the reflected beam is specifically manifested as the wavelength information of the reflected beam. Therefore, the film thickness situation can be obtained by collecting the reflected beam.

[0044] It can be understood that the preset measurement points of the battery under test in this embodiment can be adjusted according to actual needs, and the positions of the respective integrating spheres are adjusted accordingly, so that each integrating sphere can irradiate the detection beam to the corresponding preset measurement point, realizing multi-point synchronous testing of the battery under test. At the same time, considering factors such as space size and production rhythm, the film thickness collection device can be integrated and optimized. For example, multiple sets of film thickness collection devices are set. In this way, the number of collection devices is set according to the space size and production rhythm, so as to realize online real-time detection of each battery under test.

[0045] Preferably, in combination with Figure 2 as shown Figure 2An integrating sphere 300 is provided. The integrating sphere is an integrating sphere with an 8-degree angle of incidence and a 90-degree angle of reception. For example, a reflectance integrating sphere. The integrating sphere 300 includes a sphere 301. The sphere 301 is a hollow sphere with a highly reflective inner surface, and is provided with an incident end 307 (i.e., a light inlet), an irradiation port 303, and a receiving end 304 (i.e., a light outlet). For ease of understanding, a battery under test 306 is also shown in this embodiment. A collimating mirror 302 is provided at the incident end 307, and the incident end 307 is incident at an 8-degree angle with respect to the normal line 305; the irradiation port 303 is provided at the bottom of the sphere, and the irradiation port 303 is at a 0-degree angle with respect to the normal line. The preset measurement point of the battery under test 306 is placed directly below the irradiation port 303; the receiving end 304 is perpendicular to the normal line 305 and is connected to the spectral detection module. Since the integrating sphere is a relatively mature prior art and uses the functions of the integrating sphere itself to collect, dissipate heat, and homogenize the light beam to homogenize the received light beam, this embodiment will not be elaborated herein. In this embodiment, the light source module collimates the detection light beam into a parallel light beam through the collimating mirror, and irradiates it onto the corresponding preset measurement point at an 8-degree angle through the incident end, and receives the reflected light beam reflected back through the irradiation port. The reflected light beam undergoes diffuse reflection inside the sphere to achieve light homogenization, and finally the homogenized reflected light beam is output from the receiving end of the integrating sphere at a 90-degree angle and transmitted to the spectral detection module.

[0046] In addition, in this embodiment, using the integrating sphere to homogenize the reflected light beam can also increase the detection span, that is, it is applicable not only to thin film measurement (the thickness of the solar cell poly-si film in the range of 1 - 2000 nm belongs to thin film), but also to thick film measurement (the thickness of the solar cell poly-si film in the range of 2 - 400 um belongs to thick film).

[0047] Preferably, the light source module includes a light source unit and at least one first optical fiber; wherein, the number of the first optical fibers is the same as the number of the integrating spheres, and one first optical fiber is connected to one of the integrating spheres. The light source unit is used to form a detection light beam. For each first optical fiber, it is used to transmit the detection light beam to the corresponding integrating sphere. In this way, since the loss of the light beam is small when it is conducted in the optical fiber, using the light source unit and the first optical fiber to form the light source module can transmit the detection light beam to the integrating sphere with low loss, reduce the light beam loss, and achieve energy saving. Specifically, one end of the first optical fiber is connected to the incident end of the integrating sphere to transmit the detection light beam to the incident end of the integrating sphere, and the other end of the first optical fiber is connected to the light source unit.

[0048] It can be understood that the number of the first optical fibers corresponds one-to-one to the number of the integrating spheres, and the integrating spheres connected with the first optical fibers are not connected to other optical fibers repeatedly.

[0049] Preferably, the light source unit includes an LED light source. In this way, by selecting the LED light source as the light source unit, the requirements of the poly-si film thickness of the solar cell for the detection beam can be met.

[0050] In some embodiments, the LED light source includes a power supply and an LED bulb. The power supply is used to supply electrical energy to the LED bulb, and the LED bulb emits LED light to form a detection beam.

[0051] Preferably, the light source unit includes a halogen light source. In this way, by selecting the halogen light source as the light source unit, the requirements of the poly-si film thickness of the solar cell for the detection beam can be met.

[0052] In some embodiments, the halogen light source includes a power supply and a halogen bulb. The power supply is used to supply electrical energy to the halogen bulb, and the halogen bulb emits halogen light to form a detection beam.

[0053] Preferably, the light source unit includes a xenon light source. In this way, by selecting the xenon light source as the light source unit, the requirements of the poly-si film thickness of the solar cell for the detection beam can be met.

[0054] In some embodiments, the xenon light source includes a power supply and a xenon bulb. The power supply is used to supply electrical energy to the xenon bulb, and the xenon bulb emits xenon light to form a detection beam.

[0055] It can be understood that the color temperature, energy consumption, and light brightness of the LED light source, halogen light source, and xenon light source are all different. And in different test environments, the required detection beams will also vary. Therefore, according to the different test environments, selecting one of the LED light source, halogen light source, and xenon light source that meets the detection requirements can meet the requirements of the poly-si film thickness of the solar cell for the detection beam.

[0056] Preferably, a solar cell film thickness acquisition device further includes at least one second optical fiber. The number of second optical fibers is the same as the number of integrating spheres. One end of a second optical fiber is connected to the corresponding integrating sphere through a receiving end, and the other end is connected to the spectral detection module. For each second optical fiber, it is used to transmit the homogenized reflected beam to the spectral detection module. In this way, since the loss of the beam during conduction in the optical fiber is small. In this way, using the second optical fiber to transmit the homogenized reflected beam to the spectral detection module can reduce the loss of the beam during transmission in the optical fiber, which can not only save energy but also ensure that the spectral detection module receives the homogenized reflected beam with sufficient luminous flux.

[0057] Preferably, a device for collecting the film thickness of a solar cell further includes: a grasping mechanism and an industrial control computer; the industrial control computer is respectively connected to the grasping mechanism and the spectral detection module. The spectral detection module is configured to convert each homogenized reflected light beam into corresponding wavelength information and transmit each wavelength information to the industrial control computer. The grasping mechanism is configured to grasp the solar cell to be measured when the industrial control computer determines that the film thickness at any preset measurement point of the solar cell to be measured is abnormal based on each wavelength information.

[0058] In this way, when the grasping mechanism determines that any preset measurement point of the solar cell to be measured is abnormal according to the industrial control computer, it grasps the solar cell to be measured, so that the solar cells to be measured with abnormalities can be separated from those without abnormalities, facilitating the sorting of all solar cells to be measured.

[0059] In some embodiments, the spectral detection module includes a beam splitting element, a CCD linear array detector, an optical fiber interface, and a communication interface. Among them, the spectral detection module is connected to the second optical fiber through the optical fiber interface and connected to the industrial control computer through the communication interface. The beam splitting element is configured to split and focus the reflected light beam transmitted through the second optical fiber and then conduct it to the CCD linear array detector. The CCD linear array detector then converts the reflected light beam after splitting and focusing into corresponding wavelength information, that is, converts it into corresponding spectral information, and transmits it to the industrial control computer through the communication interface. It can be understood that the spectral detection module is actually a spectrometer, and it is a relatively mature existing technology for a spectrometer to convert a light beam into corresponding wavelength information, so it will not be elaborated here.

[0060] In some embodiments, the industrial control computer stores the wavelength information obtained under the irradiation of a detection light beam for different film thicknesses of solar cells. Since the coherent signals corresponding to different film thicknesses are different, the corresponding wavelength information will also be different. Therefore, the industrial control computer matches the wavelength information transmitted by the spectral detection module with the stored wavelength information, and thus determines the film thickness corresponding to the matched wavelength information as the film thickness at the preset measurement point, so as to synchronously obtain the optical parameters (thickness, refractive index, extinction coefficient) of the poly-si film at each preset measurement point and achieve accurate measurement of the overall refractive index and thickness. If the film thickness at the preset measurement point is not within the range of the preset film thickness, it is considered that the film thickness at this preset measurement point is abnormal. The industrial control computer is actually an industrial control computer, which is a relatively mature existing technology and will not be elaborated here. For example, if the preset film thickness of the poly-si film is 1 nm - 150 nm, and the film thickness of the poly-si film at the preset measurement point is 155 nm, it is considered that the film thickness at this preset measurement point is abnormal. At this time, the grasping mechanism is triggered to perform the grasping operation. It can be understood that the industrial control computer is a traditional industrial computer and will not be elaborated here.

[0061] It can be understood that the battery to be measured includes a single-layer film or a multi-layer film. When the film layer of the battery to be measured is a multi-layer film, since the interference light signals formed by the reflection of each layer of film are different, the industrial control computer can distinguish different layers of film from the returned interference light signals (i.e., wavelength information) and obtain the film thicknesses of films such as pi ly-si film and SiO2 film.

[0062] In some embodiments, the grasping mechanism is a manipulator. In the offline mode, the staff can manually detect the film thickness at different positions of the battery cell. This mode is mostly used for experimental comparative research. In the online mode, it is docked with automation and uses TCP / IP or IO communication methods to realize the connection between the acquisition device and the automation. During the acquisition process, the pipeline equipment (such as the transmission mechanism) is used to sequentially transfer the preset measurement points of each battery to be measured to the lower part of the corresponding integrating sphere. The light source module, integrating sphere, spectral detection module and industrial control computer are used to collect or detect the film thickness. If the film thickness parameter at a certain preset measurement point exceeds the set range, it is determined that the battery to be measured is NG, and then the preset NG signal is returned to the automation, and the NG piece is quickly grabbed out by the manipulator. In addition, the light source module emits a detection beam and passes through the integrating sphere. After communication with the software poly through automation, that is, each detection beam emitted by the light source detection is marked with the battery to be measured, and each detection beam corresponds to a reflected beam, so as to realize the one-to-one correspondence and marking between the battery to be measured and the reflected beam, so as to ensure the traceability of each battery to be measured.

[0063] Preferably, a device for collecting the film thickness of a solar cell further includes: an alarm module; the alarm module is connected to the industrial control computer. The alarm module is used to issue an alarm prompt when the industrial control computer determines that the film thickness at any preset measurement point of the battery to be measured is abnormal based on each wavelength information. In this way, when the alarm module determines that there is an abnormality at any preset measurement point of the battery to be measured according to the industrial control computer, it issues an alarm prompt so that the staff can know in time that the film thickness of the battery to be measured is abnormal.

[0064] In some embodiments, the alarm module is an alarm. A buzzer is arranged in the alarm for emitting a sound to achieve an alarm prompt.

[0065] Preferably, a device for collecting the film thickness of a solar cell further includes: a display, and the display is connected to the industrial control computer. The display is used to display the film thicknesses of all preset measurement points of the battery to be measured when receiving the film thicknesses of all preset measurement points of the battery to be measured determined by the industrial control computer based on each wavelength information. In this way, the display shows the film thicknesses of all preset measurement points of the battery to be measured, which is convenient for the staff to timely understand the detection situation of the battery to be measured.

[0066] Preferably, a solar cell film thickness acquisition device further includes: a transmission mechanism; wherein, the transmission mechanism is arranged below each integrating sphere. The transmission mechanism is used to respectively transmit each preset measurement point of the battery to be measured below each integrating sphere. In this way, by using the transmission mechanism to output each preset measurement point of the battery to be measured below each integrating sphere, it is convenient to detect the battery to be measured, which can save the time for staff to place the battery to be measured below each integrating sphere, and realize the detection of the poly-si film thickness of the solar cell in a pipeline manner, improving the acquisition efficiency.

[0067] It can be understood that the transmission mechanism in this embodiment is a common transmission device or pipeline for transmitting materials. Based on the requirements of the preset measurement points, the position of the integrating sphere is adaptively adjusted so that the battery to be measured can transmit each preset point below the corresponding integrating sphere. Thus, the poly-si film thickness of each battery to be measured can be detected in a pipeline manner. Since multiple integrating spheres can be used in this embodiment to simultaneously detect the poly-si film thickness of multiple preset measurement points of a battery to be measured, the multi-point synchronous detection of the poly-si film thickness of the battery to be measured is realized. Combined with the conveying mechanism, the acquisition device in this embodiment can realize the online real-time synchronous monitoring of the multi-point film thickness during the manufacturing process of the solar cell coating, so as to control the quality of the battery to be measured.

[0068] In some embodiments, combined with Figure 3 as shown Figure 3 Another solar cell film thickness acquisition device 200 is provided, including a spectral detection module 201, a light source unit 202, a plurality of first optical fibers 203, a plurality of integrating spheres 204, a plurality of second optical fibers 205, an industrial control computer 206, a pipeline 207, and a display 208. Among them, the spectral detection module 201 is provided with an access end and a signal transmission end. The number of the first optical fibers 203 corresponds to the number of the integrating spheres 204 one by one. One end of each first optical fiber 203 is respectively connected to the light source unit 202, and the other end is connected to and only connected to one integrating sphere 204. For the sake of understanding, Figure 3 each first optical fiber 203 connecting each integrating sphere 204 one by one is not shown. The number of the integrating spheres 204 corresponds to the number of the preset measurement points 210 of the battery to be measured 209 one by one, and each integrating sphere 204 is respectively arranged above the corresponding preset measurement point 210. The number of the second optical fibers 205 corresponds to the number of the integrating spheres 204 one by one. One end of each second optical fiber 205 is respectively connected to one integrating sphere 204, and the other end is connected to the access end of the spectrometer 201. For the sake of understanding, Figure 3It is not shown that each second optical fiber 205 is connected to the integrating sphere 204 and the spectral detection module 201 one by one. Only one second optical fiber 205 connecting one integrating sphere 204 and the spectral detection module 201 is taken as an example. The industrial control computer 206 is connected to the signal transmission end of the spectral detection module 201 through a USB data cable, and the display 208 is connected to the industrial control computer 206 through a USB data cable. A plurality of batteries to be measured 209 are sequentially placed on the production line 207, and each integrating sphere 204 is arranged at a preset position above the production line 207 so that the production line 207 can respectively convey each preset point 210 of the battery to be measured 209 to the position below the corresponding integrating sphere 204.

[0069] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present invention.

[0070] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0071] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0072] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature may mean that the first feature is directly below or obliquely below the second feature, or merely indicates that the horizontal height of the first feature is less than that of the second feature.

[0073] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0074] Although the embodiments of the present utility model have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present utility model. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present utility model.

Claims

1. An acquisition device for the film thickness of a solar cell, characterized in that, It includes a spectral detection module, a light source module, and at least one integrating sphere; wherein, each of the integrating spheres is respectively connected to the spectral detection module and the light source module, and each of the integrating spheres is respectively disposed above different preset measurement points of the battery under test. The light source module is configured to form a detection beam and transmit the detection beam to each of the integrating spheres. For each of the integrating spheres, it is configured to irradiate the detection beam to the corresponding preset measurement point, obtain a reflected beam formed after the detection beam is reflected by the corresponding preset measurement point, and transmit the homogenized reflected beam to the spectral detection module through the receiving end of the integrating sphere.

2. The device according to claim 1, wherein, The light source module includes a light source unit and at least one first optical fiber; wherein, the number of the first optical fibers is the same as the number of the integrating spheres, and one of the first optical fibers is connected to one of the integrating spheres. The light source unit is configured to form the detection beam. For each of the first optical fibers, it is configured to transmit the detection beam to the corresponding integrating sphere.

3. The device according to claim 2, characterized in that The light source unit includes an LED light source.

4. The device according to claim 2, characterized in that, The light source unit includes a halogen light source.

5. The device according to claim 2, characterized in that, The light source unit includes a xenon light source.

6. The device according to claim 1, characterized in that, It further includes at least one second optical fiber, the number of the second optical fibers is the same as the number of the integrating spheres, and one end of one of the second optical fibers is connected to the corresponding integrating sphere through one of the receiving ends, and the other end is connected to the spectral detection module. For each of the second optical fibers, it is configured to transmit the homogenized reflected beam to the spectral detection module.

7. The device according to any one of claims 1 to 6, characterized in that It further includes a grasping mechanism and an industrial control computer; the industrial control computer is respectively connected to the grasping mechanism and the spectral detection module. The spectral detection module is configured to convert each of the homogenized reflected beams into corresponding wavelength information and transmit each of the wavelength information to the industrial control computer. The grasping mechanism is configured to grasp the battery under test when the industrial control computer determines that the film thickness at any of the preset measurement points of the battery under test is abnormal based on each of the wavelength information.

8. The device according to claim 7, characterized in that, It further includes an alarm module; the alarm module is connected to the industrial control computer. The alarm module is configured to give an alarm prompt when the industrial control computer determines that the film thickness at any of the preset measurement points of the battery under test is abnormal based on each of the wavelength information.

9. The device according to claim 7, characterized in that, It further includes a display, and the display is connected to the industrial control computer. The display is configured to display the film thickness of each of the preset measurement points of the battery under test when receiving the film thickness of all the preset measurement points of the battery under test determined by the industrial control computer based on each of the wavelength information.

10. The device according to any one of claims 1 to 6, characterized in that It further includes a transmission mechanism; wherein, the transmission mechanism is disposed below each of the integrating spheres. The transmission mechanism is configured to respectively transmit each of the preset measurement points of the battery under test to below each of the integrating spheres.

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