Semiconductor measurement circuit, driving device and semiconductor measurement system
By using amplifiers and self-calibration modules in semiconductor measurement circuits, the high cost of measuring small value resistances and complex environments of high-precision instruments is solved, and high-precision and low-cost resistance measurement is achieved.
Patent Information
- Application Number
- CN202421579335.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-05
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-07-05
AI Technical Summary
The problem of high-precision instruments in the prior art is expensive to measure small value resistances and complex environmental construction.
The semiconductor measurement circuit is adopted, including an amplifier and a measurement module, and the semiconductor voltage signal is obtained through the amplifier and output to the measurement module. At the same time, the voltage signal is calibrated by a self-calibration module, reducing costs and simplifying the environment construction.
It improves the accuracy of small value resistance measurement, reduces costs, and simplifies the construction process of the measurement environment.
Smart Images
Figure CN223092078U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor measurement, and particularly relates to a semiconductor measurement circuit, a driving device and a semiconductor measurement system. Background Art
[0002] In the field of semiconductor resistance measurement, the accurate determination of resistance value has always been an important direction of technological development. Traditional resistance testing methods are mainly used for the measurement of conventional resistance values. However, with the continuous progress of semiconductor technology, the demand for the measurement of micro-resistance values is increasing day by day, and the requirements for measurement accuracy are also getting higher and higher.
[0003] In the prior art, the measurement of resistance usually adopts Ohm's law, that is, the current and voltage of the resistance are obtained to calculate the resistance value. In this way, the accurate resistance value can be obtained only by measuring the voltage of the current flowing through the resistance with a test device.
[0004] For the measurement of micro-resistance values, high-precision instruments are generally used for testing. Although such instruments can provide relatively high measurement accuracy, they are often costly and the environmental setup is complex. Summary of the Utility Model
[0005] The purpose of the utility model is to provide a semiconductor measurement circuit, a driving device and a semiconductor measurement system to solve the technical problems of high cost and complex environmental setup in the prior art when using high-precision instruments to obtain voltage for measuring semiconductors.
[0006] To achieve one of the above-mentioned utility model purposes, an embodiment of the utility model provides a semiconductor measurement circuit, and the circuit includes: an amplifier, a first input end of the amplifier is coupled to a signal output end of a semiconductor device, a second input end of the amplifier is coupled to a reference ground, and an output end of the amplifier is coupled to the measurement module;
[0007] The measurement module is also coupled to the signal output end of the semiconductor device;
[0008] Wherein, the signal output end of the semiconductor device is used for outputting a voltage signal, and the measurement module is configured to detect and acquire the voltage signal of the semiconductor device.
[0009] As a further improvement of the utility model, the circuit further includes: the measurement module has a first input end and a second input end, the output end of the amplifier is coupled to the first input end of the measurement module, and the signal output end of the semiconductor device is coupled to the second input end of the measurement module;
[0010] The measurement module is configured to receive the voltage signal of the semiconductor device at the first input end and / or the second input end.
[0011] As a further improvement of the present utility model, the circuit further includes: the output end of the amplifier is coupled to the measurement module through a first switching tube, and the signal output end of the semiconductor device is coupled to the measurement module through a second switching tube.
[0012] As a further improvement of the present utility model, the circuit further includes: a power supply module, the power supply module is coupled to the input end of the semiconductor device; the power supply module is used to output current or voltage to the semiconductor device.
[0013] As a further improvement of the present utility model, the circuit further includes: a self-calibration module and a power supply module, the power supply module is coupled to the self-calibration module and is used to output current to the self-calibration module, and the self-calibration module is coupled to the measurement module;
[0014] The measurement module is further configured to calibrate the voltage signal of the semiconductor device based on the resistance signal and current signal of the self-calibration module.
[0015] As a further improvement of the present utility model, the circuit further includes: the power supply module is connected in series with the self-calibration module, and the measurement module is connected in parallel with the self-calibration module, and the measurement module is used to obtain the voltage signal of the self-calibration module.
[0016] As a further improvement of the present utility model, the circuit further includes: the self-calibration module includes a first resistor, a first end of the first resistor is coupled to the power supply module, a second end of the first resistor is coupled to the reference ground, and the power supply module is used to output current flowing through the first resistor;
[0017] Both ends of the first resistor are further respectively coupled to the measurement module, and the measurement module is used to detect the voltage across the first resistor.
[0018] As a further improvement of the present utility model, the circuit further includes: the self-calibration module further includes a second resistor and a third resistor, one end of the first resistor is coupled to the power supply module through the second resistor, and the other end of the first resistor is coupled to the reference ground through the third resistor;
[0019] The self-calibration module further includes a fourth resistor and a fifth resistor, one end of the first resistor is coupled to the measurement module through the fourth resistor, and the other end of the first resistor is coupled to the measurement module through the fifth resistor.
[0020] The present utility model further provides a driving device, and the driving device includes the semiconductor measurement circuit as described in any one of the above.
[0021] The present utility model further provides a semiconductor measurement system, which includes the driving device as described above, and further includes a host computer, and the host computer is communicatively connected to the driving device.
[0022] Compared with the prior art, the present utility model has the following beneficial effects: By providing an amplifier, the voltage of the semiconductor can be obtained and the small voltage can be amplified and output to the measurement module; at the same time, the measurement module can also directly obtain the voltage signal of the semiconductor, and thus the voltage can be selectively obtained, and when the voltage is small, it is obtained by amplification, which ensures the accuracy of the measurement of the small-value voltage, reduces the cost, and simplifies the environmental setup. Description of the Drawings
[0023] Figure 1 is a schematic block diagram of a semiconductor measurement circuit in an embodiment of the present utility model.
[0024] Figure 2 is a schematic block diagram of connecting a measurement module through a first switching tube and a second switching tube in an embodiment of the present utility model.
[0025] Figure 3 is a schematic connection diagram of a self-calibration module in an embodiment of the present utility model.
[0026] Figure 4 is a circuit structure diagram of a semiconductor measurement circuit in an embodiment of the present utility model. Detailed Embodiments
[0027] The present utility model will be described in detail below with reference to the specific embodiments shown in the drawings. However, these embodiments do not limit the present utility model, and any structural, method, or functional transformation made by those of ordinary skill in the art based on these embodiments is included in the protection scope of the present utility model.
[0028] In one embodiment, a semiconductor measurement circuit is provided. The semiconductor measurement circuit is applied to the field of semiconductor measurement. Specifically, it can be used to measure the resistance value of a semiconductor; by obtaining the current flowing through the semiconductor and the voltage across the resistance, the resistance value can be obtained using Ohm's law.
[0029] It should be noted that a known current can be output to the semiconductor, and the voltage on both sides of the semiconductor can be detected, so as to detect the resistance value of the semiconductor.
[0030] The semiconductor measurement circuit is used to detect the voltage across the semiconductor to calculate the resistance value of the semiconductor device 2. Specifically, as Figure 1 shown, the semiconductor measurement circuit includes an amplifier A and a measurement module 1; the amplifier A is used to amplify the voltage signal output by the semiconductor device 2, and the measurement module 1 is used to obtain the voltage signal output by the semiconductor device 2.
[0031] The first input terminal of the amplifier A is coupled to the signal output terminal of the semiconductor device 2, the second input terminal of the amplifier A is coupled to the reference ground, and the output terminal of the amplifier A is coupled to the measurement module 1; the measurement module 1 is also coupled to the signal output terminal of the semiconductor device 2.
[0032] Wherein, the signal output terminal of the semiconductor device 2 is used to output a voltage signal, and the measurement module 1 is configured to detect and acquire the voltage signal of the semiconductor device 2.
[0033] In this way, on the one hand, the measurement module 1 is directly connected to the semiconductor device 2, and on the other hand, it is connected to the semiconductor device 2 through the amplifier A, and the voltage signal of the semiconductor device 2 can be acquired respectively, significantly improving the accuracy and convenience of voltage measurement. This solution not only ensures the direct and efficient acquisition of voltage data, reduces the loss and interference in the signal transmission process, but also further improves the measurement accuracy through the precise amplification of the smaller voltage signal by the amplifier A.
[0034] In the above embodiment, the measurement module 1 can adopt a BMU (Battery Management Unit) module, which can detect parameters such as voltage, current and ambient temperature in the semiconductor device 2 in real time. It has functions such as voltage monitoring, current detection, temperature monitoring, insulation monitoring, and relay status monitoring.
[0035] The amplifier A can adopt an amplifier A of model X10.
[0036] In one embodiment, the measurement module 1 can selectively conduct and receive the voltage signal directly from the semiconductor device 2 or the voltage signal from the output terminal of the amplifier A.
[0037] In one embodiment, the measurement module 1 can receive the voltage signal directly from the semiconductor device 2 and the voltage signal from the output terminal of the amplifier A at the same time.
[0038] In one implementation, the measurement module 1 has a first input terminal and a second input terminal. The output terminal of the amplifier A is coupled to the first input terminal of the measurement module 1, and the signal output terminal of the semiconductor device 2 is coupled to the second input terminal of the measurement module 1;
[0039] The measurement module 1 is configured to receive the voltage signal of the semiconductor device 2 at the first input terminal and / or the second input terminal.
[0040] In this way, by distinguishing the first input terminal and the second input terminal to receive voltage signals from different sources respectively, the interference between signals is prevented, the detected voltage value is more accurate, and thus the resistance value of the semiconductor device 2 calculated is also more accurate.
[0041] In one embodiment, the measurement module 1 includes a switching component, and the switching component can switch to connect to the first input terminal or the second input terminal. When the switching component switches to the first input terminal, the measurement module 1 receives the voltage signal at the output terminal of the amplifier A, that is, it receives the amplified voltage signal. When the switching component switches to the second input terminal, the measurement module 1 receives the voltage signal directly from the semiconductor device 2.
[0042] The switching component can be a circuit module with multi-channel inputs corresponding to a single-channel output.
[0043] In one implementation, as Figure 2 shown, the output terminal of the amplifier A is coupled to the measurement module 1 through the first switching transistor K1, and the signal output terminal of the semiconductor device 2 is coupled to the measurement module 1 through the second switching transistor K2.
[0044] In this way, the on or off of the switching transistors can be controlled to selectively receive voltage signals. The switching transistors have a fast response time, low drive power, little influence on current and voltage signals, and strong stability.
[0045] When the first switching transistor K1 is turned on and the second switching transistor K2 is turned off, the measurement module 1 obtains the voltage signal at the output terminal of the amplifier A, that is, it obtains the amplified voltage signal.
[0046] When the second switching transistor K2 is turned on and the first switching transistor K1 is turned off, the measurement module 1 directly obtains the voltage signal at the signal output terminal of the semiconductor device 2.
[0047] Among them, the first switching transistor K1 and the second switching transistor K2 can use MOS transistors.
[0048] In one implementation, as Figure 3 shown, it further includes a power supply module 3, and the power supply module 3 is coupled to the input terminal of the semiconductor device 2; the power supply module 3 is used to output current or voltage to the semiconductor device 2.
[0049] The power supply module 3 can provide a stable supply current or supply voltage to the semiconductor device 2.
[0050] The power supply module 3 can be characterized as a current source or a voltage source. When it is a current source, the output current flows through the semiconductor device 2. When it is a voltage source, the output voltage, and the current formed by the voltage flows through the semiconductor device 2.
[0051] Specifically, one end of the semiconductor device 2 is connected to the power supply module 3 for receiving current, and the other end is coupled to the reference ground.
[0052] The power supply module 3 integrates a reference ground terminal, and both ends of the semiconductor device 2 are connected to the corresponding ports of the power supply module 3.
[0053] The second input terminal of the amplifier A can also be coupled to the reference ground terminal of the power supply module 3.
[0054] In one embodiment, as Figure 3 shown, it further includes a self-calibration module 4 and a power supply module 3. The power supply module 3 is coupled to the self-calibration module 4 for outputting a current to the self-calibration module 4, and the self-calibration module 4 is coupled to the measurement module 1; the measurement module 1 is further configured to calibrate the voltage signal of the semiconductor device 2 based on the resistance signal and the current signal of the self-calibration module 4.
[0055] In this way, the self-calibration module 4 can calibrate the measurement accuracy of the measurement module 1, avoid the calculation deviation of the resistance value caused by the deviation of the acquired voltage signal, and ensure more accurate and reliable measurement of the semiconductor.
[0056] Based on the principle of Ohm's law, the self-calibration module 4 obtains the voltage value of the self-calibration module 4 through a fixed resistor and a fixed current output by the power supply module 3, compares the voltage of the self-calibration module 4 acquired by the measurement module 1, calculates the deviation of the voltage signal, and thus calibrates the voltage signal of the semiconductor device 2 obtained by measurement, and further can calibrate the resistance of the semiconductor device 2 obtained by measurement.
[0057] Specifically, the self-calibration module 4 can adopt any one of a four-wire measurement circuit, a three-wire measurement circuit, a two-wire measurement circuit, etc.
[0058] It should be noted that the power supply module 3 in this embodiment can be independent of the power supply module 3 in the previous embodiment or can be the same shared power supply module 3, which will not be explained here.
[0059] Further, the power supply module 3 is connected in series with the self-calibration module 4, and the measurement module 1 is connected in parallel with the self-calibration module 4. The measurement module 1 is used to obtain the voltage signal of the self-calibration module 4.
[0060] By connecting the power supply module 3 in series with the self-calibration module 4, a fixed current is output to the self-calibration module 4.
[0061] By connecting the measurement module 1 in parallel with the self-calibration module 4, the voltage of the self-calibration module 4 is detected.
[0062] Through the above method, the voltage of the self-calibration module 4 can be detected, and the deviation of the voltage can be obtained according to the fixed voltage obtained by the fixed resistor and the fixed current, so that the voltage signal of the semiconductor device 2 can be calibrated.
[0063] In one embodiment, as Figure 4 shown, the self-calibration module 4 includes a first resistor R1. The first end of the first resistor R1 is coupled to the power supply module 3, and the second end of the first resistor R1 is coupled to the reference ground. The power supply module 3 is configured to output a current flowing through the first resistor R1;
[0064] Both ends of the first resistor R1 are further respectively coupled to the measurement module 1, and the measurement module 1 is configured to detect the voltage across the first resistor R1.
[0065] By measuring the voltage value across the first resistor R1 and comparing it with the voltage value generated by the fixed current output by the power supply module 3 flowing through the first resistor R1, an accurate measurement deviation can be obtained, thereby accurately calibrating the measurement module 1.
[0066] In one embodiment, the self-calibration module 4 further includes a second resistor R2 and a third resistor R3. One end of the first resistor R1 is coupled to the power supply module 3 through the second resistor R2, and the other end of the first resistor R1 is coupled to the reference ground through the third resistor R3;
[0067] The self-calibration module 4 further includes a fourth resistor R4 and a fifth resistor R5. One end of the first resistor R1 is coupled to the measurement module 1 through the fourth resistor R4, and the other end of the first resistor R1 is coupled to the measurement module 1 through the fifth resistor R5.
[0068] Using the second resistor R2 and the third resistor R3 as well as the fourth resistor R4 and the fifth resistor R5 to form a four-wire system for measuring the first resistor R1 effectively eliminates the influence of the resistance of the measurement wire on the measurement result; and it can be applied to resistance tests at different frequencies, including different operating frequencies such as direct current, low frequency, and high frequency.
[0069] In one embodiment, the signal output end of the semiconductor device 2 is coupled to the measurement module 1 through a first current-limiting resistor X1.
[0070] The first input end of the amplifier A is coupled to the signal output end of the semiconductor device 2 through a second current-limiting resistor X2; the second input end of the amplifier A is coupled to the reference ground through a third current-limiting resistor X3.
[0071] The output end of the amplifier A is coupled to the measurement module 1 through a fourth current-limiting resistor X4.
[0072] There is also a connection between the fourth current-limiting resistor X4 and the third current-limiting resistor X3 through a fifth current-limiting resistor X5.
[0073] The first current-limiting resistor X1 is also coupled to the first input terminal of the amplifier A through a sixth current-limiting resistor X6, and the measurement module 1 is coupled between the first current-limiting resistor X1 and the sixth current-limiting resistor X6 to directly obtain a voltage signal from the semiconductor device 2.
[0074] Further, those skilled in the art can configure the connections of the other terminals of the amplifier A according to the prior art. For details, please refer to the figure shown, which will not be elaborated here.
[0075] In one embodiment, a driving device is further provided, including the semiconductor measurement circuit described in any one of the above embodiments.
[0076] In one embodiment, a semiconductor measurement system is further provided, including the driving device in the above embodiment, and a host computer; the host computer is communicatively connected to the driving device.
[0077] The host computer can be used to control the measurement module 1 in the driving device to measure the voltage of the semiconductor device 2; at the same time, the host computer can also calculate the resistance value of the semiconductor device 2 according to the measurement result.
[0078] It should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
[0079] The series of detailed descriptions listed above are only specific descriptions of the feasible embodiments of the present invention, and they are not intended to limit the protection scope of the present invention. Any equivalent embodiments or changes made without departing from the technical spirit of the present invention should be included in the protection scope of the present invention.
Claims
1. A semiconductor measurement circuit, characterized in that, Comprising an amplifier and a measurement module: The first input terminal of the amplifier is coupled to the signal output terminal of the semiconductor device, the second input terminal of the amplifier is coupled to the reference ground, and the output terminal of the amplifier is coupled to the measurement module; The measurement module is further coupled to the signal output terminal of the semiconductor device; Wherein, the signal output terminal of the semiconductor device is used to output a voltage signal, and the measurement module is configured to detect and acquire the voltage signal of the semiconductor device.
2. The semiconductor measurement circuit according to claim 1, wherein The measurement module has a first input terminal and a second input terminal, the output terminal of the amplifier is coupled to the first input terminal of the measurement module, and the signal output terminal of the semiconductor device is coupled to the second input terminal of the measurement module; The measurement module is configured to receive the voltage signal of the semiconductor device at the first input terminal and / or the second input terminal.
3. The semiconductor measurement circuit according to claim 1, wherein The output terminal of the amplifier is coupled to the measurement module through a first switching transistor, and the signal output terminal of the semiconductor device is coupled to the measurement module through a second switching transistor.
4. The semiconductor measurement circuit according to claim 1, wherein, It further includes a power supply module, and the power supply module is coupled to the input terminal of the semiconductor device; the power supply module is used to output current or voltage to the semiconductor device.
5. The semiconductor measurement circuit according to claim 1, characterized in that, It further includes a self-calibration module and a power supply module, the power supply module is coupled to the self-calibration module and is used to output current to the self-calibration module, and the self-calibration module is coupled to the measurement module; The measurement module is further configured to calibrate the voltage signal of the semiconductor device based on the resistance signal and current signal of the self-calibration module.
6. The semiconductor measurement circuit according to claim 5, wherein The power supply module is connected in series with the self-calibration module, and the measurement module is connected in parallel with the self-calibration module, and the measurement module is used to acquire the voltage signal of the self-calibration module.
7. The semiconductor measurement circuit according to claim 5, characterized in that, The self-calibration module includes a first resistor, the first end of the first resistor is coupled to the power supply module, the second end of the first resistor is coupled to the reference ground, and the power supply module is used to output current flowing through the first resistor; Both ends of the first resistor are further respectively coupled to the measurement module, and the measurement module is used to detect the voltage across the first resistor.
8. The semiconductor measurement circuit according to claim 7, wherein The self-calibration module further includes a second resistor and a third resistor, one end of the first resistor is coupled to the power supply module through the second resistor, and the other end of the first resistor is coupled to the reference ground through the third resistor; The self-calibration module further includes a fourth resistor and a fifth resistor, one end of the first resistor is coupled to the measurement module through the fourth resistor, and the other end of the first resistor is coupled to the measurement module through the fifth resistor.
9. A driving device, characterized in that, Comprising the semiconductor measurement circuit according to any one of claims 1 to 8.
10. A semiconductor measurement system, characterized in that, Comprising the driving device according to claim 9, and further including a host computer, and the host computer is communicatively connected to the driving device.