Curved lens field lens switching structure
Through the curved lens field mirror adaptation structure and heat dissipation design, the problem of large space and pollution of imaging light in laser direct writing lithography system is solved, and the lens volume reduction and imaging quality improvement is achieved.
Patent Information
- Application Number
- CN202422228791.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-11
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-09-11
AI Technical Summary
In the existing laser direct write lithography system, the cube reflective structure causes the imaging light to occupy a large space and be easily contaminated, affecting the imaging quality.
A curved lens field mirror adaptation structure is adopted, and an eccentric light path is formed by tilting the incident part and the reflection part, and a heat dissipation structure and a light-removing chamber are provided in the lens housing to reduce light scattering and heat accumulation.
Effectively reduce lens volume, improve imaging contrast and imaging quality, reduce irradiated light interference, and maintain the accuracy and stability of the lens structure.
Smart Images
Figure CN223092215U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of lens imaging processing, and specifically relates to a bending lens field lens adapter structure. Background Art
[0002] In a laser direct writing lithography system, the most core part is the DMD chip. In optics, the DMD chip refers to a digital micromirror device that controls and adjusts light through a tiny mirror array and is used for projection imaging and optical processing. When the DMD chip is in the on state, the imaging light forms an image after passing through the lens.
[0003] The prior art usually adopts a cubic reflection structure 1, as shown in Figures 1-3 , that is, the incident light enters the cubic reflection structure 1 from one side of the cubic reflection structure, and the incident light is perpendicular and coplanar with the midline of this side of the cube. The incident light reaches the inclined reflection plate 2 inside the reflection structure 1, the reflection surface of the reflection plate 2 faces the DMD chip 7, and after being reflected by the reflection plate 2 in the reflection structure 1 to the DMD chip 7, the imaging light is formed after being processed by the DMD chip 7 and then the imaging light is reflected to the imaging device to finally form an image; and the finally formed incident light and the imaging light are in the same plane and the imaging light will contact the incident light when it exits, which not only makes the imaging structure 1 occupy a large space, but also pollutes the imaging light. Summary of the Utility Model
[0004] The purpose of the utility model is to provide a bending lens field lens adapter structure to solve the problems raised in the above background art.
[0005] To achieve the above purpose, the utility model provides the following technical solutions:
[0006] A bending lens field lens adapter structure includes a lens housing. The lens housing includes an incident part and a reflection part. An incident port is provided at the incident part of the lens housing, and a reflection port and an exit port are provided at the reflection part of the lens housing. A DMD chip is provided outside the lens housing corresponding to the position of the reflection port;
[0007] One side of the incident part and the reflection part is obliquely connected. A reflecting mirror is arranged inside the incident part, and a conversion part is arranged inside the reflection part. The surface of the conversion part faces the DMD chip;
[0008] The optical path from the incident port through the conversion part to the DMD chip forms a first optical path, and the optical path from the DMD chip to the exit port forms a second optical path. The first optical path and the second optical path are eccentrically arranged.
[0009] As a further technical solution, a layer of dielectric film is coated on the surface of the reflecting mirror.
[0010] Further technical solution: The incident part and the reflection part are detachably connected.
[0011] Further technical solution: An optical path channel for light to pass through is provided in the incident part, and the optical path channel is cylindrical.
[0012] Further technical solution: Two steps are provided on the inner wall of the optical path channel.
[0013] Further technical solution: The exit port is a rectangular exit port.
[0014] Further technical solution: It further includes a heat dissipation structure for dissipating heat from the lens housing.
[0015] Further technical solution: The heat dissipation structure includes a circulating water path formed to communicate with the inside of the lens housing. The water path forms a water inlet and a water outlet on the surface of the lens housing for connection with an external water cooling device.
[0016] Further technical solution: The water path is installed at the connection between the incident part and the reflection part.
[0017] Further technical solution: The reflection part is hollow inside, and an arc-edge design is adopted inside the reflection part.
[0018] Advantages of the present utility model: By arranging the incident part and the reflection part obliquely, the incident light enters the reflection part along the angle of the inclined placement of the incident part and the reflection part and irradiates onto the conversion part. The conversion part and the DMD chip are eccentrically arranged, and the conversion part faces the DMD chip so that the incident light can reach the DMD chip to form imaging light, thus forming the first optical path; after the imaging light is reflected out, the second optical path is formed. The first optical path and the second optical path are not in the same plane, thereby further reducing the volume of the lens.
[0019] Other features and advantages of the present utility model will be described in detail in the subsequent specific implementation part. Description of the Drawings
[0020] Figure 1 : Schematic diagram of the background technology of the present utility model.
[0021] Figure 2 : Front view of the optical path of the background technology of the present utility model.
[0022] Figure 3 : Top view of the optical path of the background technology of the present utility model.
[0023] Figure 4 : Schematic diagram of the overall structure of the present utility model.
[0024] Figure 5: Bottom view of the overall structure of the present utility model.
[0025] Figure 6 : First sectional view of the present utility model.
[0026] Figure 7 : Schematic diagram of the hidden support device and DMD chip of the present utility model.
[0027] Figure 8 : Second sectional view of the present utility model.
[0028] Figure 9 : First optical path and second optical path diagrams of the present utility model.
[0029] Figure 10 : Front view of the first optical path and second optical path of the present utility model.
[0030] Figure 11 : Top view of the first optical path and second optical path of the present utility model.
[0031] Figure 12 : Top view of the overall structure of the present utility model.
[0032] Figure 13 : Schematic diagram of the close arrangement of multiple structures of the present utility model.
[0033] Reference numerals: 1, reflection structure; 2, reflector; 3, lens housing; 31, incident part; 32, reflection part; 4, incident port; 5, reflection port; 6, exit port; 7, DMD chip; 8, support device; 9, conversion member; 10, step; 11, water inlet; 12, water outlet; 13, water path. Detailed implementation manner
[0034] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model.
[0035] Please refer to Figures 4-13 ;
[0036] A bending lens field lens adapter structure includes a lens housing 3. The lens housing 3 is used to protect and fix the optical elements inside the lens, which not only plays a role in protecting the internal precision optical elements, but also undertakes the functions of supporting, positioning, and adjusting the optical elements. The lens housing 3 includes an incident part 31 and a reflection part 32. In this embodiment, the shape of the reflection part 32 is not limited. Only taking the shape of the reflection part 32 as a cuboid as an example, the incident part 31 is connected to one side of the cuboid, and the inside of the incident part 31 is hollow. An optical path channel for incident light to pass through is opened in the incident part 31. The optical path channel is cylindrical, and there are two steps 10 provided on the inner wall of the optical path channel. The two steps 10 can be used to precisely control and shape the light beam, so that the light can be evenly distributed when passing through different media. The reflection part 32 is hollow inside, and an arc-edge design is adopted inside the reflection part 32. The arc-edge design can reduce the scattering and reflection losses of the incident light at the edge, thereby improving the overall efficiency of the structure in this embodiment. The incident part 31 and the reflection part 32 are connected. The incident part 31 and the reflection part 32 are inclined. In this embodiment, the angle of inclination of the incident part 31 relative to the side surface of the reflection part 32 is not limited. An incident port 4 is provided at the incident part 31 of the lens housing 3, and a reflection port 5 and an exit port 6 are provided at the reflection part 32 of the lens housing 3. The reflection port 5 penetrates the upper surface of the cuboid, and the exit port 6 penetrates the lower surface of the cuboid, and the central axes of the reflection port 5 and the exit port 6 are collinear. And a DMD chip 7 is provided at a position corresponding to the reflection port 5 outside the lens housing 3. The DMD chip 7 can be directly connected to the lens housing 3 through a support device 8, or the DMD chip 7 can be placed on the reflection port 5 through an external structure. In this embodiment, only taking the DMD chip 7 being directly fixedly connected to the lens housing 3 as an example.
[0037] A reflecting mirror is provided inside the incident part 31, and a layer of dielectric film (not shown in the figure) is coated on the surface of the reflecting mirror. In this embodiment, the specific material of the dielectric film is not limited, as long as the dielectric film can improve the reflectivity of the reflecting mirror. A conversion member 9 is provided inside the reflection part 32. The conversion member 9 is used to reflect the light transmitted from the reflecting mirror onto the DMD chip 7. The surface of the conversion member 9 faces the DMD chip 7, and the conversion member 9 is eccentrically arranged with the DMD chip 7. In this embodiment, strict requirements are imposed on the angle of the conversion member 9, and the conversion member 9 is precisely fixed inside the cavity of the reflection part 32. The optical path from the incident port 4 passing through the reflecting mirror and the conversion member 9 to the DMD chip 7 forms a first optical path, and the optical path from the DMD chip 7 to the exit port 6 forms a second optical path. The first optical path and the second optical path are eccentrically arranged.
[0038] Specifically, the incident light enters the reflector from the incident port 4. Since the incident part 31 is connected to the reflection part 32, the incident light is reflected to the conversion element 9. The conversion element 9 faces the DMD chip 7, and the conversion element 9 reflects the incident light along the first optical path to the DMD chip 7. At the DMD chip 7, the incident light forms imaging light, and the formed imaging light is reflected along the second optical path to an external imaging device outside the exit port 6.
[0039] Furthermore, when the DMD chip 7 is in the off state, it will generate directed reflected light, and the reflected light will enter the lens and become unwanted stray light, which is an unavoidable phenomenon. The current solution is to blacken the inner wall surface of the lens to eliminate the stray light. However, through long-term use, it is found that this solution can only eliminate a very weak part of the light, while the reflected light of the DMD chip 7 is very strong. With the passage of time and the irradiation of light, the blackened layer on the inner wall of the lens will turn white, eventually forming reflection, generating a large amount of stray light and entering the effective area of the lens, reducing the lens contrast. With the irradiation of light, the lens will generate a relatively high temperature. As the heat accumulates, the size of the lens will deform, reducing the imaging quality of the lens. In order to effectively remove the stray light from the lens, a stray light elimination cavity is provided in the lens housing 3. The entrance of the stray light elimination cavity corresponds to the stray light directed reflection path of the DMD chip 7. The DMD chip 7 injects the stray light into the stray light elimination cavity, and these stray light rays are absorbed and eliminated through the stray light elimination cavity, thereby achieving the effect of eliminating the stray light, enabling the required imaging light to be emitted from the exit port 6, and achieving the purpose of improving the contrast and imaging quality of the lens imaging. In this embodiment, extinction lines are provided at the bottom of the stray light elimination cavity. The extinction lines are perpendicular to the direction of the first optical path. The extinction lines can scatter the stray light reflected in the stray light elimination cavity to achieve extinction. The reflection direction of the stray light always faces the enclosed area and will not be reflected back to the lens, so that the stray light will not be projected together with the light imaged by the DMD chip 7, improving the contrast of the lens imaging; a black coating is provided on the inner wall of the stray light elimination cavity, and the black coating can strongly absorb the light effect to eliminate the stray light or reduce the light effect scattering.
[0040] Since the components that require the lens to reflect light will generate heat as they are irradiated by light, causing the temperature of the lens to rise. As the temperature of the lens rises, it will lead to deformation of the lens size, affecting the imaging quality. Therefore, a bending lens field lens adapter structure also includes a heat dissipation structure. The heat dissipation structure is used to dissipate heat from the lens housing 3. The heat dissipation structure can be air-cooled heat dissipation. For example, a fan is set outside. Because the stray light elimination cavity needs to absorb stray light, it is inevitable that a large amount of heat will accumulate inside the stray light elimination cavity. Therefore, a fan is set on the corresponding path between the stray light elimination cavity and the DMD chip 7 to directly dissipate heat from the DMD chip 7 and the stray light elimination cavity. Heat dissipation fins can also be set on the outer periphery of the lens housing 3 to absorb the heat of the lens housing 3. When the fan blows air on the lens housing 3, the heat of the heat dissipation fins can be quickly dissipated, thereby improving the heat dissipation effect of the lens housing 3. The present utility model preferably adopts water-cooled heat dissipation. The water-cooled heat dissipation specifically includes a circulating water path 13 that communicates with the inside of the lens housing 3. The water path 13 forms a water inlet 11 and a water outlet 12 on the surface of the lens housing 3 for connecting to an external water-cooling device. The water path 13 flows through the water channels located inside the lens housing 3 to absorb the heat on the surface of the lens housing 3 and improve the heat dissipation effect of the lens housing 3. The water path 13 is installed at the connection between the incident portion 31 and the reflection portion 32. Through the heat dissipation of the circulating water path 13, the thermal deformation of the mechanical structure at the connection caused by the temperature rise can be reduced, and the accuracy and stability of the entire structure can be maintained.
[0041] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above-described exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present utility model. Any reference signs in the claims should not be regarded as limiting the claims involved.
[0042] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A bending lens field lens adapter structure, comprising a lens housing (3), the lens housing (3) includes an incident part (31) and a reflection part (32), an incident port (4) is provided at the incident part (31) of the lens housing (3), a reflection port (5) and an exit port (6) are provided at the reflection part (32) of the lens housing (3), and a DMD chip (7) is provided at a position on the outer side of the lens housing (3) corresponding to the reflection port (5), characterized in that ； The incident part (31) is obliquely connected to one side of the reflection part (32). A reflecting mirror is arranged in the incident part (31), and a conversion member (9) is arranged in the reflection part (32). The surface of the conversion member (9) faces the DMD chip (7). The optical path from the incident port (4) passing through the conversion member (9) to the DMD chip (7) forms a first optical path, and the optical path from the DMD chip (7) to the exit port (6) forms a second optical path. The first optical path and the second optical path are eccentrically arranged.
2. The bending lens field lens adapter structure according to claim 1, wherein A layer of dielectric film is coated on the surface of the reflecting mirror.
3. A bending lens field lens adapter structure according to claim 2, wherein The incident part (31) and the reflection part (32) are detachably connected.
4. A bending lens field lens adapter structure according to claim 3, characterized in that An optical path channel for light to pass through is formed in the incident part (31), and the optical path channel is cylindrical.
5. The bending lens field lens adapter structure according to claim 4, characterized in that, Two steps (10) are arranged on the inner wall of the optical path channel.
6. The bending lens field lens adapter structure according to claim 1, characterized in that, The exit port (6) is a rectangular exit port (6).
7. A bending lens field lens adapter structure according to claim 1, characterized in that It further includes a heat dissipation structure for dissipating heat from the lens housing (3).
8. A bending lens field lens adapter structure according to claim 7, characterized in that, The heat dissipation structure includes a circulating water path (13) formed to communicate with the inside of the lens housing (3). The water path (13) forms a water inlet (11) and a water outlet (12) on the surface of the lens housing (3) for connection with an external water cooling device.
9. A bending lens field lens adapter structure according to claim 8, characterized in that, The water path (13) is installed at the connection between the incident part (31) and the reflection part (32).
10. A bending lens field lens adapter structure according to claim 1, characterized in that The reflection part (32) is hollow inside, and the reflection part (32) adopts an arc-edge design.