Nanoimprint demoulding device

Abstract

The utility model relates to the field of nanoimprint, and discloses a nanoimprint demoulding device which structurally comprises an imprint demoulding assembly, a vacuum adsorption table, an imprint substrate, imprint glue and a working mould, the imprinting demolding assembly and the imprinting base are both arranged on the vacuum adsorption table. One side of the working mold is clamped on the imprinting demolding assembly and is attached to the imprinting substrate; the imprinting glue is coated between the working mold and the imprinting substrate; the working mold is pressed on the coining glue through the coining demolding assembly, so that the pattern of the working mold is coined on the coining glue; the vacuum adsorption table is provided with a plurality of vacuum grooves which are sequentially nested, the sizes of the plurality of vacuum grooves are sequentially reduced from outside to inside, and the size of the imprinting substrate is respectively corresponding to the sizes of the plurality of vacuum grooves, so that the limitation in the nano-imprinting process is effectively avoided, the nano-imprinting efficiency is greatly improved, the production cost is reduced, and the production efficiency is improved. And the method can be used for various experimental verification, the efficiency is improved, and the cost is saved.

Description

Technical Field

[0001] The utility model relates to the field of nanoimprinting, and specifically relates to a nanoimprinting demolding device. Background Art

[0002] As a new micro-nano processing technology, nanoimprinting technology has indeed shown great potential in the field of material processing. Among them, nanoimprinting technology achieves ultra-high resolution through mechanical transfer means, and its processing accuracy has been able to reach 2 nanometers, far exceeding traditional lithography technology. This technology not only has ultra-high resolution, but also has the advantages of easy mass production, low cost, high consistency, etc., so it has broad application prospects in the fields of microelectronics, materials science, etc.

[0003] During the nanoimprinting process, the conventional general imprinting substrates mainly include wafer-level substrates such as 6-inch and 8-inch. The carrier plates equipped with nanoimprinting equipment are usually designed for these standard-sized substrates. This design helps to improve production efficiency and reduce production costs.

[0004] However, when it is necessary to perform imprinting on substrates of other specifications and sizes (such as those less than 6 inches, square, irregular, or PET soft films, etc.), it is necessary to customize the carrier plate or modify the nanoimprinting equipment. This process is relatively complex and requires ensuring that the newly designed carrier plate or the modified equipment can stably and accurately carry and position substrates of different shapes and sizes, while ensuring the accuracy and consistency during the imprinting process. This process has certain challenges and costs. Summary of the Utility Model

[0005] In order to overcome the defects existing in the above-mentioned prior art, the purpose of the utility model is to provide a nanoimprinting demolding device to solve the technical problem of how to achieve nanoimprinting of multiple specifications and sizes in the prior art.

[0006] The utility model is realized through the following technical solutions:

[0007] A nanoimprinting demolding device includes an imprinting demolding component, a vacuum adsorption table, an imprinting substrate, an imprinting glue, and a working mold;

[0008] Both the imprinting demolding component and the imprinting substrate are arranged on the vacuum adsorption table;

[0009] One side of the working mold is clamped on the imprinting demolding component and attached to the imprinting substrate;

[0010] The imprinting glue is coated between the working mold and the imprinting substrate; and the working mold is pressed tightly on the imprinting glue through the imprinting demolding component for imprinting the pattern of the working mold on the imprinting glue;

[0011] The vacuum adsorption table is provided with a number of vacuum grooves nested in sequence, the sizes of the number of vacuum grooves decrease sequentially from outside to inside, and the sizes of the imprinting substrates are respectively set corresponding to the sizes of the number of vacuum grooves.

[0012] Preferably, the vacuum adsorption table is further provided with a number of vacuum knob switches, and the number of vacuum knob switches are respectively connected to the number of vacuum grooves through vacuum pipelines correspondingly.

[0013] Preferably, the structures of the number of vacuum grooves are the same, and the structures include circular shapes or rectangular shapes.

[0014] Preferably, the structure of the imprinting substrate corresponds to the structures of the number of vacuum grooves.

[0015] Preferably, the imprinting and demolding assembly includes an imprinting roller, a fixed column and a working mold clamping frame;

[0016] The fixed column is vertically arranged on the vacuum adsorption table, one end of the working mold clamping frame is slidably sleeved on the fixed column, and the other end clamps on one side of the working mold for placing the working mold on the imprinting substrate;

[0017] The imprinting roller rolls on the upper surface of the working mold for pressing the working mold tightly on the imprinting substrate coated with imprinting glue.

[0018] Further, the imprinting roller includes a handle and a roller;

[0019] One end of the handle is connected to the roller, and the roller contacts with the upper surface of the working mold.

[0020] Furthermore, the width of the roller corresponds to the width of the working mold.

[0021] Further, the working mold clamping frame includes a sliding column, a connecting column and a clamping plate;

[0022] The sliding column is sleeved on the fixed column for ascending and descending on the fixed column, one end of the connecting column is fixed on the sliding column, and the other end is fixed to the clamping plate;

[0023] One side of the working mold is clamped on the clamping plate.

[0024] Furthermore, the inner diameter of the sliding column corresponds to the outer diameter of the fixed column.

[0025] Furthermore, the clamping plate includes an upper pressing plate, a lower pressing plate and a number of positioning columns;

[0026] A number of positioning columns are fixed on the lower pressing plate, a number of positioning holes are provided on the upper pressing plate corresponding to the number of positioning columns, and the upper pressing plate is covered on the lower pressing plate by the positioning columns passing through the positioning holes. A number of bolts are further provided on the lower pressing plate for fixing the upper pressing plate and the lower pressing plate; one side of the working mold is pressed tightly between the upper pressing plate and the lower pressing plate.

[0027] Compared with the prior art, the utility model has the following beneficial technical effects:

[0028] The utility model provides a nanoimprint demoulding device. By providing a plurality of vacuum grooves nested in sequence on a vacuum adsorption table, the sizes of the plurality of vacuum grooves decrease sequentially from outside to inside, and the sizes of the imprint substrates are respectively set corresponding to the sizes of the plurality of vacuum grooves, so that imprint substrates of different sizes can correspond to vacuum grooves of different sizes, effectively avoiding the limitations in the nanoimprint process, greatly improving the nanoimprint efficiency, meeting the imprint requirements of various substrates, and can be used for various experimental verifications, improving efficiency and saving costs.

[0029] Furthermore, a plurality of vacuum knob switches are also provided on the vacuum adsorption table, and the plurality of vacuum knob switches are respectively connected to the plurality of vacuum grooves through vacuum pipelines, so that different vacuum grooves can be controlled through the vacuum pipelines by different vacuum knob switches, which is convenient for realizing nanoimprinting of multiple specifications and sizes.

[0030] Furthermore, the structures of the plurality of vacuum grooves are the same, and the structures include circular shapes or rectangular shapes, which can realize nanoimprinting work of different structures.

[0031] Furthermore, the imprint demoulding assembly includes an imprint roller, a fixed column and a working mold clamping frame; the fixed column is vertically arranged on the vacuum adsorption table, one end of the working mold clamping frame is slidably sleeved on the fixed column, and the other end is clamped on one side of the working mold for placing the working mold on the imprint substrate; the imprint roller rolls on the upper surface of the working mold for pressing the working mold tightly on the imprint substrate coated with imprinting glue, improving the nanoimprint efficiency of the working mold.

[0032] Furthermore, the roller includes a handle and a roller, one end of the handle is connected to the roller, and the roller contacts the upper surface of the working mold, so that the working mold can be pressed tightly on the imprinting glue, improving the imprint efficiency.

[0033] Furthermore, the width of the roller corresponds to the width of the working mold, so that the working mold can be completely attached to the imprinting glue.

[0034] Furthermore, the mold clamping frame includes a sliding column, a connecting column and a clamping plate; the sliding column is sleeved on the fixed column for ascending and descending on the fixed column, one end of the connecting column is fixed on the sliding column, and the other end is fixed with the clamping plate; one side of the working mold is clamped on the clamping plate, which is convenient for adjusting the height of the working mold and facilitating the completion of nanoimprinting work. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic structural diagram of the nanoimprint demoulding device in the embodiment of the utility model;

[0036] Figure 2Schematic diagram of the vacuum chamber structure of the vacuum adsorption table in the embodiment of the present utility model;

[0037] Figure 3 Schematic diagram of the internal structure of the vacuum adsorption table in the embodiment of the present utility model;

[0038] Figure 4 Schematic diagram of the nano - imprinting process structure in the embodiment of the present utility model;

[0039] Figure 5 Schematic diagram of the nano - demolding process structure in the embodiment of the present utility model;

[0040] Figure 6 Schematic diagram of the imprinting roller structure in the embodiment of the present utility model;

[0041] Figure 7 Top view of the working mold clamping frame in the embodiment of the present utility model;

[0042] Figure 8 Side view of the working mold clamping frame in the embodiment of the present utility model;

[0043] In the figure: 1 - bottom table; 2 - vacuum adsorption table; 3 - imprinting substrate; 4 - imprinting glue; 5 - imprinting roller; 6 - fixed rod; 7 - working mold clamping frame; 8 - first vacuum knob switch; 9 - second vacuum knob switch; 10 - third vacuum knob switch; 11 - fourth vacuum knob switch; 12 - working mold; 21 - first vacuum groove; 22 - second vacuum groove; 23 - third vacuum groove; 24 - fourth vacuum groove; 51 - handle; 52 - roller; 71 - sliding column; 72 - connecting column; 73 - upper pressing plate; 74 - positioning column; 75 - bolt; 76 - lower pressing plate; 81 - first vacuum pipeline; 91 - second vacuum pipeline; 101 - third vacuum pipeline; 111 - fourth vacuum pipeline. Detailed implementation manners

[0044] In order to enable those skilled in the art to better understand the solution of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0045] It should be noted that the terms "first", "second", etc. in the description, claims and above-mentioned drawings of the present utility model are used to distinguish similar objects, and do not necessarily need to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present utility model described here can be implemented in an order other than those illustrated or described here. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, products or devices.

[0046] The following further describes the present utility model in detail with reference to the drawings:

[0047] The purpose of the present utility model is to provide a nanoimprint demolding device to solve the technical problem of how to achieve nanoimprinting of multiple specifications and sizes in the prior art.

[0048] See Figure 1 , in an embodiment of the present utility model, a nanoimprint demolding device is provided, which includes an imprint demolding assembly, a vacuum adsorption table 2, an imprint substrate 3, an imprinting adhesive 4, and a working mold 12;

[0049] Both the imprint demolding assembly and the imprint substrate 3 are arranged on the vacuum adsorption table 2;

[0050] One side of the working mold 12 is clamped on the imprint demolding assembly and is attached to the imprint substrate 3;

[0051] The imprinting adhesive 4 is coated between the working mold 12 and the imprint substrate 3; and the working mold 12 is pressed tightly on the imprinting adhesive 4 through the imprint demolding assembly for imprinting the pattern of the working mold 12 on the imprinting adhesive 4;

[0052] The vacuum adsorption table 2 is provided with a number of vacuum grooves nested in sequence, and the sizes of the number of vacuum grooves decrease sequentially from outside to inside, and the size of the imprint substrate 3 is correspondingly set with the sizes of the number of vacuum grooves.

[0053] The principle of the structure in this embodiment is as follows:

[0054] The vacuum adsorption table 2 is designed with a number of vacuum grooves nested in sequence, and the sizes of these vacuum grooves decrease sequentially from outside to inside, allowing imprint substrates 3 of different sizes to be accurately and firmly adsorbed on the tabletop. When the vacuum pump is started, the air in each vacuum groove is pumped out to form a negative pressure area, thereby firmly adsorbing the imprint substrate 3 placed in the corresponding groove and preventing displacement during the subsequent imprinting process.

[0055] According to the size of the imprinting substrate 3, a matching vacuum groove is selected for placement. This design improves the versatility and flexibility of the equipment and can adapt to imprinting requirements of different sizes.

[0056] A layer of imprinting glue 4 is evenly coated between the working mold 12 and the imprinting substrate 3. As an intermediate medium for pattern transfer, the quality and uniformity of the imprinting glue directly affect the final imprinting effect.

[0057] One side of the working mold 12 is clamped on the imprinting demolding assembly, and then it is accurately applied to the imprinting substrate 3 coated with the imprinting glue through this assembly. Then, the imprinting demolding assembly applies appropriate pressure to tightly press the working mold 12 onto the imprinting glue. During this process, the pattern on the working mold 12 is accurately imprinted into the imprinting glue layer.

[0058] In the demolding stage, after sufficient pressure and holding time, the pattern on the working mold 12 is completely transferred to the imprinting glue layer. At this time, through the operation of the imprinting demolding assembly, the working mold 12 is gently lifted and separated from the imprinting glue layer to complete the demolding process.

[0059] According to the type of the imprinting glue and specific application requirements, it may be necessary to cure the imprinted imprinting glue layer, such as heating, ultraviolet irradiation, etc., to ensure the permanence and stability of the pattern.

[0060] In this embodiment, the vacuum adsorption table 2 can be placed on the bottom table 1.

[0061] According to Figure 2 As shown, in this embodiment, several vacuum grooves include a first vacuum groove 21, a second vacuum groove 22, a third vacuum groove 23, and a fourth vacuum groove 24;

[0062] Among them, the fourth vacuum groove 24 is nested in the third vacuum groove 23, the third vacuum groove 23 is nested in the second vacuum groove 22, and the second vacuum groove 22 is nested in the first vacuum groove 21.

[0063] Among them, the size of the first vacuum groove 21 is the size of the entire surface of the vacuum adsorption table; the size of the second vacuum groove 22 is less than 8 inches, the size of the third vacuum groove 23 is less than 6 inches; the size of the fourth vacuum groove 24 is less than 4 inches.

[0064] Specifically, several vacuum knob switches are also provided on the vacuum adsorption table 2, and several vacuum knob switches are respectively connected to several vacuum grooves through vacuum pipelines.

[0065] The principle of the structure in this embodiment is as follows:

[0066] When the vacuum pump is started, it begins to extract the air inside the vacuum adsorption table, thereby forming a negative pressure area in the vacuum groove. Through the vacuum pipeline, this negative pressure is transmitted to each vacuum groove to ensure that each groove can reach the required vacuum degree.

[0067] The vacuum knob switch, as a control component, is used to adjust and control the vacuum degree of the corresponding vacuum chamber.

[0068] Each vacuum knob switch independently controls one or a group of vacuum chambers. By rotating the switch, the intake or exhaust volume of the vacuum pump can be adjusted, thereby changing the vacuum degree in the vacuum chamber.

[0069] This design enables the operator to flexibly adjust the vacuum degree of each vacuum chamber according to different imprinting requirements to achieve the best imprinting effect.

[0070] According to Figure 3 As shown, in this embodiment, several vacuum knob switches include a first vacuum knob switch 8, a second vacuum knob switch 9, a third vacuum knob switch 10, and a fourth vacuum knob switch 11; among them, the first vacuum knob switch 8 is connected to the inside of the first vacuum chamber 21 through a first vacuum pipeline 81; the second vacuum knob switch 9 is connected to the inside of the second vacuum chamber 22 through a second vacuum pipeline 91; the third vacuum knob switch 10 is connected to the inside of the third vacuum chamber 23 through a third vacuum pipeline 101; the fourth vacuum knob switch 11 is connected to the inside of the fourth vacuum chamber 24 through a fourth vacuum pipeline 111.

[0071] In this embodiment, the structures of several vacuum chambers are the same, including a circular or rectangular shape, and the structure of the imprinting substrate 3 corresponds to the structures of several vacuum chambers.

[0072] Specifically, the imprinting and demolding assembly includes an imprinting roller 5, a fixed column 6, and a working mold clamping frame 7;

[0073] The fixed column 6 is vertically arranged on the vacuum adsorption table 2. One end of the working mold clamping frame 7 is slidably sleeved on the fixed column 6, and the other end clamps one side of the working mold 12, and is used to place the working mold 12 on the imprinting substrate 3;

[0074] The imprinting roller 5 rolls on the upper surface of the working mold 12 and is used to press the working mold 12 tightly on the imprinting substrate 3 coated with imprinting glue 3.

[0075] The principle of the structure in this embodiment is as follows:

[0076] The imprinting roller 5, as the main component for applying pressure, rolls on the upper surface of the working mold 12 to ensure uniform contact and tight fit between the working mold and the imprinting substrate. One end of the working mold clamping frame 7 is slidably sleeved on the fixed column 6, and the other end clamps one side of the working mold 12. Through the sliding and clamping actions along the fixed column, the working mold is accurately placed on the imprinting substrate 3.

[0077] Specifically, according to Figure 6As shown, the embossing roller 5 includes a handle 51 and a roller 52; one end of the handle 51 is connected to the roller 52, and the roller 52 contacts the upper surface of the working die 12. The width of the roller 52 corresponds to the width of the working die 12.

[0078] The principle of the structure in this embodiment is described as follows:

[0079] The handle 51 serves as an operating component. One end of the handle 51 is connected to the roller 52, providing a lever point for the operator to apply force. By holding and operating the handle, the operator can control the position of the roller 52 and the applied pressure.

[0080] The roller 52 serves as an embossing component. The width of the roller 52 corresponds to the width of the working die 12, ensuring full and uniform contact with the upper surface of the working die during embossing. The material and hardness of the roller 52 are usually selected according to the embossing material and requirements to ensure the clarity and durability of the embossing effect.

[0081] Specifically, according to Figure 7 and Figure 8 As shown, the working die clamping bracket 7 includes a sliding column 71, a connecting column 72, and a clamping plate; the sliding column 71 is sleeved on the fixed column 6 for ascending and descending on the fixed column 6. One end of the connecting column 72 is fixed to the sliding column 71, and the other end is fixed to the clamping plate; one side of the working die 12 is clamped on the clamping plate.

[0082] Among them, the inner diameter of the sliding column 71 corresponds to the outer diameter of the fixed column 6.

[0083] Among them, the clamping plate includes an upper clamping plate 73, a lower clamping plate 76, and several positioning columns 74;

[0084] Several positioning columns 74 are fixed on the lower clamping plate 76. Corresponding to the several positioning columns 74 on the upper clamping plate 73, there are several positioning holes. The upper clamping plate 73 is covered on the lower clamping plate 76 by passing the positioning columns through the positioning holes. There are also several bolts 75 on the lower clamping plate 76 for fixing the upper clamping plate 73 and the lower clamping plate 76; one side of the working die 12 is pressed between the upper clamping plate 73 and the lower clamping plate 76.

[0085] The principle of the structure in this embodiment is described as follows:

[0086] The sliding column 71 serves as a lifting component. The sliding column 71 is sleeved on the fixed column 6, allowing it to freely ascend and descend on the fixed column. By controlling the lifting of the sliding column, the height and position of the working die can be adjusted.

[0087] The connecting column 72 serves as a connecting component. One end of the connecting column 72 is fixed to the sliding column 71, and the other end is connected to the clamping plate. It is responsible for transmitting the lifting movement of the sliding column to the clamping plate, enabling the clamping plate to move with the sliding column.

[0088] The clamping plate, as a clamping component, is used to clamp one side of the working mold 12. The shape and size of the clamping plate are usually designed according to the shape and size of the working mold to ensure that the working mold can be firmly clamped and prevent it from moving or tilting during the imprinting process.

[0089] The present embodiment provides a nanoimprint demolding device, and its usage process is as follows:

[0090] Place the imprinting substrate 3 in the center on the vacuum adsorption table 2. According to the area of the imprinting substrate 3, synchronously turn on the corresponding first vacuum knob switch 8, second vacuum knob switch 9, third vacuum knob switch 10, and fourth vacuum knob switch 11 to vacuum-adsorb the imprinting substrate 3 on the vacuum adsorption table 2.

[0091] Adjust the height of the working mold clamping frame 7 and clamp the working mold 12 on the working mold clamping frame 7 so that the surface of the working mold 12 is flush with or slightly lower than the upper surface of the imprinting substrate 3.

[0092] At the top, middle, and end of the imprinting substrate 3, use the method of manually dotting and scribing the imprinting glue 4 to draw the glue on the substrate 3.

[0093] From the position where the working mold 12 contacts the imprinting substrate 3, gently lift the other end of the working mold 12 at the same time and slowly roll the imprinting roller 5 to make the working mold 12 fully contact the imprinting substrate 3 and be in a flat state.

[0094] Then irradiate the surface of the working mold 12 with an external ultraviolet curing device to completely cure the imprinting glue 4, as Figure 4 shown.

[0095] After the imprinting glue 4 is cured, gently lift it from the unfixed end of the working mold 12, as Figure 5 shown, then the working mold 12 will be separated from the imprinting glue 4, and in this way, the pattern of the working mold 12 will be transferred to the imprinting substrate 3, completing the nanoimprinting and demolding operations.

[0096] Turn off the corresponding vacuum knob switch of the vacuum adsorption table 2 and remove the imprinting substrate 3 from the vacuum adsorption table 2, then the imprinting and demolding of the entire product are completed.

[0097] In summary, the present utility model provides a nanoimprint demolding device. By providing a plurality of vacuum grooves nested in sequence on the vacuum adsorption table, the sizes of the plurality of vacuum grooves decrease sequentially from the outside to the inside, and the sizes of the imprinting substrates correspond to the sizes of the plurality of vacuum grooves respectively. It can realize that different-sized imprinting substrates correspond to different-sized vacuum grooves, effectively avoiding the limitations in the nanoimprinting process, greatly improving the nanoimprinting efficiency, meeting the imprinting of various substrates, and can be used for various experimental verifications, improving efficiency and saving costs.

[0098] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation manners of the present invention. Any modification or equivalent substitution that does not depart from the spirit and scope of the present invention should be covered by the protection scope of the claims of the present invention.

Claims

1. A nanoimprint demolding device, characterized in that It includes an imprinting and demolding assembly, a vacuum adsorption table (2), an imprinting substrate (3), an imprinting adhesive (4), and a working mold (12); Both the imprinting and demolding assembly and the imprinting substrate (3) are arranged on the vacuum adsorption table (2); One side of the working mold (12) is clamped on the imprinting and demolding assembly and is affixed to the imprinting substrate (3); The imprinting adhesive (4) is coated between the working mold (12) and the imprinting substrate (3); and the working mold (12) is pressed onto the imprinting adhesive (4) by the imprinting and demolding assembly for imprinting the pattern of the working mold (12) on the imprinting adhesive (4); A number of vacuum grooves nested in sequence are provided on the vacuum adsorption table (2), and the sizes of the number of vacuum grooves decrease successively from outside to inside, and the size of the imprinting substrate (3) is correspondingly set with the sizes of the number of vacuum grooves.

2. The nanoimprint demolding device according to claim 1, characterized in that, A number of vacuum knob switches are also provided on the vacuum adsorption table (2), and the number of vacuum knob switches are respectively connected to the number of vacuum grooves through vacuum pipelines.

3. The nanoimprint demolding device according to claim 1, characterized in that, The structures of the number of vacuum grooves are all the same, and their structures include a circular shape or a rectangular shape.

4. A nanoimprint demolding device according to claim 1, characterized in that, The structure of the imprinting substrate (3) corresponds to the structures of the number of vacuum grooves.

5. A nanoimprint demolding device according to claim 1, characterized in that, The imprinting and demolding assembly includes an imprinting roller (5), a fixed column (6), and a working mold clamping frame (7); The fixed column (6) is vertically arranged on the vacuum adsorption table (2), one end of the working mold clamping frame (7) is slidably sleeved on the fixed column (6), and the other end is clamped on one side of the working mold (12) for placing the working mold (12) on the imprinting substrate (3); The imprinting roller (5) rolls on the upper surface of the working mold (12) for pressing the working mold (12) onto the imprinting substrate (3) coated with the imprinting adhesive (4).

6. A nanoimprint demolding device according to claim 5, characterized in that, The imprinting roller (5) includes a handle (51) and a roller (52); One end of the handle (51) is connected to the roller (52), and the roller (52) contacts the upper surface of the working mold (12).

7. A nanoimprint demolding device according to claim 6, characterized in that, The width of the roller (52) corresponds to the width of the working mold (12).

8. A nanoimprint demolding device according to claim 5, characterized in that, The working mold clamping frame (7) includes a sliding column (71), a connecting column (72), and a clamping plate; The sliding column (71) is sleeved on the fixed column (6) for ascending and descending on the fixed column (6), one end of the connecting column (72) is fixed on the sliding column (71), and the other end is fixed to the clamping plate; One side of the working mold (12) is clamped on the clamping plate.

9. The nanoimprint demolding device according to claim 8, characterized in that, The inner diameter of the sliding column (71) corresponds to the outer diameter of the fixed column (6).

10. A nanoimprint demolding device according to claim 8, characterized in that, The clamping plate includes an upper pressing plate (73), a lower pressing plate (76), and a number of positioning columns (74); The number of positioning columns (74) are fixed on the lower pressing plate (76), a number of positioning holes corresponding to the number of positioning columns (74) are provided on the upper pressing plate (73), and the upper pressing plate (73) is covered on the lower pressing plate (76) by passing the positioning columns through the positioning holes. A number of bolts (75) are also provided on the lower pressing plate (76) for fixing the upper pressing plate (73) and the lower pressing plate (76); one side of the working mold (12) is pressed between the upper pressing plate (73) and the lower pressing plate (76).

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