Multifunctional ventilation system applied to laser direct imaging photoetching equipment

Abstract

The utility model relates to a multifunctional ventilation system applied to laser direct imaging photoetching equipment, which comprises an air treatment device provided with an air inlet, an air return port and an air outlet, and external air enters the air treatment device through the air inlet, is filtered, cooled and dehumidified and then flows downwards from the top to the bottom. The air flow is blown into the photoetching equipment through the air outlet and then is divided into two paths of air flow, the first path of air flow is blown out of the photoetching equipment from a working table after passing through an operating platform of the photoetching equipment downwards and rightwards, and the second path of air flow is downwards and leftwards to cool a part needing to be cooled on the left side and then upwards enters the air treatment device through the air return opening; and after being filtered, cooled and dehumidified by the air treatment device, the air is blown into the photoetching equipment through the air outlet of the air treatment device, so that circulating operation is realized. The multifunctional ventilation system integrates temperature, humidity and cleanliness control functions, has fresh air and return air functions, and can ensure stable operation of photoetching equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of environmental control of laser direct imaging lithography equipment, and specifically relates to a multi-functional ventilation system applied to laser direct imaging lithography equipment. Background Art

[0002] A lithography device, also known as a lithography machine, is one of the most core high-end devices in integrated circuit manufacturing. The working principle of a lithography machine is to use a light source with a specific wavelength to expose a silicon wafer coated with photoresist through a photomask with patterns, so that the patterns on the photomask are copied onto the silicon wafer, thereby forming the required electronic circuit diagram on the silicon wafer. This process is similar to taking a photo with a camera, but what the lithography machine engraves is not a photo, but a circuit diagram and other electronic components.

[0003] A laser direct imaging lithography device belongs to a high-precision and high-accuracy device, and has strict requirements on the temperature, humidity, cleanliness, etc. of the internal and external environments of the device. Usually, it is required that the temperature, humidity, and cleanliness be controlled under the premise of a very small and stable change fluctuation to ensure the stable and reliable operation of the device.

[0004] At present, the environmental control of most similar products on the market is not ideal, and still mainly relies on the external environment. However, the environmental control of the external environment, that is, the environment of the workshop or laboratory, is often unstable and has a large change fluctuation. At the same time, some volatile substances will inevitably be generated inside the device during operation, polluting the internal environment of the device.

[0005] Therefore, the utility model aims to design a multi-functional ventilation system that integrates temperature, humidity, and cleanliness control functions and has fresh air and return air functions, and is applied to laser direct imaging lithography equipment to ensure the safe, reliable, and stable operation of the equipment. Content of the Utility Model

[0006] In order to overcome the defects in the above-mentioned prior art, the utility model purpose of the utility model is to provide a multi-functional ventilation system applied to laser direct imaging lithography equipment. The structure of the multi-functional ventilation system is ingenious. It integrates temperature, humidity, and cleanliness control functions and has fresh air and return air functions, can ensure the safe, reliable, and stable operation of the lithography equipment, enhance the user experience, and is conducive to the popularization and application of the above-mentioned multi-functional ventilation system applied to laser direct imaging lithography equipment in the market.

[0007] To achieve the above-mentioned utility model purpose, the present utility model adopts the following technical solutions: A multi-functional ventilation system applied to a laser direct imaging lithography device, including an air treatment device, the air treatment device having an air inlet, a return air outlet and an air outlet. External air enters the interior of the air treatment device through the air inlet, and after filtration, cooling and dehumidification operations, it blows downward from the top and is blown into the interior of the lithography device through the air outlet, and then is divided into two airflows. Among them, the first airflow blows downward and then to the right, passes through the operating platform of the lithography device and then blows out of the lithography device from the workbench surface. The second airflow blows downward and then to the left, cools the components on the left that need to be cooled and then enters the air treatment device upward through the return air outlet. After passing through the filtration, cooling and dehumidification treatment of the air treatment device again, it is blown into the lithography device again through the air outlet of the air treatment device, realizing a cyclic operation.

[0008] As a preferred solution of the present utility model, the air treatment device is installed on the top of the lithography device.

[0009] As a preferred solution of the present utility model, the multi-functional ventilation system further includes a blowing and suction device, the blowing and suction device including a wind knife mechanism and a suction mechanism; the wind knife mechanism includes a high-speed blowing fan assembly, an air duct and a wind knife air port. During operation, the air processed by the air treatment device is driven by the high-speed blowing fan assembly to inhale clean and dry air, forms a high-speed air flow after entering the wind knife air port, and then enters the suction mechanism.

[0010] As a preferred solution of the present utility model, the high-speed blowing fan assembly includes a blowing base, a blowing fan, a cover plate and a fan mesh cover. The blowing fan is installed on the blowing base, the cover plate and the blowing base enclose a receiving cavity for installing the blowing fan, and the fan mesh cover is installed at the air outlet of the blowing fan.

[0011] As a preferred solution of the present utility model, the blowing fans are arranged in one-to-one correspondence with the air ducts, the air ducts are connected to the blowing fans, and both the blowing fans and the air ducts are two, and the wind knife air port is one, and one wind knife air port is connected to two air ducts.

[0012] As a preferred solution of the present utility model, the suction mechanism includes an intake air duct component, a filter component, a suction fan component and an outlet air duct component. Part of the gas coming out of the wind knife air port enters the intake air duct component, and then sequentially passes through the filter component, the suction fan component and the outlet air duct component. The outlet air duct component is connected with an air duct directly leading to the outside of the lithography device.

[0013] As a preferred embodiment of the present utility model, the filter assembly includes a main box body, a filter, and a filter cover plate, and the filter is installed in the space enclosed by the main box body and the filter cover plate.

[0014] As a preferred embodiment of the present utility model, the air suction fan assembly includes an air suction base, an air suction fan, and an upper cover, and the air suction fan is installed in the space enclosed by the air suction base and the upper cover.

[0015] As a preferred embodiment of the present utility model, the number of the air suction fans is greater than the number of the air blowing fans.

[0016] As a preferred embodiment of the present utility model, a water inlet and a water outlet are further provided on the side of the air treatment device.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows: A multifunctional ventilation system applied to a laser direct imaging lithography device in the present utility model is compact and ingenious in structure. By setting an air treatment device, the fresh air entering from the outside is cooled, dehumidified, and filtered, and can be operated in a cyclic manner, so as to realize air circulation dehumidification, temperature control, and filtration cleaning inside the whole lithography device. At the same time, a large amount of external fresh air enters the whole machine, making the inside of the whole machine form a positive pressure, which can better avoid the influence of external air on the temperature, humidity, and cleanliness of the internal environment of the whole machine, thereby reducing the influence of temperature, humidity, and cleanliness on the lithography device, ensuring the safe, reliable, and stable operation of the lithography device, enhancing the user experience, and being beneficial to the popularization and application of the above-mentioned multifunctional ventilation system applied to the laser direct imaging lithography device in the market.

[0018] Furthermore, a blowing and suction device is also provided in the multifunctional ventilation system of the present utility model. The blowing and suction device includes an air knife mechanism and a suction mechanism, which can further effectively promote the air flow and circulation inside the lithography device, ensure uniform air distribution, avoid dead zones and air flow short circuits, and can quickly remove pollutants inside the lithography device, including dust, harmful gases, odors, etc., and maintain the air quality in the operation space. Description of the Drawings

[0019] Figure 1 is a schematic structural diagram of a multifunctional ventilation system applied to a laser direct imaging lithography device in an embodiment of the present utility model;

[0020] Figure 2 is a schematic structural diagram of the air treatment device in an embodiment of the present utility model;

[0021] Figure 3 is a schematic structural diagram of the air knife mechanism in an embodiment of the present utility model;

[0022] Figure 4 It is a schematic structural diagram of a high-speed blowing fan assembly in an embodiment of the present utility model;

[0023] Figure 5 It is a partial schematic structural diagram of a multi-functional ventilation system applied to a laser direct imaging lithography apparatus in an embodiment of the present utility model;

[0024] Figure 6 It is a schematic structural diagram of a suction fan assembly in an embodiment of the present utility model.

[0025] Reference numerals: 1, air treatment device; 101, air inlet; 102, air return port; 103, air outlet; 104, water inlet; 105, water outlet; 2, high-speed blowing fan assembly; 201, blowing base; 202, blowing fan; 203, cover plate; 204, fan mesh cover; 3, air duct; 4, air knife air port; 5, intake air duct component; 6, filter assembly; 601, main box body; 602, filter; 603, filter cover plate; 7, suction fan assembly; 701, suction base; 702, suction fan; 703, upper cover; 8, air outlet duct assembly. Detailed implementation manners

[0026] To make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be described below through specific embodiments shown in the drawings. However, it should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present utility model. In addition, in the following description, the descriptions of well-known structures and technologies are omitted to avoid unnecessarily confusing the concepts of the present utility model.

[0027] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present utility model.

[0028] The embodiments of the present utility model will be described in detail below with reference to the drawings.

[0029] Embodiment: As Figures 1 to 6As shown in the figure, a multi-functional ventilation system applied to a laser direct imaging lithography device is mainly used to cool, dehumidify, and filter the fresh air entering from the outside, so as to control the temperature, humidity, and cleanliness of the fresh air, that is, air, and reduce the impact of the environment on the lithography device. The multi-functional ventilation system mainly includes an air treatment device 1. Inside the air treatment device 1, there is a filter for filtering air, a temperature and humidity sensor for testing the temperature and humidity of air, a dust particle counter for testing the cleanliness of air, or other instruments for testing the cleanliness of air, etc. The above-mentioned air treatment device 1 also has an air inlet 101, an air return port 102, and an air outlet 103. External air enters the inside of the above-mentioned air treatment device 1 through the above-mentioned air inlet 101, and after filtering, cooling, and dehumidifying operations, it blows downward from the top and enters the inside of the lithography device through the above-mentioned air outlet 103, and then is divided into two airflows. The first airflow blows downward and then to the right, passes through the operation platform of the lithography device, and then blows out of the lithography device from the workbench surface. The second airflow blows downward and then to the left, cools the components that need to be cooled on the left side, and then enters the above-mentioned air treatment device 1 upward through the above-mentioned air return port 102. After passing through the filtering, cooling, and dehumidifying treatment of the air treatment device 1 again, it is blown into the lithography device again through the air outlet 103 of the air treatment device 1 to achieve a cyclic operation.

[0030] The lithography process has extremely high requirements for the cleanliness of the environment. The air treatment device 1 can filter out dust particles and other pollutants in the air, ensuring the cleanliness of the operation environment of the lithography device. In this embodiment, the above-mentioned air treatment device 1 is installed on the top of the lithography device. Through the air treatment device 1, a continuous positive pressure airflow can be provided to the inside of the lithography device to prevent external pollutants from entering the device interior and protect the accuracy of the lithography process. Moreover, the air treatment device 1 above the lithography device can control the direction and speed of air flow, forming a laminar flow or a specific air flow pattern, reducing the impact of air disturbance on the lithography process.

[0031] In order to further effectively promote the air flow and circulation in the lithography device, ensure uniform air distribution, and avoid dead zones and air flow short circuits, the multi-functional ventilation system in this embodiment is also provided with a blowing and suction device. At the same time, through the blowing and suction device, pollutants in the lithography device, including dust, harmful gases, odors, etc., can be quickly removed, maintaining the air quality in the operation space. Specifically, the above-mentioned blowing and suction device includes a wind knife mechanism, that is, a blowing mechanism and a suction mechanism. The above-mentioned wind knife mechanism mainly consists of a high-speed blowing fan assembly 2, an air duct 3, and a wind knife air port 4. During operation, the air with qualified temperature, humidity, and cleanliness after being processed by the above-mentioned air treatment device 1 is driven by the above-mentioned high-speed blowing fan assembly 2 to inhale clean and dry air, forms a high-speed air flow after entering the above-mentioned wind knife air port 4, and then enters the above-mentioned suction mechanism.

[0032] The above-mentioned high-speed air-blowing fan assembly 2 includes an air-blowing base 201, an air-blowing fan 202, a cover plate 203 and a fan grille 204. The air-blowing fan 202 is installed on the air-blowing base 201. The cover plate 203 and the air-blowing base 201 enclose a receiving cavity for installing the air-blowing fan 202. The fan grille 204 is installed at the air outlet of the air-blowing fan 202. Among them, the air-blowing fan 202 is installed at a specific position through the air-blowing base 201, and can blow high-speed air towards a specific area or device to achieve directional air flow. In the operating environment of precision instruments such as lithography equipment, high-speed air-blowing can quickly remove dust and particulate matter on the surface of the equipment or in the surrounding environment, preventing pollutants from interfering with the process. In a clean room or a special process environment, the positive pressure can also be maintained through the high-speed air-blowing fan assembly 2 to prevent external pollutants from entering the clean area through gaps. High-speed air-blowing can also help remove the heat and moisture generated during the operation of the equipment, maintaining the appropriate temperature and humidity of the equipment and the environment. Installing the fan grille 204 at the air outlet of the air-blowing fan 202 can protect the air-blowing fan 202 from being damaged by foreign objects, and helps to make the air outlet of the air-blowing fan 202 more uniform, avoiding too concentrated air flow. At the same time, the fan grille 204 can also filter out some larger particulate matter to prevent them from being blown into the lithography equipment. The cover plate 203 and the air-blowing base 201 enclose a receiving cavity for installing the air-blowing fan 202, providing a stable installation environment for the air-blowing fan 202, and can reduce air leakage to ensure that the air flow blows out in a predetermined direction.

[0033] In this embodiment, the above-mentioned blowing fan 202 and the above-mentioned air duct 3 are arranged in one-to-one correspondence. The above-mentioned air duct 3 is connected to the above-mentioned blowing fan 202, and both the above-mentioned blowing fan 202 and the above-mentioned air duct 3 are two, and the above-mentioned air knife air port 4 is one. One above-mentioned air knife air port 4 is connected to two above-mentioned air ducts 3. The two blowing fans 202 provide higher air flow output capacity, which can meet greater ventilation requirements or serve as a backup system to improve the reliability of the system. Moreover, the two blowing fans 202 can work together to provide a more balanced and stable air flow, avoiding uneven air flow that may be caused by a single fan. The two blowing fans 202 in this embodiment can also be independently controlled, and their respective wind speeds can be adjusted according to actual needs to achieve more precise air flow regulation. And if one of the blowing fans 202 or the air duct 3 has a problem, the other blowing fan 202 can still continue to work, reducing the impact of system failures on production. The air duct 3 guides the air flow of the blowing fan 202 to the air knife air port 4, and then blows it to a specific area through the air knife air port 4. The one-to-one correspondence setting ensures that the air flow of each blowing fan 202 can be effectively utilized. The single air knife air port 4 is connected to two air ducts 3, which can concentrate the air flow to form an effect similar to an air knife, for more precisely controlling the air flow direction and intensity. The high-speed concentrated air flow generated by the air knife air port 4 can effectively remove dust, moisture, etc. on the surface of the lithography equipment or the product, and is suitable for cleaning and drying processes.

[0034] The above-mentioned suction mechanism in this embodiment includes an intake air duct component 5, a filter assembly 6, a suction fan assembly 7 and an outlet air duct assembly 8. The intake air duct component 5 is used to absorb the excess gas at the above-mentioned air knife air port 4. The filter assembly 6 filters the inhaled air to remove pollutants such as dust, microorganisms, and harmful gases, ensuring the cleanliness of the air entering the system. The suction fan assembly 7 provides power for the air flow to ensure that the air is inhaled and processed with sufficient flow rate and speed. The outlet air duct assembly 8 distributes the processed air to the required area or guides it back to the environment again to achieve air recirculation or discharge. In this embodiment, a part of the excess gas coming out of the above-mentioned air knife air port 4 enters the above-mentioned intake air duct component 5, and then successively passes through the above-mentioned filter assembly 6, the above-mentioned suction fan assembly 7 and the above-mentioned outlet air duct assembly 8. The above-mentioned outlet air duct assembly 8 is connected to an air duct that directly leads to the outside of the lithography equipment.

[0035] The above-mentioned filter assembly 6 includes a main box body 601, a filter 602 and a filter cover plate 603. The above-mentioned filter 602 is installed in the space surrounded by the above-mentioned main box body 601 and the above-mentioned filter cover plate 603. The space surrounded by the main box body 601 and the filter cover plate 603 forms a sealed cavity, ensuring that when the filter 602 is working, air can only pass through the filter 602 for filtration, preventing unfiltered air from bypassing the filter 602 and entering the system. The filter cover plate 603 can also protect the filter 602 from physical damage or contamination, and at the same time is convenient for inspecting and replacing the filter 602. The filter cover plate 603 can be designed as a detachable structure, specifically connected by fasteners or snap connections, etc., which is convenient for users to assemble it. The designs of the main box body 601 and the filter cover plate 603 can also optimize the air flow path, reduce the air flow resistance, and improve the filtration efficiency.

[0036] The above-mentioned air suction fan assembly 7 includes an air suction base 701, an air suction fan 702 and an upper cover 703. The above-mentioned air suction fan 702 is installed in the space surrounded by the above-mentioned air suction base 701 and the above-mentioned upper cover 703, providing physical protection for the air suction fan 702 to prevent dust, moisture or other pollutants from directly contacting the air suction fan 702. At the same time, this structure can also reduce the noise generated when the air suction fan 702 operates. Through the structural design of the upper cover 703 and the air suction base 701, sound blocking and absorption can be achieved. Similarly, the upper cover 703 can be designed as a detachable structure, which is convenient to open and is convenient for regularly inspecting, maintaining and cleaning the air suction fan 702. The air suction base 701 also provides a stable installation platform for the air suction fan 702, and the upper cover 703 helps to maintain the structural stability of the entire air suction fan assembly 7.

[0037] During operation, the air flow entering the air suction mechanism will carry away the pollutants volatilized in the nearby working area when passing through the area and enter the intake air duct component 5 of the air suction mechanism. After being filtered and cleaned by the filter 602, it is driven by the air suction fan assembly 7 and discharged outside the whole machine through the air outlet duct assembly 8, so as to ensure the cleanliness of the working environment of the lithography equipment.

[0038] In this embodiment, the number of the above-mentioned air suction fans 702 is greater than the number of the above-mentioned blowing fans 202 to ensure that the above-mentioned air suction fans 702 can inhale more pollutants volatilized in the working area, so as to better ensure the cleanliness of the internal environment of the lithography equipment.

[0039] On the side of the above-mentioned air treatment device 1, there are also a water inlet 104 and a water outlet 105. The water inlet 104 is connected to the water inlet pipe, and the water outlet 105 is connected to the water outlet pipe. Cooling water can be introduced and the temperature and flow rate of the cooling water can be controlled to effectively control the temperature and humidity of the air entering the equipment.

[0040] In the multi-functional ventilation system of this embodiment, the air handling device 1 directly sucks air from outside the equipment. Compared with the method of using an external additional device to supply air to the equipment through an air duct, the air resistance is smaller and the air volume is larger. Therefore, it can ensure the formation of an effective positive pressure inside the lithography equipment, and can perform temperature control, dehumidification, and filtration cleaning more effectively to ensure the cleanliness of the environment inside the lithography equipment. The blowing and suction device therein can also protect the environment from pollution, and at the same time can absorb and filter the pollutants volatilized in the working area to ensure the cleanliness of the environment inside and outside the equipment.

[0041] The multi-functional ventilation system of this embodiment is also provided with a blowing and suction device. The blowing and suction device includes a air knife mechanism and a suction mechanism, which can further effectively promote the air flow and circulation inside the lithography equipment, ensure uniform air distribution, avoid dead zones and air flow short circuits, and can quickly remove pollutants inside the lithography equipment, including dust, harmful gases, odors, etc., to maintain the air quality in the operation space.

[0042] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

[0043] Although terms such as the reference numerals in the drawings: 1, air handling device; 101, air inlet; 102, air return port; 103, air outlet; 104, water inlet; 105, water outlet; 2, high-speed blowing fan assembly; 201, blowing base; 202, blowing fan; 203, cover plate; 204, fan grille; 3, air duct; 4, air knife air port; 5, intake air duct component; 6, filter assembly; 601, main box body; 602, filter; 603, filter cover plate; 7, suction fan assembly; 701, suction base; 702, suction fan; 703, upper cover; 8, air outlet duct assembly, etc. are used more in this article, the possibility of using other terms is not excluded. These terms are used only to more conveniently describe and explain the essence of the present invention; interpreting them as any additional limitation is contrary to the spirit of the present invention.

Claims

1. A multi-functional ventilation system applied to a laser direct imaging lithography device, characterized in that, It includes an air handling unit (1) which has an air inlet (101), an air return opening (102) and an air outlet (103). External air enters the interior of the air handling unit (1) through the air inlet (101), and after filtration, cooling and dehumidification operations, it blows downward from the top and enters the interior of the lithography equipment through the air outlet (103). Then it is divided into two airflows. The first airflow goes downward and then to the right, blows out of the lithography equipment from the workbench surface after passing through the operating platform of the lithography equipment. The second airflow goes downward and then to the left, cools the components on the left that need to be cooled, and then goes upward and enters the air handling unit (1) through the air return opening (102). After passing through the filtration, cooling and dehumidification treatment of the air handling unit (1) again, it is blown into the lithography equipment through the air outlet (103) of the air handling unit (1) again to achieve a cyclic operation.

2. The multi-functional ventilation system applied to a laser direct imaging lithography device according to claim 1, wherein The air handling unit (1) is installed on the top of the lithography equipment.

3. The multifunctional ventilation system applied to a laser direct imaging lithography device according to claim 1, characterized in that, The multi-functional ventilation system further includes a blowing and suction device which includes a air knife mechanism and a suction mechanism; the air knife mechanism includes a high-speed blowing fan assembly (2), an air duct (3) and an air knife air port (4). During operation, the air processed by the air handling unit (1) is driven by the high-speed blowing fan assembly (2) to suck in clean and dry air, forms a high-speed air current after entering the air knife air port (4), and then enters the suction mechanism.

4. The multi-functional ventilation system applied to a laser direct imaging lithography apparatus according to claim 3, characterized in that, The high-speed blowing fan assembly (2) includes a blowing base (201), a blowing fan (202), a cover plate (203) and a fan grille (204). The blowing fan (202) is installed on the blowing base (201). The cover plate (203) and the blowing base (201) enclose a receiving cavity for installing the blowing fan (202). The fan grille (204) is installed at the air outlet of the blowing fan (202).

5. The multi-functional ventilation system applied to a laser direct imaging lithography device according to claim 4, wherein, The blowing fans (202) are arranged in one-to-one correspondence with the air ducts (3). The air ducts (3) are connected to the blowing fans (202). Both the blowing fans (202) and the air ducts (3) are two, and the air knife air port (4) is one. One air knife air port (4) is connected to two air ducts (3).

6. The multi-functional ventilation system applied to a laser direct imaging lithography device according to claim 3, wherein, The suction mechanism includes an intake air duct component (5), a filter assembly (6), a suction fan assembly (7) and an outlet air duct assembly (8). Part of the gas coming out of the air knife air port (4) enters the intake air duct component (5), and then successively passes through the filter assembly (6), the suction fan assembly (7) and the outlet air duct assembly (8). The outlet air duct assembly (8) is connected with an air duct directly leading to the outside of the lithography equipment.

7. The multifunctional ventilation system applied to a laser direct imaging lithography device according to claim 6, characterized in that, The filter assembly (6) includes a main box body (601), a filter (602) and a filter cover plate (603). The filter (602) is installed in the space enclosed by the main box body (601) and the filter cover plate (603).

8. A multi-functional ventilation system applied to a laser direct imaging lithography device according to claim 6, characterized in that The suction fan assembly (7) includes a suction base (701), a suction fan (702) and an upper cover (703), and the suction fan (702) is installed in a space formed by enclosing the suction base (701) and the upper cover (703).

9. A multi-functional ventilation system applied to a laser direct imaging lithography apparatus according to claim 8, characterized in that, The number of the suction fans (702) is greater than the number of the blowing fans (202).

10. A multi-functional ventilation system applied to a laser direct imaging lithography device according to claim 1, characterized in that, A water inlet (104) and a water outlet (105) are further provided on the side of the air treatment device (1).

Images