Silicon wafer basket supporting and mounting frame of automatic silicon wafer inserting machine

Abstract

The utility model discloses a silicon wafer basket supporting and mounting rack of an automatic silicon wafer inserting machine, which relates to the technical field of silicon wafer basket supporting and mounting racks and comprises a base, a supporting and mounting rack body is arranged on the base, a rotating rod is rotatably connected to the top end of the inner wall of the left side of the supporting and mounting rack body, and a mounting top plate is arranged on the outer wall of the rotating rod. A hinge seat is mounted at the right end of the lower surface of the mounting top plate, a rotating shaft is rotatably connected to the inner wall of the hinge seat, an electric hydraulic rod is arranged at the right end of the upper surface of the base and located under the hinge seat, four groups of through grooves are formed in the top wall of the base, a moving seat is slidably connected into each group of through grooves, and an L-shaped plate is mounted on the side wall of each group of moving seat. An adjusting screw rod is in threaded connection in the L-shaped plate, and a limiting plate is arranged at the bottom of the adjusting screw rod. The distance between the adjacent moving seats and the adjacent L-shaped plates and the transverse position of the limiting plate can be adjusted, the size of the space for mounting the top plate on the supporting mounting frame can be adjusted, and the silicon wafer basket mounting device can be suitable for mounting silicon wafer baskets of different sizes and is wide in application range.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer carrier support mounting frames, and specifically relates to a wafer carrier support mounting frame for a wafer automatic inserter. Background Technique

[0002] A wafer automatic inserter is a device used in semiconductor manufacturing and solar cell production. The automatic inserter is commonly used in large-scale production, which can significantly improve production efficiency and product quality. In a wafer automatic inserter, wafers need to use a wafer carrier, and the wafer carrier is usually installed on a support mounting frame to achieve accurate and smooth insertion of wafers with the inclination angle of the wafer carrier.

[0003] Most of the existing support mounting frames can usually adjust the inclination angle of the wafer carrier, but most of the support mounting frames are of flat plate structure, which is not convenient to adjust the size of the installation space and cannot be applied to the installation of wafer carriers of different sizes of wafer automatic inserters, so there are certain limitations in use. For this reason, we propose a wafer carrier support mounting frame for a wafer automatic inserter. Content of the Utility Model

[0004] The purpose of the utility model is to provide a wafer carrier support mounting frame for a wafer automatic inserter, so as to solve the problem that the support mounting frame cannot be applied to the installation of wafer carriers of different sizes, resulting in certain limitations in use in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution:

[0006] A wafer carrier support mounting frame for a wafer automatic inserter includes a base. A support mounting frame body is provided on the base. The top end of the left inner wall of the support mounting frame body is rotatably connected to a rotating rod through a bearing. An installation top plate is provided on the outer wall of the rotating rod. The right end of the lower surface of the installation top plate is provided with a hinge seat, and a rotating shaft is rotatably connected to the inner wall of the hinge seat. The right end of the upper surface of the base and directly below the hinge seat is provided with an electric hydraulic rod, and the telescopic end of the electric hydraulic rod is connected to the outer wall of the rotating shaft;

[0007] Four groups of through grooves are opened on the top wall of the base. A moving seat is slidably connected in each group of through grooves. An L-shaped plate is installed on the side wall of each group of moving seats. An adjusting screw rod is threadedly connected in the L-shaped plate, and a limiting plate is provided at the bottom of the adjusting screw rod.

[0008] Furthermore: Two handwheels are provided on the front end face of the installation top plate. Two bidirectional lead screws are installed at the bottoms of the two handwheels, and the bottom ends of the bidirectional lead screws are rotatably connected to the inner wall of the installation top plate through bearings. Two threaded blocks are threadedly connected to the bidirectional lead screws, and the tops of the threaded blocks are connected to the bottom wall of the moving seat.

[0009] Further: The inner cavity of the installation top plate is provided with two groups of fixed rods, the two groups of fixed rods are respectively located directly below the two groups of bidirectional lead screws, and each group of fixed rods is slidably connected with a sliding sleeve, and the top of the sliding sleeve is connected to the bottom of the threaded block.

[0010] Further: The top walls of each group of moving seats are embedded with staggered protrusions.

[0011] Further: Anti-slip rubber sleeves are sleeved on the hand-held ends of the two handwheels.

[0012] Further: Anti-slip pads are provided on the inner sides of each group of limit plates.

[0013] Compared with the prior art, the beneficial effects of the present utility model are:

[0014] By rotating the handwheel of the present utility model, the bidirectional lead screw can be driven to rotate. After the two threaded blocks threadedly connected to the bidirectional lead screw are limited by the fixed rod and the sliding sleeve, the moving seat can slide in the through groove, and the distance between adjacent moving seats and adjacent L-shaped plates can be adjusted. With the rotation of the adjusting screw in the L-shaped plate, the lateral position of the limit plate can be adjusted, and the space size of the installation top plate on the support mounting frame can be adjusted, which can be applicable to the installation of wafer flower baskets of different sizes of wafer automatic inserters, and has a wide range of applications; through the telescopic movement of the electric hydraulic rod, the rotation of the rotating shaft in the hinge seat and the rotation of the rotating rod, the use angle of the wafer automatic inserter wafer flower basket on the installation top plate can be adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a structural schematic diagram of the present utility model;

[0016] Figure 2 is a bottom view structural schematic diagram of the present utility model;

[0017] Figure 3 is a cross-sectional schematic diagram of the connection structure between the installation top plate and the side of the moving seat of the present utility model.

[0018] In the figure: 1, base; 2, support mounting frame body; 3, rotating rod; 4, installation top plate; 5, electric hydraulic rod; 6, through groove; 7, moving seat; 8, L-shaped plate; 9, adjusting screw; 10, limit plate; 11, hinge seat; 12, rotating shaft; 13, handwheel; 14, bidirectional lead screw; 15, fixed rod; 16, sliding sleeve; 17, threaded block. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] Embodiment 1:

[0021] Please refer to Figures 1-3 , the present invention provides a technical solution: a wafer carrier support mounting frame for an automatic wafer inserter, including a base 1, a support mounting frame body 2 is provided on the base 1, the top end of the left inner wall of the support mounting frame body 2 is rotatably connected to a rotating rod 3 through a bearing, an installation top plate 4 is provided on the outer wall of the rotating rod 3, the right end of the lower surface of the installation top plate 4 is provided with a hinge seat 11, and a rotating shaft 12 is rotatably connected to the inner wall of the hinge seat 11. The right end of the upper surface of the base 1 and directly below the hinge seat 11 is provided with an electric hydraulic rod 5, and the telescopic end of the electric hydraulic rod 5 is connected to the outer wall of the rotating shaft 12; the base 1 and the support mounting frame body 2 are fixedly installed, the rotating rod 3 and the installation top plate 4 are fixedly connected, the telescopic end of the electric hydraulic rod 5 is fixedly connected to the outer wall of the rotating shaft 12, and the hinge seat 11 is welded to the bottom of the installation top plate 4. By the telescopic movement of the electric hydraulic rod 5, the rotation of the rotating rod 3, and the rotation of the rotating shaft 12, the angle of the installation top plate 4 can be adjusted, so that the inclination angle of the wafer carrier on the installation top plate 4 is aligned with the automatic wafer inserter, realizing accurate and smooth insertion of the wafers;

[0022] Four groups of through grooves 6 are opened on the top wall of the base 1, a moving seat 7 is slidably connected in each group of through grooves 6, an L-shaped plate 8 is installed on the side wall of each group of moving seats 7, an adjusting screw rod 9 is threadedly connected in the L-shaped plate 8, and a limiting plate 10 is provided at the bottom of the adjusting screw rod 9; the moving seat 7 and the L-shaped plate 8 are fixedly connected, the bottom end of the adjusting screw rod 9 is movably connected to the limiting plate 10 through a bearing. The moving seat 7 slidably connected in the through groove 6 can slide, and the distance between adjacent moving seats 7 before and after can be adjusted. The rotation of the adjusting screw rod 9 can drive the limiting plate 10 to move, and the distance between adjacent limiting plates 10 on the left and right can be adjusted. The spatial size of the installation top plate 4 on the support mounting frame body 2 can be adjusted, which can be suitable for the installation of wafer carriers of automatic wafer inserters of different sizes, and has a wide application range.

[0023] Among them, preferably, two groups of handwheels 13 are provided on the front end face of the mounting top plate 4. Two-way lead screws 14 are installed at the bottoms of the two groups of handwheels 13, and the bottom ends of the two-way lead screws 14 are rotatably connected to the inner wall of the mounting top plate 4 through bearings. Two groups of threaded blocks 17 are threadedly connected to the two-way lead screws 14, and the tops of the threaded blocks 17 are connected to the bottom wall of the moving seat 7; the rotation of the handwheel 13 can drive the two-way lead screw 14 to rotate forward or backward. A through-threaded hole is provided in the threaded block 17, and the threaded hole is threadedly connected to the two-way lead screw 14.

[0024] Preferably, two groups of fixed rods 15 are provided in the inner cavity of the mounting top plate 4. The two groups of fixed rods 15 are respectively located directly below the two groups of two-way lead screws 14. A sliding sleeve 16 is slidably connected to each group of fixed rods 15, and the top of the sliding sleeve 16 is connected to the bottom of the threaded block 17; both ends of the threaded block 17 are connected to the sliding sleeve 16 and the moving seat 7 respectively. The rotation of the handwheel 13 can drive the two-way lead screw 14 to rotate. After the two groups of threaded blocks 17 threadedly connected to the two-way lead screw 14 are limited by the fixed rods 15 and the sliding sleeves 16, the moving seat 7 can slide in the through groove 6, and the distance between the adjacent front and rear moving seats 7 and the adjacent left and right L-shaped plates 8 can be adjusted.

[0025] Preferably, the top walls of each group of moving seats 7 are embedded with alternately distributed protrusions; the alternately distributed protrusions can increase the friction force with the bottom of the wafer carrier, improving the stability of the wafer carrier installation;

[0026] Preferably, anti-slip rubber sleeves are sleeved on the hand-held ends of the two groups of handwheels 13; the anti-slip rubber sleeves play an anti-slip role, avoiding slipping off when holding the handwheel 13.

[0027] Embodiment 2:

[0028] Referring to Figure 1 , what is different from the first embodiment in this embodiment is that anti-slip pads are provided on the inner side surfaces of each group of limiting plates 10; the anti-slip pads play an anti-slip role, further improving the stability of the wafer carrier installation and preventing the wafer carrier from detaching from the mounting top plate 4.

[0029] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer carrier support mounting frame for an automatic wafer inserter, comprising a base (1), characterized in that: A support mounting frame body (2) is provided on the base (1). The top end of the left inner wall of the support mounting frame body (2) is rotatably connected to a rotating rod (3) through a bearing. An installation top plate (4) is provided on the outer wall of the rotating rod (3). The right end of the lower surface of the installation top plate (4) is provided with a hinge seat (11), and a rotating shaft (12) is rotatably connected to the inner wall of the hinge seat (11). An electric hydraulic rod (5) is provided at the right end of the upper surface of the base (1) and directly below the hinge seat (11). The telescopic end of the electric hydraulic rod (5) is connected to the outer wall of the rotating shaft (12). Four groups of through grooves (6) are formed in the top wall of the base (1). A moving seat (7) is slidably connected in each group of through grooves (6). An L-shaped plate (8) is installed on the side wall of each moving seat (7). An adjusting screw rod (9) is threadedly connected in the L-shaped plate (8), and a limiting plate (10) is provided at the bottom of the adjusting screw rod (9).

2. The wafer carrier support mounting bracket of an automatic wafer inserter according to claim 1, wherein: Two handwheels (13) are provided on the front end face of the installation top plate (4). Two bidirectional screw rods (14) are installed at the bottom of the two handwheels (13), and the bottom ends of the bidirectional screw rods (14) are rotatably connected to the inner wall of the installation top plate (4) through bearings.

3. The wafer carrier support mounting bracket of an automatic wafer inserter according to claim 2, characterized in that: Two thread blocks (17) are threadedly connected to the bidirectional screw rod (14). The top of the thread block (17) is connected to the bottom wall of the moving seat (7).

4. The wafer carrier support mounting frame of an automatic wafer inserter according to claim 3, characterized in that: Two fixing rods (15) are provided in the inner cavity of the installation top plate (4). The two fixing rods (15) are respectively located directly below the two bidirectional screw rods (14). A sliding sleeve (16) is slidably connected to each fixing rod (15), and the top of the sliding sleeve (16) is connected to the bottom of the thread block (17).

5. The wafer carrier support mounting bracket of an automatic wafer inserter according to claim 1, characterized in that: Protrusions are embedded in an alternating distribution on the top wall of each moving seat (7).

6. The wafer carrier support mounting bracket of an automatic wafer inserter according to claim 2, characterized in that: Anti-slip rubber sleeves are sleeved on the hand-held ends of the two handwheels (13).

7. The wafer carrier support mounting bracket of an automatic wafer inserter according to claim 1, characterized in that: Anti-slip pads are provided on the inner side surfaces of each group of limiting plates (10).

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