Wafer corrosion basket
Through designing adjustment and auxiliary devices, the shaking and drop problems caused by model misfit in the wafer corrosion basket are solved, and stable positioning and efficient processing of different types of wafers are achieved.
Patent Information
- Application Number
- CN202422286887.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-19
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-09-19
AI Technical Summary
During use, existing wafer corrosion baskets cannot adapt to different types of wafers, resulting in shaking and falling damage.
A wafer corrosion basket is designed, using adjustment devices and auxiliary devices. Through the coordination of bidirectional screws and screw hole blocks, the positioning limits of different types of wafers are achieved. Combined with structures such as bearings, sliders, circular plates and support frames, positioning flexibility and stability are improved.
It effectively reduces the risk of shaking and falling in the basket of different types of wafers, and improves positioning flexibility and processing efficiency for different types of wafers.
Smart Images
Figure CN223092835U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of carrying baskets, in particular to a wafer etching carrying basket. Background Art
[0002] Quartz wafers are the main raw materials for quartz crystal oscillators and quartz crystal resonators, providing basic clock signals for digital signals. Quartz wafers need to be etched during the production process, so a carrying basket is required.
[0003] In the existing wafer etching carrying basket, during use, the wafers are mostly placed in a placement space composed of multiple support rods, and then the carrying basket is moved into an etching furnace, so that the etching furnace corrodes the wafers in the carrying basket at high temperature.
[0004] However, since there are many types and sizes of wafers, and the positions of the multiple support rods are fixed, it may cause the size of the placement space formed by the multiple support rods to be mismatched with the sizes of different types and sizes of wafers after they are placed in the carrying basket, resulting in the wafers shaking and falling and being damaged during the process of taking and placing the carrying basket. Summary of the Utility Model
[0005] The purpose of the utility model is to solve the deficiencies existing in the prior art and to propose a wafer etching carrying basket.
[0006] To achieve the above purpose, the utility model adopts the following technical scheme: A wafer etching carrying basket includes two vertical plates. A first support rod is arranged between the two vertical plates. Support plates are arranged on one side of each of the two vertical plates. An adjusting device is arranged between the two vertical plates. Auxiliary devices are arranged on one side of each of the two vertical plates. The adjusting device includes two rectangular rods. The two rectangular rods are symmetrically and fixedly connected to the surface of one of the vertical plates. Two rectangular holes are symmetrically formed on one side of each of the two vertical plates. A bidirectional screw rod is rotatably connected between the two rectangular rods. The thread shapes on the surface of the bidirectional screw rod are arranged in opposite symmetry. Two threaded hole blocks are symmetrically and threadedly connected to the surface of the bidirectional screw rod. The surfaces of the two threaded hole blocks are respectively slidably connected to the inner walls of the two rectangular holes. A second support rod is fixedly connected to one side of each of the two threaded hole blocks.
[0007] The effects achieved by the above components are as follows: By setting the adjusting device, first place the wafer body in the limiting groove on the first support rod, so that the wafer body is located between the two second support rods. At this time, manually rotate the bidirectional screw rod, so that the bidirectional screw rod drives the two screw hole blocks to move towards each other, so that the two screw hole blocks move towards each other along the inside of the two rectangular holes, so that the two screw hole blocks drive the two second support rods to move towards each other. When the two second support rods move towards each other to the position where they are simultaneously in contact with the surface of the wafer body, the two second support rods cooperate with the first support rod to intercept and limit the wafer body. Furthermore, the two second support rods can intercept and limit wafer bodies of different model sizes through position adjustment, reducing the situation that the placement space formed by the wafer bodies of different model sizes and multiple support rods is not well-matched after being placed in the basket, resulting in the wafer body shaking and falling and being damaged during the process of taking and placing the basket, and improving the positioning flexibility and processing efficiency of wafer bodies of different model sizes.
[0008] Preferably, bearings are fixedly connected to both ends of the bidirectional screw rod, and the outer rings of the two bearings are respectively fixedly connected to the two rectangular rods.
[0009] The effects achieved by the above components are as follows: By setting the bearings, the bearings can increase the rotation efficiency and rotation stability between the bidirectional screw rod and the rectangular rod, and at the same time can reduce the rotational wear between the bidirectional screw rod and the rectangular rod.
[0010] Preferably, an operation block is fixedly connected to the middle position of the bidirectional screw rod, and a plurality of grooves are formed on the surface of the operation block.
[0011] The effects achieved by the above components are as follows: By setting the operation block, the operation block can increase the contact area of the bidirectional screw rod, so that personnel can drive the bidirectional screw rod to rotate by manually rotating the operation block, improving the convenience of manually rotating the bidirectional screw rod.
[0012] Preferably, sliding rods are fixedly connected to the sides of the two second support rods away from the screw hole blocks, and the surfaces of the two sliding rods are respectively slidably connected to the inner walls of the other two rectangular holes.
[0013] The effects achieved by the above components are as follows: By setting the sliding rods, the sliding rods can be located inside the rectangular holes to assist in supporting the sides of the second support rods away from the screw hole blocks, reducing the situation that the sides of the second support rods away from the screw hole blocks shake up and down during use.
[0014] Preferably, circular plates are fixedly connected to the sides of the two sliding rods away from the second support rods, and the surface of the circular plate is larger than the inner wall of the rectangular hole.
[0015] The effect achieved by the above components is: by setting the circular plate, the circular plate can assist in limiting the second support rod, thereby reducing the left and right shaking of the two second support rods away from the side of the screw hole block when they move towards each other.
[0016] Preferably, the auxiliary device includes a slot provided on one side of the vertical plate, a threaded groove is provided on the side of the vertical plate close to the slot, a block is slidably connected to the inner wall of the slot, a support frame is fixedly connected to one side of the block, a round hole rod is fixedly connected to one side of the block, a bolt is provided inside the round hole rod, and the surface of the bolt is threadedly connected to the inner wall of the threaded groove.
[0017] The effect achieved by the above-mentioned components is as follows: by setting up the auxiliary device, first the manual round hole rod is moved so that the round hole rod drives the support frame and the clamping block to move. When the clamping block moves to the position that is completely inserted into the internal slot, the inner wall of the round hole rod coincides with the inner wall of the threaded groove. At this time, the bolt is turned into the round hole rod and the threaded groove by a tool to fix the position of the round hole rod and the support frame, and the assembly of the support frame and the vertical plate is completed, so that the support frame can increase the contact area between the vertical plate and the ground or table top and provide auxiliary support for the bottom of the vertical plate, thereby reducing the shaking or tipping to one side of the vertical plate when it is placed on the table top or the ground, and improving the placement stability of the vertical plate.
[0018] Preferably, a non-slip base plate is fixedly connected to one side of the support frame, and a plurality of non-slip protrusions are provided on one side of the non-slip base plate.
[0019] The effect achieved by the above components is: by setting the anti-skid bottom plate, the anti-skid bottom plate can increase the resistance between the support frame and the ground or the table top, and reduce the sliding of the support frame and the vertical plate when placed on the ground or the table top.
[0020] Preferably, a reinforcement plate is fixedly connected to one side of the round hole rod, and the reinforcement plate is fixedly connected to the support frame.
[0021] The effect achieved by the above components is: by setting the reinforcement plate, the reinforcement plate can increase the connection strength between the round hole rod and the support frame, reducing the situation where the round hole rod is separated from the support frame during use.
[0022] Compared with the prior art, the advantages and positive effects of the utility model are:
[0023] In the utility model, the adjustment device can be set to intercept and limit the wafer bodies of different models and sizes, thereby reducing the situation where the wafer bodies of different models and sizes are placed in the basket and the placement space formed by multiple support rods are not compatible, causing the basket to shake and fall and be damaged during the process of taking and placing. The positioning flexibility and processing efficiency of wafer bodies of different models and sizes are improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Figure 1 Schematic three-dimensional structure diagram of the present utility model;
[0025] Figure 2 Partial structure diagram of the screw hole block of the present utility model;
[0026] Figure 3 Partial structure diagram of the card slot of the present utility model;
[0027] Figure 4 Partial structure diagram of the support frame of the present utility model.
[0028] Legend: 1. Vertical plate; 2. Support plate; 3. First support rod; 4. Adjusting device; 41. Rectangular rod; 42. Rectangular hole; 43. Bidirectional screw; 44. Operating block; 45. Screw hole block; 46. Second support rod; 47. Slide rod; 48. Circular plate; 49. Bearing; 5. Auxiliary device; 51. Card slot; 52. Threaded groove; 53. Block; 54. Support frame; 55. Round hole rod; 56. Bolt; 57. Reinforcing plate; 58. Anti-slip bottom plate; 6. Chip body. Detailed implementation mode
[0029] Refer to Figures 1-4As shown in the figure, this embodiment discloses a wafer etching basket, which includes two vertical plates 1. A first support rod 3 is arranged between the two vertical plates 1. Support plates 2 are arranged on one side of each of the two vertical plates 1. An adjusting device 4 is arranged between the two vertical plates 1. Auxiliary devices 5 are arranged on one side of each of the two vertical plates 1. The adjusting device 4 includes two rectangular rods 41, which are symmetrically and fixedly connected to the surface of one of the vertical plates 1. Two rectangular holes 42 are symmetrically formed on one side of each of the two vertical plates 1. A bidirectional screw 43 is rotatably connected between the two rectangular rods 41. The thread shapes on the surface of the bidirectional screw 43 are arranged in opposite symmetry. Two threaded hole blocks 45 are symmetrically threadedly connected to the surface of the bidirectional screw 43. The surfaces of the two threaded hole blocks 45 are respectively slidably connected to the inner walls of the two rectangular holes 42. A second support rod 46 is fixedly connected to one side of each of the two threaded hole blocks 45. By setting the adjusting device 4, first place the wafer body 6 in the limiting groove on the first support rod 3, so that the wafer body 6 is located between the two second support rods 46. At this time, manually rotate the bidirectional screw 43, so that the bidirectional screw 43 drives the two threaded hole blocks 45 to move towards each other, so that the two threaded hole blocks 45 move towards each other along the inside of the two rectangular holes 42, so that the two threaded hole blocks 45 drive the two second support rods 46 to move towards each other. When the two second support rods 46 move towards each other to the position where they are simultaneously in contact with the surface of the wafer body 6, the two second support rods 46 cooperate with the first support rod 3 to intercept and limit the wafer body 6. Furthermore, the two second support rods 46 can intercept and limit the wafer bodies 6 of different model sizes through position adjustment, reducing the mismatch between the placement space formed by the wafer bodies 6 of different model sizes and multiple support rods after being placed in the basket, and preventing the wafer body 6 from shaking and falling and being damaged during the process of taking and placing the basket, improving the positioning flexibility and processing efficiency of the wafer bodies 6 of different model sizes.
[0030] Refer to Figure 2 and Figure 3 As shown in the figure, bearings 49 are fixedly connected to both ends of the bidirectional screw 43. The outer rings of the two bearings 49 are respectively fixedly connected to the two rectangular rods 41. By setting the bearings 49, the bearings 49 can increase the rotation efficiency and rotation stability between the bidirectional screw 43 and the rectangular rod 41, and at the same time reduce the rotational wear between the bidirectional screw 43 and the rectangular rod 41. An operation block 44 is fixedly connected to the middle position of the bidirectional screw 43. A plurality of grooves are formed on the surface of the operation block 44. By setting the operation block 44, the operation block 44 can increase the contact area of the bidirectional screw 43, so that personnel can drive the bidirectional screw 43 to rotate by manually rotating the operation block 44, improving the convenience of manually rotating the bidirectional screw 43.
[0031] Refer to Figure 2 and Figure 3As shown in the figure, in this embodiment, both sides of the two second support rods 46 far away from the screw hole block 45 are fixedly connected with slide rods 47. The surfaces of the two slide rods 47 are respectively slidably connected with the inner walls of the other two rectangular holes 42. By setting the slide rods 47, the slide rods 47 can be located inside the rectangular holes 42 to assist in supporting the sides of the second support rods 46 far away from the screw hole block 45, reducing the situation that the sides of the second support rods 46 far away from the screw hole block 45 shake up and down during use. Both sides of the two slide rods 47 far away from the second support rods 46 are fixedly connected with round plates 48. The surface of the round plate 48 is larger than the inner wall of the rectangular hole 42. By setting the round plate 48, the round plate 48 can assist in limiting the second support rods 46, reducing the situation that the sides of the two second support rods 46 far away from the screw hole block 45 shake left and right when moving towards each other.
[0032] Referring to Figure 3 and Figure 4 As shown in the figure, in this embodiment, the auxiliary device 5 includes a card slot 51 opened on one side of the vertical plate 1. A threaded groove 52 is opened on the side of the vertical plate 1 close to the card slot 51. The inner wall of the card slot 51 is slidably inserted and connected with a card block 53. One side of the card block 53 is fixedly connected with a support frame 54. One side of the card block 53 is fixedly connected with a round hole rod 55. A bolt 56 is arranged inside the round hole rod 55. The surface of the bolt 56 is threadedly connected with the inner wall of the threaded groove 52. By setting the auxiliary device 5, first manually move the round hole rod 55, so that the round hole rod 55 drives the support frame 54 and the card block 53 to move. When the card block 53 moves to a position where it is completely inserted into the card slot 51, the inner wall of the round hole rod 55 coincides with the inner wall of the threaded groove 52. At this time, use a tool to turn the bolt 56 into the round hole rod 55 and the threaded groove 52 to fix the positions of the round hole rod 55 and the support frame 54, completing the assembly of the support frame 54 and the vertical plate 1, so that the support frame 54 can increase the contact area between the vertical plate 1 and the ground or the tabletop and assist in supporting the bottom of the vertical plate 1, reducing the situation that the vertical plate 1 shakes or topples to one side when placed on the tabletop or the ground, and improving the placement stability of the vertical plate 1.
[0033] Referring to Figure 3 and Figure 4 As shown in the figure, in this embodiment, one side of the support frame 54 is fixedly connected with an anti-slip bottom plate 58. There are a plurality of anti-slip protrusions on one side of the anti-slip bottom plate 58. By setting the anti-slip bottom plate 58, the anti-slip bottom plate 58 can increase the resistance between the support frame 54 and the ground or the tabletop, reducing the situation that the support frame 54 and the vertical plate 1 slide when placed on the ground or the tabletop. One side of the round hole rod 55 is fixedly connected with a reinforcement plate 57. The reinforcement plate 57 is fixedly connected with the support frame 54. By setting the reinforcement plate 57, the reinforcement plate 57 can increase the connection strength between the round hole rod 55 and the support frame 54, reducing the situation that the round hole rod 55 separates from the support frame 54 during use.
[0034] Working principle: First, place the wafer body 6 in the limit groove on the first support rod 3 so that the wafer body 6 is located between two second support rods 46. At this time, manually rotate the operation block 44, so that the operation block 44 drives the bidirectional screw rod 43 to rotate, so that the bidirectional screw rod 43 rotates between two rectangular rods 41 under the action of the bearing 49, so that the bidirectional screw rod 43 drives two screw hole blocks 45 to move towards each other, so that the two screw hole blocks 45 move towards each other along the inside of the two rectangular holes 42, so that the two screw hole blocks 45 drive the two second support rods 46 to move towards each other. When the two second support rods 46 move towards each other to the position where they are in contact with the surface of the wafer body 6 at the same time, the two second support rods 46 cooperate with the first support rod 3 to intercept and limit the wafer body 6, completing the interception and positioning of the wafer body 6 of different model sizes. At this time, manually move the support plate 2 to move the two vertical plates 1 and the wafer body 6 into the etching furnace, so that the etching furnace performs high-temperature etching processing on the wafer body 6.
[0035] First, manually rotate the round hole rod 55, so that the round hole rod 55 drives the support frame 54 and the clamping block 53 to move. When the clamping block 53 moves to the position where it is completely clamped inside the clamping groove 51, the inner wall of the round hole rod 55 coincides with the inner wall of the thread groove 52. At this time, use a tool to turn the bolt 56 into the round hole rod 55 and the thread groove 52 to fix the positions of the round hole rod 55 and the support frame 54, completing the assembly of the support frame 54 and the vertical plate 1, so that the support frame 54 can increase the contact area between the vertical plate 1 and the ground or the tabletop and assist in supporting the bottom of the vertical plate 1, achieving the support and reinforcement of the bottom of the vertical plate 1.
[0036] The above is only a preferred embodiment of the present invention, and it is not a limitation of the present invention in other forms. Any person skilled in the art may use the disclosed technical content to make changes or modifications into equivalent embodiments with equivalent changes and apply them to other fields. However, as long as it does not depart from the technical solution content of the present invention, any simple modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention still belong to the protection scope of the technical solution of the present invention. In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood through specific situations.
Claims
1. A wafer etching basket, comprising two vertical plates (1), characterized in that: A first support rod (3) is arranged between the two vertical plates (1). Support plates (2) are arranged on one side of each of the two vertical plates (1). An adjusting device (4) is arranged between the two vertical plates (1). Auxiliary devices (5) are arranged on one side of each of the two vertical plates (1). The adjusting device (4) includes two rectangular rods (41). The two rectangular rods (41) are symmetrically and fixedly connected to the surface of one of the vertical plates (1). Two rectangular holes (42) are symmetrically formed on one side of each of the two vertical plates (1). A bidirectional screw rod (43) is rotatably connected between the two rectangular rods (41). The thread shapes on the surface of the bidirectional screw rod (43) are arranged in opposite symmetry. Two screw hole blocks (45) are symmetrically threadedly connected to the surface of the bidirectional screw rod (43). The surfaces of the two screw hole blocks (45) are respectively slidably connected to the inner walls of the two rectangular holes (42). A second support rod (46) is fixedly connected to one side of each of the two screw hole blocks (45).
2. The wafer etching carrier according to claim 1, characterized in that: Bearings (49) are fixedly connected to both ends of the bidirectional screw rod (43). The outer rings of the two bearings (49) are respectively fixedly connected to the two rectangular rods (41).
3. A wafer etching basket according to claim 1, characterized in that: An operation block (44) is fixedly connected to the middle position of the bidirectional screw rod (43). A plurality of grooves are formed on the surface of the operation block (44).
4. A wafer etching basket according to claim 1, characterized in that: Sliding rods (47) are fixedly connected to one side of each of the two second support rods (46) away from the screw hole blocks (45). The surfaces of the two sliding rods (47) are respectively slidably connected to the inner walls of the other two rectangular holes (42).
5. A wafer etching basket according to claim 4, characterized in that: Circular plates (48) are fixedly connected to one side of each of the two sliding rods (47) away from the second support rods (46). The surface of the circular plate (48) is larger than the inner wall of the rectangular hole (42).
6. The wafer etching basket according to claim 1, characterized in that: The auxiliary device (5) includes a card slot (51) formed on one side of the vertical plate (1). A threaded groove (52) is formed on one side of the vertical plate (1) close to the card slot (51). A card block (53) is slidably inserted into the inner wall of the card slot (51). A support frame (54) is fixedly connected to one side of the card block (53). A round hole rod (55) is fixedly connected to one side of the card block (53). A bolt (56) is arranged inside the round hole rod (55). The surface of the bolt (56) is threadedly connected to the inner wall of the threaded groove (52).
7. A wafer etching basket according to claim 6, characterized in that: An anti-slip bottom plate (58) is fixedly connected to one side of the support frame (54). A plurality of anti-slip protrusions are arranged on one side of the anti-slip bottom plate (58).
8. A wafer etching basket according to claim 6, characterized in that: A reinforcing plate (57) is fixedly connected to one side of the round hole rod (55). The reinforcing plate (57) is fixedly connected to the support frame (54).