Chlorosilane synthesis equipment

Abstract

The utility model provides chlorosilane synthesis equipment which comprises a hydrogen chloride supply device communicated with a preheating device, and the hydrogen chloride supply device is used for conveying hydrogen chloride gas to the preheating device so as to preheat the hydrogen chloride gas; the preheating device is provided with a heat exchange medium inlet and a heat exchange medium outlet; the reaction device is communicated with the preheating device, so that preheated hydrogen chloride gas enters the reaction device, and the raw material supply device is used for conveying reaction raw materials into the reaction device, so that the reaction raw materials react with the hydrogen chloride gas; the reaction device is communicated with the heat exchange medium inlet, so that a product system generated by the reaction device is used as a heat exchange medium to preheat hydrogen chloride gas; and the tail gas treatment device communicates with the heat exchange medium outlet and is used for treating the product system after heat exchange to obtain chlorosilane, by means of the equipment, hydrogen chloride gas can be preheated in advance, and reaction does not need to be guaranteed by means of reaction heat.

Description

Technical Field

[0001] The utility model relates to the technical field of chlorosilane synthesis, and more specifically, to a chlorosilane synthesis device. Background Art

[0002] Chlorosilane synthesis refers to the process in which hydrogen chloride and silicon react under high-temperature conditions, and by controlling the reaction temperature, the main component in the generated chlorosilane product is chlorosilane, and then the chlorosilane in the gas is condensed by a condensation method.

[0003] In the existing chlorosilane synthesis device, the required volume purity of the input hydrogen chloride is above 85%. When reacting, generally, its own reaction heat is relied on to maintain the temperature required for the reaction. However, if the volume purity of the input hydrogen chloride is lower than 85%, it is difficult for the heat of its own reaction to maintain the continuous progress of the reaction. When the reaction temperature is lower than a certain requirement, the reaction will stop, which is not conducive to the synthesis of chlorosilane. Summary of the Utility Model

[0004] The main purpose of the present utility model is to provide a chlorosilane synthesis device to solve the problem in the prior art that when the volume purity of the input hydrogen chloride is lower than 85%, the reaction in the reaction section will stop due to the inability to maintain the temperature of the reaction section for a long time, resulting in the inability to generate chlorosilane.

[0005] To achieve the above object, according to one aspect of the present utility model, a chlorosilane synthesis device is provided. The chlorosilane synthesis device includes: a hydrogen chloride supply device having a first discharge port;

[0006] A preheating device having a first intake port, the first intake port being in communication with the first discharge port. The hydrogen chloride supply device is used to convey hydrogen chloride gas to the preheating device through the first intake port so that the preheating device preheats the hydrogen chloride gas from the hydrogen chloride supply device; the preheating device has a heat exchange medium inlet and a heat exchange medium outlet;

[0007] A raw material supply device having a raw material outlet;

[0008] A reaction device in communication with the preheating device so that the preheated hydrogen chloride gas enters the reaction device. The reaction device has a first feed port and a second discharge port. The first feed port is in communication with the raw material outlet. The raw material supply device is used to convey reaction raw materials into the reaction device through the first feed port so that the reaction raw materials react with the hydrogen chloride gas; the second discharge port is in communication with the heat exchange medium inlet of the preheating device to use the product system generated by the reaction device as a heat exchange medium to preheat the hydrogen chloride gas in the preheating device;

[0009] The tail gas treatment device is connected to the heat exchange medium outlet of the preheating device and is used for treating the tail gas of the product system after heat exchange to obtain chlorosilane.

[0010] Furthermore, the preheating device includes: a heat exchange unit which has mutually independent first and second heat exchange channels. The first heat exchange channel is connected to the hydrogen chloride supply device, and the second heat exchange channel has a heat exchange medium inlet and a heat exchange medium outlet.

[0011] Furthermore, the preheating device also includes: a heating unit which is connected to the first heat exchange channel of the heat exchange unit to supplement heat to the hydrogen chloride gas.

[0012] Furthermore, the chlorosilane synthesis equipment also includes: a hydrogen chloride buffer device which is arranged between the hydrogen chloride supply device and the preheating device and is respectively connected to the hydrogen chloride supply device and the preheating device to increase the pressure of the hydrogen chloride gas from the hydrogen chloride supply device through the hydrogen chloride buffer device; wherein, the hydrogen chloride buffer device is also connected to the tail gas treatment device so that the tail gas treatment device supplements pressurized gas to the hydrogen chloride buffer device.

[0013] Furthermore, the tail gas treatment device includes: a cooling device which is connected to the heat exchange medium outlet of the preheating device and is used for cooling the product system after heat exchange to obtain a cooled product. The cooled product includes an intermediate product and slurry; a slurry treatment device which is connected to the cooling device and is used for collecting the slurry.

[0014] Furthermore, the tail gas treatment device also includes: a compression device which is connected to the cooling device and is used for compressing the intermediate product to obtain a compressed product;

[0015] a condensation and separation device which is connected to the compression device and is used for condensing and separating the compressed product to obtain chlorosilane.

[0016] Furthermore, the tail gas treatment device also includes: a hydrogen recovery device which is connected to the condensation and separation device to recover hydrogen chloride in the compressed product;

[0017] Wherein, the chlorosilane synthesis equipment also includes a hydrogen chloride buffer device which is arranged between the hydrogen chloride supply device and the preheating device and is respectively connected to the hydrogen chloride supply device and the preheating device. The hydrogen recovery device is connected to the hydrogen chloride buffer device to introduce the hydrogen chloride in the compressed product into the hydrogen chloride buffer device to pressurize the hydrogen chloride gas in the hydrogen chloride buffer device.

[0018] Further, the tail gas treatment device further includes: a hydrogen product tank, which is connected to both the hydrogen recovery device and the hydrogen chloride buffer device, and is used to recover hydrogen in the compressed product and transport the recovered hydrogen to the hydrogen chloride buffer device or store it to form a hydrogen product.

[0019] According to another aspect of the present invention, a method for synthesizing chlorosilane is provided. This method is applied to the chlorosilane synthesis equipment as described above, and the method includes:

[0020] Step S1: Control the hydrogen chloride supply device to transport hydrogen chloride gas to the preheating device at a preset flow rate;

[0021] Step S2: When the temperature of the reaction section in the reaction device is lower than the second preset temperature, control the preheating device to preheat the hydrogen chloride gas to the first preset temperature and transport it to the reaction device;

[0022] Step S3: Control the raw material supply device to add reaction raw materials into the reaction device so that the hydrogen chloride gas and the reaction raw materials in the reaction device react to obtain a first reaction system, and the reaction raw materials are silicon powder;

[0023] Step S4: Discharge the first reaction system through the second discharge port to the preheating device to exchange heat with the hydrogen chloride gas from the hydrogen chloride supply device, so as to increase the temperature of the hydrogen chloride gas and obtain a second reaction system;

[0024] Step S5: Use the tail gas treatment device to treat the second reaction system to obtain chlorosilane.

[0025] Further, step S2 includes:

[0026] Step S21: Use the heat exchange unit to exchange heat between the hydrogen chloride gas in its first heat exchange channel and the product system in the second heat exchange channel to increase the temperature of the hydrogen chloride gas.

[0027] Further, step S2 further includes:

[0028] Step S22: Obtain the first real-time temperature in the reaction device; obtain the second real-time temperature of the product system flowing out of the reaction device;

[0029] Step S23: Determine whether the first real-time temperature is less than the second preset temperature, or whether the second real-time temperature is less than the third preset temperature;

[0030] Step S24: When the first real-time temperature is less than the second preset temperature, or the second real-time temperature is less than the third preset temperature, control the heating unit to heat the hydrogen chloride gas flowing out of the first heat exchange channel until the first preset temperature.

[0031] Furthermore, before the step of controlling the hydrogen chloride supply device to deliver hydrogen chloride gas to the preheating device at a preset flow rate, step S1 further includes: obtaining a first real-time pressure in the hydrogen chloride buffer device and a second real-time pressure in the reaction device;

[0032] It is determined whether the first real-time pressure is greater than the second real-time pressure, so that when the first real-time pressure is less than or equal to the second real-time pressure, the pressure of the hydrogen chloride buffer device is increased until the first real-time pressure is greater than the second real-time pressure.

[0033] Further, the chlorosilane synthesis equipment is the above-mentioned chlorosilane synthesis equipment, the cooling device of the tail gas treatment device includes a tower top and a tower bottom arranged in a vertical direction, and step S5 includes:

[0034] Step S51: controlling the temperature in the tower top to be lower than a fourth preset temperature, and controlling the temperature in the tower bottom to be higher than a fifth preset temperature.

[0035] Furthermore, the compression device includes a compressor, and the compressor has a preset inlet pressure and a preset outlet pressure. Step S5 also includes:

[0036] Step S52, conveying the cooled product after being cooled by the cooling device to a compression device for compression to obtain a compressed product;

[0037] Step S53, condensing the compressed product to a third preset temperature, and separating it to obtain chlorosilane.

[0038] Further, the hydrogen recovery device includes an adsorption unit and a hydrogen chloride compression unit, and step S5 further includes:

[0039] Step S54, using the adsorption unit to adsorb the hydrogen chloride gas in the compression product, and transporting the hydrogen chloride gas to the hydrogen chloride compression unit for compression;

[0040] Step S55, transporting the hydrogen in the compressed product to a hydrogen recovery tank.

[0041] Furthermore, the first preset temperature is 260°C.

[0042] Furthermore, the second preset temperature is 280°C.

[0043] Furthermore, the fourth preset temperature is 55°C.

[0044] Furthermore, the fifth preset temperature is 80°C.

[0045] Applying the technical solution of the present utility model, during the use process, hydrogen chloride gas is transported from the hydrogen chloride supply device to the preheating device, so that the preheating device preheats the hydrogen chloride gas. The preheating device has a heat exchange medium inlet and outlet and a heat exchange medium outlet. The preheated hydrogen chloride gas is input into the reaction device, and the raw material supply device simultaneously transports reaction raw materials into the reaction device. The hydrogen chloride gas in the reaction device undergoes a chemical reaction with the reaction raw materials. There is also a tail gas treatment device, which is connected to the heat exchange medium outlet of the preheating device and is used for tail gas treatment of the product system after heat exchange to obtain chlorosilane. By providing a preheating device in this application, the hydrogen chloride gas input into the reaction device can be preheated in advance to increase the temperature of the hydrogen chloride gas input into the reaction device. As a result, when the hydrogen chloride gas reacts with the reaction raw materials, it does not solely rely on its own reaction heat. On the one hand, the output of the reaction products can be reasonably utilized. By properly treating the tail gas, the efficiency and environmental protection of the production process are ensured. Compared with the prior art, this application has no requirement for the volume concentration of the input hydrogen chloride because during the formal reaction, it does not rely on the reaction heat. Therefore, even if the volume concentration of the input hydrogen chloride is less than 85%, the normal production of chlorosilane can be ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] The schematic diagrams in the specification forming a part of this application are used to provide a further understanding of the present utility model. The illustrative embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0047] Figure 1 The flow schematic diagram of the chlorosilane synthesis equipment according to the embodiment of the present utility model is shown.

[0048] Among them, the above-mentioned drawings include the following reference numerals:

[0049] 1. Hydrogen chloride supply device; 101. First discharge port; 102. First air inlet; 2. Hydrogen chloride buffer device; 3. Preheating device; 301. Heat exchange unit; 302. Heating unit; 4. Raw material supply device; 401. Raw material outlet; 402. First feed port; 5. Reaction device; 501. Second discharge port; 6. Cooling device; 7. Slurry treatment device; 8. Compression device; 9. Condensation separation device; 10. Hydrogen recovery device; 103. Adsorption unit; 104. Hydrogen chloride compression unit; 11. Hydrogen product tank. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0050] It should be noted that, without conflict, the embodiments in this application and the features in the embodiments can be combined with each other. The present utility model will be described in detail below with reference to the drawings and in combination with the embodiments.

[0051] In the existing polysilicon production process, chlorine needs to be supplemented by adding trichlorosilane to the system. Whether purchased externally or produced in-house, trichlorosilane is produced by reacting hydrogen chloride with silicon.

[0052] Chlorosilane synthesis refers to the reaction of hydrogen chloride and silicon under high-temperature conditions. By controlling the reaction temperature, the main component in the resulting chlorosilane product is chlorosilane, and then the chlorosilane in the gas is condensed by a condensation method.

[0053] In the existing chlorosilane synthesis device, the required volume purity of the input hydrogen chloride is above 85%. During the reaction, the reaction is generally maintained at the required temperature by its own reaction heat. However, if the volume purity of the input hydrogen chloride is lower than 85%, the heat generated by its own reaction is difficult to maintain the continuous progress of the reaction. When the reaction temperature is lower than a certain requirement, the reaction will stop, and the reactor needs to be restarted, resulting in the lack of guarantee for the continuity and stability of production, which is not conducive to the synthesis of chlorosilane.

[0054] Therefore, the purpose of this application is to provide a chlorosilane synthesis device and a synthesis method to solve the above problems.

[0055] This application first provides a chlorosilane synthesis device, which includes:

[0056] A hydrogen chloride supply device 1, which has a first discharge port 101;

[0057] A preheating device 3, which has a first inlet 102. The first inlet 102 is connected to the first discharge port 101. The hydrogen chloride supply device 1 is used to transport hydrogen chloride gas to the preheating device 3 through the first inlet 102, so that the preheating device 3 preheats the hydrogen chloride gas from the hydrogen chloride supply device 1; the preheating device 3 has a heat transfer medium inlet and a heat transfer medium outlet;

[0058] A raw material supply device 4, which has a raw material outlet 401; a reaction device 5, which is connected to the preheating device 3, so that the preheated hydrogen chloride gas enters the reaction device 5. The reaction device 5 has a first feed port 402 and a second discharge port 501. The first feed port 402 is connected to the raw material outlet 401. The raw material supply device 4 is used to transport reaction raw materials into the reaction device 5 through the first feed port 402, so that the reaction raw materials react with the hydrogen chloride gas; the second discharge port 501 is connected to the heat transfer medium inlet of the preheating device 3, so as to use the product system generated by the reaction device 5 as the heat transfer medium to preheat the hydrogen chloride gas in the preheating device 3;

[0059] The tail gas treatment device is connected to the heat exchange medium outlet of the preheating device 3 and is used for treating the tail gas of the product system after heat exchange to obtain chlorosilane.

[0060] Applying the technical solution of the present utility model, during the use process, hydrogen chloride gas is transported from the hydrogen chloride supply device to the preheating device, so that the preheating device preheats the hydrogen chloride gas. And the preheating device has a heat exchange medium inlet and outlet and a heat exchange medium outlet. The preheated hydrogen chloride gas is input into the reaction device, and the raw material supply device simultaneously transports reaction raw materials into the reaction device. The hydrogen chloride gas in the reaction device reacts with the reaction raw materials to undergo a chemical reaction. There is also a tail gas treatment device, which is connected to the heat exchange medium outlet of the preheating device and is used for treating the tail gas of the product system after heat exchange to obtain chlorosilane. In this application, by providing a preheating device, the hydrogen chloride gas input into the reaction device can be preheated in advance to increase the temperature of the hydrogen chloride gas input into the reaction device. Thus, when the hydrogen chloride gas reacts with the reaction raw materials, it does not solely rely on its own reaction heat. On the one hand, the output of the reaction product can be reasonably utilized. By properly treating the tail gas, the efficiency and environmental protection of the production process are ensured. Compared with the prior art, this application has no requirement for the volume concentration of the input hydrogen chloride because during the formal reaction, it does not rely on the reaction heat. Therefore, even when the volume concentration of the input hydrogen chloride is less than 85% or even lower, the normal production of chlorosilane can still be ensured.

[0061] Generally, the progress of a reaction requires a certain amount of energy. During the reaction of hydrogen chloride with silicon powder to form chlorosilane, the reaction itself releases a certain amount of heat. Using the reaction heat to maintain the normal progress of the reaction means that once the reaction is started, the heat generated can promote the subsequent reaction to continue, forming a self-sustaining system. However, in the prior art, generally a relatively high volume concentration of the input hydrogen chloride gas is required so that the reaction can continue. When the hydrogen chloride gas is preheated, it is equivalent to providing a part of the energy for the reaction in advance, making the reaction easier to reach the required activation energy and proceed smoothly. In this way, even if the volume concentration of the input hydrogen chloride is not that high, due to the increase in the initial energy, the reaction can still occur effectively and continue. In actual operation, lower-concentration hydrogen chloride gas may be easier to control and adjust the reaction conditions, reduce the potential risks and operation difficulties brought by high concentration, and may also reduce the harsh requirements for equipment and processes, making the entire reaction system more stable and controllable, thus maintaining the normal progress of the reaction.

[0062] Furthermore, the preheating device 3 includes: a heat exchange unit 301 having independent first and second heat exchange channels. The first heat exchange channel is connected to the hydrogen chloride supply device 1, and the second heat exchange channel has a heat exchange medium inlet and a heat exchange medium outlet;

[0063] a heating unit 302 connected to the first heat exchange channel of the heat exchange unit 301 to supplement heat to the hydrogen chloride gas.

[0064] During use, the hydrogen chloride gas coming out of the hydrogen chloride supply device 1 first enters the first heat exchange channel in the heat exchange unit 301. The product system coming out of the second discharge port 501 of the reaction device 5 enters through the heat exchange medium inlet of the second heat exchange channel and exchanges heat with the hydrogen chloride gas in the first heat exchange channel, thereby increasing the temperature of the hydrogen chloride gas in the first channel. The product system after heat exchange in the second heat exchange channel flows out through the heat exchange medium outlet. The hydrogen chloride gas in the first channel after heat exchange enters the heating unit 302, and the heating unit 302 supplements heat to the hydrogen chloride gas coming out of the first heat exchange channel again to increase the temperature of the hydrogen chloride gas. Furthermore, when the hydrogen chloride gas and silicon powder react in the reaction device 5, it is not necessary to rely only on its own reaction heat to maintain the normal progress of the reaction, ensuring the continuity of the reaction.

[0065] Furthermore, the chlorosilane synthesis equipment further includes: a hydrogen chloride buffer device 2 provided between the hydrogen chloride supply device 1 and the preheating device 3 and respectively connected to the hydrogen chloride supply device 1 and the preheating device 3 to increase the pressure of the hydrogen chloride gas from the hydrogen chloride supply device 1 through the hydrogen chloride buffer device 2; wherein, the hydrogen chloride buffer device 2 is also connected to the tail gas treatment device to enable the tail gas treatment device to supplement pressurized gas to the hydrogen chloride buffer device 2.

[0066] By providing the hydrogen chloride buffer device 2, the pressure of the hydrogen chloride gas from the hydrogen chloride supply device 1 can be increased, so that the hydrogen chloride in the hydrogen chloride supply device 1 can continuously enter the preheating device 3 for preheating and enter the reaction device 5 to react with the silicon powder.

[0067] Furthermore, the tail gas treatment device includes a cooling device 6 connected to the heat exchange medium outlet of the preheating device 3 for cooling the product system after heat exchange to obtain a cooled product, and the cooled product includes an intermediate product and a slurry; a slurry treatment device 7 connected to the cooling device 6 for collecting the slurry.

[0068] Among them, by providing a cooling device 6, the product system from the preheating device 3 can be cooled in a timely manner. The slurry in the cooled product enters the slurry treatment device 7 and is collected by the slurry treatment device 7, which can prevent subsequent equipment and pipelines from being blocked due to the presence of the slurry, thereby ensuring that the entire device can operate continuously for a long time.

[0069] Furthermore, the tail gas treatment device further includes a compression device 8. The compression device 8 is connected to the cooling device 6 and is used to compress the intermediate product to obtain a compressed product; a condensation separation device 9. The condensation separation device 9 is connected to the compression device 8 and is used to condense and separate the compressed product to obtain chlorosilane.

[0070] Furthermore, the tail gas treatment device further includes a hydrogen recovery device 10. The hydrogen recovery device 10 is connected to the condensation separation device 9 to recover hydrogen chloride in the compressed product. Among them, the chlorosilane synthesis equipment further includes a hydrogen chloride buffer device 2. The hydrogen chloride buffer device 2 is arranged between the hydrogen chloride supply device 1 and the preheating device 3 and is respectively connected to the hydrogen chloride supply device 1 and the preheating device 3. The hydrogen recovery device 10 is connected to the hydrogen chloride buffer device 2 to introduce the hydrogen chloride in the compressed product into the hydrogen chloride buffer device 2 to pressurize the hydrogen chloride gas in the hydrogen chloride buffer device 2.

[0071] By providing a hydrogen recovery device 10, hydrogen chloride in the compressed product can be recovered. The hydrogen recovery device 10 is connected to the hydrogen chloride buffer device 2. When the pressure in the hydrogen chloride buffer device 2 is difficult to send the hydrogen chloride gas inside it to the reaction device 5, the hydrogen recovery device 10 transports hydrogen chloride to the hydrogen chloride buffer device 2 to increase the pressure in the hydrogen chloride buffer device 2, so that the hydrogen chloride gas in the hydrogen chloride buffer device 2 can continuously enter the reaction device 5 and react with silicon powder.

[0072] Furthermore, the tail gas treatment device further includes: a hydrogen product tank 11. The hydrogen product tank 11 is connected to both the hydrogen recovery device 10 and the hydrogen chloride buffer device 2 and is used to recover hydrogen in the compressed product and transport the recovered hydrogen into the hydrogen chloride buffer device 2 or store it to form a hydrogen product.

[0073] The tail gas treatment device also includes a hydrogen product tank 11, which can recover hydrogen chloride gas in the compressed product. When the pressure in the hydrogen chloride buffer device 2 is difficult to send the hydrogen chloride gas inside it to the reaction device 5, the hydrogen product tank 11 transports hydrogen chloride to the hydrogen chloride buffer device 2 to increase the pressure in the hydrogen chloride buffer device 2, so that the hydrogen chloride gas in the hydrogen chloride buffer device 2 can continuously enter the reaction device 5 and undergo a chemical reaction with the silicon powder inside it, thereby ensuring the continuous progress of the entire reaction.

[0074] Example 1

[0075] An embodiment of the present application provides a chlorosilane synthesis device. As Figure 1 shown, the chlorosilane synthesis device includes a hydrogen chloride supply device 1. The hydrogen chloride supply device 1 has a first discharge port 101, which can transport the hydrogen chloride in its inner cavity to the next device through the first discharge port 101. The chlorosilane synthesis device includes a preheating device 3. The preheating device 3 has a first air inlet 102. The first air inlet 102 is communicated with the first discharge port 101, so that the hydrogen chloride gas in the hydrogen chloride supply device 1 is transported to the preheating device 3 for preheating. Among them, the preheating device 3 has a heat exchange medium inlet and a heat exchange medium outlet. The preheating device 3 includes a heat exchange unit 301. In the heat exchange unit 301, there are independent first heat exchange channels and second heat exchange channels. Among them, the first heat exchange channel is communicated with the hydrogen chloride supply device 1. The second heat exchange channel has a heat exchange medium inlet and a heat exchange medium outlet. The preheating device 3 further includes a heating unit 302. The heating unit 302 is communicated with the first heat exchange channel of the heat exchange unit 301 to realize supplementary heating of the hydrogen chloride gas. Among them, the heating unit 302 uses an electric heater in this embodiment. The chlorosilane synthesis device further includes a hydrogen chloride buffer device 2 provided between the hydrogen chloride supply device 1 and the preheating device 3 and communicated with them respectively. The hydrogen chloride buffer device 2 is used to increase the pressure of the hydrogen chloride from the hydrogen chloride supply device 1. The hydrogen chloride gas from the hydrogen chloride supply device 1 first enters the hydrogen chloride buffer device 2. The hydrogen chloride buffer device 2 pressurizes the hydrogen chloride gas in it, so that the hydrogen chloride gas in the hydrogen chloride buffer device 2 can smoothly enter the preheating device 3 for preheating. Among them, the hydrogen chloride buffer device is also communicated with a tail gas treatment device. The tail gas treatment device is used to supplement pressurized gas into the hydrogen chloride buffer device 2, so that the hydrogen chloride buffer device 2 can pressurize the hydrogen chloride gas in it. The chlorosilane synthesis device further includes a raw material supply device 4. The raw material supply device 4 has a raw material outlet 401. The raw material supply device 4 is communicated with a reaction device 5 through the raw material outlet 401 for transporting the reaction raw material silicon to the reaction device 5. The reaction device 5 has a first feed port 402 and a second discharge port 501. Among them, the raw material outlet 401 is communicated with the reaction device 5 through the first feed port 402. The reaction device 5 is also communicated with the preheating device 3. The hydrogen chloride gas preheated by the preheating device 3 enters the reaction device 5. The second discharge port 501 is communicated with the heat exchange medium inlet of the heat exchange device 3, so that the product system generated by the reaction device 5 can be used as a heat exchange medium to preheat the hydrogen chloride gas in the preheating device 3. The chlorosilane synthesis device further includes a tail gas treatment device. Among them, the tail gas treatment device is communicated with the heat exchange medium outlet of the preheating device 3 for tail gas treatment of the product system after heat exchange to obtain chlorosilane.

[0076] Among them, the tail gas treatment device includes a cooling device 6 communicated with the heat exchange medium outlet in the preheating device 3, which is used to cool the heat-exchanged product system and obtain cooled products. Among them, the cooled products include intermediate products and slurry. The cooling device 6 is also communicated with a slurry treatment device 7, and the slurry treatment device 7 is used to collect the slurry obtained from the cooling device 6. The cooling device 6 is also communicated with a compression device 8, which is used to compress the intermediate products in the cooled products to obtain compressed products. The compression device 8 is also communicated with a condensation separation device 9, and the condensation separation device 9 is used to condense and separate the compressed products and obtain the final chlorosilane product. The condensation separation device 9 is also communicated with a hydrogen recovery device 10, and the hydrogen recovery device 10 is used to recover hydrogen chloride in the compressed products. The hydrogen chloride buffer device 2 is communicated with the hydrogen chloride supply device 1 and the preheating device 3. The hydrogen recovery device 10 is communicated with the hydrogen chloride buffer device 2, and the hydrogen recovery device 10 is used to introduce hydrogen chloride in the compressed products into the hydrogen chloride buffer device 2 to increase the pressure of the hydrogen chloride gas in the hydrogen chloride buffer device 2, so that the hydrogen chloride gas in the hydrogen chloride buffer device 2 can smoothly enter the preheating device 3 for preheating. The tail gas treatment device also includes a hydrogen product tank 11, and the hydrogen product tank 11 is communicated with the hydrogen recovery device 10 and the hydrogen chloride buffer device 2. The hydrogen product tank 11 is used to recover hydrogen chloride gas in the compressed products and transport the recovered hydrogen chloride gas into the hydrogen chloride buffer device 2 to increase the pressure in the hydrogen chloride buffer device 2.

[0077] The present application also provides a method for synthesizing chlorosilane, which is prepared by using the above chlorosilane synthesis equipment. The method for synthesizing chlorosilane includes:

[0078] Obtain the first real-time pressure in the hydrogen chloride buffer device 2 and the second real-time pressure in the reaction device 5;

[0079] Judge whether the first real-time pressure is greater than the second real-time pressure, and when the first real-time pressure is less than or equal to the second real-time pressure, increase the pressure of the hydrogen chloride buffer device 2 until the first real-time pressure is greater than the second real-time pressure;

[0080] Step S1: Control the hydrogen chloride supply device 1 to transport hydrogen chloride gas to the preheating device 3 at a preset flow rate.

[0081] Step S2: When the temperature of the reaction section in the reaction device 5 is lower than the second preset temperature, control the preheating device 3 to preheat the hydrogen chloride gas to the first preset temperature and transport it to the reaction device 5. The first preset temperature is 260 °C;

[0082] Step S21: Use the heat exchange unit 301 to exchange heat between the hydrogen chloride gas in its first heat exchange channel and the product system in the second heat exchange channel to increase the temperature of the hydrogen chloride gas;

[0083] Step S22: Obtain the first real-time temperature in the reaction device 5;

[0084] Obtain the second real-time temperature of the product system flowing out of the reaction device 5;

[0085] Step S23: Determine whether the first real-time temperature is less than the second preset temperature, or whether the second real-time temperature is less than the third preset temperature, and the second preset temperature is 280 °C;

[0086] Step S24: When the first real-time temperature is less than the second preset temperature, or the second real-time temperature is less than the third preset temperature, control the heating unit 302 to heat the hydrogen chloride gas flowing out of the first heat exchange channel until the first preset temperature.

[0087] Step S3: Control the raw material supply device 4 to add reaction raw materials into the reaction device 5 so that the hydrogen chloride gas and the reaction raw materials in the reaction device 5 react to obtain a first reaction system, and the reaction raw material is silicon powder.

[0088] Step S4: Discharge the first reaction system through the second discharge port 501 to the preheating device 3 to exchange heat with the hydrogen chloride gas from the hydrogen chloride supply device 1 to increase the temperature of the hydrogen chloride gas and obtain a second reaction system.

[0089] Step S5: Treat the second reaction system with a tail gas treatment device to obtain chlorosilane;

[0090] The cooling device 6 of the tail gas treatment device includes a tower top and a tower kettle arranged in the vertical direction. Step S5 further includes:

[0091] Step S51: Control the temperature inside the tower top to be less than the fourth preset temperature, the fourth preset temperature is 55 °C, and control the temperature of the tower kettle to be greater than the fifth preset temperature, the fifth preset temperature is 80 °C;

[0092] The compression device 8 includes a compressor, and the compressor has a preset intake pressure and a preset outlet pressure. Step S5 further includes:

[0093] Step S52: Transport the cooled product after being cooled by the cooling device 6 to the compression device 8 for compression to obtain a compressed product;

[0094] Step S53: Condense the compressed product to the third preset temperature and perform separation to obtain chlorosilane;

[0095] The hydrogen recovery device 10 includes an adsorption unit 103 and a hydrogen chloride compression unit 104. Step S5 further includes:

[0096] Step S54: Use the adsorption unit 103 to adsorb the hydrogen chloride gas in the compression product, and transport the hydrogen chloride gas to the hydrogen chloride compression unit 104 for compression;

[0097] Step S55: Transport the hydrogen gas in the compression product to the hydrogen product tank 11.

[0098] Through the chlorosilane synthesis method mentioned in this application, before the hydrogen chloride gas reacts with silicon powder, the hydrogen chloride gas is preheated by a preheating device. In the prior art, during the process of generating chlorosilane, the volume purity of the hydrogen chloride input needs to reach more than 85% to provide sufficient energy to initiate and maintain the reaction. When the volume purity of the hydrogen chloride gradually decreases, the reaction heat in the reaction device will gradually decrease, resulting in the reaction gradually stopping. In this application, there is no requirement for the volume purity of the input hydrogen chloride because when the preheating device preheats the hydrogen chloride gas, it is equivalent to increasing the energy of the hydrogen chloride molecules in advance, making them have higher kinetic energy and activity. In this way, when the volume purity of the input hydrogen chloride is too low, the temperature of the hydrogen chloride gas can be increased by the preheating device before the hydrogen chloride gas is input into the reaction device to ensure that the hydrogen chloride gas with low volume purity and high temperature can also react with silicon powder in the reaction device, thus making up for the impact of the decrease in the concentration of the hydrogen chloride gas to a certain extent and still being able to meet the energy conditions and reaction rate required to initiate and maintain the reaction normally. That is to say, by preheating the hydrogen chloride gas in advance, the energy state of the hydrogen chloride gas is improved, and the high dependence on its absolute concentration is reduced, so that the reaction can proceed more smoothly.

[0099] Example 2

[0100] The embodiment of this application also provides a chlorosilane synthesis method. Specifically, pressure gauges are provided in both the hydrogen chloride buffer device 2 and the reaction device 5. The pressure gauges are used to detect the first real-time pressure in the hydrogen chloride buffer device 2 and the second real-time pressure in the reaction device 5, and send the detected pressure values to the controller in real time. The controller judges the magnitudes of the first real-time pressure and the second real-time pressure in real time. When it is judged that the first real-time pressure is less than or equal to the second real-time pressure, the pressure in the hydrogen chloride buffer device 2 is increased until the first real-time pressure is greater than the second real-time pressure, so as to ensure that the hydrogen chloride gas in the hydrogen chloride buffer device 2 has sufficient pressure to enter the reaction device 5 and react with the silicon powder therein to generate chlorosilane.

[0101] Among them, the hydrogen chloride gas in the hydrogen chloride supply device 1 is transported to the preheating device 3 through the first pipeline for preheating. A first valve is provided on the first pipeline, and multiple flow rate detectors are arranged inside the first pipeline. It can detect the flow rate of the hydrogen chloride gas in the first pipeline in real time and send the detected flow rate value to the controller. The controller controls the opening degree of the first valve according to the numerical values of each flow rate detector, so as to control the flow rate of the hydrogen chloride gas in the first pipeline, enabling the hydrogen chloride gas to flow into the preheating device 3 evenly for uniform preheating. During preheating, the heat exchange unit 301 is used to exchange heat between the hydrogen chloride gas in the first heat exchange channel and the product system in the second heat exchange channel, thereby initially increasing the temperature of the hydrogen chloride gas. When the first real-time temperature in the reaction device 5 is obtained in real time and it is judged that the first real-time temperature is less than the second preset temperature, the heating unit 302 is controlled to heat the hydrogen chloride gas flowing out of the first heat exchange channel until it reaches the first preset temperature. The first preset temperature is 260°C in this embodiment, and the second preset temperature is 280°C; or the second real-time temperature of the product system flowing out of the reaction device 5 is obtained in real time. When it is judged that the second real-time temperature is less than the third preset temperature, the heating unit 302 is controlled to heat the hydrogen chloride gas flowing out of the first heat exchange channel until the first preset temperature. The third preset temperature is 250°C in this embodiment. In order not to waste the temperature of the product system in the reaction device 5, it is used to conduct preliminary heat exchange with the hydrogen chloride gas to initially increase the temperature of the hydrogen chloride gas, and then the temperature inside the reaction device 5 and the temperature of its product system are detected, and whether the hydrogen chloride gas after heat exchange needs to be heated again is judged based on the two. In this way, it can be ensured that the temperature in the reaction device 5 can generate chlorosilane. When the hydrogen chloride gas reaching the first preset temperature is input into the reaction device 5, the raw material supply device 4 is controlled to supply the reaction raw material, that is, silicon powder, to the reaction device 5, so that the hydrogen chloride gas in the reaction device 5 can chemically react with the silicon powder and obtain the first reaction system. In the reaction device 5, different reactions occur in different temperature ranges. Specifically:

[0102]

[0103] Therefore, according to specific production requirements, the temperature of hydrogen chloride gas can be controlled based on the temperature in the reaction device 5 or the temperature of the product system in the reaction device 5, so as to ensure the normal production of a certain kind of chlorosilane in the reaction device 5. The first reaction system, namely chlorosilane, is discharged through the second discharge port 501 into the preheating device 3 to exchange heat with a pair of hydrogen chloride gases from the hydrogen chloride supply device 1, so as to increase the temperature of the hydrogen chloride gas from the hydrogen chloride supply device 1 and obtain the second reaction system, that is, the chlorosilane after heat exchange. Among them, the cooling device 6 includes a tower top and a tower kettle arranged vertically. The temperature of the tower top is controlled to be less than the fourth preset temperature, and the fourth preset temperature is 55°C, preferably 30°C. It is ensured that the temperature of the tower kettle is greater than the fifth preset temperature, and the fifth preset temperature is 80°C. The second reaction system is input from the tower kettle to the tower top of the cooling device 6 for cooling to obtain a cooling product. The cooling product includes an intermediate product and a slurry. The slurry is mainly metal oxides. The temperature of the tower top is set to 30°C, and metal oxides such as aluminum chloride can be condensed and enter the tower kettle. The temperature of the tower kettle should be greater than 80°C to avoid the solidification of metal oxides and loss of fluidity, thereby blocking the pipeline. This part of the slurry flows along the pipeline into the slurry treatment device 7 to be collected. The intermediate product is input into the compression device 8. The compression device 8 is provided with a compressor. The compressor has a preset intake pressure and a preset outlet pressure. When the pressure in the reaction device 5 is 0.2 mpa, the corresponding preset intake pressure of the compressor at this time is 0.11 Mpa, and the preset outlet pressure is 0.5 Mpa, that is, the preset intake pressure and the preset outlet pressure of the compressor will change correspondingly with the change of the pressure in the reaction device 5. In this embodiment, the pressure of the reaction device 5, as well as the preset intake pressure and the preset outlet pressure of the compressor, are not limited. After the intermediate product is compressed, a compressed product is obtained. The compressed product is input into the condensation separation device 9, condensed and separated by the condensation separation device 9 to obtain chlorosilane. The product system after being condensed and separated by the condensation separation device 9 is transported to the adsorption unit 103 of the hydrogen recovery device 10. In the adsorption unit 103, the hydrogen chloride gas is adsorbed by the PSA method, and the adsorbed hydrogen chloride gas is input into the hydrogen chloride compression unit 104 for compression. The hydrogen gas that has not been adsorbed by the adsorption unit 103 is input into the hydrogen product tank 11 for storage. This part of hydrogen gas can be used to increase the hydrogen chloride buffer device 2 or directly form a hydrogen product. When transporting the pressurized gas to the hydrogen chloride buffer device 2, first use the hydrogen chloride gas in the hydrogen recovery device 10. If the pressure of the hydrogen chloride buffer device 2 cannot be made greater than the pressure of the reaction device 5 at this time, then use the hydrogen chloride gas in the hydrogen chloride supply device 1 to increase it. If the pressure of the hydrogen chloride buffer device 2 still cannot be made greater than the pressure of the reaction device 5, then use the hydrogen gas in the hydrogen product tank 11 to increase the hydrogen chloride gas in the hydrogen chloride buffer device 2 so that the pressure in the hydrogen chloride buffer device 2 is greater than the pressure of the reaction device 5.

[0104] From the above description, it can be seen that the above embodiments of the present utility model achieve the following technical effects: The chlorosilane supply device provides hydrogen chloride gas and transports it through the first discharge port to the first intake port of the preheating device connected thereto, and enters the preheating device for preheating. The raw material supply device transports the reaction raw material silicon powder through the raw material outlet to the reaction device. The preheated hydrogen chloride gas also enters the reaction device and reacts with silicon. The product system generated by the reaction device enters the heat exchange medium inlet of the preheating device through the second discharge port, and uses the heat of the reaction product to preheat the newly entered hydrogen chloride gas, realizing the recovery and utilization of energy and improving the energy utilization efficiency. The tail gas treatment device is connected to the heat exchange medium outlet of the preheating device to treat the heat-exchanged product system, and finally obtains chlorosilane. Through the design of this application, the normal production of chlorosilane is ensured, and the output of the reaction product can be reasonably utilized. By properly treating the tail gas, the high efficiency and environmental protection of the production process are ensured. Compared with the prior art, this application can preheat the hydrogen chloride gas in advance by providing a preheating device. When the formal reaction occurs, it does not need to rely only on the reaction heat to maintain the reaction. Compared with the prior art, this application has no requirements for the volume concentration of the input hydrogen chloride. Even when the input volume concentration of hydrogen chloride is less than 85% or even smaller, the normal production of chlorosilane can be ensured.

[0105] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0106] Unless otherwise specifically stated, the relative arrangements of the components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for the sake of convenience of description, the sizes of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be regarded as part of the authorized specification. In all the examples shown and discussed herein, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0107] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom" are generally based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description. Without contrary description, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus cannot be construed as limiting the protection scope of the present invention; the orientation words "inner, outer" refer to the inside and outside relative to the contour of each component itself.

[0108] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper" etc. may be used herein to describe the spatial positional relationship of one device or feature to other devices or features as shown in the figures. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is inverted, a device described as "above" or "over" other devices or structures will then be positioned "below" or "under" the other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding explanations for the spatial relative descriptions used herein will be made accordingly.

[0109] In addition, it should be noted that the use of terms such as "first" and "second" to define components is only for the convenience of differentiating the corresponding components. Without further statement, the above terms have no special meaning, and thus should not be construed as limiting the protection scope of the present utility model.

[0110] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model may have various modifications and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A chlorosilane synthesis device, characterized in that, Comprising: A hydrogen chloride supply device (1), the hydrogen chloride supply device (1) having a first discharge port (101); A preheating device (3), the preheating device (3) having a first intake port (102), the first intake port (102) being in communication with the first discharge port (101), the hydrogen chloride supply device (1) being configured to convey hydrogen chloride gas to the preheating device (3) through the first intake port (102) so that the preheating device (3) preheats the hydrogen chloride gas from the hydrogen chloride supply device (1); the preheating device (3) having a heat exchange medium inlet and a heat exchange medium outlet; A raw material supply device (4), the raw material supply device (4) having a raw material outlet (401); A reaction device (5), the reaction device (5) being in communication with the preheating device (3) so that the preheated hydrogen chloride gas enters the reaction device (5), the reaction device (5) having a first feed port (402) and a second discharge port (501), the first feed port (402) being in communication with the raw material outlet (401), the raw material supply device (4) being configured to convey a reaction raw material to the reaction device (5) through the first feed port (402) so that the reaction raw material reacts with the hydrogen chloride gas; the second discharge port (501) being in communication with the heat exchange medium inlet of the preheating device (3) to use the product system generated by the reaction device (5) as a heat exchange medium to preheat the hydrogen chloride gas in the preheating device (3); A tail gas treatment device, the tail gas treatment device being in communication with the heat exchange medium outlet of the preheating device (3) and configured to perform tail gas treatment on the product system after heat exchange to obtain chlorosilane.

2. The chlorosilane synthesis equipment according to claim 1, characterized in that, The preheating device (3) includes: A heat exchange unit (301), the heat exchange unit (301) having mutually independent first and second heat exchange channels, the first heat exchange channel being in communication with the hydrogen chloride supply device (1), the second heat exchange channel having the heat exchange medium inlet and the heat exchange medium outlet.

3. The chlorosilane synthesis equipment according to claim 2, characterized in that, The preheating device (3) further includes: A heating unit (302), the heating unit (302) being in communication with the first heat exchange channel of the heat exchange unit (301) to supplement heat to the hydrogen chloride gas.

4. The chlorosilane synthesis device according to any one of claims 1 to 3, characterized in that, The chlorosilane synthesis equipment further includes: A hydrogen chloride buffer device (2), the hydrogen chloride buffer device (2) being provided between the hydrogen chloride supply device (1) and the preheating device (3) and being respectively in communication with the hydrogen chloride supply device (1) and the preheating device (3) to increase the pressure of the hydrogen chloride gas from the hydrogen chloride supply device (1) through the hydrogen chloride buffer device (2); wherein, the hydrogen chloride buffer device (2) is further in communication with the tail gas treatment device so that the tail gas treatment device supplements a pressurizing gas to the hydrogen chloride buffer device (2).

5. The chlorosilane synthesis equipment according to any one of claims 1 to 3, characterized in that, The tail gas treatment device includes: A cooling device (6), which is connected to the heat exchange medium outlet of the preheating device (3) and is used to cool the product system after heat exchange to obtain a cooled product, where the cooled product includes an intermediate product and a slurry.

6. The chlorosilane synthesis equipment according to claim 5, characterized in that, The tail gas treatment device further includes: A slurry treatment device (7), which is connected to the cooling device (6) and is used to collect the slurry.

7. The chlorosilane synthesis equipment according to claim 6, characterized in that, The tail gas treatment device further includes: A compression device (8), which is connected to the cooling device (6) and is used to compress the intermediate product to obtain a compressed product.

8. The chlorosilane synthesis equipment according to claim 7, characterized in that, The tail gas treatment device further includes: A condensation separation device (9), which is connected to the compression device (8) and is used to condense and separate the compressed product to obtain the chlorosilane.

9. The chlorosilane synthesis device according to claim 8, characterized in that, The tail gas treatment device further includes: A hydrogen recovery device (10), which is connected to the condensation separation device (9) to recover hydrogen chloride in the compressed product; Wherein, the chlorosilane synthesis equipment further includes a hydrogen chloride buffer device (2), which is arranged between the hydrogen chloride supply device (1) and the preheating device (3) and is respectively connected to the hydrogen chloride supply device (1) and the preheating device (3), and the hydrogen recovery device (10) is connected to the hydrogen chloride buffer device (2) to introduce the hydrogen chloride in the compressed product into the hydrogen chloride buffer device (2) to pressurize the hydrogen chloride gas in the hydrogen chloride buffer device (2).

10. The chlorosilane synthesis device according to claim 9, wherein, The tail gas treatment device further includes: A hydrogen product tank (11), which is connected to both the hydrogen recovery device (10) and the hydrogen chloride buffer device (2) and is used to recover hydrogen in the compressed product and transport the recovered hydrogen into the hydrogen chloride buffer device (2) or store it to form a hydrogen product.

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