Clamp for non-mark gluing of thin glass sheet

Abstract

The utility model discloses a thin glass sheet non-mark gluing clamp which comprises a clamp body, the clamp body comprises a base plate, vacuum adsorption holes and edge blocking columns, a plurality of circles of vacuum adsorption holes are evenly formed in the base plate along the circumference, and a circle of edge blocking columns are evenly arranged on the outer edge of the base plate along the circumference. The multiple circles of vacuum adsorption holes are correspondingly matched with a vacuum channel in the spin-coating disc, and the positions of the edge blocking columns are correspondingly matched with thin glass sheets to be machined. The special clamp is combined with the spin-coating disc on a machine table, the vacuum channel on the spin-coating disc adsorbs a glass substrate through the small holes in the chassis, suction force is greatly reduced, deformation of a thin glass sheet when the thin glass sheet is adsorbed is avoided, and the edge blocking columns effectively solve the problem that the substrate is thrown out when the substrate rotates due to the fact that the suction force is too small. By using the clamp, the problem of spin-coating disc printing during gluing of the thin glass sheet is effectively solved, and the product gluing yield is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor spin coating, in particular to a clamp for gluing thin glass sheets without marks. Background Technique

[0002] With the development of society and the research and development of new products, the processing thickness of glass products is getting thinner and thinner, and it also involves the process of gluing on thin glass sheets. At present, the equipment for gluing is generally applicable to conventional wafers, and there is a lack of a suitable process for processing thin glass sheets. Traditional gluing is to adsorb the wafer on the surface of a spin coating disc as shown in Figure 1 and then evenly coat the photoresist on the surface of the wafer by rotation. However, for thin glass sheets, using vacuum adsorption will cause slight deformation at the adsorption position, resulting in uneven coating of the photoresist in this area. Appearance-wise, it will show the marks of the spin coating disc. And by reducing the vacuum degree of the adsorption vacuum, it will cause insufficient suction and the problem of the product being thrown out during rotation. Based on the above problems, it is necessary to design a special clamp that can not only solve the problem of spin coating disc adsorption marks but also prevent the product from being thrown out during spin coating, thereby improving the yield rate of thin glass sheets during gluing. Summary of the Utility Model

[0003] To solve the above technical problems, the utility model designs a clamp for gluing thin glass sheets without marks.

[0004] The utility model adopts the following technical scheme:

[0005] A clamp for gluing thin glass sheets without marks, including a clamp body, the clamp body includes a chassis, vacuum adsorption holes and edge stoppers. A plurality of circles of vacuum adsorption holes are evenly arranged along the circumference on the chassis, and a circle of edge stoppers is evenly arranged along the circumference at the outer edge position of the chassis. The plurality of circles of vacuum adsorption holes are correspondingly arranged in cooperation with the vacuum channels on the spin coating disc, and the positions of the edge stoppers are correspondingly arranged in cooperation with the thin glass sheet to be processed.

[0006] Preferably, the height of the edge stopper is correspondingly arranged in cooperation with the thickness of the thin glass sheet to be processed.

[0007] Preferably, the diameter of the vacuum adsorption hole is smaller than the width of the vacuum channel.

[0008] Preferably, the clamp body is integrally formed.

[0009] The beneficial effects of the present utility model are as follows: The present utility model designs a fixture for gluing thin glass sheets without imprints, which combines a special fixture with a spin coater on the machine table. The vacuum channels on the spin coater adsorb the glass substrate through small holes on the chassis, greatly reducing the suction force to avoid deformation of the thin glass sheet during adsorption. The edge retaining posts effectively solve the problem that the substrate is thrown out during rotation due to too small suction force. The use of this fixture effectively solves the problem of spin coater imprints during gluing of thin glass sheets, and improves the gluing yield of products. Description of the Drawings

[0010] Figure 1 is a schematic structural diagram of an existing spin coater;

[0011] Figure 2 is a schematic structural diagram of the present utility model;

[0012] Figure 3 is Figure 2 a cross-sectional view in the A-A direction of

[0013] In the figure: 1. Chassis, 2. Vacuum adsorption holes, 3. Edge retaining posts. Detailed Embodiments

[0014] The following will further specifically describe the technical solutions of the present utility model through specific embodiments in conjunction with the drawings:

[0015] Embodiment: As shown in Figure 2 and Figure 3 A fixture for gluing thin glass sheets without imprints includes a fixture body. The fixture body includes a chassis 1, vacuum adsorption holes 2, and edge retaining posts 3. A circle of vacuum adsorption holes is evenly arranged along the circumference on the chassis, and a circle of edge retaining posts is evenly arranged along the circumference at the outer edge position of the chassis. A circle of vacuum adsorption holes is correspondingly arranged in cooperation with the vacuum channels on the spin coater, and the positions of the edge retaining posts are correspondingly arranged in cooperation with the thin glass sheet to be processed.

[0016] The height of the edge retaining posts is correspondingly arranged in cooperation with the thickness of the thin glass sheet to be processed. The fixture body is integrally formed.

[0017] The lower surface of the chassis is used to contact the spin coater on the gluing machine table, and the chassis is adsorbed by the spin coater; the vacuum adsorption holes on the chassis are used to connect the vacuum channels on the spin coater, and the thin glass sheet is adsorbed through the vacuum adsorption holes to effectively reduce the suction force and reduce product deformation; the edge retaining posts are used for product edge limiting to prevent the glass from being thrown out during rotation. The diameter of the vacuum adsorption holes is smaller than the width of the vacuum channels to ensure that there will be no blockage during the vacuum pumping process.

[0018] The fixture is placed near the central position (the round hole on the spin coater) on the spin coater. The round hole on the spin coater is an air extraction hole. By aligning the vacuum adsorption holes on the fixture with the vacuum channel, normal operation can be ensured.

[0019] The utility model designs a fixture for glue coating on thin glass sheets without imprints. A special fixture is combined with the spin coater on the machine table. The vacuum channel on the spin coater adsorbs the glass substrate through the small holes on the chassis, greatly reducing the suction force to avoid deformation of the thin glass sheet during adsorption. The edge retaining posts effectively solve the problem that the substrate is thrown out during rotation due to too small suction force. The use of this fixture effectively solves the problem of spin coater imprints when glue coating thin glass sheets, improving the glue coating yield of products.

[0020] The above-described embodiments are only a preferred solution of the utility model, and do not impose any form of limitation on the utility model. There are other variations and modifications without exceeding the technical solutions recorded in the claims.

Claims

1. A fixture for gluing a thin glass sheet without marks, comprising a fixture body, characterized in that, The fixture body includes a chassis, vacuum adsorption holes and edge retaining columns. A plurality of circles of vacuum adsorption holes are uniformly arranged along the circumference on the chassis, and a circle of edge retaining columns is uniformly arranged along the circumference at the outer edge position of the chassis. The multiple circles of vacuum adsorption holes are correspondingly arranged in cooperation with the vacuum channels on the spin coater, and the positions of the edge retaining columns are correspondingly arranged in cooperation with the thin glass sheet to be processed.

2. The jig for non-imprinting glue application on a thin glass sheet according to claim 1, characterized in that, The height of the edge retaining columns is correspondingly arranged in cooperation with the thickness of the thin glass sheet to be processed.

3. The jig for non-imprinting glue application on a thin glass sheet according to claim 1, characterized in that, The diameter of the vacuum adsorption holes is smaller than the width of the vacuum channels.

4. A jig for non-imprinting glue application on a thin glass sheet according to claim 1, characterized in that, The fixture body is integrally formed.

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