Lower temperature measuring crucible lifting device for single crystal furnace

Abstract

The utility model relates to a lower temperature measuring crucible lifting device for a single crystal furnace. The technical problem to be solved by the utility model is to provide the lower temperature measuring crucible lifting device for the single crystal furnace, which is fast in cooling. According to the technical scheme, the crucible temperature measuring device comprises a crucible lifting assembly, a crucible main shaft tray assembly, a crucible main shaft device and a lower temperature measuring device, the crucible main shaft device comprises a main shaft assembly and a crucible magnetic fluid assembly, and the main shaft assembly comprises a main shaft, a shaft marine riser, a shaft external connection sleeve, an external connection sleeve end sealing plate and a water cooling base. The main shaft comprises a main shaft body and a main shaft boss, the shaft marine riser comprises a shaft marine riser body and a shaft marine riser boss, and a shaft marine riser penetrating hole is formed in the shaft marine riser. The main shaft assembly has the advantages that the contact area of cooling water and the main shaft can be greatly increased, and the cooling water can be in full contact with the main shaft, so that the cooling effect and efficiency are effectively improved, and the cooling expectation can be achieved in a short time.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a lower temperature measuring crucible lifting device for a single crystal furnace. Background Art

[0002] In the process of producing single crystal silicon, the temperature control of the single crystal furnace is very critical. The lower temperature measuring crucible lifting device is a device used to measure the temperature of the single crystal furnace in real time by lifting up and down. It plays an important role in ensuring the quality and production efficiency of single crystal silicon. In order to ensure the accuracy of the temperature measurement of the lower temperature measuring crucible lifting device, it is generally necessary to quickly cool down the temperature measuring spindle through a water cooling device after a temperature measurement in preparation for the next temperature measurement. However, the existing temperature measuring spindle water cooling device has a small contact area between the cooling water and the temperature measuring spindle, resulting in poor cooling effect. It is difficult to achieve the expected cooling in a short time, which affects the accuracy of subsequent measurements, so it needs to be improved and optimized. Utility Model Content

[0003] In order to solve the above problems, the technical problem to be solved by the utility model is to provide a lower temperature measuring crucible lifting device for a single crystal furnace with fast cooling.

[0004] The technical solution adopted by the lower temperature measuring crucible lifting device for a single crystal furnace of the utility model includes: a crucible lifting assembly, a crucible spindle tray assembly movably arranged on the crucible lifting assembly, a crucible spindle device inserted in the crucible spindle tray assembly, and a lower temperature measuring device installed at the front end of the crucible spindle device, characterized in that the crucible spindle device includes a spindle assembly and a crucible magnetic fluid assembly sleeved on the spindle assembly, the spindle assembly includes a spindle, an axis watertight tube, an axis external sleeve, an external sleeve end sealing plate and a water cooling seat, the spindle includes a spindle body and a spindle boss, the axis watertight tube includes an axis watertight tube body and an axis watertight tube boss arranged at the end of the axis watertight tube body, an axis watertight tube penetration hole for the penetration of the spindle body is provided in the axis watertight tube, and a water inlet gap is formed between the inner wall of the axis watertight tube penetration hole and the outer wall of the spindle body. The shaft external sleeve comprises a shaft external sleeve body and a shaft external sleeve boss arranged at the end of the shaft external sleeve body, the shaft external sleeve boss is welded together with the main shaft boss, a shaft external sleeve through hole for the shaft watertight pipe to pass through is provided in the shaft external sleeve, the inner wall of the shaft external sleeve through hole is provided with a shaft external sleeve inner rib welded together with the shaft watertight pipe boss, a water outlet gap is formed between the inner wall of the shaft external sleeve through hole and the outer wall of the shaft watertight pipe body, the shaft external sleeve body is provided with a water outlet hole communicating with the water outlet gap on one side of the shaft external sleeve inner rib close to the shaft external sleeve boss, and a water inlet hole communicating with the water inlet gap is provided on the other side, the external sleeve end sealing plate is sleeved on the main shaft body and is welded together with the end of the shaft external sleeve body.

[0005] The water-cooling base is provided with a water-cooling base docking hole corresponding to the outer shaft sleeve body. The outer wall of the water-cooling base is provided with a water-cooling base water inlet connection hole penetrating through and communicating with the water inlet hole, and a water-cooling base water outlet connection hole penetrating through and communicating with the water outlet hole. The inner wall of the water-cooling base docking hole is provided with sealing limit grooves on both sides of the water inlet hole and the water outlet hole, and a main sealing ring is arranged in the sealing limit grooves.

[0006] The outer wall of the outer shaft sleeve body is provided with a water inlet guide groove communicating with the water-cooling base water inlet connection hole and a water outlet guide groove communicating with the water-cooling base water outlet connection hole. The water inlet guide groove is provided with the water inlet holes at intervals around an arc, the water outlet guide groove is provided with the water outlet holes at intervals around an arc, and the number of both the water inlet holes and the water outlet holes is two.

[0007] The outer wall of the other end of the shaft partition water pipe body is provided with shaft partition water pipe limit blocks fitting on the inner wall of the boss of the outer shaft sleeve at intervals around an arc.

[0008] One end of the main shaft boss close to the main shaft body is provided with buffer transition grooves respectively communicating with the water inlet gap and the water outlet gap.

[0009] The main sealing ring is a rotary shaft Gland packing.

[0010] The advantages of the lower temperature measuring crucible lifting device for single crystal furnaces of the present utility model are as follows: the main shaft assembly can greatly increase the contact area between the cooling water and the main shaft, and the cooling water can fully contact the main shaft, thereby effectively improving the cooling effect and efficiency, and achieving the cooling expectation in a shorter time. Description of the Drawings

[0011] The following further describes the present utility model in detail with reference to the drawings and specific embodiments.

[0012] Figure 1 is a schematic structural diagram of the lower temperature measuring crucible lifting device for single crystal furnaces of the present utility model;

[0013] Figure 2 is a schematic structural diagram of the crucible main shaft device of the present utility model;

[0014] Figure 3 is a schematic structural diagram of the main shaft assembly of the present utility model;

[0015] Figure 4 is a half-sectional view of the main shaft assembly of the present utility model;

[0016] Figure 5 is a schematic structural diagram of the main shaft of the present utility model;

[0017] Figure 6 is a schematic structural diagram of the shaft partition water pipe of the present utility model;

[0018] Figure 7 It is a schematic structural view of the outer sleeve of the shaft of the present utility model;

[0019] Figure 8 It is a schematic structural view of the water-cooling seat of the present utility model. Specific embodiments

[0020] As Figure 1-8 shown, the lower temperature measuring crucible lifting device for a single crystal furnace according to the present utility model includes a crucible lifting assembly 1, a crucible main shaft tray assembly 2 movably provided on the crucible lifting assembly 1, a crucible main shaft device 3 penetrating through the crucible main shaft tray assembly 2, and a lower temperature measuring device 4 installed at the front end of the crucible main shaft device 3. The crucible main shaft device 3 includes a main shaft assembly 6 and a crucible magneto-hydrodynamic assembly 7 sleeved on the main shaft assembly 6. The main shaft assembly 6 includes a main shaft 9, a shaft partition water pipe 10, a shaft outer sleeve 11, an outer sleeve end sealing plate 12, and a water-cooling seat 13. The main shaft 9 includes a main shaft body 17 and a main shaft boss 18. The shaft partition water pipe 10 includes a shaft partition water pipe body 19 and a shaft partition water pipe boss 20 provided at the end of the shaft partition water pipe body 19. A shaft partition water pipe through hole 21 for the main shaft body 17 to pass through is provided in the shaft partition water pipe 10. An inlet water gap is formed between the inner wall of the shaft partition water pipe through hole 21 and the outer wall of the main shaft body 17. The shaft outer sleeve 11 includes a shaft outer sleeve body 23 and a shaft outer sleeve boss 24 provided at the end of the shaft outer sleeve body 23. The shaft outer sleeve boss 24 is welded to the main shaft boss 18. A shaft outer sleeve through hole 25 for the shaft partition water pipe 10 to pass through is provided in the shaft outer sleeve 11. A shaft outer sleeve inner stop 26 welded to the shaft partition water pipe boss 20 is provided on the inner wall of the shaft outer sleeve through hole 25. An outlet water gap is formed between the inner wall of the shaft outer sleeve through hole 25 and the outer wall of the shaft partition water pipe body 19. The shaft outer sleeve body 23 is provided with an outlet water hole 28 communicating with the outlet water gap on one side close to the shaft outer sleeve boss 24, and an inlet water hole 27 communicating with the inlet water gap on the other side. The outer sleeve end sealing plate 12 is sleeved on the main shaft body 17 and is welded to the end of the shaft outer sleeve body 23. The main shaft assembly 6 can greatly increase the contact area between the cooling water and the main shaft 9, and the cooling water can fully contact the main shaft 9, thereby effectively improving the cooling effect and efficiency and achieving the cooling expectation in a shorter time.

[0021] The water-cooling base 13 is provided with a water-cooling base docking hole 30 corresponding to the shaft external sleeve main body 23. The outer wall of the water-cooling base 13 is provided with a water-cooling base water inlet connection hole 31 that penetrates and communicates with the water inlet hole 27, and a water-cooling base water outlet connection hole 32 that penetrates and communicates with the water outlet hole 28. The inner wall of the water-cooling base docking hole 30 is provided with sealing limit grooves 34 on both sides of the water inlet hole 27 and the water outlet hole 28. A main sealing ring 35 is arranged in the sealing limit grooves 34. The water-cooling base 13 makes the docking with external docking parts more flexible and stable, and the main sealing ring 35 can effectively ensure the sealing and waterproof performance of the water-cooling base 13.

[0022] The outer wall of the shaft external sleeve main body 23 is provided with a water inlet guide groove 37 that communicates with the water-cooling base water inlet connection hole 31 and a water outlet guide groove 38 that communicates with the water-cooling base water outlet connection hole 32. The water inlet guide groove 37 is provided with the water inlet holes 27 at intervals around an arc, and the water outlet guide groove 38 is provided with the water outlet holes 28 at intervals around an arc. The number of both the water inlet holes 27 and the water outlet holes 28 is two, which can enable the cooling water to flow in quickly and evenly from the water inlet holes 27 and flow out from the water outlet holes 28, effectively reducing the impact of high-pressure cooling water on the shaft external sleeve 11 and improving the service life of the product.

[0023] The outer wall of the other end of the shaft partition water pipe main body 19 is provided with shaft partition water pipe limit blocks 40 that are attached to the inner wall of the shaft external sleeve boss 24 at intervals around an arc, keeping the two ends of the shaft partition water pipe main body 19 balanced without affecting water outlet, with a more stable structure, preventing the position of its end from shifting due to the influence of water flow and affecting water cooling.

[0024] One end of the main shaft boss 18 close to the main shaft body 17 is provided with a buffer transition groove 41 that communicates with the water inlet gap and the water outlet gap respectively, reducing the impact of water and playing a buffering role.

[0025] The main sealing ring 35 is a shaft-mounted rotary Gleason ring, with better sealing performance, capable of reducing friction and crawling phenomena and having a wide adaptability to working conditions.

[0026] The above are only the preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention are all included in the protection scope of the present invention.

Claims

1. A lower temperature measuring crucible lifting device for a single crystal furnace, comprising a crucible lifting assembly (1), a crucible main shaft tray assembly (2) movably arranged on the crucible lifting assembly (1), a crucible main shaft device (3) arranged inside the crucible main shaft tray assembly (2), and a lower temperature measuring device (4) installed at the front end of the crucible main shaft device (3), characterized in that: The crucible main shaft device (3) includes a main shaft assembly (6) and a crucible magnetohydrodynamic assembly (7) sleeved on the main shaft assembly (6). The main shaft assembly (6) includes a main shaft (9), a shaft partition water pipe (10), a shaft outer sleeve (11), an outer sleeve end sealing plate (12), and a water-cooling seat (13). The main shaft (9) includes a main shaft body (17) and a main shaft boss (18). The shaft partition water pipe (10) includes a shaft partition water pipe body (19) and a shaft partition water pipe boss (20) provided at the end of the shaft partition water pipe body (19). A shaft partition water pipe through hole (21) for the main shaft body (17) to pass through is provided in the shaft partition water pipe (10), and a water inlet gap is formed between the inner wall of the shaft partition water pipe through hole (21) and the outer wall of the main shaft body (17). The shaft outer sleeve (11) includes a shaft outer sleeve body (23) and a shaft outer sleeve boss (24) provided at the end of the shaft outer sleeve body (23). The shaft outer sleeve boss (24) is welded to the main shaft boss (18). A shaft outer sleeve through hole (25) for the shaft partition water pipe (10) to pass through is provided in the shaft outer sleeve (11). An inner retaining edge (26) of the shaft outer sleeve welded to the shaft partition water pipe boss (20) is provided on the inner wall of the shaft outer sleeve through hole (25). A water outlet gap is formed between the inner wall of the shaft outer sleeve through hole (25) and the outer wall of the shaft partition water pipe body (19). A water outlet hole (28) communicating with the water outlet gap is provided on one side of the shaft outer sleeve body (23) near the shaft outer sleeve boss (24) where the inner retaining edge (26) of the shaft outer sleeve is located, and a water inlet hole (27) communicating with the water inlet gap is provided on the other side. The outer sleeve end sealing plate (12) is sleeved on the main shaft body (17) and is welded to the end of the shaft outer sleeve body (23).

2. The lower temperature measuring crucible lifting device for a single crystal furnace according to claim 1, wherein: A water-cooling seat docking hole (30) corresponding to the shaft outer sleeve body (23) is provided in the water-cooling seat (13). A water-cooling seat water inlet connection hole (31) penetrating through and communicating with the water inlet hole (27) and a water-cooling seat water outlet connection hole (32) penetrating through and communicating with the water outlet hole (28) are provided on the outer wall of the water-cooling seat (13). Sealing limit grooves (34) are provided on the inner wall of the water-cooling seat docking hole (30) on both sides of the water inlet hole (27) and the water outlet hole (28), and a main sealing ring (35) is provided in the sealing limit grooves (34).

3. The lower temperature measuring crucible lifting device for a single crystal furnace according to claim 2, characterized in that: An inlet water guide groove (37) communicating with the water-cooling seat water inlet connection hole (31) and an outlet water guide groove (38) communicating with the water-cooling seat water outlet connection hole (32) are provided on the outer wall of the shaft outer sleeve body (23). The inlet water guide groove (37) is provided with the water inlet holes (27) at intervals around an arc, and the outlet water guide groove (38) is provided with the water outlet holes (28) at intervals around an arc. The number of both the water inlet holes (27) and the water outlet holes (28) is two.

4. The lowering and temperature measuring crucible lifting device for a single crystal furnace according to claim 1, wherein: Shaft partition water pipe limit blocks (40) fitting on the inner wall of the shaft outer sleeve boss (24) are provided at intervals around an arc on the outer wall of the other end of the shaft partition water pipe body (19).

5. The lifting device for the lower temperature measuring crucible of the single crystal furnace according to claim 1, wherein: One end of the main shaft boss (18) close to the main shaft body (17) is provided with a buffer transition groove (41) respectively communicating with the water inlet gap and the water outlet gap.

6. The lower temperature measuring crucible lifting device for a single crystal furnace according to claim 2, characterized in that: The main sealing ring (35) is a shaft-mounted rotary Gleason ring.

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