Air exhaust and impurity removal device with self-cleaning function

Abstract

An air exhaust and impurity removal device with a self-cleaning function comprises a main path air pipe, a main path main valve, a main path airflow processing unit and an air exhaust unit are arranged on the main path air pipe, the air exhaust unit comprises a vacuum pump set composed of at least one vacuum pump, and the vacuum pump set is provided with a first main path valve and a second main path valve; a liquid supply unit is externally connected between the vacuum pump set and the first main path valve; a cleaning circulating pipe is arranged on one side of the vacuum pump set; cleaning circulating valves are arranged at two ends of the cleaning circulating pipe; an impurity-removing cleaning pipe is arranged on one side of the main path airflow treatment unit, and impurity-removing circulating valves are arranged at two ends of the main path airflow treatment unit. The vacuum pump is used as a power source, self-cleaning of the vacuum pump and self-cleaning of the vacuum pump and the main path airflow processing unit are achieved, dismounting and external driving are not needed, cleaning efficiency is high, and cost is low; the vacuum pump is air-dried through the non-circulating air-drying channel, so that cleaned impurities are prevented from entering the vacuum pump again; through parallel connection and independent cleaning of the multiple sets of air exhaust units, the air exhaust and impurity removal device can still conduct air exhaust and impurity removal operation in the vacuum pump cleaning process.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pump equipment, and particularly relates to an air extraction and impurity removal device with a self-cleaning function. Background Art

[0002] Air extraction and impurity removal is a common industrial process, mainly used to remove gases and impurities in the area of the medium to be extracted, so as to improve the performance and quality of industrial products; air extraction and impurity removal needs to be realized through a special air extraction and impurity removal device. The air extraction and impurity removal device mainly consists of an impurity removal mechanism and an air extraction mechanism. Among them, the air extraction mechanism provides power to extract the gases and impurities in the area of the medium to be extracted, and the impurity removal mechanism is used to remove the impurities in the air flow. During the operation of the air extraction and impurity removal device, some impurities will adhere to the impurity removal mechanism and the air extraction mechanism. As the adhered impurities increase, the performance of the impurity removal mechanism and the air extraction mechanism will be affected, and its air extraction flow rate and impurity removal effect will gradually decrease. To ensure the performance of the air extraction and impurity removal device, it needs to be cleaned regularly.

[0003] At present, the existing air extraction and impurity removal devices mainly still adopt disassembly cleaning or external equipment cleaning. Especially, the cleaning of the impurity removal mechanism takes a long time and has a high cleaning cost, which cannot meet the requirements of modern high-efficiency production.

[0004] Therefore, aiming at the deficiencies of the existing technology, it is necessary to design an air extraction and impurity removal device with a self-cleaning function to solve the above problems.

[0005] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solution of the present utility model and facilitating the understanding of those skilled in the art. It cannot be considered that the above content is well-known to those skilled in the art just because these contents are described in the background art of the present utility model. Summary of the Utility Model

[0006] To overcome the above deficiencies in the prior art, the purpose of the present utility model is to disclose an air extraction and impurity removal device with a self-cleaning function, which is used to solve the problems of high cleaning cost and low efficiency of the air extraction and impurity removal device.

[0007] The utility model discloses an air extraction and impurity removal device with a self-cleaning function, which comprises a main air pipe connected to the area of the medium to be extracted. A main road total valve, a main road air flow treatment unit and at least one set of air extraction units are successively arranged on the main road air pipe. The air extraction unit comprises a vacuum pump group composed of at least one vacuum pump. A first main road valve and a second main road valve are respectively arranged on the main road air pipe on the front and rear sides of the vacuum pump group; A liquid supply unit is externally connected between the vacuum pump group and the first main road valve; A cleaning circulation pipe is arranged on one side of the vacuum pump group. The two ends of the cleaning circulation pipe are connected to the two ends of the vacuum pump group to form a circulation loop. Cleaning circulation valves are arranged at both ends of the cleaning circulation pipe; An impurity removal and cleaning pipe is arranged on one side of the main road air flow treatment unit. The front end of the impurity removal and cleaning pipe is connected to the air inlet of the main road air flow treatment unit, and the rear end is connected to the cleaning circulation pipe. Impurity removal circulation valves are arranged at both ends of the impurity removal and cleaning pipe. A circulation loop is formed by connecting the cleaning circulation pipe to both ends of the vacuum pump group, and the vacuum pump group is used as the power output to clean the vacuum pump; A circulation loop is formed by the cleaning circulation pipe, the impurity removal and cleaning pipe, the main road air flow treatment unit and the vacuum pump group, and the vacuum pump group is used as the power output to clean the main road air flow treatment unit and the vacuum pump at the same time.

[0008] Preferred technical solution: An exhaust pipe is externally connected to the cleaning circulation pipe. The exhaust pipe is arranged facing the air, and an exhaust valve is arranged on the exhaust pipe; A first air inlet pipe is externally connected to the main road air pipe between the first main road valve and the liquid supply unit. A first air inlet valve is arranged on the first air inlet pipe. A second air inlet pipe is externally connected to the main road air pipe between the main road total valve and the main road air flow treatment unit. A second air inlet valve is arranged on the second air inlet pipe. During the air drying operation, the external clean air is controlled to enter through the valve and finally discharged from the exhaust pipe to prevent the impurities washed down from entering the vacuum pump again.

[0009] Preferred technical solution: The liquid supply unit includes a cleaning liquid conveying device and a maintenance liquid conveying device, which can respectively input cleaning liquid and maintenance liquid into the main road air pipe.

[0010] Preferred technical solution: A maintenance circulation pipe is also arranged on one side of the vacuum pump group. The two ends of the maintenance circulation pipe are connected to the two ends of the vacuum pump group to form a circulation loop. Maintenance circulation valves are arranged at both ends of the maintenance circulation pipe; An impurity removal and maintenance pipe is also arranged on one side of the main road air flow treatment unit. The front end of the impurity removal and maintenance pipe is connected to the air inlet of the main road air flow treatment unit, and the rear end is connected to the maintenance circulation pipe. Impurity removal and maintenance valves are arranged at both ends of the impurity removal and maintenance pipe; The cleaning and maintenance operations are carried out in different loops respectively to prevent the cleaning liquid and the maintenance liquid from being mixed and reducing the cleaning or maintenance effect.

[0011] Preferred technical solution: The number of the air extraction units is two or more. The air extraction units are connected in parallel to the air outlet of the main road air flow treatment unit, and the normal operation of the air extraction and impurity removal device can still be ensured during the cleaning process by switching the air extraction units.

[0012] Preferred technical solution: A second filter is also provided on the cleaning circulation pipe to remove impurities in the circulation loop during the cleaning process.

[0013] Preferred technical solution: The main air extraction pipe uses a first four-way valve to replace the combination of the main road main valve, the adjacent impurity removal circulation valve and the impurity removal maintenance valve; uses a second four-way valve to replace the combination of the first main road valve and its adjacent cleaning circulation valve and maintenance circulation valve; uses a third four-way valve to replace the combination of the second main road valve and its adjacent cleaning circulation valve and maintenance circulation valve, reducing the number of valves used and facilitating installation and maintenance.

[0014] Preferred technical solution: The main road main valve, the first main road valve, the second main road valve, the cleaning circulation valve, the impurity removal circulation valve, the impurity removal maintenance valve, the exhaust valve, the first intake valve, the second intake valve, the maintenance circulation valve, the first four-way valve, the second four-way valve, the third four-way valve, the vacuum pump group, the cleaning liquid delivery device and the maintenance liquid delivery device are all connected to the console for centralized control, and fully automated cleaning and maintenance can be achieved through the control program.

[0015] Preferred technical solution: The main road air flow processing unit includes a condensation and impurity removal device.

[0016] Preferred technical solution: The main road air flow processing unit also includes a first filter.

[0017] Due to the application of the above technical solutions, the beneficial effects of the utility model, an air extraction and impurity removal device with a self-cleaning function, are as follows:

[0018] (1) This device uses its own vacuum pump as the power source to realize the self-cleaning of the vacuum pump and the self-cleaning of the vacuum pump and the main road air flow processing unit. There is no need for disassembly and external drive, and the cleaning efficiency is high and the cost is low;

[0019] (2) The vacuum pump and the cleaning circulation pipe are air-dried through the non-circulating air-drying channel to prevent the impurities washed down from entering the vacuum pump again;

[0020] (3) Through the parallel connection and independent cleaning of multiple groups of air extraction units, the air extraction and impurity removal device can still perform air extraction and impurity removal operations during the cleaning of the vacuum pump. Description of the Drawings

[0021] Figure 1 It is a schematic structural diagram of an air extraction and impurity removal device with a self-cleaning function of the utility model in Embodiment 1;

[0022] Figure 2 It is a schematic structural diagram of an air extraction and impurity removal device with a self-cleaning function of the utility model in Embodiment 3;

[0023] Figure 3Schematic diagram of the structure of an air extraction and impurity removal device with self-cleaning function in the second embodiment of the present utility model.

[0024] In the above drawings, 100 is the area of the medium to be extracted; 1 is the main pipeline for air; 11 is the first main pipeline valve; 12 is the second main pipeline valve; 2 is the main pipeline master valve; 3 is the main pipeline air flow processing unit; 31 is the impurity removal and cleaning pipe; 31a is the impurity removal circulation valve; 32 is the condensation impurity removal device; 33 is the first filter; 34 is the impurity removal maintenance pipe; 34a is the impurity removal maintenance valve; 4 is the air extraction unit; 41 is the vacuum pump group; 42 is the liquid supply unit; 42a is the cleaning liquid conveying device; 42b is the maintenance liquid conveying device; 43 is the cleaning circulation pipe; 43a is the cleaning circulation valve; 44 is the exhaust pipe; 44a is the exhaust valve; 45 is the first intake pipe; 45a is the first intake valve; 46 is the maintenance circulation pipe; 46a is the maintenance circulation valve; 47 is the second filter; 48 is the second intake pipe; 48a is the second intake valve; 5 is the first four-way valve; 6 is the second four-way valve; 7 is the third four-way valve. Detailed implementation manners

[0025] The following specific embodiments illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification.

[0026] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In addition, terms such as "horizontal", "vertical", "hanging" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0027] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium. It can be the internal communication of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0028] Embodiment 1:

[0029] As Figure 1 shown, a gas extraction and impurity removal device with a self-cleaning function disclosed by the present utility model includes a main air pipe 1 connected to the area 100 of the medium to be extracted. A main road main valve 2, a main road air flow processing unit 3 and an air extraction unit 4 are successively arranged on the main air pipe 1. The following will specifically describe the main components of the above-mentioned present utility model:

[0030] As Figure 1 shown, the air extraction unit 4 includes a vacuum pump group 41 composed of a single vacuum pump. A first main road valve 11 and a second main road valve 12 are respectively arranged on the main air pipe 1 on the front and rear sides of the vacuum pump group 41; a liquid supply unit 42 is externally connected between the vacuum pump group 41 and the first main road valve 11. The liquid supply unit 42 includes a cleaning liquid conveying device 42a and a maintenance liquid conveying device 42b. A cleaning circulation pipe 43 is arranged on one side of the vacuum pump group 41. The two ends of the cleaning circulation pipe 43 are connected to the two ends of the vacuum pump group 41 to form a circulation loop. Cleaning circulation valves 43a are arranged at both ends of the cleaning circulation pipe 43. An exhaust pipe 44 is externally connected to the cleaning circulation pipe 43. The exhaust pipe 44 is arranged facing the air. An exhaust valve 44a is arranged on the exhaust pipe 44; at the same time, a second filter 47 is also arranged on the cleaning circulation pipe 43; a first intake pipe 45 is externally connected to the main air pipe 1 between the first main road valve 11 and the liquid supply unit 42. A first intake valve 45a is arranged on the first intake pipe 45; a second intake pipe 48 is externally connected to the main air pipe 1 between the main road main valve 2 and the main road air flow processing unit 3. A second intake valve 48a is arranged on the second intake pipe 48.

[0031] As Figure 1 shown, a maintenance circulation pipe 46 is also arranged on one side of the vacuum pump group 41. The two ends of the maintenance circulation pipe 46 are connected to the two ends of the vacuum pump group 41 to form a circulation loop. Maintenance circulation valves 46a are arranged at both ends of the maintenance circulation pipe 46. It should be noted that the above structure is only exemplary and not restrictive. In this embodiment, a maintenance circulation pipe 46 is arranged on one side of the vacuum pump group 41, but in other embodiments, a separate maintenance circulation pipe 46 may not be provided.

[0032] As Figure 1As shown, the main air flow processing unit 3 includes a condensation and impurity removal device 32 and a first filter 33. One side of it is provided with an impurity removal and cleaning pipe 31. The front end of the impurity removal and cleaning pipe 31 is connected to the air inlet of the main air flow processing unit 3, and the rear end is connected to the cleaning circulation pipe 43. Impurity removal circulation valves 31a are provided at both ends of the impurity removal and cleaning pipe 31; on one side of the main air flow processing unit (3), there is also an impurity removal and maintenance pipe 34. The front end of the impurity removal and maintenance pipe 34 is connected to the air inlet of the main air flow processing unit 3, and the rear end is connected to the maintenance circulation pipe 46. Impurity removal maintenance valves 34a are provided at both ends of the impurity removal and maintenance pipe 34. It should be noted that in this embodiment, the main air flow processing unit 3 includes a condensation and impurity removal device 32 and a first filter 33, but in other embodiments, the main air flow processing unit 3 may also include other air flow processing structures.

[0033] Reference Figure 1 As shown, the principle and usage method of a suction and impurity removal device with a self-cleaning function of the present utility model are as described below:

[0034] When the vacuum pump performs a separate cleaning operation: close the first main road valve 11, the second main road valve 12, the maintenance circulation valve 46a, the impurity removal circulation valve 31a, the exhaust valve 44a, and the first air inlet valve 45a; open the cleaning circulation valve 43a, and then turn on the vacuum pump group 41 and the cleaning liquid delivery device 42a, so that the cleaning circulation pipe 43 and the vacuum pump group 41 form a circulation loop, and the cleaning liquid repeatedly cleans the vacuum pump group 41 under the drive of the air flow in the circulation loop.

[0035] When the vacuum pump and the main air flow processing unit perform a joint cleaning operation: close the main road master valve 2, the second main road valve 12, the impurity removal maintenance valve 34a, the cleaning circulation valve 43a at the front end of the cleaning circulation pipe 43, the exhaust valve 44a, the first air inlet valve 45a, the maintenance circulation valve 46a, and the second air inlet valve 48a; open the first main road valve 11, the impurity removal circulation valve 31a, and the cleaning circulation valve 43a at the rear end of the cleaning circulation pipe 43; then turn on the vacuum pump group 41 and the cleaning liquid delivery device 42a, so that the main air flow processing unit 3, the impurity removal and cleaning pipe 31, the cleaning circulation pipe 43, and the vacuum pump group 41 form a circulation loop, and the cleaning liquid repeatedly cleans the vacuum pump group 41 and the main air flow processing unit 3 under the drive of the air flow in the circulation loop.

[0036] When the vacuum pump performs a separate air drying operation: close the first main road valve 11, the second main road valve 12, the impurity removal circulation valve 31a, the cleaning circulation valve 43a at the front end of the cleaning circulation pipe 43, and the maintenance circulation valve 46a; open the exhaust valve 44a, the first air inlet valve 45a, and the cleaning circulation valve 43a at the rear end of the cleaning circulation pipe 43; then turn on the vacuum pump group 41, so that the external clean gas flows in from the first air inlet valve 45a, passes through the vacuum pump group 41 and the cleaning circulation pipe 43, and is directly discharged from the exhaust valve 44a, avoiding impurities from entering the vacuum pump group 41 again.

[0037] When the vacuum pump and the main air flow processing unit perform air drying operation together: close the main road main valve 2, the second main road valve 12, the impurity removal circulation valve 31a, the impurity removal maintenance valve 34a, the cleaning circulation valve 43a at the front end of the cleaning circulation pipe 43, the first air inlet valve 45a, the maintenance circulation valve 46a, and the first air inlet valve 45a; open the first main road valve 11, the cleaning circulation valve 43a at the rear end of the cleaning circulation pipe 43, the exhaust valve 44a, and the second air inlet valve 48a; then turn on the vacuum pump group 41, so that the external clean gas flows in from the second air inlet valve 48a, passes through the main air flow processing unit 3, the vacuum pump group 41, and the cleaning circulation pipe 43, and is directly discharged from the exhaust valve 44a, to prevent impurities from entering the vacuum pump group 41 and the main air flow processing unit 3 again.

[0038] When the vacuum pump performs maintenance operation: close the first main road valve 11, the second main road valve 12, the cleaning circulation valve 43a, and the first air inlet valve 45a; open the maintenance circulation valve 46a, then turn on the vacuum pump group 41 and the maintenance liquid delivery device 42b, so that the maintenance circulation pipe 46 and the vacuum pump group 41 form a circulation loop, and the maintenance liquid repeatedly coats and maintains the vacuum pump group 41 driven by the air flow in the circulation loop.

[0039] When the vacuum pump and the main air flow processing unit perform joint maintenance operation: close the main road main valve 2, the second main road valve 12, the impurity removal circulation valve 31a, the cleaning circulation valve 43a, the first air inlet valve 45a, the maintenance circulation valve 46a at the front end of the maintenance circulation pipe 46, and the second air inlet valve 48a; open the first main road valve 11, the impurity removal maintenance valve 34a, the maintenance circulation valve 46a at the rear end of the maintenance circulation pipe 46, then turn on the vacuum pump group 41 and the maintenance liquid delivery device 42b, so that the main air flow processing unit 3, the impurity removal maintenance pipe 34, the maintenance circulation pipe 46, and the vacuum pump group 41 form a circulation loop, and the maintenance liquid repeatedly coats and maintains the vacuum pump group 41 and the main air flow processing unit 3 driven by the air flow in the circulation loop.

[0040] Embodiment 2:

[0041] As Figure 1 and Figure 3 shown, the difference from Embodiment 1 is that the number of the air extraction units 4 is three groups, and the three groups of air extraction units 4 are connected in parallel to the air outlet of the main air flow processing unit 3. During the cleaning and maintenance operations, the air extraction units 4 can be switched to be cleaned one by one, ensuring that the air extraction and impurity removal device can still operate normally during the cleaning process.

[0042] Embodiment 3:

[0043] As Figure 1 and Figure 2As shown, the difference from the first embodiment is that the main air extraction pipe 1 is replaced by a first four-way valve 5 for the combination of the main road main valve 2, the adjacent impurity removal circulation valve 31a and the impurity removal maintenance valve 34a; the second four-way valve 6 is used to replace the combination of the first main road valve 11 and its adjacent cleaning circulation valve 43a and maintenance circulation valve 46a; the third four-way valve 7 is used to replace the combination of the second main road valve 12 and its adjacent cleaning circulation valve 43a and maintenance circulation valve 46a. At the same time, all valves and devices are connected to the console for centralized control; the number of valves used is reduced, which is convenient for installation and maintenance, and enables the device to perform automatic cleaning and maintenance control.

[0044] The above embodiments are only illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. An air extraction and impurity removal device with a self-cleaning function, comprising a main air pipe (1) connected to the area of the medium to be extracted (100), wherein a main road master valve (2), a main road air flow processing unit (3) and at least one set of air extraction units (4) are sequentially arranged on the main air pipe (1), and the air extraction unit (4) comprises a vacuum pump group (41) composed of at least one vacuum pump, and is characterized in that: A first main path valve (11) and a second main path valve (12) are respectively provided on the main path air pipe (1) on the front and rear sides of the vacuum pump group (41); a liquid supply unit (42) is externally connected between the vacuum pump group (41) and the first main path valve (11); a cleaning circulation pipe (43) is provided on one side of the vacuum pump group (41), and both ends of the cleaning circulation pipe (43) are connected to both ends of the vacuum pump group (41) to form a circulation loop, and cleaning circulation valves (43a) are provided at both ends of the cleaning circulation pipe (43); an impurity removal and cleaning pipe (31) is provided on one side of the main path air flow processing unit (3), the front end of the impurity removal and cleaning pipe (31) is connected to the air inlet of the main path air flow processing unit (3), and the rear end is connected to the cleaning circulation pipe (43), and impurity removal circulation valves (31a) are provided at both ends of the impurity removal and cleaning pipe (31).

2. The air extraction and impurity removal device with a self-cleaning function according to claim 1, wherein: An exhaust pipe (44) is externally connected to the cleaning circulation pipe (43), the exhaust pipe (44) is arranged facing the air, and an exhaust valve (44a) is provided on the exhaust pipe (44); a first intake pipe (45) is externally connected to the main path air pipe (1) between the first main path valve (11) and the liquid supply unit (42), a first intake valve (45a) is provided on the first intake pipe (45), and a second intake pipe (48) is externally connected to the main path air pipe (1) between the main path total valve (2) and the main path air flow processing unit (3), and a second intake valve (48a) is provided on the second intake pipe (48).

3. The air extraction and impurity removal device with self-cleaning function according to claim 2, characterized in that: The liquid supply unit (42) includes a cleaning liquid conveying device (42a) and a maintenance liquid conveying device (42b).

4. The air extraction and impurity removal device with self-cleaning function according to claim 3, characterized in that: A maintenance circulation pipe (46) is further provided on one side of the vacuum pump group (41), both ends of the maintenance circulation pipe (46) are connected to both ends of the vacuum pump group (41) to form a circulation loop, and maintenance circulation valves (46a) are provided at both ends of the maintenance circulation pipe (46); an impurity removal and maintenance pipe (34) is further provided on one side of the main path air flow processing unit (3), the front end of the impurity removal and maintenance pipe (34) is connected to the air inlet of the main path air flow processing unit (3), and the rear end is connected to the maintenance circulation pipe (46), and impurity removal and maintenance valves (34a) are provided at both ends of the impurity removal and maintenance pipe (34).

5. The air extraction and impurity removal device with self-cleaning function according to claim 4, characterized in that: The number of the air extraction units (4) is two or more, and the air extraction units (4) are connected in parallel to the air outlet of the main path air flow processing unit (3).

6. The air extraction and impurity removal device with self-cleaning function according to claim 5, wherein: A second filter (47) is further provided on the cleaning circulation pipe (43).

7. The air extraction and impurity removal device with a self-cleaning function according to claim 6, characterized in that: A first four-way valve (5) is used to replace the combination of the main path total valve (2), the adjacent impurity removal circulation valve (31a) and the impurity removal and maintenance valve (34a) on the main path air pipe (1); a second four-way valve (6) is used to replace the combination of the first main path valve (11) and its adjacent cleaning circulation valve (43a) and maintenance circulation valve (46a); a third four-way valve (7) is used to replace the combination of the second main path valve (12) and its adjacent cleaning circulation valve (43a) and maintenance circulation valve (46a).

8. The air extraction and impurity removal device with self-cleaning function according to claim 7, characterized in that: The main road master valve (2), the first main road valve (11), the second main road valve (12), the cleaning circulation valve (43a), the impurity removal circulation valve (31a), the impurity removal maintenance valve (34a), the exhaust valve (44a), the first intake valve (45a), the second intake valve (48a), the maintenance circulation valve (46a), the first four-way valve (5), the second four-way valve (6), the third four-way valve (7), the vacuum pump group (41), the cleaning liquid delivery device (42a), and the maintenance liquid delivery device (42b) are all connected to the console for centralized control.

9. The air extraction and impurity removal device with a self-cleaning function according to claim 1, wherein: The main road air flow processing unit (3) includes a condensation and impurity removal device (32).

10. The air extraction and impurity removal device with self-cleaning function according to claim 1, characterized in that: The main road air flow processing unit (3) further includes a first filter (33).

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