Furnace body cooling structure of CVD (Chemical Vapor Deposition) reaction furnace

Abstract

The utility model relates to the technical field of cooling structures, and discloses a CVD reaction furnace body cooling structure which comprises a first furnace shell and a second furnace shell, cooling cavities are formed in the inner sides of the first furnace shell and the second furnace shell, and a water inlet pipe and a water outlet pipe are fixed to one side of the first furnace shell and one side of the second furnace shell respectively. The inner sides of the first furnace shell and the second furnace shell are provided with a furnace main body for processing a CVD (Chemical Vapor Deposition) coating; a connecting assembly is arranged on one side of the first furnace shell, and a prompting assembly is arranged on one side of the connecting assembly. The interiors of the first furnace shell and the second furnace shell make contact with the furnace main body, the furnace main body is cooled, water obtained after heat exchange with the furnace main body is discharged through the water outlet pipe, cooling water enters the cooling cavity through the water inlet pipe and makes direct contact with the furnace main body, and heat generated by the furnace main body is effectively taken away through the heat exchange process; therefore, the temperature of the furnace main body is reduced, the problems of thermal stress, thermal deformation and the like caused by high temperature can be reduced, and the stability of equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cooling structures, and specifically relates to a cooling structure for a CVD reaction furnace body. Background Technique

[0002] CVD is a process in which gaseous or vaporous chemical substances are reacted by methods such as heating, plasma excitation, or light radiation, and are deposited in atomic form on a substrate placed in an appropriate position, thereby forming a required solid thin film or coating.

[0003] In a Chinese patent with the authorization announcement number CN216738521U, a cooling structure for a CVD reaction furnace body is disclosed, which includes a furnace shell cooling device and a seal cooling device. The furnace shell cooling device includes a furnace body, the furnace body is provided with water inlet and outlet joints and a cooling cavity, the water inlet and outlet joints and the cooling cavity form a furnace shell cooling channel, and the cooling medium circulates along the furnace shell cooling channel to cool the outer shell of the furnace body. The seal cooling device includes a seal assembly, the seal assembly is provided with an inlet and outlet pipe assembly and a groove body assembly, the inlet and outlet pipe assembly and the groove body assembly form a flange cooling channel, and the cooling medium circulates along the seal cooling channel to cool the seal assembly. In the utility model, the furnace body is designed to be segmented and each segment is a layered structure, the first channels and the second channels of the first half furnace shell and the second half furnace shell, the cooling medium circulates along the first channel and the second channel, taking away the heat transferred from the heat field and the quartz tube, reducing the temperature of the outer surface of the furnace body shell, and ensuring that the temperature rise of the outer surface of the furnace body shell is within the range allowed by the standard.

[0004] The following defects exist in the above patent: In the above patent, when the first outer furnace shell and the second outer furnace shell are installed, a connecting piece and a connecting nut are required for threaded connection to fixedly connect the first half furnace shell and the second half furnace shell to form a complete furnace shell. In this process, for the connecting piece and the connecting nut, the connecting piece can be understood as a bolt, and the connecting nut can be understood as a nut. The cooperation of the bolt and the nut not only makes the installation process cumbersome, but also requires multiple rotations of the bolt and the nut for fastening. Therefore, a cooling structure for a CVD reaction furnace body is proposed. Content of the Utility Model

[0005] The purpose of the utility model is to provide a cooling structure for a CVD reaction furnace body to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: A cooling structure for a CVD reaction furnace body, including a first furnace shell and a second furnace shell, cooling cavities are respectively opened on the inner sides of the first furnace shell and the second furnace shell, and a water inlet pipe and a water outlet pipe are respectively fixed on one side of the first furnace shell and the second furnace shell;

[0007] A furnace body main body for CVD coating processing is arranged on the inner sides of the first furnace shell and the second furnace shell;

[0008] On one side of the first furnace shell, a connection component is provided, and on one side of the connection component, a prompt component is provided;

[0009] The connection component includes two fixed frames and a number of limit blocks. A lock groove is provided on one side of the limit block. A first sliding plate is slidably connected to the inner wall of the fixed frame. A pull rod and a lock rod are respectively fixed on both sides of the first sliding plate. A first spring is sleeved outside the pull rod.

[0010] Preferably, the above-mentioned water inlet pipe and water outlet pipe are both communicated with the cooling cavity, and the inner walls of the first furnace shell and the second furnace shell are attached to the outside of the furnace body main body.

[0011] Preferably, limit grooves are provided on both sides of the top of the above-mentioned fixed frame. A connecting plate is fixed at one end of the pull rod. The outside of the limit block is inserted into the inside of the limit groove. The two ends of the first spring are respectively connected to one side of the fixed frame and the first sliding plate;

[0012] One side of the limit block is fixed to one side of the second furnace shell, and one side of the fixed frame is fixed to the outside of the first furnace shell.

[0013] Preferably, when the lock rod is inserted into the inside of the lock groove, the first furnace shell and the second furnace shell are in a connected state, and when the lock rod leaves the inside of the lock groove, the first furnace shell and the second furnace shell are in a separated state.

[0014] Preferably, the above-mentioned prompt component includes a second sliding plate. A sliding column is fixed at the bottom of the second sliding plate, and a push plate is fixed at the bottom of the sliding column.

[0015] Preferably, a sliding groove is provided on the inner wall of the limit groove. A switch is fixed at the bottom of the inner wall of the sliding groove. A second spring is connected between the bottom of the push plate and the inner side wall of the sliding groove;

[0016] The outside of the push plate is slidably connected to the inside of the sliding groove, and the outside of the second sliding plate is slidably connected to the inside of the limit groove.

[0017] Preferably, indicator lights are installed on the outside of both the first furnace shell and the second furnace shell. The output end of the switch is electrically connected to the input end of the indicator light.

[0018] Compared with the prior art, the present utility model adopts the above technical solutions and has the following technical effects:

[0019] 1. By contacting the furnace body main body through the inside of the first furnace shell and the second furnace shell, the temperature of the furnace body main body is reduced. The water after heat exchange with the furnace body main body is discharged through the water outlet pipe. The cooling water enters the cooling cavity through the water inlet pipe, directly contacts the furnace body main body, and effectively takes away the heat generated by the furnace body main body through the heat exchange process, thereby realizing the cooling of the furnace body main body. Reducing the temperature of the furnace body main body can reduce problems such as thermal stress and thermal deformation caused by high temperature, thereby improving the stability of the equipment.

[0020] 2. By inserting the limit block into the limit slot and using the elastic force of the first spring to lock the lock rod and the lock slot, the process of installing the first furnace shell and the second furnace shell on the outside of the furnace body main body is greatly simplified. It reduces the steps of repeatedly rotating bolts and nuts in the traditional installation method, making the installation process more rapid and efficient. Instead of manually tightening multiple bolts and nuts one by one, it can be fixed through a one-time pulling and releasing action, significantly shortening the installation time required.

[0021] 3. When the first furnace shell and the second furnace shell are correctly connected, the indicator light immediately lights up, providing immediate visual feedback to the staff. Through the lighting of the indicator light, it can be ensured that before the equipment is started or operated, the furnace shell has been correctly installed in place, avoiding equipment failures, heat leakage, or safety accidents that may be caused by incorrect installation of the furnace shell. The staff does not need to perform complex inspections or tests, and only needs to visually check the indicator light to confirm the connection status of the furnace shell. The intuitive operation method simplifies the work process and reduces the requirements for the skills of the operators. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0023] Figure 1 It is a schematic structural diagram of the first perspective of the present utility model;

[0024] Figure 2 It is a schematic top view structural diagram of the present utility model;

[0025] Figure 3 It is a schematic structural diagram of the second perspective of the present utility model;

[0026] Figure 4 It is a schematic structural diagram at the lock rod of the present utility model;

[0027] Figure 5 It is a schematic structural diagram at the switch of the present utility model;

[0028] Figure 6 This is a schematic structural diagram of the limit block of the present utility model.

[0029] Explanation of reference numerals: 1. First furnace shell; 2. Second furnace shell; 3. Furnace body main body; 4. Water inlet pipe; 5. Connection assembly; 51. Fixed frame; 52. Pull rod; 53. Connection plate; 54. First spring; 55. First sliding plate; 56. Limit block; 57. Lock rod; 58. Lock groove; 59. Limit groove; 6. Prompt assembly; 61. Indicator light; 62. Second sliding plate; 63. Slide post; 64. Push plate; 65. Second spring; 66. Switch; 67. Slide groove; 7. Water outlet pipe; 8. Cooling cavity. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0031] It should be noted that the structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those who are familiar with this technology to understand and read, and are not used to limit the limited conditions that can be implemented in this application. Therefore, they do not have technical essence. Any modification of the structure, change of the proportional relationship, or adjustment of the size should still fall within the scope that can be covered by the technical content disclosed in this application without affecting the effects that this application can produce and the purposes that can be achieved.

[0032] Embodiment

[0033] Please refer to Figure 1-6 , the present utility model provides a technical solution: a cooling structure for the furnace body of a CVD reactor, including a first furnace shell 1 and a second furnace shell 2. Cooling cavities 8 are respectively opened inside the first furnace shell 1 and the second furnace shell 2. A water inlet pipe 4 and a water outlet pipe 7 are respectively fixed on one side of the first furnace shell 1 and the second furnace shell 2. The water inlet pipe 4 and the water outlet pipe 7 are respectively communicated with an external water supply device. The water supply device can be an ice water machine. Water enters the inside of the cooling cavity 8 through the water inlet pipe 4, contacts the furnace body main body 3 through the inside of the first furnace shell 1 and the second furnace shell 2 to cool the furnace body main body 3. The water after heat exchange with the furnace body main body 3 is discharged through the water outlet pipe 7. The cooling water enters the cooling cavity 8 through the water inlet pipe 4, directly contacts the furnace body main body 3, and effectively takes away the heat generated by the furnace body main body 3 through the heat exchange process, thereby realizing the cooling of the furnace body main body 3. Reducing the temperature of the furnace body main body 3 can reduce problems such as thermal stress and thermal deformation caused by high temperature, thereby improving the stability of the equipment;

[0034] Inside the first furnace shell 1 and the second furnace shell 2, there is a furnace body main body 3 for CVD coating processing. Since the internal structure and operating principle of the furnace body main body 3 of this reaction furnace are both prior arts, no further description will be given here;

[0035] On one side of the first furnace shell 1, there is a connection component 5, and on one side of the connection component 5, there is a prompt component 6;

[0036] In order to facilitate the connection between the first furnace shell 1 and the second furnace shell 2, a connection component 5 is provided. The connection component 5 includes two fixing frames 51 and several limiting blocks 56. A locking groove 58 is opened on one side of the limiting block 56. A first sliding plate 55 is slidably connected to the inner wall of the fixing frame 51. A pull rod 52 and a locking rod 57 are respectively fixed on both sides of the first sliding plate 55. A first spring 54 is sleeved on the outside of the pull rod 52. The water inlet pipe 4 and the water outlet pipe 7 are both communicated with the cooling cavity 8. The inner walls of the first furnace shell 1 and the second furnace shell 2 are attached to the outside of the furnace body main body 3. When the locking rod 57 is inserted into the inside of the locking groove 58, the first furnace shell 1 and the second furnace shell 2 are in a connected state. When the locking rod 57 leaves the inside of the locking groove 58, the first furnace shell 1 and the second furnace shell 2 are in a separated state. The first sliding plate 55 pushes the locking rod 57 to be inserted into the inside of the locking groove 58. At this time, the first furnace shell 1 and the second furnace shell 2 can be sleeved on the outside of the furnace body main body 3. There is no need to use a connection method with multiple bolts and nuts, saving the time spent on installing the first furnace shell 1 and the second furnace shell 2 together.

[0037] Limiting grooves 59 are opened on both sides of the top of the fixing frame 51. One end of the pull rod 52 is fixed with a connecting plate 53. The limiting blocks 56 on both sides of the second furnace shell 2 are inserted into the inside of the limiting grooves 59. Then, the connecting plate 53 is pulled to one side. The outside of the limiting block 56 is inserted into the inside of the limiting groove 59. The two ends of the first spring 54 are respectively connected to one side of the fixing frame 51 and the first sliding plate 55; one side of the limiting block 56 is fixed to one side of the second furnace shell 2, and one side of the fixing frame 51 is fixed to the outside of the first furnace shell 1. When the limiting block 56 is on one side of the locking rod 57, the pulling force on the connecting plate 53 is released. At this time, under the elastic force of the first spring 54, the first sliding plate 55 is pushed to slide on the inner wall of the fixing frame 51.

[0038] To facilitate the prompt for workers as to whether the first furnace shell 1 and the second furnace shell 2 are connected together, a prompt component 6 is provided. The prompt component 6 includes a second slide plate 62. A slide post 63 is fixed to the bottom of the second slide plate 62, and a push plate 64 is fixed to the bottom of the slide post 63. A chute 67 is provided on the inner wall of the limit groove 59. The second slide plate 62 slides inside the limit groove 59. Under the action of the slide post 63, the slide post 63 pushes the push plate 64 to slide inside the chute 67. A switch 66 is fixed to the bottom of the inner wall of the chute 67. A second spring 65 is connected between the bottom of the push plate 64 and the inner side wall of the chute 67; the outer side of the push plate 64 is slidably connected to the inside of the chute 67, and the outer side of the second slide plate 62 is slidably connected to the inside of the limit groove 59. Indicator lights 61 are installed on the outer sides of both the first furnace shell 1 and the second furnace shell 2. The push plate 64 compresses the second spring 65 and abuts against the contact point of the switch 66, triggering the switch 66. When the switch 66 is triggered, the indicator lights 61 produce a light indication. The output end of the switch 66 is electrically connected to the input end of the indicator lights 61. By visually observing that the indicator lights 61 are on, it can be known that the first furnace shell 1 and the second furnace shell 2 are connected together.

[0039] Working principle: The CVD coating process needs to be carried out under high-temperature conditions. The furnace body main body 3 of the reaction furnace can provide a stable and controllable high-temperature environment. Under high temperature and a specific atmosphere, the gas-phase precursor of the furnace body main body 3 of the reaction furnace will chemically react with the surface of the substrate to generate the required coating material. The furnace body main body 3 can be heated internally by electric heating wires;

[0040] When the first furnace shell 1 and the second furnace shell 2 need to be installed on the outer side of the furnace body main body 3, at this time, only the limit blocks 56 on both sides of the second furnace shell 2 need to be inserted into the inside of the limit groove 59, and then the connecting plate 53 is pulled to one side. When the limit block 56 is on one side of the locking rod 57, the pulling force on the connecting plate 53 is released. At this time, under the elastic force of the first spring 54, the first slide plate 55 is pushed to slide on the inner side wall of the fixing frame 51, and at the same time, the first slide plate 55 pushes the locking rod 57 to be inserted into the inside of the locking groove 58. At this time, the first furnace shell 1 and the second furnace shell 2 can be sleeved on the outer side of the furnace body main body 3, without using a connection method with multiple bolts and nuts, saving the time spent on installing the first furnace shell 1 and the second furnace shell 2 together;

[0041] When the locking rod 57 is inserted into the inside of the locking groove 58, exactly the limit block 56 pushes the second slide plate 62 to slide inside the limit groove 59. Under the action of the slide post 63, the slide post 63 pushes the push plate 64 to slide inside the chute 67, and makes the push plate 64 compress the second spring 65 and abut against the contact point of the switch 66, triggering the switch 66. When the switch 66 is triggered, the indicator lights 61 produce a light indication. At this time, the staff only needs to visually observe that the indicator lights 61 are on to know that the first furnace shell 1 and the second furnace shell 2 are connected together, and the operation is simple and convenient;

[0042] When it is necessary to disassemble the first furnace shell 1 and the second furnace shell 2 connected together, it is only necessary to pull the connecting plate 53 to one side respectively, so that the connecting plate 53 drives the pull rod 52, the first slide plate 55 and the locking rod 57 to move, so that the locking rod 57 leaves the inside of the locking groove 58. At this time, it is very convenient to disassemble the first furnace shell 1 and the second furnace shell 2 connected together.

[0043] In summary, by inserting the limit block 56 into the limit groove 59 and using the elastic force of the first spring 54 to lock the locking rod 57 and the locking groove 58, the process of installing the first furnace shell 1 and the second furnace shell 2 on the outside of the furnace body main body 3 is greatly simplified, and the steps of repeatedly rotating bolts and nuts in the traditional installation method are reduced, making the installation process more rapid and efficient. Instead of manually tightening multiple bolts and nuts one by one, the fixation can be completed through a one-time pulling and releasing action, significantly shortening the time required for installation;

[0044] When the first furnace shell 1 and the second furnace shell 2 are correctly connected, the indicator light 61 immediately lights up, providing instant visual feedback to the staff. By the lighting of the indicator light 61, it can be ensured that the furnace shell has been correctly installed in place before the equipment is started or operated, avoiding equipment failures, heat leakage or safety accidents that may be caused by incorrect installation of the furnace shell. The staff does not need to perform complex inspections or tests, and only needs to visually check the indicator light 61 to confirm the connection state of the furnace shell. The intuitive operation method simplifies the work process and reduces the requirements for the skills of the operators.

[0045] Those skilled in the art can understand that the features recited in the various embodiments and / or claims of the present invention can be combined or combined in various ways, even if such combinations or combinations are not explicitly recited in the present invention. In particular, without departing from the spirit and teachings of the present invention, the features recited in the various embodiments and / or claims of the present invention can be combined and combined in various ways. All such combinations and / or combinations fall within the scope of the present invention.

Claims

1. A cooling structure for the furnace body of a CVD reactor, comprising a first furnace shell (1) and a second furnace shell (2), characterized in that: Cooling cavities (8) are provided on the inner sides of the first furnace shell (1) and the second furnace shell (2), and a water inlet pipe (4) and a water outlet pipe (7) are respectively fixed to one side of the first furnace shell (1) and the second furnace shell (2); A furnace body main body (3) for CVD coating processing is arranged on the inner sides of the first furnace shell (1) and the second furnace shell (2); A connection assembly (5) is arranged on one side of the first furnace shell (1), and a prompt assembly (6) is arranged on one side of the connection assembly (5); The connection assembly (5) includes two fixing frames (51) and a plurality of limiting blocks (56). A locking groove (58) is provided on one side of the limiting block (56). A first sliding plate (55) is slidably connected to the inner wall of the fixing frame (51). A pull rod (52) and a locking rod (57) are respectively fixed to both sides of the first sliding plate (55), and a first spring (54) is sleeved on the outer side of the pull rod (52).

2. The cooling structure of the CVD reactor furnace body according to claim 1, characterized in that: The water inlet pipe (4) and the water outlet pipe (7) are both communicated with the cooling cavity (8), and the inner walls of the first furnace shell (1) and the second furnace shell (2) are attached to the outer side of the furnace body main body (3).

3. The cooling structure of the CVD reactor furnace body according to claim 1, wherein: Limiting grooves (59) are provided on both sides of the top of the fixing frame (51). A connecting plate (53) is fixed to one end of the pull rod (52). The outer side of the limiting block (56) is inserted into the inner side of the limiting groove (59). Both ends of the first spring (54) are respectively connected to one side of the fixing frame (51) and the first sliding plate (55); One side of the limiting block (56) is fixed to one side of the second furnace shell (2), and one side of the fixing frame (51) is fixed to the outer side of the first furnace shell (1).

4. A cooling structure for a CVD reactor furnace body according to claim 3, characterized in that: When the locking rod (57) is inserted into the inner side of the locking groove (58), the first furnace shell (1) and the second furnace shell (2) are in a connected state. When the locking rod (57) leaves the inner side of the locking groove (58), the first furnace shell (1) and the second furnace shell (2) are in a separated state.

5. The cooling structure of the CVD reactor furnace body according to claim 4, characterized in that: The prompt assembly (6) includes a second sliding plate (62). A sliding column (63) is fixed to the bottom of the second sliding plate (62), and a push plate (64) is fixed to the bottom of the sliding column (63).

6. The cooling structure of the CVD reactor furnace body according to claim 5, characterized in that: A sliding groove (67) is provided on the inner wall of the limiting groove (59). A switch (66) is fixed to the bottom of the inner wall of the sliding groove (67). A second spring (65) is connected between the bottom of the push plate (64) and the inner side wall of the sliding groove (67); The outer side of the push plate (64) is slidably connected to the inner side of the sliding groove (67), and the outer side of the second sliding plate (62) is slidably connected to the inner side of the limiting groove (59).

7. A cooling structure for a CVD reactor furnace body according to claim 6, characterized in that: Indicator lights (61) are installed on the outer sides of the first furnace shell (1) and the second furnace shell (2). The output end of the switch (66) is electrically connected to the input end of the indicator light (61).

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