Test box door and semiconductor high-temperature aging test box

Abstract

The utility model relates to the technical field of high-temperature aging test, in particular to a test chamber door and a semiconductor high-temperature aging test chamber, the test chamber door is used for being installed at an opening of a chamber body, the test chamber door comprises a chamber door body, and first sliding bodies are arranged on the two sides of the chamber door body; the elastic sealing belt is arranged between the box door body and the box body; the two vertical frames are symmetrically arranged, a plurality of guide grooves are formed in the vertical frames, the tail ends of the guide grooves are concave inwards in the direction of the box body, and the first sliding bodies correspond to the guide grooves in a one-to-one mode and are installed in a matched mode; the cylinder is fixedly arranged at one end of the vertical frame, and the end of a cylinder piston rod is connected with the door body; the cylinder telescopically drives the first sliding body to move up and down along the guide groove; and when the first sliding body moves to the tail end of the guide groove, the box door body seals the box body, and the elastic sealing tape between the box door body and the box body is pressed tightly. The technical problem of contradiction between the friction force and the sealing performance of the elastic sealing belt and the test box door is solved through the concave guide groove.

Description

Technical Field

[0001] The utility model relates to the technical field of high-temperature aging tests, and particularly relates to a test chamber door and a semiconductor high-temperature aging test chamber. Background Art

[0002] With the development of electronic technology, the degree of integration of electronic products is getting higher and higher, the structure is getting finer and finer, and the manufacturing process is getting more and more complex. Therefore, latent defects will be generated during the manufacturing process, resulting in many problems during use, such as early failures (occurring at the beginning of the life cycle of electronic products, usually appearing within a few hours to a few days after use). For a good electronic product, not only high performance indicators are required, but also high stability. Semiconductors are the basic components that form the core of modern electronic products, and their stability and reliability directly affect the performance and life of the entire electronic product.

[0003] At present, high-temperature aging tests are generally used at home and abroad to identify and eliminate defective semiconductors in advance, prevent them from entering the market or being assembled into electronic products, and improve the stability and reliability of electronic products. The basic principle of semiconductor high-temperature aging test is: by testing the semiconductor in an environment exceeding its normal working conditions, the aging process of the semiconductor is accelerated, forcing early failures to occur in a shorter time to avoid early failures during use.

[0004] Most of the chamber doors of traditional high-temperature aging test chambers adopt hinge doors or lock-type doors, and a certain space needs to be reserved for the chamber door to open, resulting in a large floor area of the entire test chamber and affecting the space utilization efficiency of the test room. The Chinese patent with the publication number CN210217510U discloses a semi-automatic test chamber door, which opens and closes the door by the telescopic movement of a cylinder, and realizes the up and down sliding of the chamber door through a balance sliding component, so as to realize the closing or opening of the door, replacing the traditional hinge door lock structure, and enabling the chamber door to be evenly attached to the door frame as a whole; an elastic sealing strip is used between the test chamber door body and the box body for sealing.

[0005] For the above related technologies, the following defects exist: there is a certain contradiction between the friction force between the sealing strip and the test chamber door and the sealing performance, which is caused by the contact and friction between the chamber door and the elastic sealing strip during the sliding process. Summary of the Utility Model

[0006] The utility model provides a test chamber door and a semiconductor high-temperature aging test chamber to solve the technical problem of the contradiction between the friction force between the sealing strip and the test chamber door and the sealing performance.

[0007] The first aspect of the utility model is to provide a test chamber door for installation at the opening of a box body, including:

[0008] The door body of the box, with first sliders arranged on both sides of the door body of the box, and multiple first sliders are arranged on each side of the door body of the box;

[0009] The elastic sealing belt is arranged between the door body of the box and the box body;

[0010] There are two vertical frames which are symmetrically arranged. A guide rail is arranged inside the vertical frame, and multiple guide grooves are arranged on the guide rail. The end of the guide groove is concave along the direction of the box body. The first sliders and the guide grooves are in one-to-one correspondence and are adaptively installed;

[0011] The air cylinder is fixedly arranged at one end of the vertical frame, and the end of the piston rod of the air cylinder is connected to the door body of the box;

[0012] The telescopic movement of the air cylinder drives the first sliders to move up and down along the guide grooves; when the first sliders move to the ends of the guide grooves, the door body of the box closes the box body and the elastic sealing belt between the door body of the box and the box body is pressed tightly.

[0013] As a preferred technical solution of the present utility model, there are two guide grooves arranged on the guide rail, and two first sliders are arranged on each side of the door body of the box, which are respectively located at the upper end and the lower end of the door body of the box.

[0014] The arrangement of multiple pairs of first sliders on both sides of the door body of the box enhances the mechanical connection stability between the door body of the box and the box body, making the door body of the box more stable during the opening and closing process, reducing shaking, and is especially suitable for test boxes that need to be frequently opened and closed or bear a large weight. The two symmetrically arranged vertical frames not only provide structural support but also incorporate a precise guide rail system. The multiple guide grooves on the guide rail and their concave design ensure that the first sliders can move smoothly up and down along the guide grooves under the drive of the air cylinder, and can form a tight fit with the box body at the closed position, improving the sealing effect. The arrangement of the air cylinder realizes the automatic opening and closing of the box door, reduces the need for manual operation, and improves the operation efficiency and safety, especially in those cases where rapid opening and closing are required or the operation environment is relatively harsh.

[0015] When the air cylinder expands and contracts to push the first sliders to move to the ends along the guide grooves, the door body of the box not only closes the opening of the box body, but also the elastic sealing belt is fully compressed under the pressure of the door body, forming a reliable seal and ensuring the isolation effect of the environment inside the box.

[0016] As a preferred technical solution of the present utility model, a slider and a slide rail for the slider to slide up and down are further arranged inside the vertical frame. The slider is slidably connected to the guide rail; the slider is fixedly connected to the end of the piston rod of the air cylinder.

[0017] As a preferred technical solution of the present utility model, second sliders are further arranged on both sides of the door body of the box, and the second sliders are connected to the sliders.

[0018] As a preferred technical solution of the present utility model, an assembly groove adapted to be installed with the second sliding body is provided on the slider.

[0019] The second aspect of the present utility model is to provide a semiconductor high-temperature aging test chamber, including the above-mentioned test chamber door, the box body, the control panel, the power module box, and the driving board bin bracket.

[0020] The control panel is fixedly arranged on the box body, and the control panel is electrically connected to the power module box and the air cylinder.

[0021] The power module box is arranged above the driving board bin bracket, and the power module box and the driving board bin bracket are arranged on the back of the box body.

[0022] A docking plate is arranged between the box body and the driving board bin bracket, and insertion interfaces are arranged on both sides of the docking plate.

[0023] As a preferred technical solution of the present utility model, an industrial control computer is further included. The industrial control computer is arranged outside the high-temperature aging test chamber, and the industrial control computer is electrically connected to multiple high-temperature aging test chambers.

[0024] The beneficial effects are as follows:

[0025] 1. The concave setting at the end of the guiding groove solves the technical problem that the straight wire guiding groove causes large friction between the box door and the elastic sealing belt and reduces the service life of the elastic sealing belt. At the same time, the concave setting at the end of the guiding groove enables the elastic sealing belt between the box door and the box body to be tightly pressed when the box door is closed, making the sealing performance between the box body and the box door better.

[0026] 2. By setting the box door of the semiconductor high-temperature aging test chamber as a lifting door, compared with the hinge door or the lock-type door that requires a certain space for the box door to open, the setting of the lifting door makes the test chamber occupy less floor area, and the lifting door is controlled by an air cylinder, so that the box door can be automatically opened and closed without manual operation. Description of the Drawings

[0027] By referring to the accompanying drawings and reading the following detailed description, the above and other objects, features, and advantages of the exemplary embodiments of the present utility model will become readily understandable. In the drawings, several embodiments of the present utility model are shown in an exemplary rather than restrictive manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0028] Figure 1 It is a schematic structural diagram of the test chamber door;

[0029] Figure 2 It is a schematic structural diagram of the vertical frame assembled with the first sliding body and the second sliding body;

[0030] Figure 3 It is a schematic structural diagram of a semiconductor high-temperature aging test chamber (removing the power module box and the side plate of the drive board bin bracket).

[0031] Explanation of reference numerals:

[0032] 1. Door body; 11. First slider; 12. Second slider; 2. Vertical frame; 21. Guide rail; 22. Slide rail; 23. Slide block; 24. Guide groove; 25. Assembly groove; 3. Box body; 4. Control panel; 5. Power module box; 6. Drive board bin bracket; 7. Heat dissipation hole; 8. Air inlet and outlet. Specific implementation manners

[0033] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Those skilled in the art should know that the embodiments described below are part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0034] For the existing lifting door, the guide rail adopts a straight guide groove. In this way, when opening the door by lifting, the friction between the door and the sealing strip is large, reducing the service life of the sealing strip.

[0035] The present invention provides a guide rail with an inwardly concave end of the guide groove, which solves the technical problem that the straight guide groove causes large friction between the door and the elastic sealing strip, reducing the service life of the elastic sealing strip. The inwardly concave setting of the end of the guide groove makes the elastic sealing strip between the door and the box body be pressed tightly when the door is closed, making the sealing performance between the box body and the door better.

[0036] After introducing the basic principle of the present invention, the various non-limiting implementation manners of the present invention will be specifically introduced below. The number of any element in the accompanying drawings is for illustration rather than limitation, and any naming is only for distinction and does not have any limiting meaning.

[0037] Next, referring to several representative implementation manners of the present invention, the principle and spirit of the present invention will be elaborated in detail.

[0038] Embodiment 1:

[0039] Refer to Figure 1 and Figure 2 A test chamber door for installation at the opening of the box body 3, including a door body 1, an elastic sealing strip, a vertical frame 2, and a cylinder:

[0040] The door body 1 of the box has first sliders 11 and second sliders 12 provided on both the left and right sides thereof. On each side of the door body 1 of the box, two first sliders 11 are fixedly provided, respectively located at the upper end and the lower end of the door body 1 of the box, and the second sliders 12 are fixedly provided in the middle of the door body 1 of the box.

[0041] An elastic sealing strip is provided between the door body 1 of the box and the box body 3.

[0042] Refer to Figure 2 There are two vertical frames 2 which are symmetrically arranged on both sides of the door body 1 of the box from left to right. A guide rail 21, a slide rail 22 and a slider 23 are provided in the vertical frame 2. The guide rail 21 and the slide rail 22 are adjacently arranged, and the slider 23 is provided in the slide rail 22.

[0043] Two guide grooves 24 are provided on the guide rail 21. The ends of the guide grooves 24 are concave inward along the direction of the box body 3. The two guide grooves 24 have the same shape and size, and the two guide grooves 24 are arranged vertically opposite to each other.

[0044] The guide groove 24 is composed of a straight part and a bent part. The included angle at the connection between the straight part and the bent part is greater than 90° and less than 180°. In this embodiment, the included angle is 135°. Of course, in other embodiments, the included angle can also be 120°, 145°, 160°, 170°, etc.

[0045] The vertical distance from the end of the bent part to the straight part is not greater than the compressible range of the elastic sealing strip.

[0046] The slider 23 is slidably connected to the guide rail 21, and the slider 23 can slide up and down along the slide rail 22.

[0047] The guide groove 24 and the first slider 11 are in one-to-one correspondence and are adaptively installed. The first slider 11 can move up and down in the guide groove 24; in this example, an assembly groove 25 is provided in the slider 23, and the second slider 12 is fixedly connected to the slider 23 through the assembly groove 25.

[0048] In other embodiments, more first sliders 11 can be provided on each side of the door body 1 of the box according to requirements, such as three, four or even more. And the guide groove 24 also needs to be adaptively adjusted according to the number of the first sliders 11, so that the first sliders 11 can be installed in one-to-one correspondence with the guide groove 24.

[0049] There are two cylinders which are fixedly provided at the lower end of the vertical frame 2. The end of the piston rod of the cylinder is connected to the slider 23; the telescopic movement of the cylinder drives the first slider 11 to move up and down along the guide groove 24. When the first slider 11 moves to the end of the guide groove 24, the door body 1 of the box closes the box body 3 and the elastic sealing strip between the door body 1 of the box and the box body 3 is pressed tightly.

[0050] In other embodiments, the cylinders are fixedly provided at the upper end of the vertical frame 2.

[0051] In other embodiments, there may also be one cylinder, which may be fixedly arranged at the upper end of one of the two vertical frames 2; or it may be fixedly arranged at the upper end of the box body 3. Preferably, the cylinder may be arranged above the center position of the box door to ensure that when the cylinder expands and contracts to drive the box door to move up and down, the box door is evenly stressed, reducing the shaking caused by the center of gravity deviation.

[0052] When the test box door is closed, the cylinder contracts, and the slider 23 at the end of the piston rod moves downward in the slide rail 22, driving the box door body 1 to move downward. The first sliders 23 on both sides of the box door body 1 move downward in the guide groove 24. When the first slider 23 moves to the end (concave part) of the guide groove 24, the box door body 1 just touches the outer wall of the box body 3, and the box door body 1 closes the box body 3. At the same time, the box door body 1 presses the elastic sealing belt towards the box body 3, forming a sealed space between the box door body 1 and the box body 3.

[0053] Refer to Figure 3 , this embodiment also relates to a semiconductor high-temperature aging test chamber, including the above-mentioned test box door, as well as the box body 3, a control panel 4, a power module box 5, a drive board bin bracket 6, and an industrial computer:

[0054] The test box door is a lifting door and is arranged in front of the box body 3. It includes vertical frames 2 and a box door body 1. The vertical frames 2 are arranged on the left and right sides of the box body 3, and the box door body 1 can move up and down along the vertical frames 2.

[0055] The box body 3 is provided with an air inlet / outlet 8 and heat dissipation holes 7 at the top, and an aging board bracket is arranged inside the box.

[0056] The control panel 4 is fixedly arranged on the box body 3, and the control panel 4 is electrically connected to the power module box 5 and the cylinder.

[0057] The power module box 5 is arranged above the drive board bin bracket 6 and on the back of the box body 3. The power module box 5 is located at the upper rear of the high-temperature aging test chamber (hereinafter referred to as the test chamber). Heat dissipation holes 7 are provided on the top cover and the back plate of the power module box 5 to improve the heat dissipation speed of the power module box 5.

[0058] The drive board bin bracket 6 is arranged on the back of the box body 3. The drive board bin bracket 6 and the box body 3 are separated by a docking plate, and plug-in interfaces are arranged on both sides of the docking plate.

[0059] The industrial computer is arranged outside the high-temperature aging test chamber, and the industrial computer can be electrically connected to multiple test chambers to control multiple test chambers.

[0060] The present utility model provides a semiconductor high-temperature aging test box with a compact structure, modular setting, and high degree of automation. The modular setting is convenient for installation and assembly, and also convenient for later maintenance and repair.

[0061] In order to improve the heat dissipation speed of the test box, heat dissipation holes 7 are provided on the top cover and the back plate of the test box.

[0062] The driving board is placed on the driving board bin bracket 6, and the driving board connector is plugged into the plug interface on the docking board located on one side of the driving board bin bracket 6. An aging board bracket is provided in the box body 3, and an IC aging test socket is provided on the aging board bracket for assembling a semiconductor chip to be tested (hereinafter referred to as a semiconductor chip), and the IC aging test socket is electrically connected to the plug interface on the docking board.

[0063] When the test chamber is operated, the cylinder is extended and retracted through the control panel 4 or the industrial computer, thereby controlling the opening and closing of the test chamber door, without manual door opening and closing operations, and is suitable for use in semiconductor test production lines. The test chamber is combined with an external manipulator, and the control panel 4 or the industrial computer is used to control the opening of the test chamber door, and the semiconductor chip is placed in the test chamber through the manipulator, so that the semiconductor intelligent automatic high temperature aging test can be realized.

[0064] Embodiment 2:

[0065] The main difference between it and Example 1 is:

[0066] In this embodiment, the second sliding body 12 is not required to be disposed on the door body 1, and the sliding block 23 is fixed to the door body 1 by welding or by bolts.

[0067] According to the above description of this specification, those skilled in the art may also understand that the terms used below, such as "up", "down", "left", "right", "front", "back" and other terms indicating orientation or positional relationships are based on the orientation or positional relationships shown in the drawings of this specification, and are only for the purpose of facilitating the explanation of the scheme of the utility model and simplifying the description, rather than explicitly or implicitly indicating that the device or element involved must have the specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of the utility model.

[0068] In addition, in the description of this specification, “plurality” means at least two, for example, two, three or more, etc., unless otherwise clearly and specifically defined.

Claims

1. A test chamber door for installation at an opening of a chamber body (3), characterized in that, Comprising: A box door body (1), with first sliding bodies (11) provided on both sides of the box door body (1), and multiple first sliding bodies (11) provided on each side of the box door body (1); An elastic sealing strip, provided between the box door body (1) and the box body (3); Vertical frames (2), two of them being symmetrically arranged. A guide rail (21) is provided inside the vertical frames (2), and multiple guide grooves (24) are provided on the guide rail (21). The ends of the guide grooves (24) are concave inward along the direction of the box body (3), and the first sliding bodies (11) are in one-to-one correspondence and are adaptively installed with the guide grooves (24); A cylinder, fixedly provided at one end of the vertical frame (2), and the end of the piston rod of the cylinder is connected to the box door body (1); The telescopic movement of the cylinder drives the first sliding body (11) to move up and down along the guide groove (24); when the first sliding body (11) moves to the end of the guide groove (24), the box door body (1) closes the box body (3) and the elastic sealing strip between the box door body (1) and the box body (3) is pressed tightly.

2. The test chamber door according to claim 1, wherein, Two guide grooves (24) are provided on the guide rail (21), and two first sliding bodies (11) are provided on each side of the box door body (1), respectively located at the upper end and the lower end of the box door body (1).

3. The test chamber door according to claim 2, wherein A slider (23) and a slide rail (22) for the slider (23) to slide up and down are further provided inside the vertical frame (2). The slider (23) is slidably connected to the guide rail (21); the slider (23) is fixedly connected to the end of the piston rod of the cylinder.

4. The test chamber door according to claim 3, wherein Second sliding bodies (12) are further provided on both sides of the box door body (1), and the second sliding bodies (12) are connected to the slider (23).

5. The test chamber door according to claim 4, wherein, An assembly groove (25) adapted to be installed with the second sliding body (12) is provided on the slider (23).

6. A semiconductor high-temperature aging test chamber, characterized in that, Comprising the test box door according to any one of claims 1 - 5, as well as a box body (3), a control panel (4), a power module box (5), and a drive board bin bracket (6), The control panel (4) is fixedly provided on the box body (3), and the control panel (4) is electrically connected to the power module box (5) and the cylinder; The power module box (5) is provided above the drive board bin bracket (6), and the power module box (5) and the drive board bin bracket (6) are provided on the back of the box body (3); A docking plate is provided between the box body (3) and the drive board bin bracket (6), and plug interfaces are provided on both sides of the docking plate.

7. The semiconductor high-temperature aging test chamber according to claim 6, wherein, Further comprising an industrial control computer, which is provided outside the high-temperature aging test box, and the industrial control computer is electrically connected to multiple high-temperature aging test boxes.

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