Gluing and developing heating disc with good steam discharge effect

Abstract

The utility model discloses a gluing developing heating plate with good steam discharge effect, which comprises a base plate, the lower end of the base plate is fixedly connected with a plurality of connecting rods II, one side of each connecting rod II is fixedly connected with a bump, a disc shell is arranged below the base plate, a dismounting ring is arranged in the disc shell, and the dismounting ring is fixedly connected with the bottom of the base plate. And a plurality of mounting lugs are connected to the outer surface of the dismounting ring in a sliding manner. The base plate covers the disc shell, the second connecting rod and the protruding block on the base plate penetrate through the second mounting groove, the dismounting ring is rotated so that the second connecting rod can slide on the inner wall of the first mounting groove, and when the protruding block slides to one side of the dismounting ring from the second mounting groove, the dismounting ring fixes the second connecting rod; the gluing and developing heating disc is simple in structure and convenient to operate, and the mounting and dismounting speed of the gluing and developing heating disc is greatly increased.

Description

Technical Field

[0001] The utility model relates to the technical field of spin coating and developing hot plates, in particular to a spin coating and developing hot plate with good steam discharge effect. Background Technique

[0002] Spin coating and developing refers to the process of coating a layer of photoresist on the surface of a semiconductor wafer and transferring the designed circuit pattern to the wafer surface through a series of chemical and physical processes such as exposure and developing. After the spin coating process of the semiconductor wafer is completed, a hot plate is required to quickly volatilize the organic solvent in the photoresist by uniform heating, so as to form a uniform and dense photoresist film on the wafer surface.

[0003] At present, the outer shells of most spin coating and developing hot plates are composed of a chassis and a disc-shaped outer shell, and the connection between the two is fixed by multiple screws. This fixing method is relatively cumbersome to disassemble when repairing the spin coating and developing hot plate, and the screws may be lost during disassembly, making it inconvenient to use. Content of the Utility Model

[0004] The purpose of the utility model is to provide a spin coating and developing hot plate with good steam discharge effect to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A spin coating and developing hot plate with good steam discharge effect, including a chassis, a plurality of second connecting rods are fixedly connected to the lower end of the chassis, a convex block is fixedly connected to one side of each of the plurality of second connecting rods, a disc-shaped outer shell is arranged below the chassis, a disassembly ring is arranged inside the disc-shaped outer shell, a plurality of mounting ears are slidably connected to the outer surface of the disassembly ring, one side of each of the plurality of mounting ears is fixedly connected to the inner wall of the disc-shaped outer shell, a plurality of second mounting grooves are formed on one side of the outer surface of the disassembly ring, a plurality of first mounting grooves are formed on the other side of the outer surface of the disassembly ring, and one side of each of the plurality of first mounting grooves communicates with one side of each of the plurality of second mounting grooves through.

[0006] As a further preference of this technical solution, a sliding groove is communicated through one side of the disc-shaped outer shell, a first connecting rod is slidably connected to the inner wall of the sliding groove, a fixing groove is formed through one side of the first connecting rod, a fixing frame is fixedly connected to one side of the outer surface of the disc-shaped outer shell, a threaded rod is threadedly connected to the upper end of the fixing frame, and a nut is fixedly connected to one end of the threaded rod.

[0007] As a further preference of this technical solution, a rubber block is fixedly connected to one side of the upper end of the chassis, a power cord is arranged inside the rubber block, an electric heating element is fixedly installed in the middle of the lower end of the chassis, and one end of the electric heating element is electrically connected to one end of the power cord.

[0008] As a further preference of the present technical solution, a plurality of exhaust holes are opened at the lower end of the disc housing, and a plurality of exhaust pipes are fixedly communicated with the inner bottom of the disc housing.

[0009] As a further preference of the present technical solution, a plurality of second partitions are fixedly connected to one side of the inner wall of the exhaust pipe, and a first partition is fixedly connected to the other side of the inner wall of the exhaust pipe, and the second partitions and the first partitions are alternately distributed.

[0010] As a further preference of the present technical solution, one end of the exhaust pipe is fixedly communicated with an intake hourglass.

[0011] The utility model provides a glue coating, developing and heating plate with good steam discharging effect, which has the following beneficial effects:

[0012] (1) In the utility model, by covering the chassis on the disc housing, the second connecting rod on the chassis and the convex block pass through the second installation groove, and by rotating the disassembly ring, the second connecting rod slides on the inner wall of the first installation groove. When the convex block slides from the second installation groove to one side of the disassembly ring, the disassembly ring fixes the second connecting rod, realizing the fixation of the chassis and the disc housing. This structure is simple and convenient to operate, greatly improving the installation and disassembly speed of the glue coating, developing and heating plate.

[0013] (2) In the utility model, by installing a plurality of second partitions and a plurality of first partitions in the exhaust pipe, the flow direction of the discharged steam can be guided, so that the steam forms a stable flow channel between the plurality of second partitions and the plurality of first partitions, effectively reducing the occurrence of turbulent flow and eddy current phenomena of the steam in the exhaust pipe, thereby reducing the fluctuation of the steam pressure and improving the steam discharging effect. Description of the Drawings

[0014] Figure 1 It is a three-dimensional structure diagram of the utility model;

[0015] Figure 2 It is an exploded structure diagram of the utility model;

[0016] Figure 3 It is a three-dimensional structure diagram of the chassis in the utility model;

[0017] Figure 4 It is a three-dimensional structure diagram of the disassembly ring in the utility model;

[0018] Figure 5 It is a cross-sectional structure diagram of the exhaust pipe in the utility model;

[0019] In the figure: 1, chassis; 2, disc housing; 3, fixing bracket; 4, connecting rod one; 5, power cord; 6, exhaust hole; 7, sliding groove; 8, connecting rod two; 9, threaded rod; 10, nut; 11, exhaust pipe; 12, disassembly ring; 13, mounting ear; 14, mounting groove one; 15, mounting groove two; 16, bump; 17, fixing groove; 18, rubber block; 19, heating element; 20, intake hourglass; 21, partition one; 22, partition two. Detailed implementation manner

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0021] The present invention provides a technical solution: As Figure 1 - Figure 5 shown, in this embodiment, a glue coating, developing and heating plate with good steam discharge effect includes a chassis 1. A plurality of connecting rods two 8 are fixedly connected to the lower end of the chassis 1. A bump 16 is fixedly connected to one side of each of the plurality of connecting rods two 8. A disc housing 2 is arranged below the chassis 1. A disassembly ring 12 is arranged inside the disc housing 2. A plurality of mounting ears 13 are slidably connected to the outer surface of the disassembly ring 12. One side of each of the plurality of mounting ears 13 is fixedly connected to the inner wall of the disc housing 2. A plurality of mounting grooves two 15 are opened on one side of the outer surface of the disassembly ring 12. A plurality of mounting grooves one 14 are opened on the other side of the outer surface of the disassembly ring 12. One side of each of the plurality of mounting grooves one 14 penetrates and communicates with one side of each of the plurality of mounting grooves two 15. By covering the chassis 1 on the disc housing 2, the connecting rod two 8 on the chassis 1 passes through the mounting groove two 15 from the bump 16, and then the disassembly ring 12 is rotated so that the connecting rod two 8 slides on the inner wall of the mounting groove one 14. When the bump 16 slides from the mounting groove two 15 to one side of the disassembly ring 12, the disassembly ring 12 fixes the connecting rod two 8, realizing the fixation of the chassis 1 and the disc housing 2. This structure is simple and convenient to operate, greatly improving the installation and disassembly speed of the glue coating, developing and heating plate.

[0022] As Figure 1 and Figure 2 shown, a sliding groove 7 penetrates and communicates with one side of the disc housing 2. A connecting rod one 4 is slidably connected to the inner wall of the sliding groove 7. A fixing groove 17 is penetrated and opened on one side of the connecting rod one 4. A fixing bracket 3 is fixedly connected to one side of the outer surface of the disc housing 2. A threaded rod 9 is threadedly connected to the upper end of the fixing bracket 3. A nut 10 is fixedly connected to one end of the threaded rod 9. By rotating the nut 10, the threaded rod 9 moves along the internal thread in the fixing bracket 3, and one side of the nut 10 is attached to the upper surface of the connecting rod one 4, thereby fixing the connecting rod one 4.

[0023] As Figure 1 and Figure 2As shown in the figure, a rubber block 18 is fixedly connected to one side of the upper end of the chassis 1. A power cord 5 is arranged inside the rubber block 18. An electric heating element 19 is fixedly installed in the middle of the lower end of the chassis 1. One end of the electric heating element 19 is electrically connected to one end of the power cord 5. Through the structural design of the rubber block 18, it can prevent the power cord 5 from being damaged when being pulled.

[0024] As Figure 1 , Figure 2 and Figure 5 shown, a plurality of exhaust holes 6 are formed in the lower end of the disc housing 2. A plurality of exhaust pipes 11 are fixedly communicated with the inner bottom of the disc housing 2. Through the structural design of the exhaust holes 6 and the exhaust pipes 11, the steam in the glue coating and developing heating plate can be discharged.

[0025] As Figure 2 and Figure 5 shown, a plurality of partition plates two 22 are fixedly connected to one side of the inner wall of the exhaust pipe 11, and a plurality of partition plates one 21 are fixedly connected to the other side of the inner wall of the exhaust pipe 11. The partition plates two 22 and the partition plates one 21 are arranged in an alternating manner. By installing a plurality of partition plates two 22 and a plurality of partition plates one 21 in the exhaust pipe 11, the flow direction of the discharged steam can be guided, so that the steam forms a stable flow channel between the plurality of partition plates two 22 and the plurality of partition plates one 21, effectively reducing the occurrence of turbulent flow and eddy current phenomena of the steam in the exhaust pipe 11, thereby reducing the fluctuation of the steam pressure and improving the steam discharge effect.

[0026] As Figure 2 and Figure 5 shown, one end of the exhaust pipe 11 is fixedly communicated with an intake hourglass 20. Through the structural design of the intake hourglass 20, the amount of steam entering the chassis 1 in the glue coating and developing heating plate can be increased, and the exhaust efficiency can be improved.

[0027] The present utility model provides a glue coating and developing heating plate with good steam discharge effect. The specific working principle is as follows:

[0028] When the glue coating and developing heating plate needs to be repaired after long-term use, first rotate the nut 10 to move the threaded rod 9 upward along the threaded groove in the fixing bracket 3, move one side of the nut 10 out of the surface of the connecting rod 1 4, release the restriction of the connecting rod 1 4, then pull the connecting rod 1 4, slide the disassembly ring 12 in the mounting ear 13, and the connecting rod 2 8 slides on the inner wall of the mounting groove 1 14. When the convex block 16 is aligned with the mounting groove 2 15, the disassembly ring 12 releases the restriction on the chassis 1, and then remove the chassis 1 from the disc housing 2, so as to repair the glue coating and developing heating plate. After the repair is completed, cover the chassis 1 on the disc housing 2, pass the connecting rod 2 8 and the convex block 16 on the chassis 1 through the mounting groove 2 15, and then rotate the disassembly ring 12 so that the connecting rod 2 8 slides on the inner wall of the mounting groove 1 14. When the convex block 16 slides from the mounting groove 2 15 to one side of the disassembly ring 12, the disassembly ring 12 fixes the connecting rod 2 8, thus completing the installation.

[0029] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A glue coating, developing and heating plate with good steam discharging effect, comprising a chassis (1), characterized in that: A plurality of second connecting rods (8) are fixedly connected to the lower end of the chassis (1). A convex block (16) is fixedly connected to one side of each of the plurality of second connecting rods (8). A disc housing (2) is provided below the chassis (1). A dismounting ring (12) is arranged inside the disc housing (2). A plurality of mounting ears (13) are slidably connected to the outer surface of the dismounting ring (12). One side of each of the plurality of mounting ears (13) is fixedly connected to the inner wall of the disc housing (2). A plurality of second mounting grooves (15) are formed in one side of the outer surface of the dismounting ring (12). A plurality of first mounting grooves (14) are formed in the other side of the outer surface of the dismounting ring (12). One side of each of the plurality of first mounting grooves (14) is respectively communicated with one side of each of the plurality of second mounting grooves (15) through.

2. The glue coating, developing and heating plate with good steam discharging effect according to claim 1, wherein: A sliding groove (7) is communicated through one side of the disc housing (2). A first connecting rod (4) is slidably connected to the inner wall of the sliding groove (7). A fixing groove (17) is formed through one side of the first connecting rod (4). A fixing frame (3) is fixedly connected to one side of the outer surface of the disc housing (2). A threaded rod (9) is threadedly connected to the upper end of the fixing frame (3). A nut (10) is fixedly connected to one end of the threaded rod (9).

3. The glue coating, developing and heating plate with good steam discharging effect according to claim 1, wherein: A rubber block (18) is fixedly connected to one side of the upper end of the chassis (1). A power cord (5) is arranged inside the rubber block (18). An electric heating element (19) is fixedly installed in the middle of the lower end of the chassis (1). One end of the electric heating element (19) is electrically connected to one end of the power cord (5).

4. A glue coating, developing and heating plate with good steam discharge effect according to claim 1, characterized in that: A plurality of exhaust holes (6) are formed in the lower end of the disc housing (2). A plurality of exhaust pipes (11) are fixedly communicated with the inner bottom of the disc housing (2).

5. The glue coating, developing and heating plate with good steam discharging effect according to claim 4, characterized in that: A plurality of second partition plates (22) are fixedly connected to one side of the inner wall of the exhaust pipe (11). A first partition plate (21) is fixedly connected to the other side of the inner wall of the exhaust pipe (11). The second partition plates (22) and the first partition plates (21) are distributed alternately.

6. The glue coating, developing and heating plate with good steam discharging effect according to claim 4, wherein: One end of the exhaust pipe (11) is fixedly communicated with an intake hourglass (20).

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