Wafer suction cup height adjusting device

Abstract

The utility model relates to the technical field of wafer suction cup processing, and discloses a wafer suction cup height adjusting device which comprises a box body, a placing plate is arranged at the top end of the box body, fixing blocks are fixedly connected to the front side and the rear side of the left end of the top of the placing plate, and the close ends of the two fixing blocks are fixedly connected with the same supporting rod. A base plate is fixedly connected to the top end of the containing plate, a hydraulic cylinder is fixedly connected to the top end of the base plate, a fixing box is fixedly connected to the top end of the containing plate, a sliding rod is fixedly connected to the driving end of the hydraulic cylinder, and rotating rods are rotationally connected to the front end and the rear end of the sliding rod. According to the utility model, the hydraulic cylinder is started to drive the sliding rod to slide in the fixed box, the two ends of the sliding rod are rotatably provided with the rotating rods, and the other ends of the rotating rods are rotatably arranged on one side of the rotating plate, so that the requirement of processing different parts of a wafer at specific angles in the wafer processing process can be met.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer chuck processing, in particular to a wafer chuck height adjusting device. Background Technique

[0002] In the field of semiconductor manufacturing, the processing of wafers is crucial. The wafer chuck height adjusting device appears to meet the precise operation requirements of wafers. It combines precision machinery and electronic control technologies, fully considering the high-precision requirements and complex environments in the wafer processing process. Through continuous improvement and innovation, it aims to achieve precise adjustment of the wafer chuck height, ensure the stability and safety of wafers during production, and improve the efficiency and quality of semiconductor manufacturing.

[0003] In the prior art, some wafer chuck height adjusting devices can accurately place the wafer at the required height position to meet the requirements of different process steps. However, during use, the wafer chuck cannot be angle-adjusted, resulting in an inability to reach the ideal position in some processing links that require specific angle operations, leading to processing errors. For this reason, a wafer chuck height adjusting device is proposed to solve the above problems. Summary of the Utility Model

[0004] In order to make up for the above deficiencies, the utility model provides a wafer chuck height adjusting device, aiming to improve the problem that the wafer chuck height adjusting device in the prior art cannot angle-adjust the wafer chuck, resulting in an inability to reach the ideal position in some processing links that require specific angle operations, leading to processing errors.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A wafer chuck height adjusting device includes a box body. A placement plate is arranged at the top end of the box body. Fixing blocks are fixedly connected to the front and rear sides of the left end of the top of the placement plate. The adjacent ends of the two fixing blocks are fixedly connected to the same support rod. A cushion plate is fixedly connected to the top end of the placement plate. A hydraulic cylinder is fixedly connected to the top end of the cushion plate. A fixed box is fixedly connected to the top end of the placement plate. A sliding rod is fixedly connected to the driving end of the hydraulic cylinder. Rotating rods are rotatably connected to the front and rear ends of the sliding rod. The other ends of the two rotating rods are rotatably connected to the same rotating plate. An adsorption disc is fixedly connected to the top end of the rotating plate. A lifting component for lifting the placement plate is arranged inside the box body. A moving component for moving the box body is arranged at the bottom end of the box body;

[0007] As a further description of the above technical solution:

[0008] The lifting component includes a support column, which is fixedly connected to the inner bottom end of the box body. A firm plate is fixedly connected to the rear end of the support column. A push rod is rotatably connected to the right end of the firm plate. A ratchet pawl is fixedly connected to the right end of the push rod. A fixed block is fixedly connected to the inner top end of the box body. A motor is fixedly connected to the top end of the fixed block. A gear is fixedly connected to the driving end of the motor. A ratchet wheel is arranged in front of the gear. A sliding plate is slidably connected to the inside of the box body. A rack is fixedly connected to the right end of the sliding plate;

[0009] As a further description of the above technical solution:

[0010] The moving component includes four fixing plates, which are respectively fixedly connected to the four corners of the bottom end of the box body. A support column is fixedly connected to the bottom end of the fixing plate. A rubber pad is fixedly connected to the bottom end of the support column. A connecting block is slidably connected to the outside of the support column. A pedal is rotatably connected to the outside of the right end of the connecting block. Rotating blocks are rotatably connected to the front and rear ends of the pedal. A wheel is rotatably connected to the inside of the connecting block. Stabilizing blocks are fixedly connected to the front and rear ends of the connecting block. Springs are fixedly connected to the inside of the two stabilizing blocks;

[0011] As a further description of the above technical solution:

[0012] The rotating plate rotates on the outside of the support rod, and the bottom end of the rotating plate is in contact with the top end of the fixed box;

[0013] As a further description of the above technical solution:

[0014] The sliding rod slides inside the fixed box, and the inside of the fixed box is hollow;

[0015] As a further description of the above technical solution:

[0016] The ratchet wheel is fixed to the driving end of the motor, and the ratchet pawl is engaged with the ratchet wheel;

[0017] As a further description of the above technical solution:

[0018] The outer wall of the sliding plate is in contact with the inner wall of the box body, and the gear is meshed with the rack;

[0019] As a further description of the above technical solution:

[0020] The front and rear ends of the wheel slide in the chutes at the front and rear ends of the connecting block, and the end of the spring away from the stabilizing block is fixedly connected to the right end of the rotating block.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the present utility model, by starting the hydraulic cylinder to drive the sliding rod to slide inside the fixed box, and the two ends of the sliding rod are rotatably connected with rotating rods, and the other ends of the rotating rods are rotatably connected to one side of the rotating plate. Thus, the movement of the sliding rod can drive the rotating plate to move. The rotating plate rotates outside the support rod, and the suction cup is fixed on the top of the rotating plate. Therefore, the angle of the suction cup can be adjusted to meet the requirement of performing specific angle treatment on different parts of the wafer during the wafer processing.

[0023] 2. In the present utility model, by starting the motor to drive the gear to rotate, the gear will drive the rack to move up and down, and then drive the sliding plate to move up and down, so as to adjust the height of the suction cup on the top of the placement plate. The pawl can be engaged with the ratchet, so as to fix the position of the placement plate. When the device needs to be moved, step on the pedal downward, and then the wheel can be driven downward by the rotating block, so that the wheel contacts the ground, and then the device can be moved. Description of the Drawings

[0024] Figure 1 is a three-dimensional schematic diagram of a wafer suction cup height adjustment device proposed by the present utility model;

[0025] Figure 2 is a structural schematic diagram of the gear of a wafer suction cup height adjustment device proposed by the present utility model;

[0026] Figure 3 is a structural schematic diagram of the sliding rod of a wafer suction cup height adjustment device proposed by the present utility model;

[0027] Figure 4 is a structural schematic diagram of the rotating block of a wafer suction cup height adjustment device proposed by the present utility model.

[0028] Legend Explanation:

[0029] 1. Box body; 2. Support pillar; 3. Firm plate; 4. Push rod; 5. Pawl; 6. Fixed block; 7. Motor; 8. Gear; 9. Ratchet; 10. Sliding plate; 11. Rack; 12. Placement plate; 13. Fixed block; 14. Support rod; 15. Pad; 16. Hydraulic cylinder; 17. Fixed box; 18. Sliding rod; 19. Rotating rod; 20. Rotating plate; 21. Suction cup; 22. Fixed plate; 23. Support column; 24. Rubber pad; 25. Connecting block; 26. Pedal; 27. Rotating block; 28. Wheel; 29. Stable block; 30. Spring. Detailed Embodiment

[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0031] Referring to Figure 1 、 Figure 3 , an embodiment provided by the present utility model: a wafer chuck height adjusting device, including a box body 1. The box body 1 provides an installation and protection space for each component of the entire device, ensuring the stability and safety of the device. A placement plate 12 is provided at the top end of the box body 1. The placement plate 12 provides an installation and operation plane for other components. Fixing blocks 13 are fixedly connected to the front and rear sides of the left end of the top of the placement plate 12. The fixing blocks 13 can provide stable support and fixed points for the support rod 14. The same support rod 14 is fixedly connected to the adjacent ends of the two fixing blocks 13. The support rod 14 can play a role in support and connection. A cushion plate 15 is fixedly connected to the top end of the placement plate 12. The cushion plate 15 can enhance the installation stability of the hydraulic cylinder 16;

[0032] A hydraulic cylinder 16 is fixedly connected to the top end of the cushion plate 15. The hydraulic cylinder 16 provides power for the movement of the sliding rod 18. A fixed box 17 is fixedly connected to the top end of the placement plate 12. The driving end of the hydraulic cylinder 16 is fixedly connected to the sliding rod 18. The sliding rod 18 can perform linear motion under the action of the hydraulic cylinder 16. Rotating rods 19 are rotatably connected to the front and rear ends of the sliding rod 18. The rotation of the rotating rods 19 can achieve force transmission and position adjustment. The other ends of the two rotating rods 19 are rotatably connected to the same rotating plate 20. The rotating plate 20 can drive the suction cup 21 to change the angle. A suction cup 21 is fixedly connected to the top end of the rotating plate 20. The suction cup 21 is used for adsorbing and fixing the wafer. A lifting component for lifting the placement plate 12 is arranged inside the box body 1. The lifting component can further adjust the height of the placement plate 12 to meet different working requirements. A moving component for moving the box body 1 is arranged at the bottom end of the box body 1. The moving component facilitates the flexible movement of the device in the workplace and improves work efficiency.

[0033] Referring to Figure 2 、 Figure 4, the lifting component includes a support column 2, and the support column 2 is fixedly connected to the inner bottom end of the box body 1. The support column 2 provides a stable support foundation for subsequent components, ensuring the smooth progress of the lifting operation. A firm plate 3 is fixedly connected to the rear end of the support column 2. A push rod 4 is rotatably connected to the right end of the firm plate 3. The rotation of the push rod 4 can drive the movement of the pawl 5 to achieve a specific function. The right end of the push rod 4 is fixedly connected to the pawl 5. The pawl 5 cooperates with the ratchet wheel 9 to achieve one-way transmission and positioning. A fixed block 6 is fixedly connected to the inner top end of the box body 1. The fixed block 6 provides a stable installation position for the motor 7. A motor 7 is fixedly connected to the top end of the fixed block 6. The motor 7 serves as a power source to provide power for the lifting operation. A gear 8 is fixedly connected to the driving end of the motor 7. The gear 8 can transmit the power of the motor 7 to other components. A ratchet wheel 9 is arranged at the front end of the gear 8. The ratchet wheel 9 cooperates with the pawl 5 to ensure the one-way and stable lifting. A sliding plate 10 is slidably connected to the inside of the box body 1. The sliding of the sliding plate 10 can realize the lifting of the placing plate 12. A rack 11 is fixedly connected to the right end of the sliding plate 10. The rack 11 meshes with the gear 8 to achieve the transmission of power and the control of lifting;

[0034] The moving component includes four fixing plates 22, and the four fixing plates 22 are respectively fixedly connected to the four corners of the bottom end of the box body 1. The fixing plates 22 provide a firm connection point for the support columns 23. A support column 23 is fixedly connected to the bottom end of the fixing plate 22. The support column 23 plays a role in support and connection. A rubber pad 24 is fixedly connected to the bottom end of the support column 23. The rubber pad 24 can increase the friction force and improve the stability of the device when it is stationary. A connecting block 25 is slidably connected to the outside of the support column 23. The sliding of the connecting block 25 can adjust the position of the wheel 28. A pedal 26 is rotatably connected to the outside of the right end of the connecting block 25. Rotating blocks 27 are rotatably connected to the front and rear ends of the pedal 26. The rotating blocks 27 ensure the flexibility of the rotation of the pedal 26. A wheel 28 is rotatably connected to the inside of the connecting block 25. The wheel 28 enables the device to move easily. Firm blocks 29 are fixedly connected to the front and rear ends of the connecting block 25. Springs 30 are fixedly connected to the inside of the two firm blocks 29. The springs 30 can provide elastic force for the reset of the rotating block 27.

[0035] Refer to Figures 2 to 3, the rotating plate 20 rotates outside the support rod 14. The rotating plate 20 can rotate around the support rod 14 as an axis, so as to adjust the angle and position of the suction cup 21 to meet different wafer processing requirements. The bottom end of the rotating plate 20 contacts the top end of the fixed box 17. This contact can provide certain support for the rotating plate 20. The sliding rod 18 slides inside the fixed box 17. The sliding of the sliding rod 18 in the fixed box 17 can ensure the linearity and stability of its movement, so as to accurately achieve height adjustment. The inside of the fixed box 17 is hollow. The hollow design provides enough space for components such as the sliding rod 18 and can protect the internal components from external interference. The ratchet 9 is fixed on the driving end of the motor 7. The ratchet 9 can rotate together with the driving end of the motor 7 to achieve the cooperation action with the pawl 5;

[0036] The pawl 5 is engaged with the ratchet 9. The engagement structure can ensure the accuracy and stability of one-way transmission, prevent reverse movement, and ensure the reliability of lifting. The outer wall of the slide plate 10 contacts the inner wall of the box body 1. This contact method can limit the moving direction of the slide plate 10, making it only able to slide vertically inside the box body 1 to ensure the accuracy of lifting. The gear 8 and the rack 11 are meshed. The meshed connection can effectively convert the rotation of the gear 8 into the linear motion of the rack 11, so as to realize the lifting control of the slide plate 10. The front and rear ends of the wheel 28 slide in the chutes at the front and rear ends of the connecting block 25. This sliding method can limit the position of the wheel 28. One end of the spring 30 away from the stabilizing block 29 is fixedly connected to the right end of the rotating block 27. The fixed connection of the spring 30 can provide a reset force for the rotating block 27 to ensure the flexibility and reliability of the pedal 26 operation.

[0037] Working principle: When it is necessary to adjust the angle of the suction cup 21, at this time, start the hydraulic cylinder 16 at the top of the cushion plate 15, and then drive the sliding rod 18 to slide. The sliding rod 18 can then drive the rotating rods 19 at both ends to rotate. The rotating rods 19 are fixed at both ends of the rotating plate 20, and the rotating plate 20 rotates outside the support rod 14. Thus, the angle of the rotating plate 20 can be adjusted. The suction cup 21 is fixed at the top of the rotating plate 20, so it can tilt together with the rotating plate 20, and thus the angle adjustment effect can be achieved. When it is necessary to adjust the height of the suction cup, at this time, start the motor 7 at the top of the fixed block 6, and then drive the gear 8 to rotate. The rack 11 and the gear 8 are meshed, so the rack 11 can be driven to move up and down. The pawl 5 can be engaged with the ratchet 9, so as to fix the position of the slide plate 10;

[0038] The rack 11 is fixed on the surface of the sliding plate 10, and can drive the sliding plate 10 to move up and down. The top of the placing plate 12 is provided with a rotating plate 20 and a suction cup 21, which can drive the suction cup 21 to move up and down, so as to achieve the effect of height adjustment of the suction cup 21. When the device needs to be moved, step on the pedal 26 downward, which can drive the rotating block 27 to rotate. The rotating block 27 is fixed outside the rotating shaft inside the wheel 28, so as to drive the wheel 28 to slide in the chute on the surface of the connecting block 25. The rotating block 27 is fixed outside the rotating block 27, and the other end is fixed inside the stabilizing block 29, which can provide elastic force, so that the wheel 28 can contact the ground, and the effect of moving the device can be achieved. When it is not necessary to move, kick the pedal 26 upward, so that the wheel 28 can be separated from the ground. At this time, the rubber pad 24 will fix the whole device on the ground through the support column 23.

[0039] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A wafer chuck height adjusting device, comprising a box body (1), characterized in that: A placement plate (12) is provided at the top of the box body (1). Both the front and rear sides of the left end of the top of the placement plate (12) are fixedly connected with fixing blocks (13). The adjacent ends of the two fixing blocks (13) are fixedly connected with the same support rod (14). A cushion plate (15) is fixedly connected to the top of the placement plate (12). A hydraulic cylinder (16) is fixedly connected to the top of the cushion plate (15). A fixed box (17) is fixedly connected to the top of the placement plate (12). The driving end of the hydraulic cylinder (16) is fixedly connected with a sliding rod (18). The front and rear ends of the sliding rod (18) are rotatably connected with rotating rods (19). The other ends of the two rotating rods (19) are rotatably connected with the same rotating plate (20). An adsorption disc (21) is fixedly connected to the top of the rotating plate (20). A lifting assembly for lifting the placement plate (12) is arranged inside the box body (1), and a moving assembly for moving the box body (1) is arranged at the bottom end of the box body (1).

2. The height adjustment device for a wafer chuck according to claim 1, characterized in that: The lifting assembly includes a support column (2). The support column (2) is fixedly connected to the inner bottom end of the box body (1). A firm plate (3) is fixedly connected to the rear end of the support column (2). A push rod (4) is rotatably connected to the right end of the firm plate (3). A ratchet pawl (5) is fixedly connected to the right end of the push rod (4). A fixed block (6) is fixedly connected to the inner top end of the box body (1). A motor (7) is fixedly connected to the top of the fixed block (6). The driving end of the motor (7) is fixedly connected with a gear (8). A ratchet wheel (9) is arranged in front of the gear (8). A slide plate (10) is slidably connected to the inside of the box body (1). A rack (11) is fixedly connected to the right end of the slide plate (10).

3. The height adjustment device for a wafer chuck according to claim 1, characterized in that: The moving assembly includes four fixing plates (22). The four fixing plates (22) are respectively fixedly connected to the four corners of the bottom end of the box body (1). A support column (23) is fixedly connected to the bottom end of the fixing plate (22). A rubber pad (24) is fixedly connected to the bottom end of the support column (23). A connecting block (25) is slidably connected to the outside of the support column (23). A pedal (26) is rotatably connected to the outside of the right end of the connecting block (25). The front and rear ends of the pedal (26) are rotatably connected with rotating blocks (27). A wheel (28) is rotatably connected to the inside of the connecting block (25). Firm blocks (29) are fixedly connected to the front and rear ends of the connecting block (25). Springs (30) are fixedly connected to the inside of the two firm blocks (29).

4. A wafer chuck height adjustment device according to claim 1, characterized in that: The rotating plate (20) rotates on the outside of the support rod (14), and the bottom end of the rotating plate (20) is in contact with the top end of the fixed box (17).

5. A wafer chuck height adjustment device according to claim 1, characterized in that: The sliding rod (18) slides inside the fixed box (17), and the inside of the fixed box (17) is hollow.

6. The height adjustment device of a wafer chuck according to claim 2, characterized in that: The ratchet wheel (9) is fixed to the driving end of the motor (7), and the ratchet pawl (5) is engaged with the ratchet wheel (9).

7. A wafer chuck height adjustment device according to claim 2, characterized in that: The outer wall of the skateboard (10) is in contact with the inner wall of the box body (1), and the gear (8) is meshed with the rack (11).

8. A wafer chuck height adjusting device according to claim 3, characterized in that: The front and rear ends of the wheel (28) slide in the chutes at the front and rear ends of the connecting block (25), and one end of the spring (30) far from the stabilizing block (29) is fixedly connected to the right end of the rotating block (27).

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